CN105926038A - Sapphire crystal growth lifting device - Google Patents
Sapphire crystal growth lifting device Download PDFInfo
- Publication number
- CN105926038A CN105926038A CN201610347015.4A CN201610347015A CN105926038A CN 105926038 A CN105926038 A CN 105926038A CN 201610347015 A CN201610347015 A CN 201610347015A CN 105926038 A CN105926038 A CN 105926038A
- Authority
- CN
- China
- Prior art keywords
- seed rod
- magnetic fluid
- crystal growth
- ball screw
- slide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a sapphire crystal growth lifting device. The sapphire crystal growth lifting device is characterized in that a seed rod, a magnetic fluid sealing device, a bearing seat, a weighing sensor and a cross-shaped guide rail are included; the seed rod and the magnetic fluid sealing device are connected to the lower end of the weighing sensor through the bearing seat, the magnetic fluid sealing device is fixedly connected with the bearing seat, the seed rod penetrates through the magnetic fluid sealing device and the bearing seat, the cross-shaped guide rail is connected with the bearing seat, and the seed rod can be regulated in the X direction and the Y direction by regulating the cross-shaped guide rail. The movement precision of the seed rod can be effectively improved through the cross-shaped guide rail and the magnetic fluid sealing device, and then the product quality is improved.
Description
Technology is led
The present invention relates to a kind of sapphire crystal growth pulling apparatus.
Background technology
In current sapphire process units, seed rod uses O to seal with the sealing of other structure, and described O is easy to wear, and makes the quality of fit of two structures not, and the Product Precision finally making production is the highest.
Summary of the invention
Present invention is primarily targeted at a kind of sapphire crystal growth pulling apparatus of offer, in order to solve the problems referred to above.
For reaching object above, the technical solution used in the present invention is: a kind of sapphire crystal growth pulling apparatus includes seed rod, device for sealing magnetic fluid, bearing block, LOAD CELLS, cross guide rail, seed rod, device for sealing magnetic fluid are connected to the lower end of LOAD CELLS through bearing block, device for sealing magnetic fluid is fixedly connected with the bearing seat, seed rod passes device for sealing magnetic fluid and bearing block, cross guide rail is connected with bearing block, can adjust seed rod in XY direction by adjusting cross guide rail.
Further, this device also includes slide, ball screw and column, described ball screw and column through slide and are parallel to each other, and ball screw is in order to drive slide to move up and down and then to drive seed rod to move up and down, and described column makes slide to move up and down together with ball screw.
Further, this device also includes that pedestal, described ball screw and column are arranged on pedestal, is provided with upper limit position switch and lower position switch on pedestal, is provided with upper limit collision block and lower limit collision block on slide.
Further, described seed rod upper end uses stainless steel, and lower end uses red copper material, and top and bottom use sealing welding technique for extra to weld together.
Beneficial effects of the present invention: owing to have employed cross guide rail and device for sealing magnetic fluid so that the running precision of seed rod increases substantially, and is effectively improved product quality；Seed rod have employed special welding procedure so that seed rod will not leak.
Accompanying drawing explanation
Fig. 1 is the front view of the present invention
The right view of present invention during Fig. 2.
Detailed description of the invention
Hereinafter describe and be used for disclosing the present invention so that those skilled in the art are capable of the present invention.Preferred embodiment in below describing is only used as citing, it may occur to persons skilled in the art that other obvious modification.
