CN203569234U - Seed crystal rotating lift mechanism for sapphire furnace - Google Patents
Seed crystal rotating lift mechanism for sapphire furnace Download PDFInfo
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- CN203569234U CN203569234U CN201320722777.XU CN201320722777U CN203569234U CN 203569234 U CN203569234 U CN 203569234U CN 201320722777 U CN201320722777 U CN 201320722777U CN 203569234 U CN203569234 U CN 203569234U
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- seed crystal
- seed
- rotary pulling
- coupling mechanism
- pulling according
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- 239000013078 crystal Substances 0.000 title claims abstract description 55
- 230000007246 mechanism Effects 0.000 title claims abstract description 42
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 25
- 239000010980 sapphire Substances 0.000 title claims abstract description 25
- 230000008878 coupling Effects 0.000 claims abstract description 17
- 238000010168 coupling process Methods 0.000 claims abstract description 17
- 238000005859 coupling reaction Methods 0.000 claims abstract description 17
- 238000005303 weighing Methods 0.000 claims abstract description 15
- 238000001816 cooling Methods 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 230000009467 reduction Effects 0.000 claims description 3
- 229910001369 Brass Inorganic materials 0.000 claims description 2
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 2
- 239000010951 brass Substances 0.000 claims description 2
- 239000003638 chemical reducing agent Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 238000010899 nucleation Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 8
- 230000008901 benefit Effects 0.000 abstract description 3
- 230000008569 process Effects 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a seed crystal rotating lift mechanism for a sapphire furnace. The seed crystal rotating lift mechanism comprises a support saddle, wherein a guide shaft device is arranged at the upper side of the support saddle; the guide shaft device is connected with a coupling mechanism; a small furnace lid lifting device is arranged at the left side of the coupling mechanism; a seed crystal rod lifting limiting device is arranged at the right side of the coupling mechanism; a seed crystal lifting device is arranged in front of the coupling mechanism; a rotary drive device, a weighing device, an aligning core device and a draw bar water-cooling system are arranged above the seed crystal lifting device; a magnetic fluid sealing device is connected to the draw bar water-cooling system and welded by a metal bellow. By adopting the seed crystal rotating lift mechanism for the sapphire furnace, automatic seeding of the sapphire furnace can be achieved, and the seed crystal rotating lift mechanism has the advantages of stable and uniform speed, and small vibration in the lift rotating process.
Description
Technical field
The utility model relates to the long brilliant stove of a kind of sapphire, is specifically related to a kind of seed crystal rotary pulling mechanism for the long brilliant stove of sapphire.
Background technology
From 1890 french chemist Werner leaf (Verneuil.A) manually make first sapphire crystal, the history of existing more than 100 year of the sapphire research of Artificial Growth so far.During this period, in order to adapt to scientific and technical development and industrial production for the particular requirement of sapphire crystal quality, size, shape, in order to improve product qualified rate, the utilization ratio of sapphire crystal and to reduce production costs, sapphire growth method and correlation theory thereof have been carried out to a large amount of research, invent many new technologies, there is so far higher state of the art and larger throughput.Accordingly, the sapphire crystal growth equipment of adequate and systematic service---single crystal growing furnace has also obtained development at full speed thereupon for it.Along with the sharply expansion of sapphire crystal application market, its equipment and technology have also obtained development rapidly in last century end.
Low-cost, growing large-size sapphire single-crystal has become the current urgent task facing in high quality.Most domestic adopts KY method crystal growth technique at present, and the gordian technique point of this technique is seeding, and seeding quality directly affects the quality of crystal.Its seed crystal rotating mechanism of traditional KY law technology is simple, substantially by manual operation, and stable not, its technique Grasping level depends on operator's practical experience to a great extent, and operator's work task is large, and seeding quality is unstable; Therefore be necessary to develop a kind of improved seed crystal rotary pulling mechanism for the long brilliant stove of sapphire, to improve the stability of seeding quality, improve the quality of sapphire crystal, reduce production costs, enhance productivity.
Summary of the invention
Seed crystal rotary pulling mechanism for a kind of sapphire stove that the utility model provides, its object is to realize the automatic seeding of sapphire stove, improves the stability of seeding quality.
For achieving the above object, the utility model provides a kind of seed crystal rotary pulling mechanism for sapphire stove, comprise bearing, at bearing upside, axis of guide device is installed, axis of guide device connects with coupling mechanism, and small furnace cover pulling apparatus is equipped with in coupling mechanism left side, and coupling mechanism right side is equipped with seed rod and is lifted stop means, seed crystal lifting device is equipped with in coupling mechanism the place ahead, and rotating driving device, weighing device, the cold center device of tune and pull bar water-cooling system are equipped with in seed crystal lifting device top.In pull bar water-cooling system, be connected with magnetic fluid seal device and welded metal bellow.
Preferably, the main material of described bearing is selected as square steel, and square steel specification is 180X180X8t.
Preferably, described axis of guide device is constituted without oily lining by thrust ball bearing, the axis of guide, set collar and copper alloy.
