CN111334854A - Seed crystal rotary pulling device of semiconductor-grade monocrystalline silicon growth furnace - Google Patents
Seed crystal rotary pulling device of semiconductor-grade monocrystalline silicon growth furnace Download PDFInfo
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- CN111334854A CN111334854A CN202010181761.7A CN202010181761A CN111334854A CN 111334854 A CN111334854 A CN 111334854A CN 202010181761 A CN202010181761 A CN 202010181761A CN 111334854 A CN111334854 A CN 111334854A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Crystallography & Structural Chemistry (AREA)
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a seed crystal rotating and pulling device of a semiconductor-grade monocrystalline silicon growth furnace, which comprises a base, a seed crystal rotating part, a lead slip ring, a fixed plate and an anti-rotating bracket, wherein the base is provided with a plurality of guide grooves; the seed crystal rotating part is arranged on the base and can rotate continuously in 360 degrees without limit; the rotating part of the lead slip ring is arranged on the seed crystal rotating part, and when the seed crystal rotating part rotates 360 degrees without limit continuously, the lead is connected to the rotating part to transmit power and signals; the fixed plate is fixedly arranged on the base, the bottom end of the anti-rotation support is fixedly arranged on the fixed plate, the other end of the anti-rotation support is arranged on the fixed part of the lead slip ring, and the fixed part of the lead slip ring is ensured not to rotate together with the rotating part of the lead slip ring; the seed crystal rotating and pulling device of the semiconductor-grade monocrystalline silicon growth furnace has the advantages that the seed crystal rotating system can realize slow, accurate and stable rotating motion of the seed crystal, and the seed crystal lifting system can realize slow, accurate and stable lifting motion of the seed crystal.
Description
Technical Field
The invention belongs to the technical field of semiconductor-grade monocrystalline silicon, and particularly relates to a seed crystal rotary pulling device of a semiconductor-grade monocrystalline silicon growth furnace.
Background
The seed crystal rotating and pulling device is an actuating mechanism for realizing the upward rotating and pulling of the seed crystal at a very slow speed, plays a key role in the growth process of monocrystalline silicon, and is core equipment of a monocrystalline silicon growth furnace. In a solar-grade and silicon-grade monocrystalline silicon growth furnace, the used seed crystal rotary pulling device has lower requirements on rotation, pulling precision and stability, and can not meet the use requirement of a semiconductor-grade monocrystalline silicon growth furnace.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a seed crystal rotary pulling device of a semiconductor-grade monocrystalline silicon growth furnace.
The technical scheme of the invention is as follows: the seed crystal rotating and pulling device of the semiconductor-grade monocrystalline silicon growth furnace comprises a base, a seed crystal rotating part, a lead slip ring, an anti-rotation support and a fixed plate;
the seed crystal rotating part is arranged on the base and can rotate continuously in 360 degrees without limit;
the rotating part of the lead slip ring is arranged on the seed crystal rotating part, and when the seed crystal rotating part rotates 360 degrees without limit continuously, the lead is connected to the rotating part to transmit power and signals;
the fixed plate is fixedly mounted on the base, the bottom end of the anti-rotation support is fixedly mounted on the fixed plate, the other end of the anti-rotation support is mounted on the fixed portion of the lead slip ring, and the fixed portion of the lead slip ring is prevented from rotating together with the rotating portion of the lead slip ring.
