CN101294299A - Crystal rotating mechanism for artificial crystal growth - Google Patents
Crystal rotating mechanism for artificial crystal growth Download PDFInfo
- Publication number
- CN101294299A CN101294299A CNA2007100215287A CN200710021528A CN101294299A CN 101294299 A CN101294299 A CN 101294299A CN A2007100215287 A CNA2007100215287 A CN A2007100215287A CN 200710021528 A CN200710021528 A CN 200710021528A CN 101294299 A CN101294299 A CN 101294299A
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- CN
- China
- Prior art keywords
- turning axle
- crystal growth
- crystal
- artificial
- brush ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 34
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 16
- 230000000694 effects Effects 0.000 claims description 7
- 210000004907 gland Anatomy 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 abstract description 4
- 239000010959 steel Substances 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 230000008054 signal transmission Effects 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- 229910052732 germanium Inorganic materials 0.000 abstract 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract 1
- 238000009434 installation Methods 0.000 abstract 1
- 238000012423 maintenance Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Images
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to a crystal rotating mechanism for artificial crystal growth, in particular to a crystal rotating mechanism for semiconductor silicon single crystal growth and germanium single crystal growth. Comprising a brush ring for signal transmission mounted in the middle of a support bearing. The hoisting and lifting mechanism is arranged at the upper end of the hollow rotating shaft, and the steel wire rope flexible shaft passes through the central hole of the hollow rotating shaft and the central hole of the centering sleeve arranged at the lower part of the rotating shaft to lift and grow the artificial lens. The stability and the reliability of the rotary motion in the artificial crystal growth are improved, the installation and the maintenance are convenient, and the device can be widely applied to the crystal pulling growth motion in various artificial crystal growth devices.
Description
Technical field
The present invention relates to a kind of crystal revolving gear for artificial crystal growth, particularly the crystal rotating mechanism that semiconductor silicon single crystal is grown and Ge mono crystal growth is used.
Background technology
Crystal revolving gear for artificial crystal growth is the top that the brush ring of undertaking the signal transmission is installed in steady bearing in the prior art, and centring sleeve is installed in the top of turning axle, makes that like this back-out part of turning axle is longer, and smooth rotation is poor.In addition, the centring sleeve top that is installed in turning axle install to change very inconvenient.
Goal of the invention
Defective at above-mentioned prior art existence, it is a kind of simple in structure, easy to use that goal of the invention of the present invention is to provide, the outstanding effect crystal revolving gear for artificial crystal growth, with stability, the reliability of raising artificial crystal growth, and be easy to install and maintain.
Technology contents
Crystal revolving gear for artificial crystal growth of the present invention, comprise turning axle 5 by bearing support 12, gland 11, screw nut 6, bearing 7, bearing 14 and set screw nut 15 and be installed on the pedestal 1, the brush ring 4 that plays the signal transmitting effect is fixed on the turning axle 5 by holding screw 13, and between two steady bearings, wedge shape belt wheel 9 is by 5 rotations of key 10 driven rotary axles, turning axle 5 is provided with trough 8, the output line of brush ring 4 passes the top that trough 8 is guided to turning axle 5, so that the control components and parts.A perforate 3 is arranged on the pedestal 1, install and outlet with convenient.The shift fork 2 that is installed on the pedestal 1 contacts with the ring (outer shroud) of deciding of brush ring 4, so that make the input line relative fixed of brush ring.Because driven rotary of the present invention is the steel cable flexible axle, therefore, a centring sleeve 16 is installed in the lower end of turning axle 5, guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
Innovation part of the present invention has been that the brush ring 4 of signal transmitting effect is fixed on the turning axle 5 by holding screw 13, and between two steady bearings, shortened the back-out part of turning axle, a centring sleeve 16 is installed in lower end at turning axle 5, guarantee steel-wire flexible-shaft to neutrality, thereby improve the stationarity rotatablely move.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is a specific embodiment synoptic diagram of the present invention;
1 is pedestal in the accompanying drawing, the 2nd, and shift fork, the 3rd, a perforate on the pedestal 1, the 4th, the brush ring, the 5th, turning axle, the 6th, screw nut, the 7th, bearing, the 8th, trough, the 9th, wedge shape belt wheel, the 10th, key, the 11st, gland, the 12nd, bearing support, the 13rd, holding screw, the 14th, bearing, the 15th, set screw nut, the 16th, centring sleeve.
