CN208949447U - A kind of crucible driving mechanism - Google Patents
A kind of crucible driving mechanism Download PDFInfo
- Publication number
- CN208949447U CN208949447U CN201821439868.1U CN201821439868U CN208949447U CN 208949447 U CN208949447 U CN 208949447U CN 201821439868 U CN201821439868 U CN 201821439868U CN 208949447 U CN208949447 U CN 208949447U
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- CN
- China
- Prior art keywords
- fixing seat
- crucible
- rack
- lead screw
- support portion
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Abstract
The utility model discloses a kind of crucible driving mechanisms, including pedestal, rack and crucible axis, the rack setting on the base, is provided with guide rail in the rack, the crucible axis is fixed on the guide rail by fixing seat, and the fixing seat is slidably connected with the guide rail；The elevating mechanism for controlling the fixing seat lifting is provided in the rack, the fixing seat bottom is provided with chassis, bearing block is provided between the fixing seat and the crucible axis, is provided with cavity in the bearing block；The rotating mechanism for controlling the crucible axis rotation is additionally provided in the fixing seat；The crucible axis includes the support portion being arranged in the bearing block and the interconnecting piece that the support portion top is arranged in, and the interconnecting piece is arranged concentrically with the support portion and is connect by first flange disk.Crucible driving mechanism provided by the utility model has the effect of conveniently dismantling crucible axis.
Description
Technical field
The utility model relates to single crystal growing furnace technical fields, and in particular to a kind of crucible driving mechanism.
Background technique
Traditional crucible of single crystal furnace lifting device generally comprises bracket, slide, earthenware mainly for the production of silicon semiconductor material
Crucible axis, screw rod, guide rail and transmission mechanism, crucible axis are used to support monocrystalline silicon material.But crucible axis in the prior art is usually
It is wholely set, and crucible axis needs to go up and down and rotate, the crucible axis inconvenience staff being wholely set dismantles.
It would therefore be highly desirable to design a kind of crucible driving mechanism easy to disassemble.
Summary of the invention
The purpose of the utility model is to provide a kind of crucible driving mechanisms, its advantage is that convenient for being observed to crucible axis and
Maintenance.
The above-mentioned technical purpose of the utility model has the technical scheme that
A kind of crucible driving mechanism, including pedestal, rack and crucible axis, the rack are arranged on the base, institute
It states and is provided with guide rail in rack, the crucible axis is fixed on the guide rail by fixing seat, the fixing seat and the guide rail
It is slidably connected；The elevating mechanism for controlling the fixing seat lifting, the fixing seat bottom setting are provided in the rack
There is chassis, bearing block is provided between the fixing seat and the crucible axis, is provided with cavity in the bearing block；The fixation
The rotating mechanism for controlling the crucible axis rotation is additionally provided on seat.
The crucible axis includes the support portion being arranged in the bearing block and the connection that the support portion top is arranged in
Portion, the interconnecting piece are arranged concentrically with the support portion and are connect by first flange disk.
Further, the elevating mechanism includes the first motor of fixed setting on the base, the first motor
Output shaft be connected with retarder, the output shaft of the retarder is connected with the lead screw being vertically arranged, the other end of the lead screw
Extend to the top of the rack；The fixing seat middle position is provided with the threaded hole connecting with the threads of lead screw.
Further, the rotating mechanism includes the second motor arranged on the fixing seat, and second motor is defeated
Shaft is connected with driving wheel, and the support portion bottom end is connected with driven wheel, passes through skin between the driving wheel and the driven wheel
Band connection；It is connected between the support portion and the bearing block by several groups bearing.
Further, lead screw shield is provided with outside the lead screw, the lead screw shield includes the first bellows and the second wave
Line pipe, first bellows-sheathed connect outside the lead screw between the rack top and the fixing seat top, and described
Two bellowss are socketed in outside the lead screw on the fixing seat bottom end and the retarder top.
Further, the guide rail upper and lower ends are provided with travel switch.
Further, the fixed frame being obliquely installed, the fixed frame and institute are provided between the rack and the pedestal
It states rack and the pedestal constitutes triangular structure.
It should be noted that technical solution provided by the invention does not need to reach above-mentioned all technical effects simultaneously.
In conclusion a kind of crucible driving mechanism provided by the utility model, has the effect that
One, elevating mechanism and rotating mechanism can drive crucible axis to go up and down and rotate simultaneously, not interfere with each other；
Two, crucible axis is divided to two sections to design, intermediate to be connected by first flange, and staff is facilitated to repair crucible axis
And disassembly；
Three, lead screw protective cover can play a protective role to staff, and avoiding limbs, accidentally touching lead screw causes danger, safety
Property it is high.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the present embodiment；
Fig. 2 is the cross-sectional view for embodying internal structure.
