CN206188917U - Removable crystal of furnace chamber is carried and is drawn stove - Google Patents
Removable crystal of furnace chamber is carried and is drawn stove Download PDFInfo
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- CN206188917U CN206188917U CN201621223840.5U CN201621223840U CN206188917U CN 206188917 U CN206188917 U CN 206188917U CN 201621223840 U CN201621223840 U CN 201621223840U CN 206188917 U CN206188917 U CN 206188917U
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- furnace chamber
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Abstract
The utility model provides a removable crystal of furnace chamber is carried and is drawn stove, includes that furnace chamber, rotatory carrying draw the unit of weighing, heat preservation thermal field and crucible, and in the furnace chamber was arranged in to the heat preservation thermal field, the heat preservation thermal field was arranged in to the crucible, and rotatory carrying draws the unit of weighing to arrange the furnace chamber top in, and the seed rod is arranged in the furnace chamber to draw the unit connection of weighing with rotatory carrying, the furnace chamber includes ring flange, lower flange dish and cavity, and the cavity is arranged in between ring flange and the lower flange dish, and cavity inside or periphery are provided with heating device, all are provided with sealing device between cavity and last ring flange and the lower flange dish. Be provided with elevating gear in the furnace chamber, elevating gear fixes on the lower flange dish, heat preservation thermal field and crucible are arranged in on this elevating gear. The furnace chamber that draws the stove is carried to this crystal can adjust the change, can be applicable to the growth of more size crystal, simple structure, and the equipment is convenient, is convenient for maintain, and the power consumption is low. In addition, can make during the crucible is in best temperature field through the upgrading device, improve crystal growth efficiency and quality.
Description
Technical field
The utility model is related to a kind of lifting crystal oven according to the replaceable furnace chamber of crucible size, belongs to crystal growth equipment
Technical field.
Background technology
Czochralski method is a kind of method that high quality single crystal is grown from melt, and its general principle is that raw material adds in crucible
Thermosol, slowly by seed crystal and melt contacts, by precise control of temperature and crystal pull rate and rotating speed so that melted at solid liquid interface
Body constantly solidifies and grows crystal.Seed crystal process and crystal growing process being capable of Real Time Observation and controls under the growing method
System, can by using high-quality oriented seed and necking down technology, reduce crystal defect, obtain high quality crystal, the speed of growth compared with
Hurry up, therefore czochralski method is a kind of growing method that can be applied to industrialization, can be used to grow laser crystal, piezo crystals
The important photoelectric functional crystal such as body, electro-optic crystal, scintillation crystal.
Disclosed in Chinese patent literature CN103911655A《A kind of crystal pull device》, including Jing Sheng mechanisms, lifting be flat
Platform and the weighing sensor on lifting platform, also including being the brilliant rotation mechanism of axially symmetric structure and weighing hanging basket, claim
Weight hanging basket includes the hanging basket connecting rod that hanging basket upper flat plate and one end are connected with hanging basket upper flat plate, hanging basket upper flat plate and hanging basket connecting rod
Axially symmetric structure is formed after connection, hanging basket upper flat plate is weighed in plane installed in weighing sensor, the hanging basket connecting rod other end
The through hole being passed down through on lifting platform is connected with brilliant rotation mechanism, and hanging basket of weighing is coaxially connected with the geometirc symmetry axis of brilliant rotation mechanism
And the geometirc symmetry axis fall within the weighing on axle center of weighing sensor.
Disclosed in CN101660198《A kind of high-precision automatic photoelectric crystal pulling furnace》, including body of heater, in body of heater
Crucible equipped with melting crystal and the lifting rod for lifting crystal, also heating module and thermometric mould including being heated to crucible
Block, the lifting module that can adjust the crystal pull speed of growth adjusts the rotary module of rotary speed, and monitoring module and control
Module.