Further, the seed crystal rotating part comprises a rotating disk, a seed crystal cavity, a lifting magnetic fluid, a rotating magnetic fluid, a rope winding mechanism, a rope pressing group, a weighing mechanism, a seed crystal rope, a seed crystal chuck and a seed crystal;
the seed crystal cavity is arranged on the rotating part of the rotating magnetic fluid, the fixing part of the rotating magnetic fluid is arranged on the mounting substrate of the base, and the rotating part of the rotating magnetic fluid can rotate continuously in 360 degrees without limitation;
the rotating disc is arranged at the bottom of the seed crystal cavity and rotates along with the seed crystal cavity;
the rope winding mechanism, the rope pressing group and the weighing mechanism are arranged in the seed crystal cavity, a rotating shaft of the rope winding mechanism penetrates through a rotating part of the lifting magnetic fluid, a fixing part of the lifting magnetic fluid is arranged on the side surface of the seed crystal cavity, and the rotating part of the lifting magnetic fluid can rotate in 360 degrees without limitation;
one end of the seed crystal rope is fixed on the end face of the wire wheel of the rope winding mechanism, the other end of the seed crystal rope is fixed on the seed crystal chuck, and the seed crystal is installed on the seed crystal chuck; the seed crystal rope is wound in the wire wheel groove of the rope winding mechanism, and the seed crystal rope is pressed by the pressing rope group, so that the seed crystal rope is prevented from being separated from the wire wheel groove of the rope winding mechanism. The seed crystal rope is wound or scattered in the wire wheel groove of the rope winding mechanism by driving the rope winding mechanism to rotate, so that the seed crystal chuck and the seed crystal are lifted;
the seed crystal rope presses the weighing mechanism, and the crystal bar weighing can be realized through resultant force calculation.
Furthermore, the seed crystal rotating part also comprises a large multi-wedge belt wheel, the large multi-wedge belt wheel is fixed on the rotating part of the rotating magnetic fluid, and the large multi-wedge belt wheel can rotate under the driving of a rotating motor, a small multi-wedge belt wheel and a multi-wedge belt so as to drive the seed crystal cavity and the seed crystal to rotate; the motion transmission route is as follows: the rotary motor → the small poly wedge belt wheel → the poly wedge belt → the large poly wedge belt wheel → the rotary part of the rotary magnetic fluid → the seed crystal cavity → the rope winding mechanism → the seed crystal rope → the seed crystal chuck → the seed crystal.
Further, the seed crystal rotating part further comprises a speed reducer, a first coupling, a gearbox, a second coupling and a lifting motor;
the speed reducer, the gearbox and the lifting motor are fixedly arranged on the rotating disc, the second coupler is connected with the lifting motor and the gearbox, and the first coupler is connected with the gearbox and the speed reducer;
a rotating shaft of the rope winding mechanism penetrates through the rotating part of the lifting magnetic fluid and is inserted into the speed reducer; the lifting motor transmits power to the rope winding mechanism through a transmission path to enable the rope winding mechanism to rotate; the power transmission path is as follows: lifting motor → second coupling → gear box → first coupling → reducer → rotary part of lifting magnetic fluid → rope winding mechanism.
Further, the seed crystal rotating part further comprises a stroke limiting mechanism and a synchronous belt; the stroke limiting mechanism is arranged on the rotating disc and is linked with the rope winding mechanism through a synchronous belt, and the stroke limiting mechanism is provided with an upper limit, a lower limit and an original point position for limiting the lifting height of the seed crystal. So as to ensure that the seed crystal does not overshoot in the lifting process.
Further, the seed crystal rotating portion further includes a weight; the counter weight is installed on the rotating disk, and the gravity center of the seed crystal rotating part is coincided with the rotating axis by adjusting the position of the counter weight. Achieving static balance and realizing the stability of the seed crystal during rotation.
Further, the base comprises a furnace barrel top plate, a support column, a corrugated pipe, a rotary motor, a mounting base plate, a small multi-wedge belt wheel and a multi-wedge belt;
the supporting column is installed on the top plate of the furnace barrel, the installation substrate is horizontally installed on the supporting column, the rotary motor is fixedly installed on the installation substrate, and the small multi-wedge belt wheel is installed at the shaft end of the rotary motor; the corrugated pipe is arranged on the top plate of the furnace barrel;
the rotary motor drives the small multi-wedge belt wheel, the large multi-wedge belt wheel is driven to rotate by the multi-wedge belt, and the large multi-wedge belt wheel is fixed on the rotating part of the rotary magnetic fluid and drives the seed crystal rotating part to rotate, so that the seed crystal is driven to rotate.
Further, the mounting substrate is mounted on the supporting column through an adjusting bolt. The level of the mounting substrate can be adjusted by adjusting the height position of the adjusting bolt.
