CN104894643A - Novel sapphire upper shaft structure - Google Patents
Novel sapphire upper shaft structure Download PDFInfo
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- CN104894643A CN104894643A CN201510260316.9A CN201510260316A CN104894643A CN 104894643 A CN104894643 A CN 104894643A CN 201510260316 A CN201510260316 A CN 201510260316A CN 104894643 A CN104894643 A CN 104894643A
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Abstract
The invention relates to the field of a crystal growing furnace, and aims at providing a novel sapphire upper shaft structure. A weighting box of the upper shaft structure is internally provided with a first weighting sensor, a second weighting sensor, and a spherical bearing, wherein the first weighting sensor is fixed on the top of the weighting box; and the top end of the second weighting sensor is connected to the bottom of the first weighting sensor. The bottom of the second weighting sensor is connected to the top end of a seed crystal rod through the spherical bearing; the seed crystal rod vertically downwards passes through the bottom of the weighting box; a water-cooling shaft sleeve sleeves the seed crystal rod; the upper structure is supported by a center-adjusting platform; and a crystal rotation motor is connected to the water-cooling shaft sleeve through a belt. According to the invention, precision of a weighting signal of the upper shaft structure is effectively improved; the requirement of water-cooling of the upper shaft can be satisfied at the same time; labor cost of the sapphire crystal growing furnace is greatly reduced; and human factors resulting in the crystal quality are excluded. The sapphire crystal growing furnace high in automation degree, convenient to operate, and low in cost is realized.
Description
Technical field
Patent of the present invention belongs to field of crystal growth furnace, is specifically related to a kind of upper axle construction of novel sapphire furnace.
Background technology
Along with developing rapidly of global new forms of energy market, LED industry becomes energy industry new growth point gradually, has possessed the ability of catching up with and surpassing other Energy Saving Industries, has worldwide presented the gesture of fast development.Sapphire is as the base mateiral of LED industry, and its demand grows steadily year by year.
At present, have following several for the main way of sapphire crystal growth in the world: EFG technique, heat-exchanging method and kyropoulos.Wherein, kyropoulos is because possessing large size and high-quality monocrystalline advantage is more and more adopted.Weighing mechanism in kyropoulos sapphire crystal growing furnace often in crystal growing process weight signal collect and feedback system, be also the most important reference data of whole crystal growing process and basis for estimation.The weighing structure that traditional sapphire uses, mostly all adopt the sensor of one or more wide range, and the impact that the sensor of wide range impacts by corrugated tube or water-cooled, cause the weighing-up wave fluctuation at crystal growth initial stage large, accurately cannot measure the growing state of crystal, make the Automated condtrol at crystal growth initial stage become focus.Thus cause sapphire crystal growth to be limited by human factor, do not realize large-scale bulk production.
Summary of the invention
The technical problem to be solved in the present invention is, overcomes deficiency of the prior art, provides axle construction on a kind of novel sapphire.
For technical solution problem, solution of the present invention is as follows:
There is provided axle construction on a kind of novel sapphire, comprise seed rod and box of weighing, the inside of box of weighing is provided with the first LOAD CELLS, the second LOAD CELLS and globe bearing; Wherein, first LOAD CELLS is fixed on the top of box of weighing, the top of the second LOAD CELLS is connected to the bottom of the first LOAD CELLS, and the bottom of the second LOAD CELLS is then connected with seed rod top by globe bearing, and seed rod is straight down through the bottom of box of weighing;
The sheathed water-cooling shaft cover in the outside of described seed rod and being not in contact with each other, the outside of water-cooled axle sleeve sheathed water inlet and outlet sleeve, permanent sleeve and corrugated tube successively from top to bottom; Cooling-water duct is established in water-cooled axle sleeve inside, and water-cooling shaft puts offers water-in and water outlet, respectively corresponding with the intake antrum of water inlet and outlet sleeve and water chamber (into and out of the design of water cavity, current can be flow slowly with having one, reducing and impacting);
Described upper axle construction is with aligning platform for supporting, and water inlet and outlet sleeve and permanent sleeve are all installed on aligning platform; Aligning platform is also provided with brilliant rotating motor, and brilliant rotating motor is connected to water-cooled axle sleeve by belt, and breach is offered for passing belt in the middle part of permanent sleeve.