This device includes seed rod 1, corrugated tube 2, device for sealing magnetic fluid 3, bearing block 4, cross guide rail 5, LOAD CELLS 6, servomotor 11, reducer of turbodrill 10, Timing Belt 9, rotating water joint 8, seed rod 1, corrugated tube 2, device for sealing magnetic fluid 3 are connected to the lower end of LOAD CELLS 6 through bearing block 4, rotating water joint 8, toothed belt transmission wheel 7 is arranged on the top of LOAD CELLS 6, servomotor 11 is connected with reducer of turbodrill 10, and reducer of turbodrill 10 drives toothed belt transmission wheel 7 rotation by Timing Belt 9.This device also includes cantilever 12, cantilever 12 one end is connected with bearing block 4, the other end is connected with slide 26, ball screw 14 and column 13 it is equipped with respectively in slide 26, ball screw 14 is parallel to each other with column 13, the upper end of ball screw 14 connects reducer of turbodrill 19, motor 20 drives turbine sensor 19 to rotate by Timing Belt, and rotary encoder 21 is installed on ball screw 14 for detecting the anglec of rotation of ball screw 14, motor 20 rotates through reducer of turbodrill 19 and ball screw 14 can be driven to rotate, and then make slide 26 can move up and down along column 13.Column 13 and ball screw 16 are arranged on pedestal 27.Pedestal 27 is provided with upper limit position switch 15 and lower position switch 17, slide 26 is provided with upper limit collision block 16 and lower limit collision block 18, when upper limit collision block 16 encounters upper limit position switch 15, the power supply of motor 20 is disconnected, slide 26 stops moving upward, when lower limit collision block 18 encounters lower position switch 17, the power supply of motor 20 is disconnected, and slide 26 stops moving downward.The drive seed rod 1 that moves up and down of slide 26 moves up and down.High-precision cross guide rail 5 can move in horizontal plane (XY direction), and then seed rod 1 can be driven to move inward in XY side by bearing block.
This device also has small furnace cover and promotes crank 22, raised position lock screw 23 and dial gauge 24, when burst power-off, crank 22 hand hoisting seed rod 1 can be promoted by small furnace cover, and raised position lock screw 23 can be used when reaching the position wanting to promote to be fixed small furnace cover and promote crank 22, dial gauge 24 is for accurately controlling the height of hand hoisting.
This device also includes temperature sensor 25.
Described seed rod 1 is divided into upper and lower two ends, upper end is made up of special rustless steel, lower end uses red copper 11, top and bottom use sealing welding technique for extra, rotate while welding, make welding uniform, seamless, without fracture, will not produce bubble and crack problem, and then make seed rod will not rupture when carrying out water circulation to leak.
The ultimate principle of the present invention, principal character and advantages of the present invention have more than been shown and described.Skilled person will appreciate that of the industry; the present invention is not restricted to the described embodiments; the principle of the simply present invention described in above-described embodiment and description; the present invention also has various changes and modifications without departing from the spirit and scope of the present invention, and these changes and improvements both fall within the range of claimed invention.The protection domain of application claims is defined by appending claims and equivalent thereof.
Claims (4)
1. a sapphire crystal growth pulling apparatus, it is characterized in that, including seed rod, device for sealing magnetic fluid, bearing block, LOAD CELLS, cross guide rail, seed rod, device for sealing magnetic fluid are connected to the lower end of LOAD CELLS through bearing block, device for sealing magnetic fluid is fixedly connected with the bearing seat, seed rod passes device for sealing magnetic fluid and bearing block, and cross guide rail is connected with bearing block, can adjust seed rod in XY direction by adjusting cross guide rail.
A kind of sapphire crystal growth pulling apparatus the most according to claim 1, it is characterized in that, also include slide, ball screw and column, described ball screw and column through slide and are parallel to each other, ball screw is in order to drive slide to move up and down and then to drive seed rod to move up and down, and described column makes slide to move up and down together with ball screw.
A kind of sapphire crystal growth pulling apparatus the most according to claim 1, it is characterized in that, also include that pedestal, described ball screw and column are arranged on pedestal, pedestal is provided with upper limit position switch and lower position switch, slide is provided with upper limit collision block and lower limit collision block.