The invention has the beneficial effects that:
1. the power transmission path of the lifting motor is as follows: lifting motor → second coupling → gear box → first coupling → reducer → rotary part of lifting magnetic fluid → rope winding mechanism. The seed crystal rope is wound or scattered in the wire wheel groove of the rope winding mechanism by driving the rope winding mechanism to rotate, so that the seed crystal chuck and the seed crystal can slowly, accurately and stably move up and down;
2. the rotary motor drives the small multi-wedge belt wheel, the large multi-wedge belt wheel is driven to rotate through the multi-wedge belt, and the large multi-wedge belt wheel is fixed on the rotating part of the rotary magnetic fluid and drives the seed crystal rotating part to rotate, so that slow, accurate and stable rotary motion of the seed crystal is realized. The transmission route of the rotary motor motion is as follows: the rotary motor → the small poly wedge belt wheel → the poly wedge belt → the large poly wedge belt wheel → the rotary part of the rotary magnetic fluid → the seed crystal cavity → the rope winding mechanism → the seed crystal rope → the seed crystal chuck → the seed crystal;
3. the fixed part of the lifting magnetic fluid is arranged on the side surface of the seed crystal cavity, and the rotating part is connected with the rotating shaft of the rope winding mechanism, so that when the rope winding mechanism is driven to rotate, the seed crystal cavity is isolated from the external environment, and the vacuum state in the seed crystal cavity is ensured;
4. the fixed end of the rotary magnetic fluid is installed on the installation substrate of the base, the rotating part is installed on the seed crystal cavity, one end of the corrugated pipe is installed on the top plate of the furnace barrel, the other end of the corrugated pipe is installed on the fixing part of the rotary magnetic fluid, when the seed crystal rotating part rotates, the seed crystal cavity is isolated from the external environment, the pressure in the seed crystal cavity and the pressure in the single crystal furnace cavity are consistent, and the pressure is in a vacuum state.
5. The gravity center of the seed crystal rotating part is coincided with the rotating axis by adjusting the position of the balance weight, so that static balance is achieved, and the stability of the seed crystal during rotation is realized;
6. the weighing mechanism is arranged, so that the weighing precision is high, the weighing is stable, and the structure is simple;
7. the seed crystal chuck is provided with a stroke limiting mechanism which is provided with an upper limit, a lower limit and an original point position so as to ensure that the seed crystal chuck does not overshoot in the lifting process;
8. a wire slip ring is used to couple the wire to the rotating member for power and signal transmission during 360-degree unlimited continuous rotation of the seed crystal rotating member.
Drawings
FIG. 1 is a schematic view of the whole structure of a seed crystal rotary pulling device of a semiconductor-grade monocrystalline silicon growth furnace;
FIG. 2 is a schematic view of a seed crystal rotation section;
FIG. 3 is a schematic view of a base structure;
FIG. 4 is a top view of a seed crystal rotary pulling device of a semiconductor-grade monocrystalline silicon growth furnace;
fig. 5 is a sectional view taken along the line a-a in fig. 4.
FIG. 6 is a sectional view of the string winding mechanism in the seed crystal chamber.
In the figure: the device comprises a base 1, a seed crystal rotating part 2, a lead slip ring 3, a rotation-preventing support 4, a fixing plate 5, a rotating disc 6, a seed crystal cavity 7, a stroke limiting mechanism 8, a synchronous belt 9, a lifting magnetic fluid 10, a speed reducer 11, a first coupler 12, a gearbox 13, a second coupler 14, a lifting motor 15, a counterweight 16, a furnace barrel top plate 17, a supporting column 18, a corrugated pipe 19, a rotating motor 20, a mounting base plate 21, an adjusting bolt 22, a small multi-wedge belt wheel 23, a multi-wedge belt 24, a large multi-wedge belt wheel 25, a rotating magnetic fluid 26, a rope winding mechanism 27, a rope pressing group 28, a weighing mechanism 29, a seed crystal rope 30, a seed crystal chuck 31, a seed crystal 32, a rotating shaft 33.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
As shown in figure 1, the seed crystal rotary pulling device of the semiconductor grade monocrystalline silicon growth furnace mainly comprises a base 1 as shown in figure 3, a seed crystal rotating part 2 as shown in figure 2, a lead slip ring 3, an anti-rotation support 4 and a fixed plate 5. The seed crystal rotating part 2 is arranged on the base 1 and can rotate continuously in 360 degrees without limit; the rotating part of the lead slip ring 3 is arranged on the seed crystal rotating part 2, and when the seed crystal rotating part rotates 360 degrees without limit continuously, the lead is connected to the rotating part to transmit power and signals; fixed plate 5 fixed mounting is on base 1, prevents 4 bottom fixed mounting of commentaries on classics support on fixed plate 5, and the other end is installed on the fixed part of wire sliding ring 3, ensures that the fixed part of wire sliding ring 3 can not rotate along with the rotating part of wire sliding ring 3.
