CN203174195U - Improved-structure electric arc target and control system thereof - Google Patents
Improved-structure electric arc target and control system thereof Download PDFInfo
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- CN203174195U CN203174195U CN 201320120616 CN201320120616U CN203174195U CN 203174195 U CN203174195 U CN 203174195U CN 201320120616 CN201320120616 CN 201320120616 CN 201320120616 U CN201320120616 U CN 201320120616U CN 203174195 U CN203174195 U CN 203174195U
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Abstract
The utility model discloses an improved-structure electric arc target and a control system thereof. The electric arc target comprises a vacuum chamber (1), an arc striking electrode (2), a target material (3), an arc current source (4) and a cooling device (5), wherein the arc striking electrode (2) is arranged on the target material (3) and communicated with an arc striking circuit connection end (11); the arc striking circuit connection end is arranged on a shell of the vacuum chamber (1); and the target material is mounted in the vacuum chamber through a target seat (3-1). The electric arc target is characterized in that the target material (3) is in a conical shape or end-cutting conical shape; the cooling device (5) is directly connected with the target seat (3-1) to form a direct cooling structure for the target material; a check ring (6) is arranged on the outer surface of the target seat (3-1) to prevent arc spots from ablating the target seat (3-1) and the cooling device (5); an adjustable annular electromagnetic coil (7) for stabilizing the magnetic field of an electric arc is arranged on the outer surface of the vacuum chamber (1) so as to stabilize the electric arc; and an input end of the annular electromagnetic coil (7) is connected with a DC (direct current) power supply (8). The electric arc target disclosed by the utility model has the beneficial effects of high target material utilization rate, long continuous operation time and high ion ionization rate.
Description
Technical field
The utility model relates to a kind of electric arc target, particularly relates to a kind of electric arc target and Controlling System thereof of improving structure.Belong to the filtered cathode vacuum arc technical field.
Technical background
At present, filtered cathode vacuum arc technology is widely used in instrument and die industry, has improved use properties and the service life of tool and mould product.For the coating of conventional tool and mould, because its coating film thickness requires generally have only several microns, carrying out the coating time needs several hrs at most, therefore, uses conventional electric arc target and coating apparatus thereof just can satisfy technical requirements.Along with manufacturing progress, the vacuum plasma coating has obtained to use widely, and is higher to technical indicator and the technical requirements of coating.For example turbine engine blade will carry out heat insulating coat, and its coat-thickness requires to reach tens microns, and the continuous coated time reached more than 24 hours.In addition, for continous way band vacuum plasma coating apparatus, need the continuous coated time of electric arc target also above 24 hours.For continuous coated chronic equipment, the greatest problem that needs to solve is how to make electric arc target steady operation for a long time.
Prior art generally adopts the patty electric arc target to prolong its working hour.Conventional patty electric arc target is gone to outer rim and is caused the arc extinguishing phenomenon in order to prevent the arc spot, and the outer rim at target adds a back-up ring usually, when the arc spot is gone to outer rim, utilizes described back-up ring to make the arc spot return the pinwheel zone.In addition, in order further to stablize the arc spot, also can arrange a magnet in the behind of target, regularly adjust the axial distance of magnet and target surface, make the arc spot stable.There are two problems in this patty electric arc target of prior art: the one, and the marginal arc spot of target working face seldom is ablated to, and becomes the target surface ablation and is the bottom of a pan concavity, and the utilization ratio of target is very low; The 2nd, frequent manual observation, manual setting is unfavorable for the long non-stop run of coating apparatus.
The utility model content
One of the purpose of this utility model is for the target working face marginal arc spot that solves prior art seldom is ablated to, and becomes the target surface ablation and is the bottom of a pan concavity, and the problem that target utilization is very low provides a kind of electric arc target of improving structure.This utility model has target utilization height, continuous operating time is long, ionization level is high characteristics.
Two of the purpose of this utility model is to want frequent manual observation for the target that solves prior art, and manual setting is unfavorable for the problem that coating apparatus moves for a long time continuously, and a kind of electric arc target Controlling System of improving structure is provided.
One of the purpose of this utility model can reach by taking following technical scheme:
A kind of electric arc target of improving structure, comprise target bucket, arc electrode, target, arc current source and refrigerating unit, arc electrode is attached on the target and is communicated with the arc ignition circuit coupling end, described arc ignition circuit coupling end is located on the target bucket shell, target is installed in the target bucket by target stand, its constructional feature is: target is frusto-conical, and refrigerating unit directly is connected with target stand, constitutes the direct cooling structure to target; Outside surface at target stand is provided with the arc extinguishing circle, to prevent arc spot ablation target stand and refrigerating unit; Be provided with magnet field adjustable annular magnet coil for stable arc at the outside surface of target bucket, with stable arc arc spot, the input terminus of annular magnet coil connects direct supply.