Improve as one, the two ends up and down of described water inlet and outlet sleeve establish top pilot bearing and bottom pilot bearing respectively, and bearing gland is all equipped with in the outside of two pilot bearings; The internal cavities of water inlet and outlet sleeve is separated into intake antrum and water chamber by three X-shaped sealing rings, and intake antrum and water chamber establish water inlet tube interface and rising pipe interface respectively.The bearing that the upper and lower two ends of water inlet and outlet sleeve are arranged can prevent in the stuck phenomenon of water-cooling shaft.
Improve as one, the bottom of described permanent sleeve realizes encapsulation by magnetic fluid seal.
Improve as one, the two ends of described corrugated tube are respectively provided with flange face, are connected respectively with bottom permanent sleeve with furnace chamber, and bellows interior is closed cavity.
Improve as one, the top of described water-cooled axle sleeve with stretch to bottom box of weighing, and realize sealing by sealing member.
Improve as one, the first belt pulley is established in the spin axis end of described brilliant rotating motor, and described water-cooling shaft puts sheathed second belt pulley, and belt sleeve is connected on two belt pulleys.
Improve as one, described water-cooled axle sleeve is inner with the cooling-water duct that inside and outside sleeve gap-forming, two are interconnected, and interior passageway connects with water-in, and exterior passage way connects with water outlet.
Improve as one, described aligning platform is provided with two horizontal and vertical guide rails, and handle is established at the two ends of aligning platform.Handle, for realizing the adjustment with left and right before and after aligning platform, can be implemented in the installation initial stage, and seed rod is adjusted to and crucible center, makes temperature environment even, is conducive to crystal homoepitaxial.
Improve as one, if the internal diameter of water-cooled axle sleeve is D, the diameter of seed rod is d, then should meet 4mm≤D-d≤10mm.Cool seed rod by the water coolant in water-cooled axle sleeve, increase seed rod intensity in high temperature environments.In the present invention, the first LOAD CELLS and the difference of the second LOAD CELLS are that both range abilities are different, can differ an order of magnitude.Such as, the second LOAD CELLS precision is set to 0.1g, the first LOAD CELLS precision is set to 1g.
In the present invention, due to the long brilliant initial stage, crystalline growth velocity is slow, and crystal weight change is trickle, beyond the accuracy rating of the first LOAD CELLS, thus effectively can not show the situation at crystal growth initial stage only according to the first LOAD CELLS.But be the of paramount importance stage in this crystal growth cycles owing to growing the brilliant initial stage, thus in the present invention, specially devise high-precision second weighing and sensing, thus for improving the weighing measurement accuracy at long brilliant initial stage.And turn at crystalline substance and rise in process with brilliant, precision is unaffected.The data of two LOAD CELLS all pass through signal amplifier, and the simulating signal of LOAD CELLS is amplified, and accurately can measure the crystal weight at crystal growth initial stage.
By at the outside of seed rod application water-cooled axle sleeve, ensure that weighing-up wave not by the impact of Inlet and outlet water; Corrugated tube is fixed on installation sleeve, eliminates the impact of corrugated tube on weighing-up wave; In whole crystal pulling process, the weight signal of crystal is in precisely always, stable state, can reaction constantly to come out of the stove the practical situation of interior crystal growth, convenient with monitoring with judge; Meanwhile, weighing-up wave accurately, provides hardware foundation also to the full-automatic growth of sapphire crystal.
Compared with prior art, beneficial effect of the present invention is:
The present invention effectively can improve the precision of weighing-up wave in upper axis mechanism, and can meet upper axle water-cooled requirement simultaneously; Under the condition of the stable brilliant thermograde of length of formation one, measure crystal growth weight accurately, the long brilliant initial stage is crystal growth the most key stage, measures crystal weight accurately, crystal growth information accurately will be provided for operator, be convenient to the control of technique.The present invention can reduce the cost of labor of sapphire crystal growing furnace greatly, has abandoned the human factor of crystal mass, has achieved level of automation high, easy to operate, the sapphire crystallization furnace of low cost.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structure iron of the water inlet and outlet sleeve in Fig. 1;
Fig. 3 is the structural representation of water-cooled axle sleeve.