As shown in fig. 5, the base 1 is mainly composed of a furnace tube top plate 17, a support column 18, a corrugated tube 19, a rotary motor 20, a mounting base plate 21, an adjusting bolt 22, a small multi-wedge pulley 23, a multi-wedge belt 24 and the like. The supporting column 18 is installed on the furnace tube top plate 17, the installation base plate 21 is installed on the supporting column 18 through an adjusting bolt 22, and the level of the installation base plate 21 can be adjusted by adjusting the height position of the adjusting bolt 22. The rotary motor 20 is fixedly mounted on the mounting base plate 21, and the small multi-wedge pulley 23 is mounted at the shaft end of the rotary motor 20. One end of the corrugated pipe 19 is arranged on the furnace tube top plate 17, and the other end is arranged on the fixed part of the rotary magnetic fluid 26.
The rotary motor 20 drives the small poly-wedge belt wheel 23, and drives the large poly-wedge belt wheel 25 to rotate through the poly-wedge belt 24, and most of the poly-wedge belt wheels 25 are fixed on the rotating part of the rotating magnetic fluid 26 to drive the seed crystal rotating part 2 to rotate, thereby realizing the rotating motion of the seed crystal 32.
As shown in fig. 4 and 5, the seed crystal rotating part 2 mainly comprises a rotating disk 6, a seed crystal cavity 7, a stroke limiting mechanism 8, a synchronous belt 9, a lifting magnetic fluid 10, a speed reducer 11, a coupler a12, a gear box 13, a coupler b14, a lifting motor 15, a counterweight 16, a large multi-wedge belt wheel 25, a rotating magnetic fluid 26, a rope winding mechanism 27, a rope pressing group 28, a weighing mechanism 29, a seed crystal rope 30, a seed crystal chuck 31, a seed crystal 32 and the like.
The seed crystal cavity 7 is arranged on a rotating part of the rotating magnetic fluid 26, the rotating disk 6 is arranged at the bottom of the seed crystal cavity 7, the lifting motor 15, the gearbox 13 and the speed reducer 11 are fixedly arranged on the rotating disk 6, the coupler b14 is connected with the lifting motor 15 and the gearbox 13, and the coupler a12 is connected with the gearbox 13 and the speed reducer 11. The rope winding mechanism 27, the rope pressing group 28 and the weighing mechanism 29 are arranged inside the seed crystal cavity 7, and a rotating shaft 33 of the rope winding mechanism 27 penetrates through the rotating part of the lifting magnetic fluid 10 and is inserted into the speed reducer 11; the lifting motor 15 transmits power to the rope winding mechanism 27 through a transmission path, and rotates the rope winding mechanism 27. The power transmission path is as follows: lifting motor 15 → second coupling 14 → transmission case 13 → first coupling 12 → reducer 11 → rotary part of lifting magnetic fluid 10 → rope winding mechanism 27.
One end of the seed crystal rope 30 is fixed on the end surface of the wire wheel 34 of the rope winding mechanism 27, the other end is fixed on the seed crystal holder 31, and the seed crystal 32 is arranged on the seed crystal holder 31. The seed crystal rope 30 is wound in the groove of the wire wheel 34 of the rope winding mechanism 27, and the rope pressing group 28 presses the seed crystal rope 30 to prevent the seed crystal rope 30 from being separated from the wire wheel groove of the rope winding mechanism 27. The seed crystal string 30 is wound or unwound in the groove of the reel 34 of the string winding mechanism 27 by driving the string winding mechanism 27 to rotate, thereby realizing the elevating movement of the seed chuck 31 and the seed crystal 32.
