CN112877645B - Evaporation crucible and evaporation equipment with same - Google Patents
Evaporation crucible and evaporation equipment with same Download PDFInfo
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- CN112877645B CN112877645B CN202110035016.6A CN202110035016A CN112877645B CN 112877645 B CN112877645 B CN 112877645B CN 202110035016 A CN202110035016 A CN 202110035016A CN 112877645 B CN112877645 B CN 112877645B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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Abstract
The present disclosure provides an evaporation crucible and have evaporation equipment of this evaporation crucible, belongs to and shows technical field, and this evaporation crucible includes: the crucible support comprises a base, a fixing frame and a supporting piece connected between the base and the fixing frame; the crucible body comprises a fixed body and a telescopic body, wherein the fixed body is provided with a fixed accommodating cavity, one end of the fixed body is provided with a discharge port, the other end of the fixed body is communicated with one end of the telescopic body, the telescopic body is provided with a variable accommodating cavity, and the fixed accommodating cavity and the variable accommodating cavity form an accommodating cavity for accommodating evaporation materials; the driving assembly comprises a fixing part and a moving part, wherein the fixing part is fixed on the base, the moving part is connected to one side of the telescopic body, which is far away from the discharge port, and the moving part moves back and forth along the telescopic direction of the telescopic body. The utility model provides an evaporation crucible, drive assembly is through the scalable body of drive flexible, keeps the vapor deposition material and the distance between the discharge port unchangeable basically, ensures homogeneity and the stability of evaporation.
Description
Technical Field
The disclosure relates to the field of display technologies, and in particular relates to a vapor deposition crucible and vapor deposition equipment with the same.
Background
In recent years, with the continuous updating of mobile consumer electronic products, the rapid development of the display industry is driven. In the display manufacturing process, material evaporation is a relatively core process. The vapor deposition is to heat a coating material in a high vacuum environment to sublimate the coating material and form a film on a substrate. At present, in the vapor deposition process of display products, the vapor deposition crucible used is of a structure with a fixed depth of a containing cavity. Along with the reduction of the evaporation material in the accommodating cavity of the crucible, the distance between the evaporation material and the top of the cavity is gradually increased, so that the uniformity and the stability of evaporation are affected.
The above information disclosed in the background section is only for enhancement of understanding of the background of the disclosure and therefore it may include information that does not form the prior art that is already known to a person of ordinary skill in the art.
Disclosure of Invention
An object of the present disclosure is to provide a vapor deposition crucible and a vapor deposition apparatus having the same, the vapor deposition crucible body includes a telescopic body, a driving assembly is telescopic through driving the telescopic body, and then the size of a variable accommodating cavity is changed, and the distance between a vapor deposition material in the accommodating cavity and a discharge port is further changed, and the distance between the vapor deposition material and the discharge port is maintained to be basically unchanged, thereby ensuring uniformity and stability of vapor deposition.
In order to achieve the above purpose, the present disclosure adopts the following technical scheme:
according to a first aspect of the present disclosure, there is provided an evaporation crucible comprising:
the crucible support comprises a base, a fixing frame and a supporting piece connected between the base and the fixing frame;
the crucible body comprises a fixed body and a telescopic body, the fixed body is fixed on the fixed frame, the fixed body is provided with a fixed accommodating cavity, one end of the fixed body is provided with a discharge outlet, the other end of the fixed body is communicated with one end of the telescopic body, the other end of the telescopic body is a closed end, the telescopic body stretches out and draws back along the superposition direction of the fixed body and the telescopic body, the telescopic body is provided with a variable accommodating cavity, the discharge outlet, the fixed accommodating cavity and the variable accommodating cavity are mutually communicated, and the fixed accommodating cavity and the variable accommodating cavity form an accommodating cavity for accommodating vapor deposition materials;
the driving assembly comprises a fixing part and a moving part, wherein the fixing part is fixed on the base, the moving part is connected to one side, far away from the discharge port, of the telescopic body, and the moving part moves back and forth along the telescopic direction of the telescopic body.
In an exemplary embodiment of the present disclosure, the driving assembly further includes a driving circuit, the moving part is a first magnetic member, the fixing part is a second magnetic member, and at least one of the first magnetic member and the second magnetic member is electrically connected with the driving circuit.