Reference numeral in figure: 1 first LOAD CELLS, 2 second LOAD CELLS, 3 globe bearings, 4 weigh box, 5 seed rods, 6 water inlet and outlet sleeve, 7 water-cooled axle sleeves, 8 aligning platforms, 9 magnetic fluid seal, 10 corrugated tubes, 11 first belt pulleys, 12 brilliant rotating motors, 13 permanent sleeves, 14 top pilot bearings, 15X RunddichtringO, 16 intake antrums, 17 water chambers, 18 bottom pilot bearings, 19 bearing glands, 20 water-ins, 21 water outlets, 22 sleeves.
Embodiment
Further illustrate this use is novel below in conjunction with accompanying drawing and concrete enforcement:
With reference to the accompanying drawings shown in 1-3, on this axle construction crystalline substance that can meet in sapphire furnace crystal pulling process turn, vacuum-sealing, on requirement in axle water-cooled, precise weighing etc.
In installation:
Aligning platform 8 is directly installed in the lifting system of sapphire furnace, can followed by lifting system and carry out up-and-down movement together; On aligning platform 8, water inlet and outlet sleeve 6 has been installed, permanent sleeve 13 has been installed in its lower section, and water-cooled axle sleeve 7 from top to bottom run through water inlet and outlet sleeve 6 and permanent sleeve 13; Above water-cooled axle sleeve 7, box 4 of weighing is installed.
In crystalline substance turns:
Open opening at the medium position of its permanent sleeve 13, be connected to water-cooled axle sleeve 7 and the belt pulley on brilliant rotating motor 12 by belt, water-cooled axle sleeve 7 can be rotated stably, thus driven the rotation of whole upper axle system.
In vacuum-sealing:
Magnetic fluid seal 9 and corrugated tube 10 have been installed inside permanent sleeve 13 below, and the lower end of corrugated tube 10 directly can be connected with body of heater, by these two pieces parts, define the cavity of a sealing; On its water-cooled axle sleeve 7, box 4 of weighing is installed, has all needed between all parts to have used seal with O ring part to seal, createed the cavity of sealing.
In cooling-water flowing:
In water-cooled axle sleeve 7 top part, water inlet and outlet sleeve 6 is installed, water flowing is carried out with water chamber 17 pairs of water-cooled axle sleeves 7 by the intake antrum 16 in water inlet and outlet sleeve 6, intake antrum 16 and water chamber 17 are separated by X-shaped sealing ring 15, concrete current are water inlet pipe-intake antrum 16-water-in 20-interior passageway-exterior passage way-water outlet 21-water chamber 17-rising pipe, result in formation of a single water (flow) direction, make whole water-cooled axle sleeve 7 keep water-cooled state always.
In weighing:
First LOAD CELLS 1 is installed inside box 4 of weighing and the second LOAD CELLS 2, two LOAD CELLS are connected in series; Between the second LOAD CELLS 2 and seed rod 5, installed a globe bearing 3, for ensureing seed rod, 5 are in vertical state.
Detailed description specific as follows:
Axle construction in sapphire furnace in the present invention, comprise seed rod 5 and box 4 of weighing, the inside of box 4 of weighing is provided with the first LOAD CELLS 1, second LOAD CELLS 2 and globe bearing 3; Wherein, first LOAD CELLS 1 is fixed on the top of box 4 of weighing, the top of the second LOAD CELLS 2 is connected to the bottom of the first LOAD CELLS 1, and the bottom of the second LOAD CELLS 2 is then connected by the top of globe bearing 3 with seed rod 5, and seed rod 5 is straight down through the bottom of box 4 of weighing;
The sheathed water-cooling shaft cover 7 in the outside of seed rod 5 and being not in contact with each other, the outside of water-cooled axle sleeve 7 sheathed water inlet and outlet sleeve 6, permanent sleeve 13 and corrugated tube 10 successively from top to bottom; Cooling-water duct is established in water-cooled axle sleeve 7 inside, water-cooled axle sleeve 7 is offered water-in 20 and water outlet 21, corresponding with the intake antrum 16 of water inlet and outlet sleeve 6 and water chamber 17 respectively.Top and the bottom stretching to box 4 of weighing of water-cooled axle sleeve 7, and realize sealing by sealing member.The inside of water-cooled axle sleeve 7 is with two cooling-water ducts be interconnected inside and outside sleeve 22 gap-forming, and interior passageway connects with water-in 20, and exterior passage way connects with water outlet 21.If the internal diameter of water-cooled axle sleeve 7 is D, the diameter of seed rod 5 is d, then should meet 4mm≤D-d≤10mm.