Embodiment
Referring to shown in Figure 1, comprise that turning axle (5) is by bearing support (12), gland (11), screw nut (6), bearing (7), bearing (14) and set screw nut (15) are installed on the pedestal (1), the brush ring (4) that plays the signal transmitting effect is fixed on the turning axle (5) by holding screw (13), and between two steady bearings, wedge shape belt wheel (9) is by key (10) driven rotary axle (5) rotation, turning axle (5) is provided with trough (8), the output line of brush ring (4) passes the top that trough (8) is guided to turning axle (5), so that the electric control system on control top.A perforate (3) is arranged on the pedestal (1), install and outlet with convenient.The shift fork (2) that is installed on the pedestal (1) contacts with the ring (outer shroud) of deciding of brush ring (4), so that make the input line relative fixed of brush ring.Because driven rotary of the present invention is the steel cable flexible axle, therefore, a centring sleeve (16) is installed in the lower end of turning axle (5), guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
Below in conjunction with accompanying drawing content of the present invention is described further:
Referring to shown in Figure 2, the elevator lifting mechanism is installed in the upper end of hollow core turning axle of the present invention (5), the output line of brush ring (4) is connected with the electric control system on top, steel-wire flexible-shaft passes the centre hole pulling growth artificial lens of centring sleeve (16) by the centre hole of hollow rotary shaft (5).Hollow rotary shaft (5) is by bearing support (12), gland (11), screw nut (6), bearing (7), bearing (14) and set screw nut (15) are installed on the pedestal (1), the brush ring 4 that plays the signal transmitting effect is fixed on the hollow rotary shaft (5) by holding screw (13), and between two steady bearings, wedge shape belt wheel (9) is by 5 rotations of key (10) driven rotary axle, turning axle (5) is provided with trough (8), the output line of brush ring (4) passes the top that trough (8) is guided to hollow rotary shaft (5), is connected with the electric control system on top.A perforate 3 is arranged on the pedestal 1, install and outlet with convenient.The shift fork (2) that is installed on the pedestal (1) contacts with the ring (outer shroud) of deciding of brush ring (4), so that make the input line relative fixed of brush ring.Because driven rotary of the present invention is the steel cable flexible axle, therefore, a centring sleeve (16) is installed in the lower end of hollow (5), guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
The characteristics such as the present invention has simple in structure, and is easy to manufacture, easy to install, and working stability is reliable are wide General crystal pulling growth motion for all kinds of System Design of Crystal Growing Equipments.
Claims (4)
1, a kind of crystal revolving gear for artificial crystal growth, comprise that turning axle 5 is by bearing support 12, gland 11, screw nut 6, bearing 7, bearing 14 and set screw nut 15 etc., it is characterized in that set screw nut 15 set screw nuts 15 are installed on the pedestal 1, the brush ring 4 that plays the signal transmitting effect is fixed on the turning axle 5 by holding screw 13, and between two steady bearings, wedge shape belt wheel 9 is by 5 rotations of key 10 driven rotary axles, turning axle 5 is provided with trough 8, the output line of brush ring 4 passes the top that trough 8 is guided to turning axle 5, so that the control components and parts.A perforate 3 is arranged on the pedestal 1, install and outlet with convenient.The shift fork 2 that is installed on the pedestal 1 contacts with the ring (outer shroud) of deciding of brush ring 4, so that make the input line relative fixed of brush ring.
2, crystal revolving gear for artificial crystal growth according to claim 1 is characterized in that in the lower end of turning axle 5 centring sleeve 16 being installed.
3, crystal revolving gear for artificial crystal growth according to claim 1 is characterized in that the brush ring 4 of signal transmitting effect is fixed on the turning axle 5, and between two steady bearings.
4, according to claim 1 or 3 described crystal revolving gear for artificial crystal growth, it is characterized in that a centring sleeve 16 being installed in the lower end of turning axle 5, guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100215287A CN101294299A (en) | 2007-04-28 | 2007-04-28 | Crystal rotating mechanism for artificial crystal growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100215287A CN101294299A (en) | 2007-04-28 | 2007-04-28 | Crystal rotating mechanism for artificial crystal growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101294299A true CN101294299A (en) | 2008-10-29 |
Family
ID=40064824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007100215287A Withdrawn CN101294299A (en) | 2007-04-28 | 2007-04-28 | Crystal rotating mechanism for artificial crystal growth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101294299A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105624775A (en) * | 2014-10-29 | 2016-06-01 | 江苏拜尔特光电设备有限公司 | Novel combined damping sleeve |
-
2007
- 2007-04-28 CN CNA2007100215287A patent/CN101294299A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105624775A (en) * | 2014-10-29 | 2016-06-01 | 江苏拜尔特光电设备有限公司 | Novel combined damping sleeve |
| CN105624775B (en) * | 2014-10-29 | 2018-10-30 | 江苏拜尔特光电设备有限公司 | A kind of novel combination type damping sleeve |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C04 | Withdrawal of patent application after publication (patent law 2001) | ||
| WW01 | Invention patent application withdrawn after publication |