Disclosed in CN101788790A《For the PC control system of automatic photoelectric crystal lifting furnace》, including perform mould
Block and the control module by intelligent PID algorithm control performing module, the performing module include the temperature control of control furnace body temperature
Molding block, control crystal pull speed crystal pull module, control Crystal Rotation speed Crystal Rotation module and to body of heater
Interior remaining crystal weight makees the monitoring module for monitoring, and the control module is also associated with human-computer interface module, and the control module passes through
The implementation status of built-in each performing module of scanning element real time scan, and recorded automatically by built-in information recording unit
Execution information, human-computer interface module is sent to by execution information, the human-computer interface module include according to experiment the date arranged,
And graph inquiring is provided check interface.
Disclosed in CN105717878A《Totally digitilized collective and distributive type scintillation crystal lifts furnace control system》, including upper electromechanics
Brain, heating in medium frequency module, Weighing module and crystal growth control module, control module are communicated with obtaining title with Weighing module
Weight signal, control module communicated with heating in medium frequency module with set performance number and reading intermediate frequency parameters, control module with it is upper
The electromechanical brain in position is communicated to upload monitoring signals and receive operational order, and all communications use digital form, carry significantly
The control accuracy of system high.
The above-mentioned technology for crystal pull solves crystal pull growth and automatically controls problem, but crystal is carried at present
Stove is drawn to be primarily present problems with：
1. thick and heavy stainless steel Double water-cooled furnace shell structure is used at present, consumes substantial amounts of stainless steel material, it is relatively costly,
Stainless steel casing can also sense the substantial amounts of heat of generation needs cooled water to take away, and causes energy waste.
2. stainless steel furnace chamber dimensions is fixed, and when growing small dimension crystal with the lifting furnace of big furnace chamber, power consumption is big, wastes
The energy.When growing big specification crystal with the lifting furnace of small furnace chamber, small furnace chamber cannot be used.
Utility model content
The shortcoming that the utility model exists for existing crystal pull stove, there is provided a kind of furnace chamber is replaceable, simple structure, dimension
Shield is convenient, saves HYDROELECTRIC ENERGY, the replaceable crystal pull stove of the low furnace chamber with crucible lifting function of equipment cost.The crystalline substance
Body lifting furnace can be used to grow yttrium luetcium silicate (LYSO), lithium tantalate (LiTaO3, LT), yag crystal (Y3Al3O12,
The photoelectric functional crystal such as YAG).
The replaceable crystal pull stove of furnace chamber of the present utility model, using following technical scheme：
The replaceable crystal pull stove of the furnace chamber, including furnace chamber, rotary pulling weighing unit, thermal-preservation thermal field and crucible, protect
Warm field is placed in furnace chamber, and crucible is placed in thermal-preservation thermal field, and rotary pulling weighing unit is placed in furnace chamber top, and seed rod is placed in stove
In chamber, and it is connected with rotary pulling weighing unit；Furnace chamber includes upper flange plate, lower flange and cavity, and cavity is placed in upper flange
Between disk and lower flange, inside cavity or periphery are provided with heater, between cavity and upper flange plate and lower flange
It is provided with sealing device.
Lowering or hoisting gear is provided with the furnace chamber, lowering or hoisting gear is fixed on lower flange, the thermal-preservation thermal field and crucible
It is placed on the lowering or hoisting gear.On the one hand the lowering or hoisting gear can easily adjust relative position of the crucible in thermal field, convenient dress
Stove is operated, and on the other hand can rotate crucible, is conducive to crystal to grow and is required.
The cavity is transparent cavity, to facilitate crystal growth condition in observation cavity.
Sealing device between the cavity and upper flange plate and lower flange, including it is sleeved on the upper sealing on cavity top
The lower seal of cavity bottom is enclosed and is sleeved on, upper sealing ring is pressed on upper flange plate by upper press ring, under lower seal passes through
Pressure ring is pressed on lower flange.
The heater can be disposed on the load coil of cavity periphery, or be disposed on inside cavity
Resistive heating device.
Cooling cavity is provided with the upper flange plate and lower flange, is provided with upper flange plate empty with cooling in it
The upper flange cooling water inlet and upper flange coolant outlet of chamber connection, are provided with lower flange and cool down what cavity was connected with it
Lower flange cooling water inlet and lower flange coolant outlet.
