CN110344108A - Upper lifting vacuum drying oven - Google Patents
Upper lifting vacuum drying oven Download PDFInfo
- Publication number
- CN110344108A CN110344108A CN201910772691.XA CN201910772691A CN110344108A CN 110344108 A CN110344108 A CN 110344108A CN 201910772691 A CN201910772691 A CN 201910772691A CN 110344108 A CN110344108 A CN 110344108A
- Authority
- CN
- China
- Prior art keywords
- wall
- weighing
- lifting rod
- rod
- burner hearth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
This application discloses upper lifting vacuum drying ovens.The crystal growing apparatus includes burner hearth, lifting rod, telecontrol equipment and control system；Setting thermal field and heat source in the burner hearth；At least part of the lifting rod is located in the burner hearth, and the telecontrol equipment and the lifting rod have transmission connection, to drive the lifting rod to move up and down and/or rotation；The control system is used to control the direction of motion and/or movement velocity of the telecontrol equipment.Crystal growing process automation control may be implemented in the crystal growing apparatus of the application, and prepared monocrystal material structural integrity is good, and improves welding procedure, improves the leakproofness and corrosion resistance of burner hearth.
Description
Technical field
This application involves crystal material field, in particular to a kind of crystal growing apparatus.
Background technique
Single crystal growing furnace is to prepare silicon, germanium, GaAs, yttrium-aluminium-garnet (Y3Al5O12, abbreviation YAG), silicic acid lutetium (Lu2SiO5,
The special equipment of artificial lens such as LSO) is that collection mechanical, electrical, computer, air force, fluid dynamic, thermokinetics etc. are learned
Section is in the integrated system of one.Currently, domestic upper lifting high temperature crystal growth vaccum sensitive stove, operation and control system base
Originally be it is automanual, crystal growing process (e.g., seeding necking down, shouldering, it is isometrical, ending, cooling etc. technical process) can not achieve
Automatic Control, crystal growing process are higher to the degree of dependence of operator, to not can guarantee the consistency of crystal growth.
The full-automatic crystal growth induction furnace of external import is expensive and difficult in maintenance, is not suitable for high-volume and purchases.In addition, bilayer is not
Two-sided welding, outer wall is usually used using single-sided welding in the hearth wall inner wall of rust molten steel air-cooled structure, and the inner wall of two-sided welding can
Can there can be gap to residual air, during rising-heat contracting-cold, the gap of residual air may occur fine fisssure and cause
The problem of vacuum environment is impacted or cooling medium leaks.
Summary of the invention
Based on this, the application provides a kind of crystal growing apparatus, is used to prepare monocrystal material.
One of the embodiment of the present application provides a kind of crystal growing apparatus.Described device includes burner hearth, lifting rod, telecontrol equipment
And control system；Setting thermal field and heat source in the burner hearth；At least part of the lifting rod is located in the burner hearth, and institute
Stating telecontrol equipment and the lifting rod has transmission connection, to drive the lifting rod to move up and down and/or rotation；The control
System is used to control the direction of motion and/or movement velocity of the telecontrol equipment.
In some embodiments, the first cooling structure is provided at least part of the hearth wall.
In some embodiments, at least part of the hearth wall includes inner wall and outer wall, and the inner wall is enclosed with outer wall
At closed space, the closed space is for filling cooling medium；Offered on the outer wall cooling medium inlet port with
And cooling medium outlet.
In some embodiments, the burner hearth further includes hearth door, and the second cooling structure is provided in the hearth door.
In some embodiments, the hearth door includes door inner wall and wall, the door inner wall surround close with wall outdoors outdoors
The space closed, the closed space is for filling cooling medium；Offered on the wall outdoors cooling medium inlet port and
Cooling medium outlet.
In some embodiments, at least partially transparent material of the hearth door.
In some embodiments, the telecontrol equipment includes: lifting component and rotary components；The lifting component is used for
Control lifting rod moves up and down；The lifting component includes: column, sliding block, screw rod and the first driving unit；Described first
Driving unit is set at the top of column；Sliding rail is provided on the column；The screw rod is arranged in parallel with the sliding rail, and described
One end of screw rod is connected with first driving unit；The slide block set is set on the screw rod, and is to be threadedly engaged with screw rod；
Described sliding block at least part is located in the sliding rail, and the rotation of the screw rod is able to drive the sliding block above and below the sliding rail
It is mobile；The rotary components are used to control the rotation of lifting rod；The rotary components are set on the sliding block.
In some embodiments, described device further includes weighing device, and the weighing device is brilliant on lifting rod for detecting
The weight of body, the weighing device are set on the sliding block.
In some embodiments, the control system with the weighing device there is signal to connect, for receiving the title
Reset the output signal set.
In some embodiments, the rotary components include the second driving unit and transmission component；Second driving
Unit can drive the rotation of the weighing device by the transmission component.
In some embodiments, the transmission component includes belt pulley and belt；The output of second driving unit turns
Axis is connected with the shaft of the belt pulley；On the belt pulley and at least one belt is arranged on the weighing device.
In some embodiments, the weighing device includes weighing chamber and weighing sensor；The weighing sensor setting
Inside the weighing chamber；One end of the weighing sensor and the lifting rod are connected；The other end of the weighing sensor
It is connected with the weighing chamber.
In some embodiments, the lifting rod includes at least middle bar and seed rod；One end of the middle bar and the title
Weight room is connected；The middle bar passes through the through-hole being arranged on the sliding block；The middle bar has hollow structure；The seed rod passes through
The middle bar；Wherein, one end of the seed rod is connected with the weighing sensor；The other end of the seed rod is for connecting
Seed crystal.
In some embodiments, described device further includes sealing sleeve pipe: one end of the sealing sleeve pipe and the burner hearth top
Portion is tightly connected, and the lifting rod is located in the sealing sleeve pipe；The roof of the furnace part being tightly connected with the sealing sleeve pipe
Through-hole is offered, so that the lifting rod passes through；The lower end surface of the other end of the sealing sleeve pipe and the sliding block is tightly connected.