Upper axle construction is with aligning platform 8 for supporting, and water inlet and outlet sleeve 6 and permanent sleeve 13 are all installed on aligning platform 8, and aligning platform 8 is provided with two horizontal and vertical guide rails, and handle is established at the two ends of aligning platform 8.Aligning platform 8 is also provided with brilliant rotating motor 12, brilliant rotating motor 12 is connected to water-cooled axle sleeve 7 by belt, and breach is offered for passing belt in the middle part of permanent sleeve 13.Be specially: the first belt pulley 11 is established in the spin axis end of brilliant rotating motor 12, sheathed second belt pulley on water-cooled axle sleeve 7, belt sleeve is connected on two belt pulleys.When brilliant rotating motor 12 operates, by the rotation of belt drive water-cooled axle sleeve 7.
The two ends up and down of water inlet and outlet sleeve 6 establish the outside of top pilot bearing 14 and bottom pilot bearing 18, two pilot bearings that bearing gland 19 is all housed respectively; The internal cavities of water inlet and outlet sleeve 6 is separated into intake antrum 16 and water chamber 17 by three X-shaped sealing rings 15, and intake antrum 16 and water chamber 17 establish water inlet tube interface and rising pipe interface respectively.
The two ends of corrugated tube 10 are respectively provided with flange face, are connected respectively with bottom permanent sleeve 13 with furnace chamber, and corrugated tube 10 inside is closed cavity.The bottom of permanent sleeve 13 realizes encapsulation by magnetic fluid seal 9.
Claims (9)
1. an axle construction on novel sapphire, comprises seed rod; It is characterized in that, also comprise box of weighing, the inside of box of weighing is provided with the first LOAD CELLS, the second LOAD CELLS and globe bearing; Wherein, first LOAD CELLS is fixed on the top of box of weighing, the top of the second LOAD CELLS is connected to the bottom of the first LOAD CELLS, and the bottom of the second LOAD CELLS is then connected with seed rod top by globe bearing, and seed rod is straight down through the bottom of box of weighing;
The sheathed water-cooling shaft cover in the outside of described seed rod and being not in contact with each other, the outside of water-cooled axle sleeve sheathed water inlet and outlet sleeve, permanent sleeve and corrugated tube successively from top to bottom; Cooling-water duct is established in water-cooled axle sleeve inside, and water-cooling shaft puts offers water-in and water outlet, corresponding with the intake antrum of water inlet and outlet sleeve and water chamber respectively;
Described upper axle construction is with aligning platform for supporting, and water inlet and outlet sleeve and permanent sleeve are all installed on aligning platform; Aligning platform is also provided with brilliant rotating motor, and brilliant rotating motor is connected to water-cooled axle sleeve by belt, and breach is offered for passing belt in the middle part of permanent sleeve.
2. upper axle construction according to claim 1, is characterized in that, the two ends up and down of described water inlet and outlet sleeve establish top pilot bearing and bottom pilot bearing respectively, and bearing gland is all equipped with in the outside of two pilot bearings; The internal cavities of water inlet and outlet sleeve is separated into intake antrum and water chamber by three X-shaped sealing rings, and intake antrum and water chamber establish water inlet tube interface and rising pipe interface respectively.
3. upper axle construction according to claim 1 and 2, is characterized in that, the bottom of described permanent sleeve realizes encapsulation by magnetic fluid seal.
4. upper axle construction according to claim 1 and 2, is characterized in that, the two ends of described corrugated tube are respectively provided with flange face, is connected respectively with bottom permanent sleeve with furnace chamber, and bellows interior is closed cavity.
5. upper axle construction according to claim 1 and 2, is characterized in that, the top of described water-cooled axle sleeve with stretch to bottom box of weighing, and realize sealing by sealing member.
6. upper axle construction according to claim 1 and 2, is characterized in that, the first belt pulley is established in the spin axis end of described brilliant rotating motor, and described water-cooling shaft puts sheathed second belt pulley, and belt sleeve is connected on two belt pulleys.
7. upper axle construction according to claim 1 and 2, is characterized in that, described water-cooled axle sleeve is inner with the cooling-water duct that inside and outside sleeve gap-forming, two are interconnected, and interior passageway connects with water-in, and exterior passage way connects with water outlet.