One of the purpose of this utility model can also reach by taking following technical scheme:
Further, described refrigerating unit can be communicated with the internal cavities of target stand by water inlet pipe, rising pipe, and water coolant circulates by target stand, realizes the electric arc cooling to take away heat.
Further, described target axis can overlap with target bucket axis, and the target original thickness is 35mm, the thinnest 3mm that only reaches of thickness after target surface is ablated.
Further, annular magnet coil can be made of hollow solenoid.
Further, air core coil can be used as the solenoid that produces strong-electromagnetic field, and its field direction is consistent with the target axis direction.
Two of the purpose of this utility model can reach by taking following technical scheme:
As previously mentioned, improve the Controlling System of structure electric arc target, its constructional feature is: comprise the electric arc target that is made of target bucket, arc electrode, target, arc current source, refrigerating unit, arc extinguishing circle and annular magnet coil and the control unit of described electric arc target, be provided with cooling-water temperature sensor in refrigerating unit; The signal input part of control unit connects the signal output part of cooling-water temperature sensor, one of output terminal of control unit connects the control input end in arc current source, two of the output terminal of control unit connects the direct supply control input end, and the output terminal of direct supply connects the power end of annular magnet coil; Control unit has the size according to the processing parameter flame current, automatically regulate the function of the direct supply of arc current source and annular magnet coil, guarantee the stable output of both electric currents, and the function of monitoring temperature of cooling water, discharge, water pressure, the Controlling System of formation intelligent arc target.
Two of the purpose of this utility model can also reach by taking following technical scheme:
Further, the output terminal of control unit connects the control input end of arc ignition circuit, by the input signal of control arc ignition circuit, produces arc spark in the target side with the regulating and controlling arc electrode.
Further, control unit is made of computer and control hardware and software.
The beneficial effects of the utility model:
1, the utility model is owing to the outside surface at target stand is provided with the arc extinguishing circle, to prevent arc spot ablation target stand; Be provided with adjustable annular solenoid for stable arc at the outside surface of target bucket.When the starting the arc of needs target is worked, by the control signal that control unit sends, make arc ignition circuit produce arc spark in the target side through arc electrode, and be serially connected with the arc current source of hollow solenoid, immediately arc spark is lighted into electric arc arc spot.Because the magneticstrength that air core coil produces is very big, and field direction is consistent with the direction of target axis, to the target working face is pushed electric arc in the magnetic field that hollow solenoid produces, and can keep down always.Therefore, by the action of a magnetic field of hollow solenoid, can not only keep the stability of target surface arc spot, can also strengthen the ionization level of ion in the vacuum chamber, and have beneficial effect simple in structure, that target utilization is high and vacuum ion plating is effective.
2, the utility model is because the target of electric arc target is set to frusto-conical, the target bottom directly connects cooling structure, walking heat by the water coolant cold belt cools off, therefore its stream time is the longest to reach 70 hours, has target utilization height, continuous operating time is long, the atom ionization level is high beneficial effect.
Description of drawings
Fig. 1 is the structural representation of the utility model specific embodiment 1.
Fig. 2 is the utility model function analysis figure in actual applications.
Fig. 3 is the structural representation of the utility model specific embodiment 2.
Embodiment
Below in conjunction with embodiment method of the present utility model is described in further detail:
Specific embodiment 1:
With reference to Fig. 1, the improvement structure electric arc target that present embodiment relates to comprises target bucket 1, arc electrode 2, target 3, arc current source 4 and refrigerating unit 5.Arc electrode 2 is located on the target 3, and is communicated with arc ignition circuit coupling end 11.Described target bucket 1 is installed on the vacuum chamber 12 of coating apparatus, and arc ignition circuit 11 coupling ends are located on target bucket 1 shell, and target 3 is installed in the target bucket 1 by target stand 3-1.Its constructional feature is: target 3 is frusto-conical, and refrigerating unit 5 directly is connected with target stand 3-1, constitutes the direct cooling structure to target; Outside surface at target stand 3-1 is provided with arc extinguishing circle 6, to prevent electric arc arc spot ablation target stand 3-1 and refrigerating unit 5; Outside surface at target bucket 1 is provided with the adjustable annular solenoid 7 that generates an electromagnetic field for stable arc arc spot, and the input terminus of annular magnet coil 7 connects direct supply 8.