In some embodiments, described device further includes vacuum plant；The vacuum plant is used for in the burner hearth
Portion provides vacuum environment or provides the air pressure environment for being lower than standard atmospheric pressure.
Detailed description of the invention
The application will further illustrate that these exemplary embodiments will be carried out by attached drawing in a manner of exemplary embodiment
Detailed description.These embodiments are simultaneously unrestricted, and in these embodiments, being identically numbered indicates identical structure, in which:
Fig. 1 is the schematic diagram of the crystal growing apparatus according to shown in the application some embodiments；
Fig. 2A is the longitudinal sectional drawing of the burner hearth according to shown in the application some embodiments；
Fig. 2 B is the horizontal sectional drawing of the burner hearth according to shown in the application some embodiments；
Fig. 3 is the structural schematic diagram that component is lifted according to shown in some embodiments of the application；
Fig. 4 is the structural schematic diagram of the rotary components according to shown in the application some embodiments；
Fig. 5 is the structural schematic diagram of the weighing device according to shown in the application some embodiments；And
Fig. 6 is the structural schematic diagram of the crystal growing apparatus according to shown in the application some embodiments.
In figure, 100 be crystal growing apparatus, and 110 be burner hearth, and 120 be lifting rod, and 130 be telecontrol equipment, and 131 be lifting
Component, 132 be rotary components, and 133 be weighing device, and 111 be thermal field, and 111-1 is crucible, and 111-2 is alumina tube, and 112 are
Heat source, 113 be hearth wall, and 113-1 is inner wall, and 113-2 is outer wall, and 113-3 is inner wall and outer wall surrounds closed space, 114
For hearth door, 114-1 is door inner wall, and 114-2 is wall outdoors, and 114-3 is door inner wall and wall outdoors surrounds closed space, 115
It is column for grate, 1311,1312 be sliding block, and 1313 be screw rod, and 1314 be the first driving unit, and 1314-1 is lifting motor,
1314-2 is lifting driver, and 1314-3 is retarder, and 1314-4 is shaft joint, and 1314-5 is mounting base, and 1321 drive for second
Moving cell, 1321-1 are rotating electric machine, and 1321-2 is rotating driver, and 1321-3 is mounting base, and 1322 be transmission component,
1322-1 is belt pulley, and 1322-2 is belt, and 1331 be weighing chamber, and 1332 be weighing sensor, and 121 be middle bar, and 122 be seed crystal
Bar, 140 be sealing sleeve pipe.
Specific embodiment
It is with reference to the accompanying drawings and embodiments, right in order to which the objects, technical solutions and advantages of the application are more clearly understood
The application is further elaborated.It should be appreciated that specific embodiment described herein is only used to explain the application, and
It is not used in restriction the application.
On the contrary, the application covers any substitution done in the spirit and scope of the application being defined by the claims, repairs
Change, equivalent method and scheme.Further, in order to make the public have a better understanding the application, below to the thin of the application
It is detailed to describe some specific detail sections in section description.Part without these details for a person skilled in the art
The application can also be understood completely in description.
The invention relates to a kind of crystal growing apparatus, which can be used for preparing scintillation crystal, laser crystal
Equal monocrystal materials, the monocrystal material can be applied to medical instrument imaging, safety inspection, industrial non-destructive flaw detection, laser etc.
Field.
Fig. 1 is the schematic diagram of the crystal growing apparatus 100 according to shown in the application some embodiments；Fig. 2A is according to this Shen
Please burner hearth 110 shown in some embodiments longitudinal sectional drawing；Fig. 2 B is the burner hearth 110 according to shown in the application some embodiments
Horizontal sectional drawing.Below with reference to Fig. 1,2A-2B to crystal growing apparatus 100 and burner hearth involved in the embodiment of the present application
110 are described in detail.It is worth noting that, following embodiment does not constitute the limit to the application only to explain the application
It is fixed.
In embodiments herein, as shown in Figure 1, crystal growing apparatus 100 may include burner hearth 110, lifting rod
120, telecontrol equipment 130 and control system (not shown).
In embodiments herein, if Fig. 2A -2B shows, thermal field 111 and heat source 112 can be set in burner hearth 110, be used for
Place and temperature needed for crystal growth is provided.For example, temperature can be 2200 DEG C.In some embodiments, burner hearth 110 can be with
For cylindrical body, cube or cuboid, for providing the place of crystal growth.For example, burner hearth 110 can use diameter for 400
The cylindrical structure of~900mm, high 500~1200mm.In some embodiments, thermal field 111 is for providing the temperature of crystal growth
Environment is spent, thermal field 111 may include crucible 111-1 (e.g., iridium crucible) and alumina tube 111-2, alumina tube 111-2 and crucible
111-1 vertical arranged concentric and can be located at outside crucible 111-1, for keeping crucible 111-1 ambient temperature stable and making crucible
Material is heated evenly in 111-1.In some alternate embodiments, alumina tube 111-2 could alternatively be tubular zirconium-oxide.One
In a little alternate embodiments, tubular zirconium-oxide can also be arranged on the outside of alumina tube, or aluminium oxide is arranged outside tubular zirconium-oxide
Pipe, alumina tube is with tubular zirconium-oxide arranged concentric and outside crucible 111-1.In some alternate embodiments, tubular zirconium-oxide
It may be replaced by the hollow cylinder of zirconia brick composition.In some embodiments, heat source 112 can be heating coil, be used for
Crystal growth institute calorific requirement is provided.In some embodiments, heating coil can for internal diameter (250~330mm) × high (155~
270mm) × (7-9 circle).In some embodiments, heat source 112 can be concentric vertically with crucible 111-1 and alumina tube 111-2
Arrangement, and be located at outside alumina tube 111-2.In some embodiments, crucible 111-1 can be located at 110 center position of burner hearth
And with 120 center overlapping of axles of lifting rod, for containing the raw material of crystal growth.