It is provided with the upper flange plate and lower flange and connects gas port.Make to be in vacuum shape in cavity by connecing gas port
State, or by controlling air inlet/outlet gas flow, reach in furnace chamber in flowing atmosphere state.
Video camera is provided with the upper flange plate, for crystal growing phase in real-time monitoring cavity.
The screwed hole being distributed in concentric circles is machined with the upper flange plate and lower flange, for fixed different-diameter
The required upper press ring or lower pressure ring of sealing ring on cavity.
The locating slot being distributed in concentric circles is machined with the upper flange plate and lower flange, by the cavity of different-diameter
It is positioned in locating slot.
The bottom of the lower flange is provided with shock-absorbing leg, the outer additional stainless steel of induction coil of cavity or aluminum protective cover
Net.
According to the size of actual growth crystal, the cavity of suitable size is selected, crystalline polymorphic raw material is placed in crucible, earthenware
Thermal-preservation thermal field is laid in crucible outside, and seed crystal is placed on lifting rod.Cavity is sealed with upper flange plate and lower flange.Filled by lifting
Drive crucible lifting is put, the position of crucible is adjusted, crucible is in optimal thermal field position.By to being passed through indifferent gas in cavity
Body is vacuumized to cavity, makes to form the environment for being adapted to crystal growth in cavity, and heater switches on power, by upper flange
Flowing cooling water is passed through in disk and lower flange to be allowed to cool.When crucible is heated to more than polycrystal raw material fusing point, crystalline polymorphic
Melting sources drive lifting rod into melt state, rotary pulling weighing unit so that seed crystal is extend into the melt in crucible, so
Crystal growth is realized by rotation and upwards lifting seed crystal afterwards.
Furnace chamber in the utility model can be adjusted replacing according to the size of growth crystal, compared to fixed dimension
Monoblock type stainless steel furnace chamber, goes for the growth of more sized crystals, and simple structure is easy to assembly, is easy to safeguard, and energy
Cost is enough substantially reduced, but also HYDROELECTRIC ENERGY consumption can be reduced, consumed energy low.Additionally, can be made at crucible by update device
In optimum temperature, growing efficiency and quality are improved.
Brief description of the drawings
Fig. 1 is the replaceable crystal pull furnace structure schematic diagram of the utility model furnace chamber.
Wherein：1. upper flange plate, 2. upper flange cooling water inlet, 3.CCD video cameras, 4. rotary pulling weighing unit, 5.
On connect gas port, 6. go up sealing ring, 7. upper press ring, 8. upper flange coolant outlet, 9. cavity, 10. seed rod, 11. thermal-preservation thermal fields,
12. crucibles, 13. induction coils, 14. lower flanges, 15. lower flange cooling water inlets, 16. times pressure rings, 17. lower seals, 18.
Under connect gas port, 19. lowering or hoisting gears, 20. brackets, 21. shock-absorbing legs, 22. lower flange coolant outlets, 23. protection nets.
Specific embodiment
The utility model is the replaceable crystal pull stove of furnace chamber, and its structure is as shown in Figure 1.As existing lifting furnace
Including furnace chamber, rotary pulling weighing unit 4, thermal-preservation thermal field 11 and crucible 12, thermal-preservation thermal field 11 is placed in cavity, and crucible 12 is (such as
Noble metal iraurite or platinum crucible, graphite crucible, tungsten and molybdenum crucible etc.) it is placed in thermal-preservation thermal field 11, thermal-preservation thermal field 11 is given birth to for crystal
It is long that the thermal field for needing is provided, using insulation materials such as zirconium oxide, aluminum oxide, graphite or carbon felts.Weighing unit 4 is put on rotary pulling
In furnace chamber top, seed rod 10 is placed in furnace chamber, and is connected with rotary pulling weighing unit 4.Rotary pulling weighing unit 4 is used
Existing universal architecture, is provided with high-precision weighing sensor, lifting executing agency and rotary actuator.Meet crystal growth essence
Really lift and stable rotation.But, the furnace chamber in the utility model be it is different from the overall furnace cavity structure in existing lifting furnace, can
Dismounting is assembled into not co-content.
