CN114959883B - Seed crystal lifting mechanism of semiconductor silicon single crystal furnace - Google Patents
Seed crystal lifting mechanism of semiconductor silicon single crystal furnace Download PDFInfo
- Publication number
- CN114959883B CN114959883B CN202210595903.3A CN202210595903A CN114959883B CN 114959883 B CN114959883 B CN 114959883B CN 202210595903 A CN202210595903 A CN 202210595903A CN 114959883 B CN114959883 B CN 114959883B
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- seed crystal
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- magnetic fluid
- shaped nut
- sliding
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- 239000013078 crystal Substances 0.000 title claims abstract description 92
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 20
- 239000010703 silicon Substances 0.000 title claims abstract description 20
- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 44
- 238000007789 sealing Methods 0.000 claims abstract description 39
- 230000001681 protective effect Effects 0.000 claims abstract description 21
- 238000004804 winding Methods 0.000 claims abstract description 19
- 239000004677 Nylon Substances 0.000 claims description 28
- 229920001778 nylon Polymers 0.000 claims description 28
- 125000006850 spacer group Chemical group 0.000 claims description 23
- 230000007704 transition Effects 0.000 claims description 14
- 239000011347 resin Substances 0.000 claims description 13
- 229920005989 resin Polymers 0.000 claims description 13
- 239000003638 chemical reducing agent Substances 0.000 claims description 8
- 230000004323 axial length Effects 0.000 claims description 4
- 210000004907 gland Anatomy 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 210000001503 joint Anatomy 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000011065 in-situ storage Methods 0.000 abstract 1
- 239000000306 component Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the technical field of machinery. The seed crystal pulling mechanism of the semiconductor silicon single crystal furnace comprises a rotating shaft, a driving mechanism for driving the rotating shaft to rotate and a seed crystal rope lifting assembly; the seed crystal rope lifting assembly comprises a protective cover, a magnetic fluid rotary sealing piece, a ball bearing, a T-shaped nut, a sliding screw rod, a seed crystal rope and a winding wheel wound with the seed crystal rope, wherein the winding wheel is provided with a spiral winding groove; the rotating shaft is connected with the protective cover through a magnetic fluid rotating sealing piece to form a cavity, and a bearing seat for supporting the ball bearing is arranged in the cavity; the rotating shaft is connected with a sliding screw rod in the cavity in a sliding way by taking the axial direction as the sliding direction; the outer ring of the magnetic fluid rotary sealing piece is detachably connected with a T-shaped nut through a screw, and the T-shaped nut is positioned in the cavity; the T-shaped nut and the sliding screw are provided with mutually matched thread structures, the T-shaped nut and the sliding screw are in threaded connection through the thread structures, and the sliding screw is detachably connected with a reel. The seed crystal rope can be lifted in situ.
Description
Technical Field
The invention relates to the technical field of machinery, in particular to a seed crystal lifting mechanism.
Background
In the crystal pulling process of the solar-grade growth furnace, the used seed crystal pulling mechanism has lower requirements on the pulling precision and stability, and can not meet the use requirement of a semiconductor-grade silicon single crystal furnace.
The seed crystal pulling mechanism plays a key role in the growth process of monocrystalline silicon in the crystal pulling process, and is a core component of the silicon monocrystalline furnace. Based on the above, it is highly demanded to design a seed crystal pulling mechanism suitable for a semiconductor silicon single crystal furnace with high pulling accuracy.
Disclosure of Invention
The invention provides a seed crystal pulling mechanism of a semiconductor silicon single crystal furnace, which solves at least one technical problem in the prior art.