In embodiments herein, if Fig. 1 shows, at least part of lifting rod 120 can be located in burner hearth 110, and
Telecontrol equipment 130 and lifting rod 120 can have transmission connection (e.g., be bolted, weld, hingedly, clamping etc.), be mentioned with drive
Pull rod 120 moves up and down and/or rotation.In some embodiments, 120 bottom of lifting rod can connect seed crystal, using as crystal
The crystal seed of growth.In some embodiments, telecontrol equipment 130 may include lifting component 131, rotary components 132 and weighing dress
133 are set, and is located at 110 top of burner hearth.In some embodiments, control system can be used for controlling the movement of telecontrol equipment 130
Direction and/or movement velocity.Specifically, control system can control the direction of motion and/or movement velocity of telecontrol equipment 130,
Telecontrol equipment 130 and lifting rod 120 are sequentially connected, and 120 bottom of lifting rod can connect seed crystal and be located in burner hearth, pass through movement
The movement of device 130 can drive lifting rod 120 and seed crystal to move up and down and/or rotate to control crystal growth.
In embodiments herein, as seen in figs. 2a-2b, can be set at least part of hearth wall 113
One cooling structure, for controlling furnace wall temperature to protect operator safe.In some embodiments, hearth wall 113 is at least
A part may include inner wall 113-1 and outer wall 113-2, and inner wall and outer wall surround closed space 113-3, the closed space
For filling cooling medium；Cooling medium inlet port and cooling medium outlet can be offered on the outer wall.In some realities
It applies in example, inner wall can use the austenitic stainless steel (316L) of 5~10mm thickness, and outer wall can use the austenite of 4~8mm thickness
Stainless steel (304L).In some embodiments, inner wall and outer wall spacing can be set to 5~10mm.In some embodiments, interior
Wall and outer wall can be using the welding manners such as metal argon arc welding (MIG) or argon tungsten-arc welding (TIG) come welding fabrication.Some
In embodiment, cooling medium can be water, ethyl alcohol, ethylene glycol, isopropanol, n-hexane etc. or any combination thereof, for example, it may be
The mixed liquor of the 50:50 of water and ethyl alcohol.In some embodiments, the first cooling structure may include board-like cooling structure or tubulose
Cooling structure, or other Rational structures well-known to those skilled in the art, the application are without limitation.Some
In embodiment, the first cooling structure can be connected with the driving equipment (e.g., cooling water pump) of cooling medium by pipeline, by cold
But medium circulation cools down furnace wall.
In embodiments herein, as shown in Figure 2 B, burner hearth 110 can also include hearth door 114, in the hearth door
It is provided with the second cooling structure, for controlling furnace wall temperature to protect operator safe.In some embodiments, hearth door can
To include an inner wall 114-1 and wall 114-2 outdoors, this inner wall and outdoors wall surround closed space 114-3, the closed sky
Between for filling cooling medium；Cooling medium inlet port and cooling medium outlet can be offered on wall outdoors.Some
In embodiment, door inner wall can use the austenitic stainless steel (316L) of 5~10mm thickness, what wall can be thick using 4~8mm outdoors
Austenitic stainless steel (304L).In some embodiments, door inner wall can be set to 5~10mm with wall spacing outdoors.Some
In embodiment, door inner wall and wall outdoors can using the welding manners such as metal argon arc welding (MIG) or argon tungsten-arc welding (TIG) come
Welding fabrication.In some embodiments, cooling medium can be water, ethyl alcohol, ethylene glycol, isopropanol, n-hexane etc. or it is any
Combination, for example, it may be the mixed liquor of the 50:50 of water and ethyl alcohol.In some embodiments, the first cooling structure and the second cooling
Structure can be identical or different cooling medium.In some embodiments, the second cooling structure may include board-like cooling knot
Structure or tubulose cooling structure, or other Rational structures well-known to those skilled in the art, the application do not limit this
System.In some embodiments, the first cooling structure and the second cooling structure can be identical or different cooling structure.Some
In embodiment, the second cooling structure can be connected with the driving equipment (e.g., cooling water pump) of cooling medium by pipeline, by cold
But medium circulation cools down hearth door.
In some embodiments, hearth door at least partly can be transparent material.In some embodiments, transparent material
It can be set to an inner wall simultaneously on wall outdoors, surround closed space jointly with door inner wall and the other parts of wall outdoors,
For filling cooling medium cooling.In some embodiments, transparent material can be pyroceram or high molecular synthetic material,
It may be other reasonable materials well-known to those skilled in the art, the application is without limitation.By in the hearth door
Transparent material, operator can observe the growing state of burner hearth crystal inside in real time.
In some embodiments, burner hearth 110 can also include grate 115, and (such as bolt company is fixedly connected with grate 115
Connect, weld, hingedly), grate 115 is for installing burner hearth 110 so that burner hearth 110 is horizontal.For example, levelness is 0.05/1000.?
In some embodiments, grate 115 can be cube or the steel frame construction of cylindrical body.For example, the use of grate 115 (80~
150mm) × (80~150mm) square tube production growth (800~1600mm), wide (800~1600mm), high (300~600mm)
Rectangular parallelepiped structure.In some embodiments, the stabilizer blade of grate 115 can be round or rectangular steel tube.In some alternative realities
It applies in example, grate 115 or other Rational structures well-known to those skilled in the art, the application is without limitation.
Fig. 3 is the structural schematic diagram that component 131 is lifted according to shown in some embodiments of the application；Fig. 4 is according to this Shen
Please rotary components 132 shown in some embodiments structural schematic diagram；Fig. 5 is the weighing according to shown in the application some embodiments
The structural schematic diagram of device 133.It is carried out in detail below with reference to telecontrol equipment 130 involved in the embodiment of the present application of Fig. 3~5 pair
Explanation.It is worth noting that, following embodiment does not constitute the restriction to the application only to explain the application.