8. upper axle construction according to claim 1 and 2, is characterized in that, described aligning platform is provided with two horizontal and vertical guide rails, and handle is established at the two ends of aligning platform.
9. upper axle construction according to claim 1 and 2, is characterized in that, if the internal diameter of water-cooled axle sleeve is D, the diameter of seed rod is d, then should meet 4mm≤D-d≤10mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510260316.9A CN104894643B (en) | 2015-05-20 | 2015-05-20 | Axle construction on a kind of sapphire |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510260316.9A CN104894643B (en) | 2015-05-20 | 2015-05-20 | Axle construction on a kind of sapphire |
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| Publication Number | Publication Date |
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| CN104894643A true CN104894643A (en) | 2015-09-09 |
| CN104894643B CN104894643B (en) | 2017-06-20 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115559001A (en) * | 2022-09-06 | 2023-01-03 | 上海汉虹精密机械有限公司 | Rotatory elevating system of crucible convenient to loading and unloading material |
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| WO2003052175A1 (en) * | 2001-12-19 | 2003-06-26 | Mark Fielker | 'waterfall' production equipment for crystal growth |
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| CN202865395U (en) * | 2012-10-12 | 2013-04-10 | 湖南立晶科技有限责任公司 | Sapphire single crystal production equipment sealed by magneto-fluid |
| CN202936512U (en) * | 2012-10-11 | 2013-05-15 | 上海汉虹精密机械有限公司 | Seed-crystal lifting shaft structure of sapphire crystal growing equipment |
| CN203403172U (en) * | 2013-08-14 | 2014-01-22 | 云南乾元光能产业有限公司 | Lifting device for aluminum oxide single crystal growth |
| CN203569234U (en) * | 2013-11-18 | 2014-04-30 | 上海森松压力容器有限公司 | Seed crystal rotating lift mechanism for sapphire furnace |
| CN104357900A (en) * | 2014-11-28 | 2015-02-18 | 南京晶升能源设备有限公司 | Crystal weighing apparatus applied to single crystal furnace |
| CN104562202A (en) * | 2015-01-28 | 2015-04-29 | 杭州晶一智能科技有限公司 | Crystal transformation mechanism for sapphire crystal growth equipment |
| CN204690168U (en) * | 2015-05-20 | 2015-10-07 | 内蒙古晶环电子材料有限公司 | Axle construction on a kind of novel sapphire |
-
2015
- 2015-05-20 CN CN201510260316.9A patent/CN104894643B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003052175A1 (en) * | 2001-12-19 | 2003-06-26 | Mark Fielker | 'waterfall' production equipment for crystal growth |
| CN202576644U (en) * | 2012-04-13 | 2012-12-05 | 西安蓝晶机械科技有限公司 | Sapphire crystal growth pulling device by utilizing Kyropoulos method |
| CN202936512U (en) * | 2012-10-11 | 2013-05-15 | 上海汉虹精密机械有限公司 | Seed-crystal lifting shaft structure of sapphire crystal growing equipment |
| CN202865395U (en) * | 2012-10-12 | 2013-04-10 | 湖南立晶科技有限责任公司 | Sapphire single crystal production equipment sealed by magneto-fluid |
| CN203403172U (en) * | 2013-08-14 | 2014-01-22 | 云南乾元光能产业有限公司 | Lifting device for aluminum oxide single crystal growth |
| CN203569234U (en) * | 2013-11-18 | 2014-04-30 | 上海森松压力容器有限公司 | Seed crystal rotating lift mechanism for sapphire furnace |
| CN104357900A (en) * | 2014-11-28 | 2015-02-18 | 南京晶升能源设备有限公司 | Crystal weighing apparatus applied to single crystal furnace |
| CN104562202A (en) * | 2015-01-28 | 2015-04-29 | 杭州晶一智能科技有限公司 | Crystal transformation mechanism for sapphire crystal growth equipment |
| CN204690168U (en) * | 2015-05-20 | 2015-10-07 | 内蒙古晶环电子材料有限公司 | Axle construction on a kind of novel sapphire |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115559001A (en) * | 2022-09-06 | 2023-01-03 | 上海汉虹精密机械有限公司 | Rotatory elevating system of crucible convenient to loading and unloading material |
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| CN104894643B (en) | 2017-06-20 |
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