The technical scheme of the invention is as follows: the seed crystal pulling mechanism of the semiconductor silicon single crystal furnace comprises a rotating shaft and a driving mechanism for driving the rotating shaft to rotate, and is characterized by further comprising a seed crystal rope lifting assembly;
the seed crystal rope lifting assembly comprises a protective cover, a magnetic fluid rotary sealing piece, a ball bearing, a T-shaped nut, a sliding screw rod, a seed crystal rope and a winding wheel wound with the seed crystal rope, wherein a spiral winding groove is formed in the winding wheel;
the magnetic fluid rotary sealing piece and the ball bearing are arranged left and right on the rotary shaft;
the end part of the rotating shaft extends into the protective cover, the rotating shaft is connected with the protective cover through the magnetic fluid rotary sealing piece to form a cavity, and a bearing seat for supporting the ball bearing is arranged in the cavity;
the rotating shaft is connected with a sliding screw rod positioned in the cavity in a sliding way by taking the axial direction as the sliding direction;
the outer ring of the magnetic fluid rotary sealing piece is detachably connected with the T-shaped nut through a screw, and the T-shaped nut is positioned in the cavity;
the T-shaped nut and the sliding screw are provided with mutually matched threaded structures, the T-shaped nut is in threaded connection with the sliding screw through the threaded structures, and the winding wheel is detachably connected to the sliding screw;
an opening from which the seed crystal rope extends out is formed in the protective cover;
the thread pitch of the T-shaped nut and the thread pitch of the sliding screw thread structure are equal to the thread pitch of the winding groove.
According to the invention, the structure of the seed crystal lifting mechanism is optimized, and the rotation of the reel is driven by the rotation of the rotating shaft, so that the rotation of the reel is realized while the axial movement of the reel is further realized, and the lifting of the original position of the seed crystal rope is further realized.
The thread pitch of the T-shaped nut and the thread pitch of the sliding screw thread structure are equal to the thread pitch of the winding groove. The reel rotates once every time the sliding screw rotates, so that the position of the reel can be conveniently and accurately determined, and the hanging part of the seed crystal rope wound outside the reel is always in the center of the opening.
Further preferably, the device further comprises a T-shaped nut floating mechanism;
the T-shaped nut floating mechanism comprises a spacer bush and a gasket;
the T-shaped nut is provided with a through hole penetrating through the screw, and the spacer bush is positioned in the through hole;
the screw passes through the gasket and the spacer, the head of the screw abuts against the gasket, the gasket abuts against the spacer, and a gap exists between the head of the screw and the T-shaped nut.
The T-shaped nut is convenient to realize that a floating space exists. The head of the screw does not directly prop against the T-shaped nut, so that the screw can be prevented from being locked with the T-shaped nut due to clamping stagnation when the sliding screw moves in a rotating way.
Further preferably, the bore includes a counterbore to receive the screw head;
the spacer sleeve extends into the counter bore adjacent to the head side of the screw; and the axial length of the spacer bush is greater than the distance from the side of the perforation adjacent to the magnetic fluid rotary seal element to the side of the counter bore adjacent to the magnetic fluid rotary seal element, and the difference is 9-11 wires.
Further preferably, the device further comprises an insulating connecting component;
the insulating connecting component comprises a first screw, a nylon fixing ring, a resin collar, a nylon transition flange and a connecting flange;
the sliding screw is provided with a circumferentially arranged mounting hole, and the resin collar is positioned in the mounting hole;
the nylon fixing ring and the nylon transition flange clamp the resin collar sliding screw;
the connecting flange is abutted against one side of the nylon transition flange;
the first screw sequentially penetrates through the reel, the nylon fixing ring, the resin collar and the nylon transition flange and is detachably connected with the connecting flange.
Thereby realizing the insulation between the reel and other parts in the cavity. Preventing the reel from conducting to other parts within the cavity.
Further preferably, the rotating shaft is connected with a slider in a sliding manner along an axial direction, and the slider is clamped and fixed between the sliding screw and the nylon fixing ring.
Further preferably, a wire groove is formed in one side, away from the magnetic fluid rotary sealing piece, of the reel, and the outer side of the wire groove is in butt joint with the wire groove;
the tail end of the seed crystal rope is fixed on the end surface of one side of the reel, which is far away from the magnetic fluid rotary sealing piece, through a seed crystal rope pressing plate;
the seed crystal rope baffle is detachably connected with the reel, and the seed crystal rope baffle and the wire groove clamp and fix the end part of the seed crystal rope.
The seed crystal rope baffle is used for preventing the seed crystal rope from falling off the groove, avoiding dislocation of the seed crystal rope and inaccurate positioning.
Further preferably, the left end of the inner ring of the magnetic fluid rotary sealing element exceeds the outer ring of the magnetic fluid rotary sealing element;
the belt pulley is sleeved in the region of the inner ring of the magnetic fluid rotary sealing piece, which exceeds the outer ring of the magnetic fluid rotary sealing piece, and is linked with the detection belt pulley through a belt;
the belt pulley also comprises a sensor for sensing the rotation number of the belt pulley.