In some embodiments, telecontrol equipment 130 may include lifting component 131, rotary components 132 and weighing device
133, and it is located at 110 top of burner hearth.
In embodiments herein, as shown in figure 3, lifting component 131 may include column 1311, sliding block 1312, silk
Bar 1313 and the first driving unit 1314, for controlling moving up and down for lifting rod 120.In some embodiments, it first drives
Moving cell 1314 may include lifting motor 1314-1, lift driver 1314-2, retarder 1314-3 and mounting base 1314-5,
Lifting motor 1314-1 and lifting driver 1314-2, retarder 1314-3 can be fixedly installed on vertical by mounting base 1314-5
1311 top of column.In some embodiments, which, which can be, is bolted, welds or hingedly.In some implementations
In example, can be set sliding rail on column 1311,1311 lower end of column can be fixedly connected with grate 115 (e.g., be bolted,
Welding, hinged, clamping etc.).In some embodiments, screw rod 1313 can be arranged in parallel with sliding rail, and one end of screw rod 1313
Can be fixedly connected by shaft joint 1314-4 with retarder 1314-3 (e.g., be bolted, weld, hingedly, clamping etc.).Pass through
The control lifting direction of rotation motor 1314-1 and rotation speed can control direction of rotation and the rotation speed of screw rod 1313.One
In a little embodiments, screw rod 1313 can be ball screw.In some embodiments, the effective travel of screw rod 1313 can be 300
~1200mm, lead can be 5~20mm, and diameter can be 16~35mm.In some embodiments, the verticality of screw rod 1313
It can be less than 0.2 °.In some embodiments, sliding block 1312 can be sheathed on screw rod 1313, and be matched with screw rod 1313 for screw thread
It closes；1312 at least part of sliding block is located in sliding rail, can be with movable slider by the rotation (forward or reverse) of screw rod 1313
1312 move up and down along sliding rail.Specifically, control system can send a signal to lifting driver 1314-2 to control lifting electricity
The direction of rotation of machine 1314-1 and rotation speed pass through retarder 1314-3 and shaft joint after retarder 1314-3 deceleration
The transmission effect of 1314-4 can drive screw rod 1313 to be rotated with suitable direction of rotation and rotation speed, thus into one
Step band movable slider 1312 moves up and down at the appropriate speed, i.e., converts the vertical of sliding block 1312 for the turned position of screw rod 1313
Displacement.In some embodiments, the pull rate for lifting motor 1314-1 can be 0.1~20mm/h, and fast pulling rate degree can be
0.1~3600mm/h, precision > 0.01mm/h.
In embodiments herein, as shown in figure 4, weighing device 133 can be used for detecting crystal on lifting rod 120
Weight, weighing device 133 can be set on sliding block 1312, can drive weighing device by moving up and down for sliding block 1312
133 move up and down.In some embodiments, the mode that weighing device 133 is set on sliding block 1312 can be bolted,
Welding, hinged or clamping etc., are also possible to be placed on weighing device 133 on sliding block 1312 without any type of connection,
The gravity for only relying on weighing device 133 is stable on sliding block 1312.In some embodiments, control system can be with weighing device
133 there is signal to connect, for receiving the output signal of weighing device 133.In some embodiments, weighing device 133 is defeated
Signal can be the weight signal of crystal on lifting rod 120 out.In some embodiments, the output signal of weighing device 133 can
To be exported by mercury slip ring.By receiving 133 output signal of weighing device, control system can determine the weight of crystal, with
And the information such as increase speed of crystal weight, and then determine the crystallization rate of crystal, according to the crystallization rate of crystal, control system
System may further determine that the temperature of thermal field and send control signal to the power management section of heating coil, to control thermal field
Temperature；Meanwhile control system can control lifting component 131 and/or rotation group according to the requirement of crystal growth technique parameter
The direction of motion and/or movement velocity of part 132, and then realize the automatic control of crystal growth.
In some embodiments, rotary components 132 may include the second driving unit 1321 and transmission component 1322, and
Two driving units 1321 can drive the rotation of weighing device 133 by transmission component 1322, to control turning for lifting rod 120
It is dynamic.In some embodiments, the revolving speed of weighing device 133 can be 0.1~88rpm, and precision can be 0.1rpm.In some realities
It applies in example, transmission component 1322 may include belt pulley 1322-1 and belt 1322-2.In some embodiments, the second driving is single
Member 1321 may include rotating electric machine 1321-1, rotating driver 1321-2 and mounting base 1321-3, rotating electric machine 1321-1 and
(e.g., be bolted, weld, hinged etc.) can be fixedly installed in sliding block in rotating driver 1321-2 by mounting base 1321-3
On 1312.In some embodiments, the output revolving shaft of the second driving unit 1321 is connected with the shaft of belt pulley 1322-1, passes through
The direction of rotation and rotation speed for controlling rotating electric machine 1321-1 can control direction of rotation and the rotation speed of belt pulley 1322-1
Degree.In some embodiments, on belt pulley 1322-1 and one or more belt, belt pulley are arranged on weighing device 133
1322-1 can drive the rotation of weighing device 133 by belt connection.Specifically, control system can send a signal to rotation
Driver 1321-2 passes through belt pulley 1322-1 and belt to control direction of rotation and the rotation speed of rotating electric machine 1321-1
The transmission effect of 1322-2 is further driven to weighing device 133 and is rotated with suitable direction of rotation and rotation speed.One
In a little alternate embodiments, transmission component 1322 can be chain transmission component, including gear and chain.Second driving is single
The output revolving shaft of member 1321 can be connect with gear.The outer wall of weighing device 133 can be equipped with dentalation, and chain can be arranged
On gear and weighing device 133, the second driving unit 1321 can drive turning for weighing device 133 by chain connection
It is dynamic.