Furnace chamber in the utility model includes upper flange plate 1, lower flange 14 and cavity 9, and cavity 9 is placed in upper flange plate 1
And lower flange 14 between, sealing device is provided between cavity 9 and upper flange plate 1 and lower flange 14.The material of cavity 9
It is quartz glass or other non-metallic materials, crystal growth feelings in cavity 9 can be clearly viewed from transparent quartz glass
Condition.
The upper outside of cavity 9 is set with sealing ring 6, and upper sealing ring 6 is pressed on upper flange plate 1 by upper press ring 7, on
Pressure ring 7 is fixed by screws on upper flange plate 1 (screwed hole on upper flange plate 1 is blind hole).The lower outside suit of cavity 9
There is lower seal 17, lower seal 17 is pressed on lower flange 14 by lower pressure ring 16, lower pressure ring 16 is fixed by screws in down
On ring flange 14 (screwed hole on lower flange 14 is blind hole).
The inside of cavity 9 or periphery set heater 13.The sensing that heater 13 can be disposed on the periphery of cavity 9 adds
Heat coil, is heated with induction heating mode to crucible 12.Diameter for glass furnace chamber is, it is necessary to change different sensing heating lines
Circle.Heater 13 can also be located at the resistive heating device inside cavity 9, and heating electrode is drawn by lower flange 14.
By controlling power size, the temperature of crucible 12 is set to raise to melt crystal raw material.Power supply can be using high steady
Surely induction power supply or dc source are spent, is connected by digital communication interface and control system, realize the real-time dynamic regulation of power.
Cooling cavity is provided with upper flange plate 1, to be provided with that cool down the upper flange that cavity connects with it cold on upper flange plate 1
But water inlet 2 and upper flange coolant outlet 8.It is additionally provided with upper flange plate 1 and connects gas port 5 and ccd video camera 3.CCD is imaged
Machine 3 is used for crystal growing phase in real-time monitoring cavity 9.It is also equipped with cooling down cavity in lower flange 14, on lower flange 14
It is provided with and cools down lower flange cooling water inlet 15 and lower flange coolant outlet 22 that cavity is connected with it.On lower flange 14 also
It is provided with down and connects gas port 18.On connect gas port 5 and under connect gas port 18 1 and be used for gas is passed through in cavity 9, one is used to exclude
Gas.Connection flow gauge on gas port can be connect be passed through inert gas, flowing atmosphere shape is reached to control air inflow, in furnace chamber
State.Also the access vacuum acquiring system of gas port 18 can be connect with by above connecing gas port 5, obtains the vacuum of growth needs.
The chamber of different-diameter specification can be changed between upper flange plate 1 and lower flange 14 according to the size of growth crystal
Body, furnace chamber diameter is changed by changing cavity.To need to only be fixed on the upper press ring 7 and lower flange 14 on upper flange plate 1
Lower pressure ring 16, takes away upper flange plate 1, you can remove cavity 9.The cavity of another diameter is laid on lower flange 14, then uses phase
The sealing ring and pressure ring answered are sealed, and upper flange plate 1 is then placed on the cavity and corresponding sealing ring and pressure ring is installed, you can more
Change completion.
For ease of change cavity, be machined with upper flange plate 1 and lower flange 14 in concentric circles be distributed screwed hole, with
Upper press ring or lower pressure ring needed for sealing ring on fixed different-diameter cavity 9.Also can be in upper flange plate 1 and lower flange 14
On be machined with concentric circles be distributed locating slot, the cavity 9 of different-diameter is positioned in corresponding locating slot.Can also root
Correspondingly upper lower flange is changed according to the size of different cavitys 9.
Upper flange plate 1 and lower flange 14 can also be changed according to the size of different cavitys 9 is corresponding.Can on flange
To set multiple calibrating gas, sealed interface and electrode.