By the Controlling System that electric arc target and the control unit 9 of aforementioned improved structure constitutes, comprise by target bucket 1, arc electrode 2, arc ignition circuit 11, target 3, arc current source 4, refrigerating unit 5, arc extinguishing circle 6 and annular magnet coil 7, electric arc target that direct supply 8 constitutes and the control unit 9 of described electric arc target.In refrigerating unit 5, be provided with cooling-water temperature sensor 10; The signal input part of control unit 9 connects the signal output part of cooling-water temperature sensor 10, one of output terminal of control unit 9 connects the control input end in arc current source 4, two of the output terminal of control unit 9 connects direct supply 8 control input ends, and the output terminal of direct supply 8 connects the power end of annular magnet coil 7.Control unit 9 has the size according to the processing parameter flame current, automatically regulate the function of the direct supply 4 of arc current source 8 and annular magnet coil 7, and the functional structure of monitoring temperature of cooling water, discharge, water pressure, the Controlling System of formation intelligent arc target.In target bucket 1, be provided with barrel pin 12.
In the present embodiment:
Described refrigerating unit 5 is made of the internal cavities that water inlet pipe 5-1, rising pipe 5-2 are communicated with target stand 3-1, and water coolant is walked heat by target stand 3-1 tape loop and realized the electric arc cooling.The axis of described target 3 overlaps with the axis of target bucket 1.The target original thickness is 35mm, the thinnest 3mm that reaches of thickness after target surface is ablated.Annular magnet coil 7 is made of hollow solenoid.Air core coil is for producing the strong solenoid of strong-electromagnetic field, and its field direction is consistent with the direction of target 3 emission metal ions.
The output terminal of control unit 9 connects the control input end of arc ignition circuit 11, produces arc spark by the input signal of controlling arc ignition circuit 11 in target 3 sides with control arc electrode 2.Control unit 9 is made of computer and control hardware and software.
Principle of work of the present utility model:
As depicted in figs. 1 and 2, described target 3 axis overlap with target bucket 1 axis, target 3 working face original thicknesses are 35mm, the thinnest 3mm that reaches of thickness after target surface is ablated, arc ignition circuit 11 output terminals are connected on the target side by arc electrode 2, produce the electrical discharge arc spark in target 3 sides by arc electrode 2 tips.This structure striking working stability is realized easily.
The tip of arc electrode 2 and target 3 tapered side have discharging gap, when target 3 needs starting the arc work, Controlling System triggers outside arc ignition circuit 11, produces arc spark in target 3 sides by arc electrode 2, and at this moment arc current source 4 is lighted into electric arc arc spot to arc spark immediately.Because direct supply 8 is very big by the magneticstrength that hollow solenoid 7 produces, and field direction is vertical with target surface, the strong magnetic field that solenoid produces produces the component F1 along the target conical surface to the electric arc arc spot of the target conical surface, make the electric arc arc spot that produces in the target side push the target working face to, and keep down (See Figure) always.Because the target side is oblique cone shape, electromagnetic force can stop electric arc arc spot to go to the target side, makes electric arc arc spot be controlled in target surface zone maintenance works better always.The strong magnetic field that produces of hollow solenoid 7 has in addition strengthened the ionization level of ion in the vacuum chamber greatly, and its stream time is the longest above 70 hours.
Specific embodiment 2:
With reference to Fig. 3, the characteristics of present embodiment 2 are: the head and the tail of solenoid are serially connected in respectively between target 3 and the arc current source 4, and the electric current of exporting with arc current source 4 arrives target 3 again through solenoid 7.The advantage of this way is that cost is low, and structure is simpler, and is easy to use.Other structure and function is with specific embodiment 1.
The above; it only is the preferable specific embodiment of the utility model; but protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the scope that the utility model discloses; be equal to replacement or change according to the technical solution of the utility model and utility model design thereof, all belonged to protection domain of the present utility model.
Claims (8)
1. an electric arc target of improving structure comprises target bucket (1), arc electrode (2), target (3), arc current source (4) and refrigerating unit (5); Described target bucket (1) is installed on the vacuum chamber (12) of coating apparatus, and arc electrode (2) is located at target (3) upward and is communicated with arc ignition circuit (11); Described arc ignition circuit (11) coupling end is located on target bucket (1) shell, target is installed in the target bucket (1) by target stand (3-1), it is characterized in that: target (3) is frusto-conical, and refrigerating unit (5) directly is connected with target stand (3-1), constitutes the direct cooling structure to target; Outside surface at target stand (3-1) is provided with arc extinguishing circle (6), to prevent arc spot ablation target stand (3-1) and refrigerating unit (5); Outside surface at target bucket (1) is provided with the adjustable annular solenoid (7) that generates an electromagnetic field for stable arc arc spot, and the input terminus of annular magnet coil (7) connects direct supply (8).