In an exemplary embodiment of the present disclosure, the evaporation crucible further includes:
the guide rail is connected between the base and the fixing frame, and the moving part is in sliding connection with the guide rail.
In an exemplary embodiment of the present disclosure, a connection plate is disposed between the moving part and the guide rail, one end of the connection plate is fixedly connected to the moving part, and the other end of the connection plate is slidably connected to the guide rail.
In an exemplary embodiment of the disclosure, a linear bearing is disposed at a connection position of the connection plate and the guide rail, a mounting hole is disposed through one end of the connection plate, which is connected with the guide rail, the mounting hole is coaxially disposed with a bearing hole of the linear bearing, the guide rail penetrates through the mounting hole and the bearing hole, and the shape and the size of the mounting hole, the bearing hole and the guide rail are matched.
In an exemplary embodiment of the present disclosure, a spacer is disposed between the connection plate and the linear bearing, and the spacer is provided with a through hole penetrating therethrough, and the through hole is disposed coaxially with the bearing hole.
In an exemplary embodiment of the disclosure, the support member includes a plurality of support columns, the support columns are circumferentially uniformly distributed on the periphery of the telescopic body, the top ends of the support columns are detachably connected with the fixing frame, and the bottom ends of the support columns are fixedly connected with the base.
In an exemplary embodiment of the present disclosure, the support column is located at a side of the guide rail remote from the telescopic body.
In one exemplary embodiment of the present disclosure, the telescopic body is an elastic bellows.
According to a second aspect of the present disclosure, there is provided an evaporation apparatus including the evaporation crucible of the first aspect described above.
The present disclosure provides an evaporation crucible, including crucible body, drive assembly and crucible support. The crucible body comprises a fixed body and a telescopic body, wherein one end of the fixed body is provided with a discharge outlet, and the other end of the fixed body is communicated with the telescopic body. The fixed body is provided with a fixed accommodating cavity, and the telescopic body is provided with a variable accommodating cavity. The fixed accommodating chamber and the variable accommodating chamber constitute an accommodating chamber for accommodating the vapor deposition material. The accommodating space of the accommodating cavity is adjustable due to the elasticity. The crucible support comprises a base, a fixing frame and a supporting piece connected between the base and the fixing frame. The driving assembly comprises a fixing part and a moving part, the fixing part is fixed on the base, the moving part is connected to one side of the telescopic body, which is far away from the discharge port, and the moving part moves back and forth along the telescopic direction of the telescopic body. In actual evaporation process, the evaporation crucible that this disclosure provided, the crucible body includes scalable body, and drive assembly is flexible through the scalable body of drive, and then changes the size of variable holding chamber to further change and hold the intracavity evaporation material and the distance between the discharge port, maintain the evaporation material and the distance between the discharge port unchangeable basically, thereby ensure homogeneity and the stability of evaporation. In addition, the crucible body still includes fixed body, and the fixed body can avoid scalable body shrink transition in the coating by vaporization in-process to guarantee the security of coating by vaporization.
Drawings
The above and other features and advantages of the present disclosure will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.
FIG. 1 is a schematic diagram showing a state before vapor deposition of a vapor deposition material in a crucible in the related art;
FIG. 2 is a schematic diagram showing a state of a crucible after vapor deposition of a vapor deposition material in the related art;
FIG. 3 is a schematic diagram of a structure of an evaporation crucible prior to evaporation in an exemplary embodiment of the present disclosure;
fig. 4 is a schematic view of a shrinkage structure after vapor deposition of a vapor deposition crucible in an exemplary embodiment of the present disclosure.
The main element reference numerals in the drawings are explained as follows:
100-crucible body; 110-fixing the body; 111-a fixed receiving cavity; 112-an outlet; 120-a telescopic body; 121-a variable receiving chamber; 200-a drive assembly; 210-a moving part; 220-a fixing part; 300-crucible support; 310-base; 320-fixing frame; 330-a support; 400-guide rail; 500-linear bearings; 600-connecting plates; 700-cushion blocks; 10-crucible; 20-evaporating material.
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments may be embodied in many different forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the disclosure.