In embodiments herein, as shown in figure 5, weighing device 133 may include weighing chamber 1331 and weighing and sensing
Device 1332.In some embodiments, weighing sensor 1332 can be set inside weighing chamber 1331.In some embodiments,
Weighing sensor 1332 may include photoelectric sensor, fluid pressure type sensor, electromagnetic type sensor, capacitance type sensor,
Magnetic pole deformation type sensor, Vibratory transducer, gyro gauge-type sensor, resistance strain type sensor etc..In some embodiments
In, one end of weighing sensor 1332 can be connected (e.g., be bolted, weld, hingedly, clamping etc.) with lifting rod 120.One
In a little embodiments, the other end of weighing sensor 1332 can be connected with the cover board of weighing chamber 1331 (e.g., be bolted, weld,
Hingedly, clamping etc.).
In some embodiments, lifting rod 120 can include at least middle bar 121 and seed rod 122.In some embodiments
In, one end of middle bar 121 can be connected (e.g., be bolted, weld, hingedly, clamping etc.) with weighing chamber 1331.In some implementations
In example, middle bar 121 can pass through the through-hole being arranged on sliding block 1312.Bearing can be set above and below through-hole, in order to
The rotation of weighing chamber 1331, to drive the rotation of lifting rod 120.In some embodiments, middle bar 121 can have hollow knot
Structure, seed rod 122 can pass through middle bar 121 by the hollow structure.In some embodiments, one end of seed rod 122 can be with
Be connected with weighing sensor 1332 (e.g., be bolted, weld, hingedly, clamping etc.), the other end of seed rod 122 can be used for
Seed crystal is connected, using the crystal seed as crystal growth.In some embodiments, the material of seed rod 122 can be iridium, molybdenum, ceramics,
The material resistant to high temperature such as stainless steel.It moves up and down and rotates with speed in an appropriate direction by weighing device 133, can drive
Seed crystal on seed rod 122 is moved up and down and is rotated with speed in an appropriate direction, to control the speed of growth of crystal.
Fig. 6 is the structural schematic diagram of the crystal growing apparatus 100 according to shown in the application some embodiments.
In some embodiments, crystal growing apparatus 100 can also include sealing sleeve pipe 140.In some embodiments, close
The lower part of big envelope pipe 140 is to be tightly connected (e.g., be bolted or weld) at the top of telescopic sleeve pipe, with burner hearth 110, lifting rod
120 can be located in sealing sleeve pipe 140；The roof of the furnace part being tightly connected with sealing sleeve pipe 140 offers through-hole, to mention
Pull rod 120 passes through.In some embodiments, the top of sealing sleeve pipe 140 can be close by rotating with the lower end surface of sliding block 1312
Sealing assembly is tightly connected.Since lifting rod 120 is located in sealing sleeve pipe 140 and burner hearth 110, lifting rod 120 can be close
It rotates freely and moves up and down in big envelope pipe 140 without being influenced by sealing sleeve pipe 140, while ensuring sealing sleeve pipe 140
Airtightness.In addition, moving up and down for weighing device 133 can be driven by moving up and down for sliding block 1312, to drive lifting
Bar 120 moves up and down, since weighing device 133 and the relative position on 140 top of sealing sleeve pipe remain unchanged, and sealing sleeve pipe
140 lower parts are telescopic sleeve pipe, therefore can be drawn high or be compressed to offset and claim by the telescopic sleeve pipe of 140 lower part of sealing sleeve pipe
133 and the displacement that moves up and down of lifting rod 120 are set in refitting, and moving it is not influenced by sealing sleeve pipe 140.It is sealed by setting
Casing 140 can be such that the seed crystal of 120 lower end of lifting rod completely cuts off with ambient atmos, be completely in seed crystal and burner hearth 110 close
In the environment of envelope, so that the growing environment of crystal be made to stablize, and then guarantee that crystal structure process is stable, the habit of preparation is good
It is good, be conducive to improve crystal quality.
In some embodiments, crystal growing apparatus 100 can also include vacuum plant (not shown), vacuum plant
Vacuum environment is provided for the inside to burner hearth 110 or the air pressure environment lower than standard atmospheric pressure is provided.For example, cooling furnace
Breech pressure can be 3.3 × 10-3Pa.In some embodiments, vacuum plant may include vacuum pump and inert gas steel cylinder.
In some embodiments, nozzle can be offered on hearth wall 113, (e.g., which can be connected with vacuum plant by pipeline
It is bolted, welds), so that burner hearth inner space be made to be connected to vacuum plant.Vacuum plant, burner hearth 110 and sealing sleeve pipe
140 composition sealing spaces, are vacuumized by vacuum pump or vacuum pump is vacuumized and filled into empty in inert gas replacement burner hearth 110
Gas can make the inside of burner hearth 110 be in vacuum environment or the indifferent gas pressure ring border lower than standard atmospheric pressure, crystal growth
The seed crystal of 120 lower end of raw material and lifting rod is under above-mentioned air pressure environment, at a certain temperature, completes the growth of crystal
Journey.
