CN101070609A - Crystal rotating mechanism for artificial crystal growth - Google Patents
Crystal rotating mechanism for artificial crystal growth Download PDFInfo
- Publication number
- CN101070609A CN101070609A CN 200610040115 CN200610040115A CN101070609A CN 101070609 A CN101070609 A CN 101070609A CN 200610040115 CN200610040115 CN 200610040115 CN 200610040115 A CN200610040115 A CN 200610040115A CN 101070609 A CN101070609 A CN 101070609A
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- Prior art keywords
- crystal growth
- turning axle
- crystal
- artificial
- brush ring
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Abstract
The invention relates to a crystal rotary apparatus for artificial crystal growth, and specially relates to crystal rotary apparatus for semiconductor silicon single crystal growth and germanium single crystal growth. Electronics brush loop which transmits signal is installed upside axial bearing, and centering sleeve is installed upside the axis of revolution. So the backing out part of axis of revolution is very long, and revolving stationarity is bad. Moreover, since centering sleeve is installed upside the axis of revolution, its installation and renewal is extremely inconvenient. Install hoisting mechanism to upper end of hollow rotation axis of this invention, and make steel wire rope flexible axle through the center bore of hollow rotation axis. Pass through center bore of centering sleeve which is installed at bottom of axis of revolution to raise and pull artificial crystal growth. Enhance the stability of rotary motion in the artificial crystal growth and reliability, and it is convenient to install and maintenance. It can be widely used in crystal raising and pulling growth motion of all kinds of artificial crystal growth equipment.
Description
Affiliated technical field
The present invention relates to a kind of crystal revolving gear for artificial crystal growth, particularly the crystal rotating mechanism that semiconductor silicon single crystal is grown and Ge mono crystal growth is used.
Background technology
Crystal revolving gear for artificial crystal growth is the top that the brush ring of undertaking the signal transmission is installed in steady bearing in the prior art, and centring sleeve is installed in the top of turning axle, makes that like this back-out part of turning axle is longer, and smooth rotation is poor.In addition, the centring sleeve top that is installed in turning axle install to change very inconvenient.
Goal of the invention
Defective at above-mentioned prior art existence, it is a kind of simple in structure, easy to use that goal of the invention of the present invention is to provide, the outstanding effect crystal revolving gear for artificial crystal growth, with stability, the reliability of raising artificial crystal growth, and be easy to install and maintain.
Technology contents
Crystal revolving gear for artificial crystal growth of the present invention, comprise that turning axle (5) is by bearing support 12, gland (11), screw nut (6), bearing (7), bearing (14) and set screw nut (15) are installed on the pedestal (1), the brush ring (4) that plays the signal transmitting effect is fixed on the turning axle (5) by holding screw (13), and between two steady bearings, wedge shape belt wheel (9) is by key (10) driven rotary axle (5) rotation, turning axle (5) is provided with trough (8), the output line of brush ring (4) passes the top that trough (8) is guided to turning axle (5), so that the control components and parts.A perforate (3) is arranged on the pedestal (1), install and outlet with convenient.The shift fork (2) that is installed on the pedestal (1) contacts with the ring (outer shroud) of deciding of brush ring (4), so that make the input line relative fixed of brush ring.Because driven rotary of the present invention is the steel cable flexible axle, therefore, a centring sleeve (16) is installed in the lower end of turning axle (5), guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
Beneficial effect
Innovation part of the present invention has been that the brush ring (4) of signal transmitting effect is fixed on the turning axle (5) by holding screw (13), and between two steady bearings, shortened the back-out part of turning axle, a centring sleeve (16) is installed in lower end at turning axle (5), guarantee steel-wire flexible-shaft to neutrality, thereby improve the stationarity rotatablely move.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is specific embodiments of the invention.
In the accompanying drawing, the 1st, pedestal, 2 are mounted in the shift fork on the pedestal (1), a perforate on 3 pedestals (1), the 4th, brush ring, the 5th, turning axle, the 6th, screw nut, the 7th, bearing, the 8th, trough, the 9th, the wedge shape belt wheel, the 10th, by key, the 11st, gland, the 12nd, bearing support, the 13rd, screw, the 14th, bearing, the 15th, set screw nut, the 16th, centring sleeve.
Referring to shown in Figure 1, comprise rotating shaft (5) by bearing block (12), gland (11), screw nut (6), bearing (7), bearing (14) and hold-down nut (15) are installed on the pedestal (1) a signal biography The brush ring (4) of defeated effect is fixed on the rotating shaft (5) by holding screw (13), and two Between the individual spring bearing, wedge shape belt wheel (9) is by key (10) driven rotary axle (5) rotation, rotating shaft (5) be provided with trough (8) on, the output line of brush ring (4) passes trough (8) and guides to rotating shaft (5) top is so that the electric control system on control top. A perforate (3) is arranged on the pedestal (1), Install and outlet with convenient. The shift fork (2) that is installed on the pedestal (1) is (outer with the fixed ring of brush ring (4) Ring) contact is in order to make the input line of brush ring relatively fixing. Because driven rotary of the present invention is a steel Therefore silk rope flexible axle, installs a centring sleeve (16) in the lower end of rotating shaft (5), guarantees that steel wire rope is soft The centering of axle improves the stationarity that rotatablely moves.