Preferably, described seed crystal lifting device adopts planetary reducer and harmonic wave speed reducing machine series connection to realize high reduction ratio, and described seed crystal lifting device screw mandrel guide rail adopts intelligences combination unit.
Preferably, the cold center device of described tune is combined by upper, middle and lower-ranking XY axle mobile platform and two groups of vertical line slideways of placing, and adjusting screw is plastics annular knurl brass screw.
Preferably, described pull bar water-cooling system comprises seed rod water cold sleeve outer tube, seed rod water cold sleeve inner tube and copper swivel joint, the rotary water-cooled of described seed rod water cold sleeve outer tube is realized by connecting copper swivel joint, and described seed rod water cold sleeve outer tube end is welded with copper swivel nut.
Preferably, the uniform in the longitudinal direction spacer ring of described welded metal bellow, spacer ring spacing is 100 ~ 150mm.
Preferably, described weighing device is two Weighing modules, and two Weighing modules are uniform along the seed rod center of circle.
The utlity model has velocity-stabilization evenly, lift rotary course and shake little advantage, can improve the stability of seeding quality, improve the quality of sapphire crystal.
Accompanying drawing explanation
Fig. 1 is the seed crystal rotary pulling mechanism structure figure that the utility model provides.
Fig. 2 is the seed crystal rotary pulling mechanism structure figure that the utility model provides.
Reference numeral: 1. welded metal bellow; 2. magnetic fluid seal device; 3. adjust cold center device; 4. weighing device; 5. rotating driving device; 6. pull bar water-cooling system; 7. seed crystal lifting device; 8. coupling mechanism; 9. small furnace cover pulling apparatus; 10. axis of guide device; 11. bearings.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is described.
As Fig. 1, shown in Fig. 2, seed crystal rotary pulling mechanism for the utility model sapphire stove, comprise bearing 11, be placed in the axis of guide device 10 of described bearing upside, the coupling mechanism 8 connecting with described axis of guide device, be placed in the small furnace cover pulling apparatus 9 in described coupling mechanism left side, be placed in the seed crystal lifting device 7 in described coupling mechanism the place ahead, be placed in the cold center device 3 of tune on the intelligences combination unit slide block of described seed crystal lifting device, be placed in the weighing device 4 on the cold center device of described tune, be placed in the pull bar water-cooling system 6 on described weighing device 4, with the rotating driving device 5 that in described pull bar water-cooling system, water cold sleeve outer tube is connected, the magnetic fluid seal device 2 being connected with described pull bar water-cooling system, the welded metal bellow 1 being connected with described magnetic fluid seal device.With upper-part, formed sapphire stove seed crystal rotary pulling mechanism as shown in Figure 1.
Further, the uniform in the longitudinal direction spacer ring of welded metal bellow 1.
Further, weighing device is two Weighing modules, and two Weighing modules are uniform along the seed rod center of circle.
The working process of the present embodiment is: in rotating driving device 5, comprise servomotor, start servomotor and synchronously drive water cold sleeve outer tube by Timing Belt and synchronous pulley, water cold sleeve outer tube is connected with seed crystal, thereby realizes the rotation of seed crystal.Seed crystal lifting device 7 comprises servomotor, start servomotor by driving screw mandrel slide block lifting in screw mandrel guide rail intelligences combination unit by shaft coupling again after double reduction machine, slide block lifting drives adjusts cold center device 3 and 6 liftings of pull bar water-cooling system, thereby drives the lifting of seed crystal.
Utilize this seed crystal rotary pulling mechanism, can realize the automatic seeding of sapphire stove, have advantages of velocity-stabilization evenly, lift rotary course and shake little.
Claims (10)
1. the seed crystal rotary pulling mechanism for sapphire stove, it is characterized in that, comprise bearing, at described bearing upside, axis of guide device is installed, described axis of guide device connects with coupling mechanism, small furnace cover pulling apparatus is equipped with in coupling mechanism left side, coupling mechanism right side is equipped with seed rod and is lifted stop means, seed crystal lifting device is equipped with in coupling mechanism the place ahead, rotating driving device is equipped with in described seed crystal lifting device top, weighing device, adjust cold center device and pull bar water-cooling system, in described pull bar water-cooling system, be connected with magnetic fluid seal device and welded metal bellow.
2. seed crystal rotary pulling according to claim 1 mechanism, is characterized in that, the main material of described bearing is selected as square steel, and square steel specification is 180X180X8t.
3. seed crystal rotary pulling according to claim 1 mechanism, is characterized in that, described axis of guide device is constituted without oily lining by thrust ball bearing, the axis of guide, set collar and copper alloy.
4. seed crystal rotary pulling according to claim 1 mechanism, is characterized in that, described seed crystal lifting device adopts planetary reducer and harmonic wave speed reducing machine series connection to realize high reduction ratio.
5. seed crystal rotary pulling according to claim 4 mechanism, is characterized in that, described seed crystal lifting device screw mandrel guide rail adopts intelligences combination unit.