In some embodiments, preparing crystal by crystal growing apparatus 100 may comprise steps of:
(1) grate is installed: installation grate 115 and burner hearth 110 and level-off, levelness 0.05mm/m；
(2) install telecontrol equipment: installation telecontrol equipment 130 simultaneously adjusts 1313 verticality of screw rod less than 0.2 degree, while upper and lower two
Vertical interval is held to be less than 0.5mm；
(3) it adjusts concentricity: heat source 112 (heating coil), thermal field 111 being installed by crystal growth technique requirement, the two is same
Heart degree is less than 1mm；Adjustment telecontrol equipment 130 keeps the seed rod 122 of weighing system 133 and thermal field 111 concentric, and concentricity is less than
The vertical range at both ends is less than 0.5mm from top to bottom or from top to bottom for 0.5mm and seed rod；
(4) it vacuumizes；Vacuum system is installed and when burner hearth 110 is cooling, open vacuum pump vacuumize 3 hours it is true to the limit
Sky, or open vacuum pump and vacuumize 3 hours and fill into inert gas to the indifferent gas pressure ring border for being below or above standard atmospheric pressure,
To detect the leakproofness of whole equipment system；
(5) crystal growth prepares: being put into material, installs crucible and thermal field by technique requirement, cleaning burner hearth closes fire door
It vacuumizes, logical cooling water, the parameters of crystal growth is set, slowly declines seed crystal in temperature-rise period and is preheated, always
It keeps seed crystal and charge level distance is 5-15mm to avoid seed crystal cracking；After material melting is complete, slow sinking seed crystal and melt
Contact；Temperature and the seed crystal 0.5-2mm that sinks are adjusted, melts the material of seed crystal and fusing sufficiently, the two interface is complete；To temperature
After suitable, starting control program enters crystal automatic growth mode；
(6) crystal growth controls: the seed rod 122 of weighing device 133 is connected with seed crystal, by controlling rotating electric machine
The revolving speed of 1321-1 controls the rotation speed of crystal, the revolving speed of control lifting motor 1314-1 is the drawing of control crystal growth
Speed promotes crystal homoepitaxial；According to the requirement of crystal growth technique parameter, rotation is controlled by control system output signal
The revolving speed of motor 1321-1 and lifting motor 1314-1, to reach the requirement of crystal growth technique parameter；Specifically, passing through reception
And then realize the automatic control of crystal growth.
Process made above is above-mentioned only as an example, the technological parameter being directed in different embodiments can be different
Successively also and not exclusive, the also sequence between adjustable step in different embodiments of step, or even omit certain one or more
Step.Above-mentioned example is not answered to be interpreted as the limitation to the application protection scope.
The possible beneficial effect of crystal growing apparatus disclosed herein includes but is not limited to: (1) crystal growth
Automation control may be implemented in process, and prepared monocrystal material structural integrity is good；(2) it selects good furnace body material, change
Into welding procedure, the leakproofness and corrosion resistance of burner hearth can be improved；(3) it simplifies chamber structure, realize fast assembling-disassembling, tie up
It protects more convenient.It should be noted that the different issuable beneficial effects of embodiment are different, it, can in different embodiments
The beneficial effect that can be generated can be the combinations of any of the above one or more, be also possible to other it is any can be obtainable beneficial
Effect.
The foregoing is merely the preferred embodiments of the application, not to limit the application, all essences in the application
Made any modifications, equivalent replacements, and improvements etc., should be included within the scope of protection of this application within mind and principle.
Claims (15)
1. a kind of crystal growing apparatus, which is characterized in that including burner hearth, lifting rod, telecontrol equipment and control system；
Setting thermal field and heat source in the burner hearth；
At least part of the lifting rod is located in the burner hearth, and there is transmission to connect for the telecontrol equipment and the lifting rod
It connects, to drive the lifting rod to move up and down and/or rotation；
The control system is used to control the direction of motion and/or movement velocity of the telecontrol equipment.
2. device as described in claim 1, which is characterized in that it is cooling to be provided with first at least part of the hearth wall
Structure.
3. device as claimed in claim 2, which is characterized in that at least part of the hearth wall includes inner wall and outer wall,
The inner wall and outer wall surround closed space, and the closed space is for filling cooling medium；It is offered on the outer wall
Cooling medium inlet port and cooling medium outlet.
4. device as claimed in claim 2, which is characterized in that the burner hearth further includes hearth door, is arranged in the hearth door
There is the second cooling structure.
5. device as claimed in claim 4, which is characterized in that the hearth door includes door inner wall and wall outdoors, in the door
Wall surrounds closed space with wall outdoors, and the closed space is for filling cooling medium；It is offered on the wall outdoors cold
But medium inlet port and cooling medium outlet.
6. device as claimed in claim 4, which is characterized in that at least partially transparent material of the hearth door.
7. device as described in claim 1, which is characterized in that the telecontrol equipment includes:
Lift component；The lifting component is for controlling moving up and down for lifting rod；
The lifting component includes: column, sliding block, screw rod and the first driving unit；
First driving unit is set at the top of column；
Sliding rail is provided on the column；
The screw rod is arranged in parallel with the sliding rail, and one end of the screw rod is connected with first driving unit；
The slide block set is set on the screw rod, and is to be threadedly engaged with screw rod；Described sliding block at least part is located at the cunning
In rail, the rotation of the screw rod is able to drive the sliding block and moves up and down along the sliding rail；And rotary components；The rotation group
Part is used to control the rotation of lifting rod；The rotary components are set on the sliding block.
8. device as claimed in claim 7, which is characterized in that further include weighing device, the weighing device is mentioned for detecting
The weight of crystal on pull rod, the weighing device are set on the sliding block.
9. device as claimed in claim 8, which is characterized in that the control system and the weighing device connect with signal
It connects, for receiving the output signal of the weighing device.
10. device as claimed in claim 8, which is characterized in that the rotary components include the second driving unit and transmission
Component；
Second driving unit can drive the rotation of the weighing device by the transmission component.
11. device as claimed in claim 10, which is characterized in that the transmission component includes belt pulley and belt；
The output revolving shaft of second driving unit is connected with the shaft of the belt pulley；
On the belt pulley and at least one belt is arranged on the weighing device.
12. device as claimed in claim 8, which is characterized in that the weighing device includes weighing chamber and weighing sensor；
The weighing sensor is set to inside the weighing chamber；
One end of the weighing sensor and the lifting rod are connected；
The cover board of the other end of the weighing sensor and the weighing chamber is connected.