Embodiment
Accompanying drawing 2 is specific embodiments of the invention;
Below in conjunction with accompanying drawing content of the present invention is described further:
Referring to shown in Figure 2, the elevator lifting mechanism is installed in the upper end of hollow core turning axle of the present invention (5), the output line of brush ring (4) is connected with the electric control system on top, steel-wire flexible-shaft passes the centre hole pulling growth artificial lens of centring sleeve (16) by the centre hole of hollow rotary shaft (5).Hollow rotary shaft (5) is by bearing support (12), gland (11), screw nut (6), bearing (7), bearing (14) and set screw nut (15) are installed on the pedestal (1), the brush ring (4) that plays the signal transmitting effect is fixed on the hollow rotary shaft (5) by holding screw (13), and between two steady bearings, wedge shape belt wheel (9) is by key (10) driven rotary axle (5) rotation, turning axle (5) is provided with trough (8), the output line of brush ring (4) passes the top that trough (8) is guided to hollow rotary shaft (5), is connected with the electric control system on top.A perforate (3) is arranged on the pedestal (1), install and outlet with convenient.The shift fork (2) that is installed on the pedestal (1) contacts with the ring (outer shroud) of deciding of brush ring (4), so that make the input line relative fixed of brush ring.Because driven rotary of the present invention is the steel cable flexible axle, therefore, a centring sleeve (16) is installed in the lower end of hollow rotary shaft (5), guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
The characteristics such as the present invention has simple in structure, and is easy to manufacture, easy to install, and working stability is reliable, The crystal that is widely used in all kinds of System Design of Crystal Growing Equipments lifts growing movement.
Claims (3)
1, a kind of crystal revolving gear for artificial crystal growth, form by turning axle etc., it is characterized in that turning axle (5) is by bearing support (12), gland (11), screw nut (6), bearing (7), bearing (14) and set screw nut (15) are installed on the pedestal (1), the brush ring (4) that plays the signal transmitting effect is fixed on the turning axle (5) by holding screw (13), and between two steady bearings, wedge shape belt wheel (9) is by key (10) driven rotary axle (5) rotation, turning axle (5) is provided with trough (8), the output line of brush ring (4) passes the top that trough (8) is guided to turning axle (5), so that the control components and parts.A perforate (3) is arranged on the pedestal (1), install and outlet with convenient.The shift fork (2) that is installed on the pedestal (1) contacts with the ring (outer shroud) of deciding of brush ring (4), so that make the input line relative fixed of brush ring.Because driven rotary of the present invention is the steel cable flexible axle, therefore, a centring sleeve (16) is installed in the lower end of turning axle (5), guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
2, crystal revolving gear for artificial crystal growth according to claim 1 is characterized in that the brush ring (4) of signal transmitting effect is fixed on the turning axle (5), and between two steady bearings.
3, crystal revolving gear for artificial crystal growth according to claim 1 and 2 is characterized in that in the lower end of turning axle (5) centring sleeve (16) being installed, guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610040115 CN101070609A (en) | 2006-05-08 | 2006-05-08 | Crystal rotating mechanism for artificial crystal growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610040115 CN101070609A (en) | 2006-05-08 | 2006-05-08 | Crystal rotating mechanism for artificial crystal growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101070609A true CN101070609A (en) | 2007-11-14 |
Family
ID=38898018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610040115 Pending CN101070609A (en) | 2006-05-08 | 2006-05-08 | Crystal rotating mechanism for artificial crystal growth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101070609A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101713097B (en) * | 2009-12-18 | 2011-10-05 | 江苏华盛天龙光电设备股份有限公司 | Automatic balancing compensation lifting device used for silicon single crystal growth |
| CN101532173B (en) * | 2009-04-09 | 2012-12-26 | 西安创联新能源设备有限公司 | Rope support mechanism of single crystal furnace |
| CN105624775A (en) * | 2014-10-29 | 2016-06-01 | 江苏拜尔特光电设备有限公司 | Novel combined damping sleeve |
-
2006
- 2006-05-08 CN CN 200610040115 patent/CN101070609A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101532173B (en) * | 2009-04-09 | 2012-12-26 | 西安创联新能源设备有限公司 | Rope support mechanism of single crystal furnace |
| CN101713097B (en) * | 2009-12-18 | 2011-10-05 | 江苏华盛天龙光电设备股份有限公司 | Automatic balancing compensation lifting device used for silicon single crystal growth |
| CN105624775A (en) * | 2014-10-29 | 2016-06-01 | 江苏拜尔特光电设备有限公司 | Novel combined damping sleeve |
| CN105624775B (en) * | 2014-10-29 | 2018-10-30 | 江苏拜尔特光电设备有限公司 | A kind of novel combination type damping sleeve |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |