CN101126174A - Crystal rotating mechanism for artificial crystal growth - Google Patents
Crystal rotating mechanism for artificial crystal growth Download PDFInfo
- Publication number
- CN101126174A CN101126174A CNA2006100413067A CN200610041306A CN101126174A CN 101126174 A CN101126174 A CN 101126174A CN A2006100413067 A CNA2006100413067 A CN A2006100413067A CN 200610041306 A CN200610041306 A CN 200610041306A CN 101126174 A CN101126174 A CN 101126174A
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- China
- Prior art keywords
- crystal
- turning axle
- brush ring
- rotating
- rotating shaft
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to a crystal rotating mechanism used for the manual crystal growth, and more particularly discloses the crystal rotating mechanism used for semiconductor silicon monocrystal growth and germanium single crystal growth. The invention is characterized in that the electric brush ring responsible for signal transmission is arranged on the upper part of a supporting bearing; a centering sleeve is arranged on the upper part of a rotating shaft; in this way, the outward rotating part of the rotating shaft becomes relatively long with bed rotating stability. In addition, the mounting and replacing operation is fairly inconvenient because the centering sleeve is arranged on the upper part of the rotating shaft. A hoisting and elevating mechanism is arranged on the upper end of the hollow rotating shaft in the invention. A steel wire flexible shaft crosses through the central hole of the hollow rotating shaft, and further crosses through the central hole of the centering sleeve arranged at the lower part of the hoisting and elevating mechanism so as to hoist and make the manual crystal to grow. The invention improves the stability and reliability on the rotating movement in various manual crystals growth with convenient installation and maintenance; therefore, the invention is able to extensively be used for the crystal towing growing movement in various manual crystals growing devices.
Description
Affiliated technical field
The present invention relates to a kind of crystal revolving gear for artificial crystal growth, particularly the crystal rotating mechanism that semiconductor silicon single crystal is grown and Ge mono crystal growth is used.
Background technology
Crystal revolving gear for artificial crystal growth is the top that the brush ring of undertaking the signal transmission is installed in steady bearing in the prior art, and centring sleeve is installed in the top of turning axle, makes that like this back-out part of turning axle is longer, and smooth rotation is poor.In addition, the centring sleeve top that is installed in turning axle install to change very inconvenient.
Goal of the invention
Defective at above-mentioned prior art existence, it is a kind of simple in structure, easy to use that goal of the invention of the present invention is to provide, the outstanding effect crystal revolving gear for artificial crystal growth, with stability, the reliability of raising artificial crystal growth, and be easy to install and maintain.
Technology contents
Crystal revolving gear for artificial crystal growth of the present invention, comprise that turning axle (5) is by bearing support 12, gland (11), screw nut (6), bearing (7), bearing (14) and set screw nut (15) are installed on the pedestal (1), the brush ring (4) that plays the signal transmitting effect is fixed on the turning axle (5) by holding screw (13), and between two steady bearings, wedge shape belt wheel (9) is by key (10) driven rotary axle (5) rotation, turning axle (5) is provided with trough (8), the output line of brush ring (4) passes the top that trough (8) is guided to turning axle (5), so that the control components and parts.A perforate (3) is arranged on the pedestal (1), install and outlet with convenient.The shift fork (2) that is installed on the pedestal (1) contacts with the ring (outer shroud) of deciding of brush ring (4), so that make the input line relative fixed of brush ring.Because driven rotary of the present invention is the steel cable flexible axle, therefore, a centring sleeve (16) is installed in the lower end of turning axle (5), guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
Beneficial effect
Innovation part of the present invention has been that the brush ring (4) of signal transmitting effect is fixed on the turning axle (5) by holding screw (13), and between two steady bearings, shortened the back-out part of turning axle, a centring sleeve (16) is installed in lower end at turning axle (5), guarantee steel-wire flexible-shaft to neutrality, thereby improve the stationarity rotatablely move.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is specific embodiments of the invention.
In the accompanying drawing, the 1st, pedestal, 2 are mounted in the shift fork on the pedestal (1), a perforate on 3 pedestals (1), the 4th, brush ring, the 5th, turning axle, the 6th, screw nut, the 7th, bearing, the 8th, trough, the 9th, the wedge shape belt wheel, the 10th, by key, the 11st, gland, the 12nd, bearing support, the 13rd, screw, the 14th, bearing, the 15th, set screw nut, the 16th, centring sleeve.
Referring to shown in Figure 1, comprise that turning axle (5) is by bearing support (12), gland (11), screw nut (6), bearing (7), bearing (14) and set screw nut (15) are installed on the pedestal (1), the brush ring (4) that plays the signal transmitting effect is fixed on the turning axle (5) by holding screw (13), and between two steady bearings, wedge shape belt wheel (9) is by key (10) driven rotary axle (5) rotation, turning axle (5) is provided with trough (8), the output line of brush ring (4) passes the top that trough (8) is guided to turning axle (5), so that the electric control system on control top.A perforate (3) is arranged on the pedestal (1), install and outlet with convenient.The shift fork (2) that is installed on the pedestal (1) contacts with the ring (outer shroud) of deciding of brush ring (4), so that make the input line relative fixed of brush ring.Because driven rotary of the present invention is the steel cable flexible axle, therefore, a centring sleeve (16) is installed in the lower end of turning axle (5), guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
Embodiment
Accompanying drawing 2 is specific embodiments of the invention;
Below in conjunction with accompanying drawing content of the present invention is described further:
Referring to shown in Figure 2, the elevator lifting mechanism is installed in the upper end of hollow core turning axle of the present invention (5), the output line of brush ring (4) is connected with the electric control system on top, steel-wire flexible-shaft passes the centre hole pulling growth artificial lens of centring sleeve (16) by the centre hole of hollow rotary shaft (5).Hollow rotary shaft (5) is by bearing support (12), gland (11), screw nut (6), bearing (7), bearing (14) and set screw nut (15) are installed on the pedestal (1), the brush ring (4) that plays the signal transmitting effect is fixed on the hollow rotary shaft (5) by holding screw (13), and between two steady bearings, wedge shape belt wheel (9) is by key (10) driven rotary axle (5) rotation, turning axle (5) is provided with trough (8), the output line of brush ring (4) passes the top that trough (8) is guided to hollow rotary shaft (5), is connected with the electric control system on top.A perforate (3) is arranged on the pedestal (1), install and outlet with convenient.The shift fork (2) that is installed on the pedestal (1) contacts with the ring (outer shroud) of deciding of brush ring (4), so that make the input line relative fixed of brush ring.Because driven rotary of the present invention is the steel cable flexible axle, therefore, a centring sleeve (16) is installed in the lower end of hollow rotary shaft (5), guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
The characteristics such as the present invention has simple in structure, and is easy to manufacture, easy to install, and working stability is reliable, Be widely used in the crystal pulling growth motion in all kinds of System Design of Crystal Growing Equipments.
Claims (3)
1. crystal revolving gear for artificial crystal growth, form by turning axle etc., it is characterized in that turning axle (5) is by bearing support (12), gland (11), screw nut (6), bearing (7), bearing (14) and set screw nut (15) are installed on the pedestal (1), the brush ring (4) that plays the signal transmitting effect is fixed on the turning axle (5) by holding screw (13), and between two steady bearings, wedge shape belt wheel (9) is by key (10) driven rotary axle (5) rotation, turning axle (5) is provided with trough (8), the output line of brush ring (4) passes the top that trough (8) is guided to turning axle (5), so that the control components and parts.A perforate (3) is arranged on the pedestal (1), install and outlet with convenient.The shift fork (2) that is installed on the pedestal (1) contacts with the ring (outer shroud) of deciding of brush ring (4), so that make the input line relative fixed of brush ring.Because driven rotary of the present invention is the steel cable flexible axle, therefore, a centring sleeve (16) is installed in the lower end of turning axle (5), guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
2. crystal revolving gear for artificial crystal growth according to claim 1 is characterized in that the brush ring (4) of signal transmitting effect is fixed on the turning axle (5), and between two steady bearings.
3. crystal revolving gear for artificial crystal growth according to claim 1 and 2 is characterized in that in the lower end of turning axle (5) centring sleeve (16) being installed, guarantee steel-wire flexible-shaft to neutrality, improve the stationarity that rotatablely moves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100413067A CN101126174A (en) | 2006-08-14 | 2006-08-14 | Crystal rotating mechanism for artificial crystal growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100413067A CN101126174A (en) | 2006-08-14 | 2006-08-14 | Crystal rotating mechanism for artificial crystal growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101126174A true CN101126174A (en) | 2008-02-20 |
Family
ID=39094302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006100413067A Pending CN101126174A (en) | 2006-08-14 | 2006-08-14 | Crystal rotating mechanism for artificial crystal growth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101126174A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102013387B (en) * | 2009-09-04 | 2012-06-06 | 中芯国际集成电路制造(上海)有限公司 | Metal disc winding for etching equipment and assembly method thereof |
| CN103132136A (en) * | 2013-03-08 | 2013-06-05 | 上海锐亮晶体技术有限公司 | Crystal taking mechanism used in sapphire crystal growth furnace |
| CN105624775A (en) * | 2014-10-29 | 2016-06-01 | 江苏拜尔特光电设备有限公司 | Novel combined damping sleeve |
-
2006
- 2006-08-14 CN CNA2006100413067A patent/CN101126174A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102013387B (en) * | 2009-09-04 | 2012-06-06 | 中芯国际集成电路制造(上海)有限公司 | Metal disc winding for etching equipment and assembly method thereof |
| CN103132136A (en) * | 2013-03-08 | 2013-06-05 | 上海锐亮晶体技术有限公司 | Crystal taking mechanism used in sapphire crystal growth furnace |
| CN103132136B (en) * | 2013-03-08 | 2017-05-17 | 上海锐亮晶体技术有限公司 | Crystal taking mechanism used in sapphire crystal growth furnace |
| CN105624775A (en) * | 2014-10-29 | 2016-06-01 | 江苏拜尔特光电设备有限公司 | Novel combined damping sleeve |
| CN105624775B (en) * | 2014-10-29 | 2018-10-30 | 江苏拜尔特光电设备有限公司 | A kind of novel combination type damping sleeve |
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Legal Events
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Open date: 20080220 |