13. device as claimed in claim 12, it is characterised in that:
The lifting rod includes at least middle bar and seed rod；
One end of the middle bar and the weighing chamber are connected；
The middle bar passes through the through-hole being arranged on the sliding block；
The middle bar has hollow structure；
The seed rod passes through the middle bar；
Wherein, one end of the seed rod is connected with the weighing sensor；The other end of the seed rod is for connecting seed crystal.
14. device as claimed in claim 10, which is characterized in that further include sealing sleeve pipe:
One end of the sealing sleeve pipe and the roof of the furnace are tightly connected, and the lifting rod is located in the sealing sleeve pipe；With
The roof of the furnace part that the sealing sleeve pipe is tightly connected offers through-hole, so that the lifting rod passes through；
The lower end surface of the other end of the sealing sleeve pipe and the sliding block is tightly connected.
15. device as claimed in claim 14, which is characterized in that further include vacuum plant；The vacuum plant is used for institute
The inside for stating burner hearth provides vacuum environment or provides the air pressure environment for being lower than standard atmospheric pressure.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910772691.XA CN110344108A (en) | 2019-08-21 | 2019-08-21 | Upper lifting vacuum drying oven |
| CN202110870910.5A CN113584572B (en) | 2019-08-21 | 2020-06-24 | Crystal preparation device |
| CN202010585048.9A CN111575784B (en) | 2019-08-21 | 2020-06-24 | Crystal preparation device |
| CN202010830826.6A CN111826708A (en) | 2019-08-21 | 2020-08-18 | Upper lifting vacuum furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910772691.XA CN110344108A (en) | 2019-08-21 | 2019-08-21 | Upper lifting vacuum drying oven |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110344108A true CN110344108A (en) | 2019-10-18 |
Family
ID=68180890
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910772691.XA Pending CN110344108A (en) | 2019-08-21 | 2019-08-21 | Upper lifting vacuum drying oven |
| CN202010830826.6A Pending CN111826708A (en) | 2019-08-21 | 2020-08-18 | Upper lifting vacuum furnace |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010830826.6A Pending CN111826708A (en) | 2019-08-21 | 2020-08-18 | Upper lifting vacuum furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN110344108A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115467012A (en) * | 2022-10-27 | 2022-12-13 | 徐州鑫晶半导体科技有限公司 | Single crystal silicon crystal growth apparatus and method for controlling the same |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114921845B (en) * | 2022-04-01 | 2024-02-20 | 江苏邦翰信息科技有限公司 | Silicon rod lifting device for preparing dynamic environment monitoring chip |
Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003052175A1 (en) * | 2001-12-19 | 2003-06-26 | Mark Fielker | 'waterfall' production equipment for crystal growth |
| CN101736395A (en) * | 2008-11-17 | 2010-06-16 | 中国科学院福建物质结构研究所 | Crystal growing and pulling device |
| CN101831692A (en) * | 2009-11-24 | 2010-09-15 | 成都东骏激光股份有限公司 | Automatic control device for use in Czochralski crystal growth |
| CN202072795U (en) * | 2011-05-23 | 2011-12-14 | 西安西光机械制造有限公司 | Crucible rod operation device for preventing crucible rod from downward slip in outage |
| CN102758255A (en) * | 2012-08-02 | 2012-10-31 | 元亮科技有限公司 | Method for growing large-size high-temperature oxide crystal through for top-seeded temperature gradient technique |
| CN103132135A (en) * | 2012-12-13 | 2013-06-05 | 苏州工业园区杰士通真空技术有限公司 | High-efficient novel sapphire crystal growth system |
| CN203229583U (en) * | 2013-04-09 | 2013-10-09 | 嘉兴学院 | Three-rod crystal growth device by pulling method |
| CN103374753A (en) * | 2012-04-19 | 2013-10-30 | 吴江亿泰光伏设备有限公司 | Large-size sapphire crystal growing furnace |
| CN203403172U (en) * | 2013-08-14 | 2014-01-22 | 云南乾元光能产业有限公司 | Lifting device for aluminum oxide single crystal growth |
| CN203569234U (en) * | 2013-11-18 | 2014-04-30 | 上海森松压力容器有限公司 | Seed crystal rotating lift mechanism for sapphire furnace |
| CN204023002U (en) * | 2014-08-01 | 2014-12-17 | 江苏双良新能源装备有限公司 | The long brilliant stove seed rod shift mechanism of sapphire |
| CN104328498A (en) * | 2014-11-26 | 2015-02-04 | 元亮科技有限公司 | Automatic integrated control process for sapphire single crystal growth |
| CN205275776U (en) * | 2015-12-30 | 2016-06-01 | 成都东骏激光股份有限公司 | But multiple spot swing joint and securing device of crystal growth stove seed rod system |
| CN105926038A (en) * | 2016-05-24 | 2016-09-07 | 上海申骅机电设备制造有限公司 | Sapphire crystal growth lifting device |
| CN205893452U (en) * | 2016-08-23 | 2017-01-18 | 成都晶九科技有限公司 | Automatic growing device of crystal based on resistance furnace |
| CN106400107A (en) * | 2016-11-28 | 2017-02-15 | 中国电子科技集团公司第二十六研究所 | Crystal growth remote control system |
| CN206188917U (en) * | 2016-11-14 | 2017-05-24 | 济南金曼顿自动化技术有限公司 | Removable crystal of furnace chamber is carried and is drawn stove |
| CN208071841U (en) * | 2018-04-02 | 2018-11-09 | 济南金曼顿自动化技术有限公司 | A kind of modular composite crystal preparation system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02167884A (en) * | 1988-12-22 | 1990-06-28 | Sumitomo Metal Mining Co Ltd | Growth device of single crystal |
-
2019
- 2019-08-21 CN CN201910772691.XA patent/CN110344108A/en active Pending
-
2020
- 2020-08-18 CN CN202010830826.6A patent/CN111826708A/en active Pending