In the drawings, the thickness of regions and layers may be exaggerated for clarity. The same reference numerals in the drawings denote the same or similar structures, and thus detailed descriptions thereof will be omitted.
The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the disclosure. One skilled in the relevant art will recognize, however, that the disclosed aspects may be practiced without one or more of the specific details, or with other methods, components, materials, etc. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring the main technical ideas of the present disclosure.
When a structure is "on" another structure, it may mean that the structure is integrally formed with the other structure, or that the structure is "directly" disposed on the other structure, or that the structure is "indirectly" disposed on the other structure through another structure.
The terms "a," "an," "the" are used to indicate the presence of one or more elements/components/etc.; the terms "comprising" and "having" are intended to be inclusive and mean that there may be additional elements/components/etc. in addition to the listed elements/components/etc. The terms "first" and "second" and the like are used merely as labels, and are not intended to limit the number of their objects.
In the related art, an evaporation apparatus includes a housing and a crucible provided in the housing, the crucible being configured with a heating member. The crucible is a structure body with a fixed cavity depth, and the cavity is used for containing evaporation materials. Under the heating action of the heating element, the evaporation material in the crucible gradually decreases. As shown in fig. 1 and 2, the crucible 10 contains the vapor deposition material 20, and as the vapor deposition time progresses, the vapor deposition material 2 gradually dissipates, and the distance between the vapor deposition material 20 in the cavity of the crucible 10 and the outlet at the top of the cavity gradually increases. At present, the heating temperature of the heating element is often increased to increase the vaporization rate of the vapor deposition material, so as to maintain the stability and uniformity of the deposition rate of the vapor deposition material on the substrate. However, there is instability in increasing the heating temperature of the heating member, in practical operation, it is difficult to ensure uniformity and stability of vapor deposition, and as the vapor deposition material is continuously consumed, the heating temperature is continuously increased, and the quality of the vapor deposition material is also affected to a certain extent by too high temperature, further affecting the quality of the film layer.
As shown in fig. 2, an exemplary embodiment of the present disclosure provides an evaporation crucible including:
a crucible holder 300, the crucible holder 300 including a base 310, a fixing frame 320, and a support 330 connected between the base 310 and the fixing frame 320;
the crucible body 100, the crucible body 100 includes a fixed body 110 and a telescopic body 120, the fixed body 110 is fixed on a fixed frame 320, the fixed body 110 has a fixed accommodating cavity 111, one end of the fixed body 110 is provided with a discharge outlet 112, the other end of the fixed body 110 is communicated with one end of the telescopic body 120, the other end of the telescopic body 120 is a closed end, the telescopic body 120 stretches and contracts along the overlapping direction of the fixed body 110 and the telescopic body 120, the telescopic body 120 has a variable accommodating cavity 121, the discharge outlet 112, the fixed accommodating cavity 111 and the variable accommodating cavity 121 are mutually communicated, and the fixed accommodating cavity 111 and the variable accommodating cavity 121 form an accommodating cavity for accommodating vapor deposition materials;
the driving assembly 200, the driving assembly 200 includes a fixing portion 220 and a moving portion 210, the fixing portion 220 is fixed to the base 310, the moving portion 210 is connected to a side of the telescopic body 120 away from the discharge port 112, and the moving portion 210 reciprocates along a telescopic direction of the telescopic body 120.