The measuring of the number of rotations of the reel is facilitated.
Further preferably, the driving mechanism comprises a speed reducer, and a power output shaft of the speed reducer is connected with the rotating shaft;
the end part of the rotating shaft is detachably connected with the shaft end gland.
The driving mechanism comprises a speed reducing motor, and the speed reducing motor is in transmission connection with the speed reducer through a speed changer.
Further preferably, the right end of the protective cover is detachably connected with a cover plate.
Further preferably, the cavity is a vacuum closed cavity, and the opening is provided with an insulating sealing ring;
and the protective cover is provided with a vacuumizing air port.
The cavity is a vacuum sealed environment that prevents the reel from conducting electricity to other parts within the cavity.
Working principle: when the reel moves to the left end limit position, the head-mounted seed crystal of the seed crystal rope is indicated to reach the liquid level of the graphite crucible of the silicon single crystal furnace, and when the power is reversed, the crystal starts to be pulled upwards. The reel is kept with the safe distance with the side of the inner wall of the cavity when in the left and right extreme positions, so that extrusion collision and electric conduction are prevented.
Drawings
FIG. 1 is a cross-sectional view of embodiment 1 of the present invention;
fig. 2 is a schematic view showing the structure of a seed rope pressing plate according to embodiment 1 of the present invention.
In the figure: the magnetic fluid rotary sealing device comprises a rotary shaft 1, a magnetic fluid rotary sealing piece 3, a protective cover 4, a T-shaped nut 5, a sliding screw rod 6, a reel, a bearing seat 7, a cover plate 8, a ball bearing 9, a nylon fixing ring 10, a first screw 11, a resin collar 12, a nylon transition flange 13, a connecting flange 14, a screw 15, a gasket 16, a spacer 17, a belt pulley 18, a speed reducer 19, a shaft end gland 20, a seed crystal rope pressing plate 21, a seed crystal rope baffle 22, a seed crystal rope 23 and a guide wheel 24.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1 to 2, embodiment 1 is a seed crystal pulling mechanism of a semiconductor silicon single crystal furnace, which comprises a rotation shaft 1, a driving mechanism for driving the rotation shaft 1 to rotate, and a seed crystal rope lifting assembly; the seed crystal rope lifting assembly comprises a protective cover 3, a magnetic fluid rotary sealing piece 2, a ball bearing 9, a T-shaped nut 4, a sliding screw 5, a seed crystal rope and a winding wheel 6 wound with the seed crystal rope, wherein the winding wheel 6 is provided with a spiral winding groove; the rotary shaft 1 is provided with a left magnetic fluid rotary seal 2 and a right magnetic fluid rotary seal 9; the end part of the rotating shaft 1 extends into the protective cover 3, the rotating shaft 1 is connected with the protective cover 3 through the magnetic fluid rotary sealing piece 2 to form a cavity, and a bearing seat 7 for supporting a ball bearing 9 is arranged in the cavity; the rotating shaft 1 is connected with a sliding screw 5 in the cavity in a sliding way by taking the axial direction as the sliding direction; the outer ring of the magnetic fluid rotary sealing piece 2 is detachably connected with the T-shaped nut 4 through a screw 15, and the T-shaped nut 4 is positioned in the cavity; the T-shaped nut 4 and the sliding screw 5 are provided with mutually matched thread structures, the T-shaped nut 4 and the sliding screw 5 are in threaded connection through the thread structures, and the sliding screw 5 is detachably connected with a reel 6; an opening from which the seed crystal rope extends is formed in the protective cover 3; the thread pitch of the thread structures of the T-shaped nut 4 and the sliding screw 5 is equal to that of the winding groove. The magnetic fluid rotary sealing piece comprises an inner ring and an outer ring which are connected in a rotating way.
According to the invention, through optimizing the structure of the seed crystal lifting mechanism, the rotation of the rotating shaft 1 drives the axial movement of the reel 6, and simultaneously, the rotation of the reel 6 is realized, so that the lifting of the original position of the seed crystal rope is realized. The thread pitch of the thread structures of the T-shaped nut 4 and the sliding screw 5 is equal to that of the winding groove. For each rotation of the sliding screw 5, the reel 6 rotates one time, so that the position of the reel 6 can be conveniently and accurately determined, and the hanging part of the seed rope wound outside the reel 6 is always in the center of the opening.
The device also comprises a T-shaped nut floating mechanism; the T-shaped nut 4 floating mechanism comprises a spacer 17 and a gasket 16; the T-shaped nut 4 is provided with a through hole penetrating through the screw 15, and the spacer 17 is positioned between the through hole and the T-shaped nut 4; the screw 15 passes through the spacer 16 and the spacer 17, and the head of the screw 15 abuts against the spacer 16, the spacer 16 abuts against the spacer 17, and a gap exists between the head of the screw 15 and the T-nut 4. It is convenient to realize that the T-shaped nut 4 has a floating space. The head of the screw 15 does not directly prop against the T-shaped nut 4, so that the locking of the sliding screw 5 and the T-shaped nut due to clamping stagnation can be avoided when the sliding screw rotates and moves. The spacer bush and the T-shaped nut are propped against the magnetic fluid rotary sealing piece.
The bore includes a counterbore to receive the head of the screw; the spacer 17 extends into the counter bore adjacent to the head side of the screw; and the axial length of the spacer 17 is larger than the distance from the side of the perforation adjacent to the magnetic fluid rotary seal 2 to the side of the counter bore adjacent to the magnetic fluid rotary seal 2, and the difference is 9-11 wires.
The device also comprises an insulating connecting component; the insulating connecting assembly comprises a first screw 11, a nylon fixing ring 10, a resin collar 12, a nylon transition flange 13 and a connecting flange 14; the sliding screw 5 is provided with a circumferentially arranged mounting hole, and the resin collar 12 is positioned in the mounting hole; the nylon fixing ring 10 and the nylon transition flange 13 clamp the sliding screw 5; the connecting flange 14 is propped against one side of the nylon transition flange 13; the first screw 11 passes through the reel 6, the nylon retainer 10, the resin collar 12, and the nylon transition flange 13 in this order, and is detachably connected to the connection flange 14. Thereby achieving insulation of the reel 6 from other parts in the cavity. Preventing the reel 6 from conducting to other parts in the cavity. The rotating shaft 1 is connected with a sliding block along the axial direction in a sliding way, and the sliding block is clamped and fixed between the sliding screw 5 and the nylon fixed ring 10. The sliding block is fixed relative to the sliding screw. The nylon fixing ring 10 and the nylon transition flange 13 clamp the flange of the sliding screw 5; the thickness of the flange of the sliding screw is about 0.5mm greater than the axial length of the resin collar. Therefore, the sliding screw rod can not move or shake due to the fact that the resin collar exceeds the flange of the sliding screw rod.
A wire groove is formed in one side, far away from the magnetic fluid rotary sealing piece 2, of the reel 6, and the outer side of the wire groove is in butt joint with the wire groove; the tail end of the seed crystal rope 23 is fixed on the end surface of one side of the reel 6 far away from the magnetic fluid rotary sealing piece 2 through a seed crystal rope pressing plate 21; the reel 6 is also detachably connected with a seed rope baffle 22, and the seed rope baffle 22 and the wire groove clamp and fix the end part of the seed rope 23. The seed crystal rope baffle is used for preventing the seed crystal rope from falling off the groove, avoiding dislocation of the seed crystal rope and inaccurate positioning. A guide wheel 24 is rotatably mounted within the cavity. The seed rope is guided downwards from the space between the reel and the guide wheel and extends out of the opening.
The left end of the inner ring of the magnetic fluid rotary sealing element 2 exceeds the outer ring of the magnetic fluid rotary sealing element 2; the area of the inner ring of the magnetic fluid rotary sealing element 2, which exceeds the outer ring of the magnetic fluid rotary sealing element 2, is sleeved with a belt pulley 18, and the belt pulley is linked with the detection belt pulley through a belt; the belt pulley also comprises a sensor for sensing the rotation number of the belt pulley. The number of rotations of the reel 6 is conveniently measured.
The driving mechanism comprises a speed reducer, and a power output shaft of the speed reducer 19 is connected with the rotating shaft 1; the end of the rotary shaft 1 is detachably connected with the shaft end gland 20. The right end of the protective cover 3 is detachably connected with a cover plate 8.