6. seed crystal rotary pulling according to claim 1 mechanism, is characterized in that, the cold center device of described tune is combined by upper, middle and lower-ranking XY axle mobile platform and two groups of vertical line slideways of placing, and adjusting screw is plastics annular knurl brass screw.
7. seed crystal rotary pulling according to claim 1 mechanism, is characterized in that, described pull bar water-cooling system comprises seed rod water cold sleeve outer tube, seed rod water cold sleeve inner tube and copper swivel joint.
8. seed crystal rotary pulling according to claim 7 mechanism, is characterized in that, the rotary water-cooled of described seed rod water cold sleeve outer tube is realized by connecting copper swivel joint, and described seed rod water cold sleeve outer tube end is welded with copper swivel nut.
9. seed crystal rotary pulling according to claim 1 mechanism, is characterized in that, the uniform in the longitudinal direction spacer ring of described welded metal bellow, and spacer ring spacing is 100 ~ 150mm.
10. seed crystal rotary pulling according to claim 1 mechanism, is characterized in that, described weighing device is two Weighing modules, and two Weighing modules are uniform along the seed rod center of circle.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320722777.XU CN203569234U (en) | 2013-11-18 | 2013-11-18 | Seed crystal rotating lift mechanism for sapphire furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320722777.XU CN203569234U (en) | 2013-11-18 | 2013-11-18 | Seed crystal rotating lift mechanism for sapphire furnace |
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CN203569234U true CN203569234U (en) | 2014-04-30 |
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CN201320722777.XU Expired - Fee Related CN203569234U (en) | 2013-11-18 | 2013-11-18 | Seed crystal rotating lift mechanism for sapphire furnace |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104499052A (en) * | 2014-12-12 | 2015-04-08 | 上海汉虹精密机械有限公司 | Crystal growth pulling-lifting mechanism of sapphire furnace |
CN104562202A (en) * | 2015-01-28 | 2015-04-29 | 杭州晶一智能科技有限公司 | Crystal transformation mechanism for sapphire crystal growth equipment |
CN104894643A (en) * | 2015-05-20 | 2015-09-09 | 内蒙古晶环电子材料有限公司 | Novel sapphire upper shaft structure |
CN105803530A (en) * | 2015-01-19 | 2016-07-27 | 丰田自动车株式会社 | Single crystal production apparatus |
CN106337203A (en) * | 2016-09-23 | 2017-01-18 | 沈阳大学 | Water-cooling mechanical moving device for test piece in high-vacuum single-crystal growth furnace |
CN106435731A (en) * | 2016-08-31 | 2017-02-22 | 南京晶升能源设备有限公司 | Automatic seeding control system of sapphire furnace and seeding control method of single crystal furnace |
CN109837585A (en) * | 2019-03-21 | 2019-06-04 | 浙江晶盛机电股份有限公司 | A kind of full-automatic furnace chamber elevating rotary system |
CN110344108A (en) * | 2019-08-21 | 2019-10-18 | 眉山博雅新材料有限公司 | Upper lifting vacuum drying oven |
-
2013
- 2013-11-18 CN CN201320722777.XU patent/CN203569234U/en not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104499052A (en) * | 2014-12-12 | 2015-04-08 | 上海汉虹精密机械有限公司 | Crystal growth pulling-lifting mechanism of sapphire furnace |
CN104499052B (en) * | 2014-12-12 | 2023-09-26 | 上海汉虹精密机械有限公司 | Crystal growth lifting mechanism of sapphire furnace |
CN105803530A (en) * | 2015-01-19 | 2016-07-27 | 丰田自动车株式会社 | Single crystal production apparatus |
CN104562202A (en) * | 2015-01-28 | 2015-04-29 | 杭州晶一智能科技有限公司 | Crystal transformation mechanism for sapphire crystal growth equipment |
CN104894643A (en) * | 2015-05-20 | 2015-09-09 | 内蒙古晶环电子材料有限公司 | Novel sapphire upper shaft structure |
CN106435731A (en) * | 2016-08-31 | 2017-02-22 | 南京晶升能源设备有限公司 | Automatic seeding control system of sapphire furnace and seeding control method of single crystal furnace |
CN106337203A (en) * | 2016-09-23 | 2017-01-18 | 沈阳大学 | Water-cooling mechanical moving device for test piece in high-vacuum single-crystal growth furnace |
CN109837585A (en) * | 2019-03-21 | 2019-06-04 | 浙江晶盛机电股份有限公司 | A kind of full-automatic furnace chamber elevating rotary system |
CN110344108A (en) * | 2019-08-21 | 2019-10-18 | 眉山博雅新材料有限公司 | Upper lifting vacuum drying oven |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: Workshop 1, building 1, No. 458, Zhongmin Road, Maogang Town, Songjiang District, Shanghai, 201607 Patentee after: Shanghai Senyong Engineering Equipment Co.,Ltd. Address before: 29 Jinwen Road, Pudong New Area, Shanghai, 201323 Patentee before: SHANGHAI MORIMATSU PRESSURE VESSEL Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140430 |