In figure, 1, pedestal；11, fixed frame；2, rack；3, crucible axis；31, support portion；32, interconnecting piece；33, the first method
It is blue；4, fixing seat；51, first motor；52, lead screw；53, retarder；61, chassis；62, bearing block；71, the second motor；72, main
Driving wheel；73, driven wheel；81, lead screw shield；82, the first bellows；83, the second bellows；84, travel switch.
Specific embodiment
A kind of crucible driving mechanism is present embodiments provided, as shown in Figure 1, including pedestal 1, rack 2 and crucible axis 3,
The setting of rack 2 is bolted to connection on pedestal 1, and between rack 2 and pedestal 1.It is arranged between rack 2 and pedestal 1
There are the fixed frame 11 being obliquely installed, fixed frame 11 and rack 2 and pedestal 1 to constitute triangular structure, makes the structure of rack 2 more
Stablize.
Rack 2 is made of two identical columns, and guide rail is provided on each root post, is connected on guide rail
Fixing seat 4, fixing seat 4 is for connecting and fixing crucible axis 3.The two sides setting of guide rail is fluted, and fixing seat 4 passes through four contacts
Point is connect with guide rail, and the convex block with groove cooperation is provided on each contact point, so that guide rail and fixing seat 4 can only be perpendicular
Histogram relatively moves upwards, so as to make crucible axis 3 realize lifting on guide rail.
The elevating mechanism gone up and down for controlling the fixing seat 4 is provided in rack 2, elevating mechanism includes being fixed at
The output shaft of the first motor 51 on 2 top of rack, first motor 51 is arranged towards underface and is connected with the silk being vertically arranged
Thick stick 52,4 middle position of fixing seat are provided with the threaded hole being threadedly coupled with lead screw 52.When first motor 51 works, in lead screw
52 rotation and guide rail are under the position-limiting action of fixing seat 4, and fixing seat 4 can realize lifting on guide rail, thus to crucible
The lifting of axis 3 realizes automatic control.
4 bottom of fixing seat is provided with chassis 61, and bearing block 62, bearing block are provided between fixing seat 4 and crucible axis 3
Cavity is provided in 62；Crucible axis 3 is arranged in cavity and is rotatablely connected with bearing block 62.It is additionally provided with and is used on chassis 61
Control the rotating mechanism that the crucible axis 3 rotates；Rotating mechanism includes the second motor 71 being arranged on chassis 61, the second motor
71 output shafts are connected with driving wheel 72, and 31 bottom end of support portion is connected with driven wheel 73, between driving wheel 72 and the driven wheel 73
It is connected by belt；It is connected between crucible axis 3 and bearing block 62 by several groups bearing.In the present embodiment, in bearing block 62
Cavity top and cavity low side be provided with bearing, crucible axis 3 is rotatably connected in bearing block 62 by two bearings, and
Bearing block 62 is fixedly connected with fixing seat 4, and when the work of the second motor 71, driven wheel 73 is rotated by belt, due to
Crucible axis 3 is fixedly connected with driven wheel 73, and crucible axis 3 is rotated.And driven wheel 73 is fixed in crucible axis 3, is made
It obtains elevating mechanism not interfereing with each other with rotating mechanism, can work at the same time.
As shown in Fig. 2, crucible axis 3 includes that the support portion 31 being arranged in bearing block 62 and setting are pushed up in the support portion 31
The interconnecting piece 32 at end, interconnecting piece 32 are arranged concentrically with the support portion 31 and are connect by 33 disk of first flange.When needs pair
When carrying out Maintenance and Repair or observation 3 inner case of crucible axis inside crucible axis 3, crucible can be opened by 33 disk of first flange
Axis 3 facilitates operation.Solving crucible axis 3 in the prior art is inconvenient to dismantle, it has not been convenient to the problem of Maintenance and Repair.
As shown in Fig. 2, in one embodiment, 52 shield of lead screw is provided with outside lead screw 52,52 shield of lead screw includes first
Bellows 82 and the second bellows 83, the first bellows 82 are socketed in the lead screw 52 between 4 top of 2 top of rack and fixing seat
Outside, the second bellows 83 is socketed in outside the lead screw 52 on 4 bottom end of fixing seat and 53 top of retarder.First bellows 82 and the second wave
Line pipe 83 can make lead screw 52 be always positioned at bellows interior as the raising and lowering of fixing seat 4 is by drawstring or compression,
It avoids staff's limbs from touching lead screw 52 and causes danger.