The present disclosure provides an evaporation crucible including a crucible body 100, a drive assembly 200, and a crucible stand 300. The crucible body 100 comprises a fixed body 110 and a telescopic body 120, wherein one end of the fixed body 110 is provided with a discharge outlet 112, and the other end of the fixed body 110 is communicated with the telescopic body 120. The fixed body 110 has a fixed accommodation chamber 111, and the telescopic body 120 has a variable accommodation chamber 121. The fixed accommodating chamber 111 and the variable accommodating chamber 121 constitute an accommodating chamber for accommodating the vapor deposition material. The accommodation space of the variable accommodation chamber 121 itself is adjustable due to the flexibility. The crucible holder 300 includes a base 310, a fixing frame 320, and a support 330 connected between the base 310 and the fixing frame 320. The driving assembly 200 includes a fixing portion 220 and a moving portion 210, the fixing portion 220 is fixed to the base 310, the moving portion 210 is connected to a side of the telescopic body 120 away from the discharge port 112, and the moving portion 210 reciprocates along the telescopic direction of the telescopic body 120. In the practical evaporation process, the evaporation crucible provided by the present disclosure, the crucible body 100 includes the telescopic body 120, the driving assembly 200 stretches and contracts through driving the telescopic body 120, and then changes the size of the variable accommodating cavity 121, and further changes the distance between the evaporation material in the accommodating cavity and the discharge port 112, and maintains the distance between the evaporation material and the discharge port 112 basically unchanged, thereby ensuring the uniformity and stability of evaporation. In addition, the crucible body 100 further includes a fixing body 110, and the fixing body 110 can prevent the telescopic body 120 from shrinking and transiting in the evaporation process, so as to ensure the safety of evaporation.
The following describes in detail an evaporation crucible and an evaporation apparatus provided in an embodiment of the present disclosure with reference to the accompanying drawings:
as shown in fig. 3 and 4, the evaporation crucible provided by the present disclosure includes a crucible body 100, a driving assembly 200, and a crucible holder 300. The crucible holder 300 includes a base 310, a fixing frame 320, and a support 330 coupled between the base 310 and the fixing frame 320, for fixedly supporting the crucible body 100. The crucible body 100 includes a fixed body 110 and a telescopic body 120, the driving assembly 200 includes a fixed portion 220 and a moving portion 210, the moving portion 210 is connected to one side of the telescopic body 120 away from the exhaust port 112, the moving portion 210 reciprocates along the telescopic direction of the telescopic body 120, and drives the telescopic body 120 to stretch and retract, thereby changing the space size of the variable accommodating cavity 121 of the telescopic body 120, and further changing the distance between the evaporation material therein and the exhaust port 112.
In some exemplary embodiments of the present disclosure, the crucible body 100 is made of a high temperature resistant metal or alloy material, such as tantalum, tungsten, platinum, or alloys thereof, etc., to meet the heating requirements in actual evaporation processes. The fixing body 110 and the telescopic body 120 may be made of the same material or different materials. In some embodiments of the present disclosure, the telescoping body 120 is made of a metallic material that is relatively ductile to meet its telescoping requirements. The fixing body 110 and the telescopic body 120 may be integrally formed or separately formed. When the fixed body 110 and the telescopic body 120 are of a split structure, the telescopic body 120 may be connected to the fixed body 110 by a fixed connection manner such as welding, and the specific connection manner is not limited in this disclosure.
The fixed body 110 and the telescopic body 120 may be substantially prismatic or cylindrical structures, and the specific shape is not limited in the present disclosure. In some exemplary embodiments of the present disclosure, the end of the fixing body 110 provided with the discharge port 112 is a tapered structure, and the discharge port 112 is provided at a smaller end of the tapered structure. The fixed body 110 is connected to one end of the telescopic body 120 in a cylindrical or prismatic shape. The telescopic body 120 may be an elastic bellows. The elastic corrugated pipe in the present disclosure refers to a tubular elastic sensing element formed by connecting foldable corrugated sheets along a folding and stretching direction, and has stretchability. Here, the elastic bellows in the present disclosure includes an elastic bellows having a substantially cylindrical shape, a prismatic shape, or other shapes, and the specific shape is not limited as long as the elastic bellows has stretchability. The telescopic body 120 can be designed into a single layer or multiple layers according to practical requirements, such as a telescopic structure with a plurality of elastic bellows connected, and also can comprise a single elastic bellows.
The fixing body 110 has a fixing accommodating chamber 111. The telescopic body 120 has a variable accommodating chamber 121, and the fixed accommodating chamber 111 and the variable accommodating chamber 121 constitute an accommodating chamber for accommodating the vapor deposition material. In the actual evaporation process, the evaporation material is placed in the accommodating cavity, evaporated after being heated, and discharged from the discharge port 112, and then deposited on the substrate to be evaporated, thereby completing the evaporation process. The addition amount of the evaporation material is designed according to actual requirements. Preferably, the addition amount of the evaporation material may be 1/3 to 2/3 of the total volume of the accommodating chamber. The evaporation material in the range has better uniformity and stability. During the evaporation process, the driving assembly 200 drives the telescopic body 120 to retract so as to maintain the distance between the evaporation material and the discharge outlet 112 to be basically unchanged, thereby ensuring the uniformity and stability of evaporation.