4. according to a kind of sapphire crystal growth pulling apparatus described in any one of claim 1-3, it is characterised in that described seed rod upper end uses stainless steel, lower end uses red copper material, and top and bottom use sealing welding technique for extra to weld together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610347015.4A CN105926038A (en) | 2016-05-24 | 2016-05-24 | Sapphire crystal growth lifting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610347015.4A CN105926038A (en) | 2016-05-24 | 2016-05-24 | Sapphire crystal growth lifting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105926038A true CN105926038A (en) | 2016-09-07 |
Family
ID=56841942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610347015.4A Pending CN105926038A (en) | 2016-05-24 | 2016-05-24 | Sapphire crystal growth lifting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105926038A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109306524A (en) * | 2018-11-21 | 2019-02-05 | 南京晶升能源设备有限公司 | The crystal equilibrium lifting device and method for improving of sapphire single-crystal furnace |
| CN110344108A (en) * | 2019-08-21 | 2019-10-18 | 眉山博雅新材料有限公司 | Upper lifting vacuum drying oven |
| CN110528071A (en) * | 2019-10-17 | 2019-12-03 | 山东大学 | A kind of crystal growing and pulling lifting device and its working method |
| CN111334854A (en) * | 2020-03-16 | 2020-06-26 | 上海汉虹精密机械有限公司 | Seed crystal rotary pulling device of semiconductor-grade monocrystalline silicon growth furnace |
| CN116949559A (en) * | 2023-09-18 | 2023-10-27 | 内蒙古晶环电子材料有限公司 | Sapphire crystal growth furnace |
| CN116949558A (en) * | 2023-09-18 | 2023-10-27 | 内蒙古晶环电子材料有限公司 | Sapphire lifting shaft and sapphire crystal growth furnace |
| CN117187944A (en) * | 2022-10-25 | 2023-12-08 | 浙江晶盛机电股份有限公司 | Adjusting mechanism and single crystal furnace |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102677159A (en) * | 2012-05-22 | 2012-09-19 | 无锡力汇光电科技有限公司 | Water-cooling seed rod heat exchange device of crystal growth furnace |
| CN202989343U (en) * | 2012-10-31 | 2013-06-12 | 浙江露笑光电有限公司 | Sapphire single crystal pulling device |
| CN104562202A (en) * | 2015-01-28 | 2015-04-29 | 杭州晶一智能科技有限公司 | Crystal transformation mechanism for sapphire crystal growth equipment |
| CN205774930U (en) * | 2016-05-24 | 2016-12-07 | 上海申骅机电设备制造有限公司 | A kind of sapphire crystal growth pulling apparatus |
-
2016
- 2016-05-24 CN CN201610347015.4A patent/CN105926038A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102677159A (en) * | 2012-05-22 | 2012-09-19 | 无锡力汇光电科技有限公司 | Water-cooling seed rod heat exchange device of crystal growth furnace |
| CN202989343U (en) * | 2012-10-31 | 2013-06-12 | 浙江露笑光电有限公司 | Sapphire single crystal pulling device |
| CN104562202A (en) * | 2015-01-28 | 2015-04-29 | 杭州晶一智能科技有限公司 | Crystal transformation mechanism for sapphire crystal growth equipment |
| CN205774930U (en) * | 2016-05-24 | 2016-12-07 | 上海申骅机电设备制造有限公司 | A kind of sapphire crystal growth pulling apparatus |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109306524A (en) * | 2018-11-21 | 2019-02-05 | 南京晶升能源设备有限公司 | The crystal equilibrium lifting device and method for improving of sapphire single-crystal furnace |
| CN110344108A (en) * | 2019-08-21 | 2019-10-18 | 眉山博雅新材料有限公司 | Upper lifting vacuum drying oven |
| CN110528071A (en) * | 2019-10-17 | 2019-12-03 | 山东大学 | A kind of crystal growing and pulling lifting device and its working method |
| CN111334854A (en) * | 2020-03-16 | 2020-06-26 | 上海汉虹精密机械有限公司 | Seed crystal rotary pulling device of semiconductor-grade monocrystalline silicon growth furnace |
| CN117187944A (en) * | 2022-10-25 | 2023-12-08 | 浙江晶盛机电股份有限公司 | Adjusting mechanism and single crystal furnace |
| CN117187944B (en) * | 2022-10-25 | 2024-04-19 | 浙江晶盛机电股份有限公司 | Adjusting mechanism and single crystal furnace |
| CN116949559A (en) * | 2023-09-18 | 2023-10-27 | 内蒙古晶环电子材料有限公司 | Sapphire crystal growth furnace |
| CN116949558A (en) * | 2023-09-18 | 2023-10-27 | 内蒙古晶环电子材料有限公司 | Sapphire lifting shaft and sapphire crystal growth furnace |
| CN116949558B (en) * | 2023-09-18 | 2024-02-13 | 内蒙古晶环电子材料有限公司 | Sapphire lifting shaft and sapphire crystal growth furnace |
| CN116949559B (en) * | 2023-09-18 | 2024-03-12 | 内蒙古晶环电子材料有限公司 | Sapphire crystal growth furnace |
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| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160907 |