Lowering or hoisting gear 19 is additionally provided with the utility model.The lowering or hoisting gear 19 is arranged on lower flange 14, for earthenware
The lifting of crucible 12, so that crucible 12 is in optimal temperature field.Bracket 20, the He of thermal-preservation thermal field 11 are connected with lowering or hoisting gear 19
Crucible 12 is placed on bracket 20.Lowering or hoisting gear 19 can be any manually or electrically using screw-threaded shaft elevator structure, electric pushrod etc.
Lowering or hoisting gear.The one side of lowering or hoisting gear 19 can easily adjust relative position of the crucible 12 in thermal field, facilitate shove charge to grasp
Make, on the other hand can rotate crucible 12, be conducive to crystal to grow and require.
Additionally, the bottom of lower flange 14 is provided with shock-absorbing leg 21, the periphery of lower flange 14 is provided with protection network 23,
Operating personnel are isolated in load coil outside, it is ensured that personal security.
Above-mentioned lifting furnace, for yttrium luetcium silicate (LYSO) or lithium tantalate (LiTaO3, LT) or lithium columbate crystal
(LiNbO3, LN) or yag crystal (Y3Al3O12, YAG) and crystal growth, specific growth course is as described below.
According to the size of actual growth crystal, select the glass chamber 9 of suitable size, will growth yttrium luetcium silicate (LYSO) or
Lithium tantalate (LiTaO3, LT) or lithium columbate crystal (LiNbO3, LN) or yag crystal (Y3Al3O12, YAG) it is many
Brilliant raw material is placed in crucible 12, and thermal-preservation thermal field 11 is laid in the outside of crucible 12, and seed crystal is placed on lifting rod 10.Cavity 9 and upper method
Blue disk 1 and lower flange 14 are sealed, and are allowed to cool using flowing cooling water by upper flange plate 1 and lower flange 14, are protected
Shield sealing ring and steel flange disk will not overheating failures.Crucible 12 is driven to lift by lowering or hoisting gear 19, adjustment crucible 12
Position, makes crucible 12 be in optimal thermal field position.By above connecing gas port 5 to inert gas is passed through in cavity 9, by above connecing gas
Flowmeter control air inflow on mouth 5.Also cavity can be vacuumized, makes to form the environment for being adapted to crystal growth in cavity.Heating
Device 13 switches on power, and the power supply can use high stability induction power supply or resistance heating power supply, be connected by control system, real
The real-time dynamic regulation of existing power.
When crucible is heated to more than polycrystal raw material fusing point, crystalline polymorphic melting sources claim into melt state, rotary pulling
Weight unit 4 drives lifting rod 10 so that seed crystal is extend into the melt in crucible 12, then lifts by rotating and upwards seed crystal
And realize crystal growth.Heating power or temperature control, rotary pulling control can be realized brilliant by computer real time and on line monitoring
Body growth is automatically controlled.
By crystal growing phase in the real-time monitoring cavity 9 of ccd video camera 3, realtime graphic is gathered by CCD, in real time note
Record crystal growing process, shows on computers, can intuitively observed and recorded crystal growth real-time status.
Claims (10)
1. a kind of replaceable crystal pull stove of furnace chamber, including furnace chamber, rotary pulling weighing unit, thermal-preservation thermal field and crucible, protect
Warm field is placed in furnace chamber, and crucible is placed in thermal-preservation thermal field, and rotary pulling weighing unit is placed in furnace chamber top, and seed rod is placed in stove
In chamber, and it is connected with rotary pulling weighing unit；It is characterized in that：Furnace chamber includes upper flange plate, lower flange and cavity, and cavity is put
Between upper flange plate and lower flange, inside cavity or periphery are provided with heater, cavity and upper flange plate and lower flange
Sealing device is provided between disk.
2. the replaceable crystal pull stove of furnace chamber according to claim 1, it is characterized in that：Lifting is provided with the furnace chamber
Device, lowering or hoisting gear is fixed on lower flange, and the thermal-preservation thermal field and crucible are placed on the lowering or hoisting gear.
3. the replaceable crystal pull stove of furnace chamber according to claim 1, it is characterized in that：The cavity is transparent cavity.
4. the replaceable crystal pull stove of furnace chamber according to claim 1, it is characterized in that：The cavity and upper flange plate and
Sealing device between lower flange, including be sleeved on the upper sealing ring on cavity top and be sleeved on the lower sealing of cavity bottom
Circle, upper sealing ring is pressed on upper flange plate by upper press ring, and lower seal is pressed on lower flange by lower pressure ring.
5. the replaceable crystal pull stove of furnace chamber according to claim 1, it is characterized in that：The upper flange plate and lower flange
Cooling cavity is provided with disk, is provided with upper flange plate and the upper flange cooling water inlet that connects of cooling cavity in it and upper
Flange coolant outlet, is provided with lower flange and cools down lower flange cooling water inlet and the lower flange cooling that cavity is connected with it
Water out.
6. the replaceable crystal pull stove of furnace chamber according to claim 1, it is characterized in that：The upper flange plate and lower flange
It is provided with disk and connects gas port, can made in vacuum state in cavity, or by controlling gas flow, is reached in furnace chamber in stream
Take offence atmosphere state.
7. the replaceable crystal pull stove of furnace chamber according to claim 1, it is characterized in that：It is provided with the upper flange plate
Video camera.
8. the replaceable crystal pull stove of furnace chamber according to claim 1, it is characterized in that：The upper flange plate and lower flange
The screwed hole being distributed in concentric circles is machined with disk.
9. the replaceable crystal pull stove of furnace chamber according to claim 1, it is characterized in that：The upper flange plate and lower flange
The locating slot being distributed in concentric circles is machined with disk.
10. the replaceable crystal pull stove of furnace chamber according to claim 1, it is characterized in that：The bottom of the lower flange
It is provided with shock-absorbing leg.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621223840.5U CN206188917U (en) | 2016-11-14 | 2016-11-14 | Removable crystal of furnace chamber is carried and is drawn stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621223840.5U CN206188917U (en) | 2016-11-14 | 2016-11-14 | Removable crystal of furnace chamber is carried and is drawn stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206188917U true CN206188917U (en) | 2017-05-24 |
Family
ID=58735236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621223840.5U Active CN206188917U (en) | 2016-11-14 | 2016-11-14 | Removable crystal of furnace chamber is carried and is drawn stove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206188917U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435712A (en) * | 2016-11-14 | 2017-02-22 | 济南金曼顿自动化技术有限公司 | Crystal pulling furnace with replaceable furnace cavity |
| CN110344108A (en) * | 2019-08-21 | 2019-10-18 | 眉山博雅新材料有限公司 | Upper lifting vacuum drying oven |
| US11155930B2 (en) | 2019-08-21 | 2021-10-26 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
-
2016
- 2016-11-14 CN CN201621223840.5U patent/CN206188917U/en active Active
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435712A (en) * | 2016-11-14 | 2017-02-22 | 济南金曼顿自动化技术有限公司 | Crystal pulling furnace with replaceable furnace cavity |
| CN106435712B (en) * | 2016-11-14 | 2018-09-18 | 济南金曼顿自动化技术有限公司 | A kind of crystal pull stove that furnace chamber is replaceable |
| CN110344108A (en) * | 2019-08-21 | 2019-10-18 | 眉山博雅新材料有限公司 | Upper lifting vacuum drying oven |
| US11155930B2 (en) | 2019-08-21 | 2021-10-26 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
| US11198947B2 (en) | 2019-08-21 | 2021-12-14 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
| US11566343B2 (en) | 2019-08-21 | 2023-01-31 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
| US11566342B2 (en) | 2019-08-21 | 2023-01-31 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
| US11566341B2 (en) | 2019-08-21 | 2023-01-31 | Meishan Boya Advanced Materials Co., Ltd. | Open czochralski furnace for single crystal growth |
| US11572634B2 (en) | 2019-08-21 | 2023-02-07 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
| US11851782B2 (en) | 2019-08-21 | 2023-12-26 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
| US11851783B2 (en) | 2019-08-21 | 2023-12-26 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
| US11885037B2 (en) | 2019-08-21 | 2024-01-30 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
| US11982014B2 (en) | 2019-08-21 | 2024-05-14 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
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