2. a kind of electric arc target of improving structure according to claim 1, be primarily characterized in that: described refrigerating unit (5) is by water inlet pipe (5-1), rising pipe (5-2), and the internal cavities that is communicated with target stand (3-1) constitutes, water coolant is walked heat by target stand (3-1) tape loop, to realize the electric arc cooling.
3. a kind of electric arc target of improving structure according to claim 1 and 2, it is characterized in that: the axis of described target (3) overlaps with the axis of target bucket (1), and target working face original thickness is 35mm, the thinnest 3mm that reaches of thickness after target surface is ablated.
4. a kind of electric arc target of improving structure according to claim 1 and 2, it is characterized in that: annular magnet coil (7) is made of hollow solenoid.
5. a kind of electric arc target of improving structure according to claim 4 is characterized in that: air core coil is for producing the strong solenoid of strong-electromagnetic field, and its field direction is consistent with target (3) axis direction.
6. a Controlling System of improving the structure electric arc target according to claim 1 is characterized in that: comprise by target bucket (1), arc electrode (2), arc ignition circuit (11), target (3), arc current source (4), refrigerating unit (5), arc extinguishing circle (6) and annular magnet coil (7), the electric arc target of direct supply (8) formation and the control unit (9) of described electric arc target; In refrigerating unit (5), be provided with cooling-water temperature sensor (10); The signal input part of control unit (9) connects the signal output part of cooling-water temperature sensor (10); One of output terminal of control unit (9) connects the control input end in arc current source (4); Two of the output terminal of control unit (9) connects direct supply (8) control input end, and the output terminal of direct supply (4) connects the power end of annular magnet coil (7); Control unit (9) has the size according to the processing parameter flame current, automatically regulate the function of the direct supply (4) of arc current source (8) and annular magnet coil (7), and the functional structure of monitoring temperature of cooling water, discharge, water pressure, the Controlling System of formation intelligent arc target.
7. Controlling System according to claim 6, it is characterized in that: the output terminal of control unit (9) connects the control input end of arc ignition circuit (11), input signal by control arc ignition circuit (11) produces arc spark with control arc ignition circuit (11) by arc electrode (2) in target (3) side.
8. according to claim 6 or 7 described Controlling System, it is characterized in that: control unit (9) is made of computer and control hardware and software.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320120616 CN203174195U (en) | 2013-03-17 | 2013-03-17 | Improved-structure electric arc target and control system thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320120616 CN203174195U (en) | 2013-03-17 | 2013-03-17 | Improved-structure electric arc target and control system thereof |
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| Publication Number | Publication Date |
|---|---|
| CN203174195U true CN203174195U (en) | 2013-09-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320120616 Withdrawn - After Issue CN203174195U (en) | 2013-03-17 | 2013-03-17 | Improved-structure electric arc target and control system thereof |
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| CN (1) | CN203174195U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103132020A (en) * | 2013-03-17 | 2013-06-05 | 广东世创金属科技有限公司 | Structurally-improved electric arc target and control system thereof |
-
2013
- 2013-03-17 CN CN 201320120616 patent/CN203174195U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103132020A (en) * | 2013-03-17 | 2013-06-05 | 广东世创金属科技有限公司 | Structurally-improved electric arc target and control system thereof |
| CN103132020B (en) * | 2013-03-17 | 2018-04-20 | 广东世创金属科技股份有限公司 | The electric arc target and its control system of a kind of improved structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP03 | Change of name, title or address |
Address after: 510450, Stone Industrial Park, Chencun Town, Shunde District, Guangdong, Foshan, 32 Patentee after: Guangdong Shi Chuan metal Science and Technology Co., Ltd. Address before: 510450 No. 15, Guangzhou economic and Technological Development Zone, Guangzhou, Guangdong, Qingnian Road Patentee before: Guangdong Strong Metal Technology Co., Ltd. |
|
| C56 | Change in the name or address of the patentee | ||
| CP02 | Change in the address of a patent holder |
Address after: 528313, Stone Industrial Park, Chencun Town, Shunde District, Guangdong, Foshan, 32 Patentee after: Guangdong Shi Chuan metal Science and Technology Co., Ltd. Address before: 510450, Stone Industrial Park, Chencun Town, Shunde District, Guangdong, Foshan, 32 Patentee before: Guangdong Shi Chuan metal Science and Technology Co., Ltd. |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20130904 Effective date of abandoning: 20180420 |
|
| AV01 | Patent right actively abandoned |