The seed crystal rope 30 presses the weighing mechanism 29, and the weighing function of the crystal bar can be realized through resultant force calculation.
The stroke limiting mechanism 8 is arranged on the rotating disc 6 and is linked with the rope winding mechanism 27 through a synchronous belt 9, and the stroke limiting mechanism 8 is provided with an upper limiting position, a lower limiting position and an original position so as to ensure that the seed crystal 32 does not overshoot in the lifting process.
The balance weight 16 is arranged on the rotating disk 6, and the gravity center of the seed crystal rotating part 2 is overlapped with the rotating axis by adjusting the position of the balance weight 16, so that static balance is achieved, and the stability of the seed crystal during rotation is realized.
The magnetic fluid sealing transmission device is a partial solution for transmitting the rotary motion into a vacuum container, and is also suitable for other occasions with high requirements on gas environment. The magnetic fluid sealing transmission device avoids gas and pollution. The fixed part of the lifting magnetic fluid 10 is arranged on the side surface of the seed crystal cavity 7, and the rotating part is connected with the rope winding mechanism 27, so that when the rope winding mechanism is driven to rotate, the seed crystal cavity is isolated from the external environment, and the vacuum state in the seed crystal cavity is ensured; the fixed end of the rotary magnetic fluid 26 is arranged on the mounting base plate 21 of the base 1, the rotary part is arranged on the seed crystal cavity 7, the bellows 19 is connected with the fixed end of the rotary magnetic fluid 26 and the furnace barrel top plate 17, when the seed crystal rotary part 2 rotates, the seed crystal cavity is isolated from the external environment, the pressure in the seed crystal cavity is consistent with that in the single crystal furnace cavity, and the seed crystal cavity is in a vacuum state.
During operation, the rotary motor 20 and the lifting motor 15 are started, and the power transmission path of the lifting motor is as follows: lifting motor 15 → second coupling 14 → transmission case 13 → first coupling 12 → reducer 11 → rotary part of lifting magnetic fluid 10 → rope winding mechanism 27. The seed crystal string 30 is wound or unwound in the groove of the reel 34 of the string winding mechanism 27 by driving the string winding mechanism 27 to rotate, thereby realizing the elevating movement of the seed chuck 31 and the seed crystal 32. The rotary motor 20 drives the small poly-wedge belt wheel 23, and drives the large poly-wedge belt wheel 25 to rotate through the poly-wedge belt 24, and most of the poly-wedge belt wheels 25 are fixed on the rotating part of the rotating magnetic fluid 26 to drive the seed crystal rotating part 2 to rotate, thereby realizing the rotating motion of the seed crystal 32. The transmission route of the rotary motor motion is as follows: the rotary motor → the small poly wedge belt wheel → the poly wedge belt → the large poly wedge belt wheel → the rotary part of the rotary magnetic fluid → the seed crystal cavity → the rope winding mechanism → the seed crystal rope → the seed crystal chuck → the seed crystal.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (8)
1. Rotatory pulling device of semiconductor level monocrystalline silicon growth furnace seed crystal, its characterized in that: comprises a base (1), a seed crystal rotating part (2), a lead slip ring (3), an anti-rotation bracket (4) and a fixed plate (5);
the seed crystal rotating part (2) is arranged on the base (1) and can rotate continuously in 360 degrees without limit;
the rotating part of the lead slip ring (3) is arranged on the seed crystal rotating part (2), and when the seed crystal rotating part (2) rotates continuously in 360 degrees without limit, the lead is connected to the rotating part to transmit power and signals;
fixed plate (5) fixed mounting is on base (1), prevents changeing support (4) bottom fixed mounting on fixed plate (5), and the other end is installed on the fixed part of wire sliding ring (3), ensures that the fixed part of wire sliding ring (3) can not rotate along with the rotating part of wire sliding ring (3).
2. The seed crystal rotary pulling device of the semiconductor-grade monocrystalline silicon growth furnace of claim 1, characterized in that: the seed crystal rotating part (2) comprises a rotating disk (6), a seed crystal cavity (7), a lifting magnetic fluid (10), a rotating magnetic fluid (26), a rope winding mechanism (27), a rope pressing group (28), a weighing mechanism (29), a seed crystal rope (30), a seed crystal chuck (31) and a seed crystal (32);
the seed crystal cavity (7) is arranged on a rotating part of the rotating magnetofluid (26), a fixing part of the rotating magnetofluid (26) is arranged on an installation substrate (21) of the base (1), and the rotating part of the rotating magnetofluid (26) can rotate continuously in 360 degrees without limit;
the rotating disc (6) is arranged at the bottom of the seed crystal cavity (7) and rotates along with the seed crystal cavity (7);
the rope winding mechanism (27), the rope pressing group (28) and the weighing mechanism (29) are arranged inside the seed crystal cavity (7), a rotating shaft (33) of the rope winding mechanism (27) penetrates through a rotating part of the lifting magnetic fluid (10), a fixing part of the lifting magnetic fluid (10) is arranged on the side surface of the seed crystal cavity (7), and the rotating part of the lifting magnetic fluid (10) can rotate in 360 degrees without limit;
one end of the seed crystal rope (30) is fixed on the end surface of a wire wheel (34) of the rope winding mechanism (27), the other end of the seed crystal rope is fixed on the seed crystal chuck (31), and the seed crystal (32) is arranged on the seed crystal chuck (31); the seed crystal rope (30) is wound in a groove of a wire wheel (34) of the wire winding mechanism (27), the seed crystal rope (30) is pressed by the rope pressing group (28), and the seed crystal rope (30) is wound or scattered in the groove of the wire wheel (34) of the wire winding mechanism (27) by driving the wire winding mechanism (27) to rotate, so that the seed crystal chuck (31) and the seed crystal (32) are lifted and lowered;
the seed crystal rope (30) presses the weighing mechanism (29), and the crystal bar weighing can be realized through resultant force calculation.
3. The seed crystal rotary pulling device of the semiconductor-grade monocrystalline silicon growth furnace of claim 2, characterized in that: the seed crystal rotating part (2) further comprises a large multi-wedge belt wheel (25), the large multi-wedge belt wheel (25) is fixed on the rotating part of the rotating magnetic fluid (26), and the large multi-wedge belt wheel (25) can be driven by the rotating motor (20), the small multi-wedge belt wheel (23) and the multi-wedge belt (24) to rotate so as to drive the seed crystal cavity (7) and the seed crystal (32) to rotate; the motion transmission route is as follows: the rotary motor → the small poly wedge belt wheel → the poly wedge belt → the large poly wedge belt wheel → the rotary part of the rotary magnetic fluid → the seed crystal cavity → the rope winding mechanism → the seed crystal rope → the seed crystal chuck → the seed crystal.
4. The seed crystal rotary pulling device of the semiconductor-grade monocrystalline silicon growth furnace of claim 2, characterized in that: the seed crystal rotating part (2) further comprises a speed reducer (11), a first coupling (12), a gearbox (13), a second coupling (14) and a lifting motor (15);
the speed changer (11), the gearbox (13) and the lifting motor (15) are fixedly arranged on the rotating disc (6), the second coupler (14) is connected with the lifting motor (15) and the gearbox (13), and the first coupler (12) is connected with the gearbox (13) and the speed reducer (11);
a rotating shaft (33) of the rope winding mechanism (27) penetrates through a rotating part of the lifting magnetic fluid (10) and is inserted into the speed reducer (11); the lifting motor (15) transmits power to the rope winding mechanism (27) through the transmission path, so that the rope winding mechanism (27) rotates; the power transmission path is as follows: the elevating motor (15) → the second coupling (14) → the transmission (13) → the first coupling (12) → the speed reducer (11) → the rotating portion of the elevating magnetic fluid (10) → the rope winding mechanism (27).