As further shown in fig. 3 and 4, in some embodiments of the present disclosure, the driving assembly 200 further includes a driving circuit (not shown), the moving portion 210 is a first magnetic member, the fixing portion 220 is a second magnetic member, and at least one of the first magnetic member and the second magnetic member is electrically connected to the driving circuit. The first magnetic member is coupled to a side of the telescopic body 120 remote from the discharge port 112. The second magnetic member is disposed on a side of the first magnetic member away from the telescopic body 120. In the disclosed embodiment, the second magnetic member is fixed to the base 310. The driving circuit is used for driving the first magnetic member to move in a direction away from the second magnetic member.
The first magnetic member and the second magnetic member may be electromagnets or permanent magnets. Specifically, one of the first magnetic member and the second magnetic member is an electromagnet, and the other magnetic member is a permanent magnet, or both of the first magnetic member and the second magnetic member are electromagnets. When the first magnetic member is an electromagnet, the driving circuit is electrically connected with the first magnetic member. When the second magnetic member is an electromagnet, the driving circuit is electrically connected with the second magnetic member. When the first magnetic force piece and the second magnetic force piece are electromagnets, the driving circuit is electrically connected with the first magnetic force piece and the second magnetic force piece. In a specific embodiment of the disclosure, the first magnetic member is a permanent magnet and the second magnetic member is an electromagnet.
In some embodiments of the present disclosure, the driving circuit is used to supply current to the first magnetic member or the second magnetic member connected thereto, and change the moving distance of the first magnetic member by changing the magnitude of the current. In the evaporation process, the magnitude of the magnetic force between the first magnetic member and the second magnetic member is adjusted by changing the magnitude of the current, so that the first magnetic member moves towards the direction close to the discharge port 112 and pushes the telescopic body 120 to shrink towards one end close to the discharge port 112, thereby maintaining the interval between the evaporation material and the discharge port 112 substantially unchanged. In the actual evaporation process, according to the magnetic conditions of the first magnetic member and the second magnetic member, the direction of the current is set in combination with the right-hand spiral law, so that a repulsive force is generated between the first magnetic member and the second magnetic member, and the first magnetic member moves towards the discharge port 112. In particular, in one embodiment, the current level may be adjusted according to the consumption of the evaporation material, and the consumption of the evaporation material may be calculated from the thickness of the evaporation material. And calculating the required magnetic field intensity between the first magnetic force piece and the second magnetic force piece according to the consumption of the evaporation material, and calculating the required current according to the required magnetic field intensity. For example, the magnetic field strength is calculated according to a calculation formula of the magnetic field strength generated by the direct current. The calculation formula is as follows: h=n×i/Le, where H is the magnetic field strength in a/m; n is the number of turns of the exciting coil; i is exciting current, and the unit is A; le is the effective magnetic path length in m. As shown in fig. 3 and 4, the first magnetic member is a permanent magnet, and the second magnetic member is an electromagnet. During evaporation, the current flowing in the electromagnet is adjusted, so that the first magnetic member moves towards the direction of the discharge port 112 and pushes the telescopic body 120 to shrink, and the distance between the evaporation material and the discharge port 112 in the process before evaporation (fig. 3) and the process after evaporation (fig. 4) is basically unchanged.
In still other exemplary embodiments of the present disclosure, the fixed portion 220 of the driving assembly 200 is a hydraulic cylinder, and the moving portion 210 is a moving plate, the hydraulic cylinder including a piston rod, and the moving plate is connected to a telescopic end of the piston rod. In the evaporation process, the displacement of the piston rod is controlled to adjust the moving distance of the moving plate, so as to adjust the telescopic condition of the telescopic body 120.