In one embodiment, guide rail upper and lower ends are respectively arranged with travel switch 84.Each travel switch 84 with
First motor 51 connects, and when fixing seat 4 touches one of travel switch 84, first motor 51 can stop working, and avoid
Fixing seat 4 moves out the range of rack 2.
It should be understood by those skilled in the art that, the embodiment of the present invention can provide as method, apparatus or computer program
Product.Therefore, complete hardware embodiment, complete software embodiment or reality combining software and hardware aspects can be used in the present invention
Apply the form of example.Moreover, it wherein includes the computer of computer usable program code that the present invention, which can be used in one or more,
The computer program implemented in usable storage medium (including but not limited to magnetic disk storage, CD-ROM, optical memory etc.) produces
The form of product.
Although some specific embodiments of the invention are described in detail by example, the skill of this field
Art personnel it should be understood that example above merely to being illustrated, the range being not intended to be limiting of the invention.The skill of this field
Art personnel are it should be understood that can without departing from the scope and spirit of the present invention modify to above embodiments.This hair
Bright range is defined by the following claims.
Claims (6)
1. a kind of crucible driving mechanism, which is characterized in that including pedestal (1), rack (2) and crucible axis (3), the rack
(2) it is arranged on the pedestal (1), guide rail is provided on the rack (2), the crucible axis (3) is fixed by fixing seat (4)
On the guide rail, the fixing seat (4) is slidably connected with the guide rail；It is provided on the rack (2) described for controlling
The elevating mechanism of fixing seat (4) lifting, fixing seat (4) bottom are provided with chassis (61), the fixing seat (4) and the earthenware
It is provided between crucible axis (3) bearing block (62), is provided with cavity in the bearing block (62)；It is also set up on the fixing seat (4)
There is the rotating mechanism for controlling the crucible axis (3) rotation；
The crucible axis (3) includes the support portion (31) being arranged in the bearing block (62) and is arranged in the support portion (31)
The interconnecting piece (32) on top, the interconnecting piece (32) and the support portion (31) are arranged concentrically and by first flange (33) disk
Connection.
2. a kind of crucible driving mechanism according to claim 1, which is characterized in that the elevating mechanism includes fixed setting
The output shaft of first motor (51) on the pedestal (1), the first motor (51) is connected with retarder (53), described to subtract
The output shaft of fast device (53) is connected with the lead screw (52) being vertically arranged, and the other end of the lead screw (52) extends to the rack
(2) top；Fixing seat (4) middle position is provided with the threaded hole being threadedly coupled with the lead screw (52).
3. a kind of crucible driving mechanism according to claim 2, which is characterized in that the rotating mechanism includes being arranged in institute
The second motor (71) on chassis (61) is stated, the second motor (71) output shaft is connected with driving wheel (72), the support portion
(31) bottom end is connected with driven wheel (73), is connect between the driving wheel (72) and the driven wheel (73) by belt；It is described
It is connect between support portion (31) and the bearing block (62) by several groups bearing.
4. a kind of crucible driving mechanism according to claim 3, which is characterized in that be provided with lead screw outside the lead screw (52)
(52) shield, lead screw (52) shield include the first bellows (82) and the second bellows (83), first bellows
(82) it is socketed in the lead screw (52) between the rack (2) top and the fixing seat (4) top outside, second ripple
Pipe (83) is socketed in the lead screw (52) on the fixing seat (4) bottom end and the retarder (53) top outside.
5. a kind of crucible driving mechanism according to claim 1, which is characterized in that the guide rail upper and lower ends are provided with row
Cheng Kaiguan (84).
6. a kind of crucible driving mechanism according to claim 1, which is characterized in that the rack (2) and the pedestal (1)
Between be provided with the fixed frame (11) being obliquely installed, the fixed frame (11) and the rack (2) and the pedestal (1) are constituted
Triangular structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821439868.1U CN208949447U (en) | 2018-09-03 | 2018-09-03 | A kind of crucible driving mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821439868.1U CN208949447U (en) | 2018-09-03 | 2018-09-03 | A kind of crucible driving mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208949447U true CN208949447U (en) | 2019-06-07 |
Family
ID=66736873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821439868.1U Active CN208949447U (en) | 2018-09-03 | 2018-09-03 | A kind of crucible driving mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208949447U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112877645A (en) * | 2021-01-12 | 2021-06-01 | 合肥京东方卓印科技有限公司 | Evaporation crucible and evaporation equipment with same |
-
2018
- 2018-09-03 CN CN201821439868.1U patent/CN208949447U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112877645A (en) * | 2021-01-12 | 2021-06-01 | 合肥京东方卓印科技有限公司 | Evaporation crucible and evaporation equipment with same |
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