5. The seed crystal rotary pulling device of the semiconductor-grade monocrystalline silicon growth furnace of claim 2, characterized in that: the seed crystal rotating part (2) further comprises a stroke limiting mechanism (8) and a synchronous belt (9); the stroke limiting mechanism (8) is installed on the rotating disk (6) and is linked with the rope winding mechanism (27) through a synchronous belt (9), and the stroke limiting mechanism (8) is provided with an upper limiting position, a lower limiting position and an original point position which are used for limiting the lifting height of the seed crystal.
6. The seed crystal rotary pulling device of the semiconductor-grade monocrystalline silicon growth furnace of claim 2, characterized in that: the seed crystal rotating part (2) further comprises a counterweight (16); the counterweight (16) is mounted on the rotating disk (6), and the center of gravity of the seed crystal rotating part (2) is coincident with the rotation axis by adjusting the position of the counterweight (16).
7. The seed crystal rotary pulling device of the semiconductor-grade monocrystalline silicon growth furnace of claim 1, characterized in that: the base (1) comprises a furnace barrel top plate (17), a support column (18), a corrugated pipe (19), a rotary motor (20), a mounting base plate (21), a small multi-wedge belt wheel (23) and a multi-wedge belt (24);
the supporting column (18) is installed on the top plate (17) of the furnace barrel, the installation base plate (21) is horizontally installed on the supporting column (18), the rotary motor (20) is fixedly installed on the installation base plate (21), and the small multi-wedge belt wheel (23) is installed at the shaft end of the rotary motor (20); the corrugated pipe (19) is arranged on the furnace barrel top plate (17);
the rotary motor (20) drives the small multi-wedge belt wheel (23), the large multi-wedge belt wheel (25) is driven to rotate through the multi-wedge belt (24), the large multi-wedge belt wheel (25) is fixed on the rotating part of the rotary magnetic fluid (26) and drives the seed crystal rotating part (2) to rotate, and therefore the seed crystal (32) is driven to rotate.
8. The seed crystal rotary pulling device of the semiconductor-grade monocrystalline silicon growth furnace of claim 7, characterized in that: the mounting base plate (21) is mounted on the supporting column (18) through an adjusting bolt (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010181761.7A CN111334854A (en) | 2020-03-16 | 2020-03-16 | Seed crystal rotary pulling device of semiconductor-grade monocrystalline silicon growth furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010181761.7A CN111334854A (en) | 2020-03-16 | 2020-03-16 | Seed crystal rotary pulling device of semiconductor-grade monocrystalline silicon growth furnace |
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| CN111334854A true CN111334854A (en) | 2020-06-26 |
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| CN202010181761.7A Pending CN111334854A (en) | 2020-03-16 | 2020-03-16 | Seed crystal rotary pulling device of semiconductor-grade monocrystalline silicon growth furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114836819A (en) * | 2022-03-29 | 2022-08-02 | 徐州鑫晶半导体科技有限公司 | Seed crystal pulling device and crystal growth equipment |
| CN114959883A (en) * | 2022-05-17 | 2022-08-30 | 上海汉虹精密机械有限公司 | Seed crystal pulling mechanism of semiconductor silicon single crystal furnace |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114836819A (en) * | 2022-03-29 | 2022-08-02 | 徐州鑫晶半导体科技有限公司 | Seed crystal pulling device and crystal growth equipment |
| CN114836819B (en) * | 2022-03-29 | 2023-06-13 | 中环领先(徐州)半导体材料有限公司 | Seed crystal pulling device and crystal growth equipment |
| TWI845232B (en) * | 2022-03-29 | 2024-06-11 | 中國大陸商中環領先半導體科技股份有限公司 | Seed crystal pulling device and crystal growth equipment |
| CN114959883A (en) * | 2022-05-17 | 2022-08-30 | 上海汉虹精密机械有限公司 | Seed crystal pulling mechanism of semiconductor silicon single crystal furnace |
| CN114959883B (en) * | 2022-05-17 | 2024-02-06 | 上海汉虹精密机械有限公司 | Seed crystal lifting mechanism of semiconductor silicon single crystal furnace |
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Application publication date: 20200626 |