As shown in fig. 3 and 4, in some exemplary embodiments of the present disclosure, the evaporation crucible further includes a guide rail 400, and the driving assembly 200 drives one end of the telescopic body 120 to slide along the guide rail 400. The guide rail 400 is located at the periphery of the telescopic body 120, and the number of the guide rails 400 may be plural. As shown in fig. 3 and 4, the number of the guide rails 400 is two, and symmetrically located at opposite sides of the telescopic body 120. It should be noted that, the number of the guide rails 400 may be three, four or more, and the guide rails 400 are circumferentially and uniformly distributed on the periphery of the telescopic body 120, and the number and the distribution positions of the guide rails 400 are not limited, so long as the telescopic body 120 can slide along the guide rails 400. In addition, the end of the telescopic body 120 of the present disclosure slides along the guide rail 400, which may include that the end of the telescopic body 120 is directly connected to the guide rail 400 and slides along the guide rail 400, or may include that the end of the telescopic body 120 is indirectly connected to the guide rail 400. In the embodiment of the present disclosure, the moving part 210 is slidably connected to the guide rail 400, and the telescopic body 120 slides along the guide rail 400 by means of the moving part 210.
In some embodiments of the present disclosure, one side surface of the moving part 210 is connected to a surface of the telescopic body 120 remote from the discharge port 112, and both ends of the moving part 210 are slidably connected to the guide rail 400. The sliding connection manner of the moving part 210 and the guide rail 400 is not limited.
In one embodiment of the present disclosure, a linear bearing 500 is disposed at the connection between the moving part 210 and the guide rail 400, and the moving part 210 slides along the guide rail 400 through the linear bearing 500. Specifically, a connection plate 600 is disposed between the moving portion 210 and the guide rail 400, one end of the connection plate 600 is fixedly connected to the moving portion 210, and the other end of the connection plate 600 is slidably connected to the guide rail 400. One end of the connecting plate 600 connected with the guide rail 400 is provided with a mounting hole in a penetrating manner, the mounting hole is coaxially arranged with the bearing hole of the linear bearing 500, the guide rail 400 penetrates through the mounting hole and the bearing hole, and the mounting hole, the bearing hole and the guide rail 400 are matched in shape and size, so that the moving part 210 can stably slide along the guide rail 400. In still other exemplary embodiments of the present disclosure, a spacer block 700 is provided between the connection plate 600 and the linear bearing 500, and the spacer block 700 is provided with a through hole therethrough, which is disposed coaxially with the bearing hole. The spacer 700 helps reduce wear of the linear bearing 500.
In another embodiment of the present disclosure, a sliding groove is provided on the guide rail 400, and a protrusion matching the sliding groove is provided on the moving part 210 itself or the connection plate 600 connecting the moving part 210 and the guide rail 400. The moving part 210 slides along the guide rail 400 by the engagement of the protrusions with the slide grooves.
In some exemplary embodiments of the present disclosure, the crucible support 300 includes a base 310, a fixing frame 320, and a support 330 connected between the base 310 and the fixing frame 320 for fixedly supporting the crucible body 100. The supporting member 330 includes a plurality of supporting columns, the supporting columns are circumferentially and uniformly distributed on the periphery of the telescopic body 120, the top ends of the supporting columns are detachably connected with the fixing frame 320, and the bottom ends of the supporting columns are fixedly connected with the base 310. The number of support columns may be two, three or more, the support columns may be cylindrical or prismatic, and the specific number and shape are not limited by this disclosure. As shown in fig. 3 and 4, in some embodiments, the guide rail 400 is located at the periphery of the telescopic body 120, and the support column is located at the side of the guide rail 400 away from the telescopic body 120.
The disclosure also provides an evaporation device comprising the evaporation crucible. In a specific embodiment, the evaporation device further includes a heating element, where the heating element is disposed outside the evaporation crucible and is configured to provide a heat source for the evaporation crucible. The heating element can be wound on the outer wall of the evaporation crucible to heat the evaporation material in the evaporation crucible, so that the evaporation material is gasified and discharged from the discharge port 112, deposited on the substrate to be evaporated, and the evaporation process is completed. The utility model provides an evaporation crucible, crucible body 100 include scalable body 120, and drive assembly 200 is flexible through the scalable body 120 of drive, and then changes the size of variable holding chamber 121 to further change the distance that holds between intracavity evaporation material and the discharge port 112, maintain the distance between evaporation material and the discharge port 112 and be unchangeable basically, thereby reduce the temperature variation of heating element in the evaporation process, and then ensure the homogeneity and the stability of evaporation, and guarantee the quality of rete.