Patent Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003052175A1 (en) * | 2001-12-19 | 2003-06-26 | Mark Fielker | 'waterfall' production equipment for crystal growth |
| CN101736395A (en) * | 2008-11-17 | 2010-06-16 | 中国科学院福建物质结构研究所 | Crystal growing and pulling device |
| CN101831692A (en) * | 2009-11-24 | 2010-09-15 | 成都东骏激光股份有限公司 | Automatic control device for use in Czochralski crystal growth |
| CN202072795U (en) * | 2011-05-23 | 2011-12-14 | 西安西光机械制造有限公司 | Crucible rod operation device for preventing crucible rod from downward slip in outage |
| CN103374753A (en) * | 2012-04-19 | 2013-10-30 | 吴江亿泰光伏设备有限公司 | Large-size sapphire crystal growing furnace |
| CN102758255A (en) * | 2012-08-02 | 2012-10-31 | 元亮科技有限公司 | Method for growing large-size high-temperature oxide crystal through for top-seeded temperature gradient technique |
| CN103132135A (en) * | 2012-12-13 | 2013-06-05 | 苏州工业园区杰士通真空技术有限公司 | High-efficient novel sapphire crystal growth system |
| CN203229583U (en) * | 2013-04-09 | 2013-10-09 | 嘉兴学院 | Three-rod crystal growth device by pulling method |
| CN203403172U (en) * | 2013-08-14 | 2014-01-22 | 云南乾元光能产业有限公司 | Lifting device for aluminum oxide single crystal growth |
| CN203569234U (en) * | 2013-11-18 | 2014-04-30 | 上海森松压力容器有限公司 | Seed crystal rotating lift mechanism for sapphire furnace |
| CN204023002U (en) * | 2014-08-01 | 2014-12-17 | 江苏双良新能源装备有限公司 | The long brilliant stove seed rod shift mechanism of sapphire |
| CN104328498A (en) * | 2014-11-26 | 2015-02-04 | 元亮科技有限公司 | Automatic integrated control process for sapphire single crystal growth |
| CN205275776U (en) * | 2015-12-30 | 2016-06-01 | 成都东骏激光股份有限公司 | But multiple spot swing joint and securing device of crystal growth stove seed rod system |
| CN105926038A (en) * | 2016-05-24 | 2016-09-07 | 上海申骅机电设备制造有限公司 | Sapphire crystal growth lifting device |
| CN205893452U (en) * | 2016-08-23 | 2017-01-18 | 成都晶九科技有限公司 | Automatic growing device of crystal based on resistance furnace |
| CN206188917U (en) * | 2016-11-14 | 2017-05-24 | 济南金曼顿自动化技术有限公司 | Removable crystal of furnace chamber is carried and is drawn stove |
| CN106400107A (en) * | 2016-11-28 | 2017-02-15 | 中国电子科技集团公司第二十六研究所 | Crystal growth remote control system |
| CN208071841U (en) * | 2018-04-02 | 2018-11-09 | 济南金曼顿自动化技术有限公司 | A kind of modular composite crystal preparation system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115467012A (en) * | 2022-10-27 | 2022-12-13 | 徐州鑫晶半导体科技有限公司 | Single crystal silicon crystal growth apparatus and method for controlling the same |
| CN115467012B (en) * | 2022-10-27 | 2024-04-05 | 中环领先(徐州)半导体材料有限公司 | Single crystal silicon crystal growing apparatus and control method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111826708A (en) | 2020-10-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110344108A (en) | Upper lifting vacuum drying oven | |
| CN101429677A (en) | Polycrystalline silicon ingot furnace | |
| CN102154699B (en) | Method for growing sapphire monocrystal and growth equipment | |
| CN103147121A (en) | Device for growing crystals by using lifting and Kyropoulos method | |
| CN104805502A (en) | Method for producing relaxor ferroelectric single crystal PMN-PT by using vertical freezing technology | |
| CN106906515A (en) | A kind of SiC single crystal grower that can realize temperature field real-time adjustment and the method that SiC single crystal is grown using the device | |
| CN102879302A (en) | Wide-range magnetic field viscometer for high-temperature melt, and method for measuring viscosity by using same | |
| CN109264985A (en) | A kind of degassing method and device of preform | |
| CN110592659A (en) | Multi-crucible gradient condensation crystal growth device and method for growing large-size lanthanum bromide single crystal by using same | |
| CN114411238B (en) | Metal crystal growth method and device | |
| CN105891050B (en) | A kind of variable magnetic field high-temperature fusant oscillation viscosity instrument and its method for fast measuring | |
| CN104404622A (en) | Thermocouple lifting device for indium phosphide single-crystal furnace | |
| CN112064108B (en) | Vacuum high-pressure single crystal furnace system for growing mercury telluride crystal and control method thereof | |
| CN104975194A (en) | High-purity uranium metal preparing device and method | |
| CN110220825A (en) | A kind of wetting system safety testing device under the compound field action of ultrasound thermoelectricity | |
| CN115261975A (en) | Temperature-gradient dynamically adjustable artificial crystal growth temperature field structure and temperature field adjusting method | |
| CN210856408U (en) | Crystal growth furnace provided with furnace body lifting mechanism | |
| CN1818151A (en) | Method for growing tantalic acid lithium in diameter of 5-inch single crystal | |
| CN111575784A (en) | Crystal preparation device | |
| CN221965107U (en) | Radioactive waste melting and stirring device | |
| RU2562188C2 (en) | Device to produce casts by directed crystallisation | |
| CN218880140U (en) | Czochralski crystal growth device | |
| CN215746294U (en) | Magnet melt-spun furnace temperature measuring device and magnet alloy smelting device | |
| CN217535814U (en) | Automatic welding device for indium phosphide single-crystal quartz tube | |
| CN221397697U (en) | Powder stick heating vitrification device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20191018 |
|
| WD01 | Invention patent application deemed withdrawn after publication |