It is to be understood that the disclosure is not limited in its application to the details of construction and the arrangement of components set forth in the disclosure. The disclosure is capable of other embodiments and of being practiced and carried out in various ways. The foregoing variations and modifications are within the scope of the present disclosure. It should be understood that the present disclosure disclosed and defined herein extends to all alternative combinations of two or more of the individual features mentioned or evident from the text and/or drawings. All of these different combinations constitute various alternative aspects of the present disclosure. Embodiments of the present disclosure describe the best mode known for carrying out the disclosure and will enable one skilled in the art to utilize the disclosure.
Claims (7)
1. An evaporation crucible, comprising:
the crucible support comprises a base, a fixing frame and a supporting piece connected between the base and the fixing frame;
the crucible body comprises a fixed body and a telescopic body, the fixed body is fixed on the fixed frame, the fixed body is provided with a fixed accommodating cavity, one end of the fixed body is provided with a discharge outlet, the other end of the fixed body is communicated with one end of the telescopic body, the other end of the telescopic body is a closed end, the telescopic body stretches out and draws back along the superposition direction of the fixed body and the telescopic body, the telescopic body is provided with a variable accommodating cavity, the discharge outlet, the fixed accommodating cavity and the variable accommodating cavity are mutually communicated, and the fixed accommodating cavity and the variable accommodating cavity form an accommodating cavity for accommodating vapor deposition materials;
the driving assembly comprises a fixing part and a moving part, the fixing part is fixed on the base, the moving part is connected to one side of the telescopic body far away from the discharge port, and the moving part moves back and forth along the telescopic direction of the telescopic body;
the guide rails are connected between the base and the fixing frame, the moving parts are in sliding connection with the guide rails, the number of the guide rails is multiple, and the guide rails are circumferentially and uniformly distributed on the periphery of the telescopic body;
a connecting plate is arranged between the moving part and the guide rail, one end of the connecting plate is fixedly connected with the moving part, and the other end of the connecting plate is connected with the guide rail in a sliding manner;
the connecting plate with the junction of guide rail is provided with linear bearing, the connecting plate is connected the one end of guide rail runs through and is provided with the mounting hole, the mounting hole with linear bearing's bearing hole coaxial arrangement, the guide rail runs through the mounting hole with the bearing hole, the mounting hole with the shape size phase-match of guide rail.
2. The evaporation crucible according to claim 1, wherein the driving assembly further comprises a driving circuit, the moving portion is a first magnetic member, the fixing portion is a second magnetic member, and at least one of the first magnetic member and the second magnetic member is electrically connected to the driving circuit.
3. The evaporation crucible according to claim 1, wherein a spacer is provided between the connection plate and the linear bearing, the spacer being provided with a through hole therethrough, the through hole being provided coaxially with the bearing hole.
4. The evaporation crucible according to claim 1, wherein the support member comprises a plurality of support columns, the support columns are circumferentially and uniformly distributed on the periphery of the telescopic body, the top ends of the support columns are detachably connected with the fixing frame, and the bottom ends of the support columns are fixedly connected with the base.
5. The evaporation crucible according to claim 4, wherein said support column is located on a side of said guide rail remote from said telescopic body.
6. The evaporation crucible according to claim 1, wherein the telescopic body is an elastic bellows.
7. An evaporation apparatus comprising the evaporation crucible according to any one of claims 1 to 6.
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| CN202110035016.6A CN112877645B (en) | 2021-01-12 | 2021-01-12 | Evaporation crucible and evaporation equipment with same |
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| CN202110035016.6A CN112877645B (en) | 2021-01-12 | 2021-01-12 | Evaporation crucible and evaporation equipment with same |
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| CN112877645A CN112877645A (en) | 2021-06-01 |
| CN112877645B true CN112877645B (en) | 2023-06-16 |
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| CN114015985B (en) * | 2021-11-15 | 2024-05-07 | 合肥维信诺科技有限公司 | Evaporation equipment |
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