The cavity is a vacuum closed cavity, and an insulating sealing ring is arranged at the opening; the protective cover 3 is provided with a vacuumizing air port. The cavity is a vacuum tight environment preventing the reel 6 from conducting electricity to other parts within the cavity.
Working principle: when the reel 6 moves to the left end limit position, it is indicated that the head-mounted seed crystal of the seed crystal rope has reached the liquid level of the graphite crucible of the silicon single crystal furnace, and when the power is reversed, the crystal starts to be pulled upward. The reel 6 is kept a safe distance from the side surface of the inner wall of the cavity in the left and right limit positions, so that extrusion collision and electric conduction are prevented.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (9)
1. The seed crystal pulling mechanism of the semiconductor silicon single crystal furnace comprises a rotating shaft and a driving mechanism for driving the rotating shaft to rotate, and is characterized by further comprising a seed crystal rope lifting assembly;
the seed crystal rope lifting assembly comprises a protective cover, a magnetic fluid rotary sealing piece, a ball bearing, a T-shaped nut, a sliding screw rod, a seed crystal rope and a winding wheel wound with the seed crystal rope, wherein a spiral winding groove is formed in the winding wheel;
the magnetic fluid rotary sealing piece and the ball bearing are arranged left and right on the rotary shaft;
the end part of the rotating shaft extends into the protective cover, the rotating shaft is connected with the protective cover through the magnetic fluid rotary sealing piece to form a cavity, and a bearing seat for supporting the ball bearing is arranged in the cavity;
the rotating shaft is connected with a sliding screw rod positioned in the cavity in a sliding way by taking the axial direction as the sliding direction;
the outer ring of the magnetic fluid rotary sealing piece is detachably connected with the T-shaped nut through a screw, and the T-shaped nut is positioned in the cavity;
the T-shaped nut and the sliding screw are provided with mutually matched threaded structures, the T-shaped nut is in threaded connection with the sliding screw through the threaded structures, and the winding wheel is detachably connected to the sliding screw;
an opening from which the seed crystal rope extends out is formed in the protective cover;
the thread pitch of the T-shaped nut and the thread structure of the sliding screw rod is equal to the thread pitch of the winding groove;
the device also comprises a T-shaped nut floating mechanism;
the T-shaped nut floating mechanism comprises a spacer bush and a gasket;
the T-shaped nut is provided with a through hole penetrating through the screw, and the spacer bush is positioned in the through hole;
the screw passes through the gasket and the spacer, the head of the screw abuts against the gasket, the gasket abuts against the spacer, and a gap exists between the head of the screw and the T-shaped nut.
2. The seed crystal pulling mechanism of a semiconductor silicon single crystal furnace as defined in claim 1, wherein: the bore includes a counterbore to receive the screw head;
the spacer sleeve extends into the counter bore adjacent to the head side of the screw; and the axial length of the spacer bush is greater than the distance from the side of the perforation adjacent to the magnetic fluid rotary seal element to the side of the counter bore adjacent to the magnetic fluid rotary seal element, and the difference is 9-11 wires.
3. The seed crystal pulling mechanism of a semiconductor silicon single crystal furnace as defined in claim 1, wherein: the device also comprises an insulating connecting component;
the insulating connecting component comprises a first screw, a nylon fixing ring, a resin collar, a nylon transition flange and a connecting flange;
the sliding screw is provided with a circumferentially arranged mounting hole, and the resin collar is positioned in the mounting hole;
the nylon fixing ring and the nylon transition flange clamp the sliding screw;
the connecting flange is abutted against one side of the nylon transition flange;
the first screw sequentially penetrates through the reel, the nylon fixing ring, the resin collar and the nylon transition flange and is detachably connected with the connecting flange.
4. A seed crystal pulling mechanism of a semiconductor silicon single crystal furnace as defined in claim 3, wherein: the rotary shaft is connected with a sliding block in a sliding manner along the axial direction, and the sliding block is clamped and fixed between the sliding screw and the nylon fixing ring.
5. The seed crystal pulling mechanism of a semiconductor silicon single crystal furnace as defined in claim 1, wherein: a wire groove is formed in one side, far away from the magnetic fluid rotary sealing piece, of the reel, and the outer side of the wire groove is in butt joint with the wire groove;
the tail end of the seed crystal rope is fixed on the end surface of one side of the reel, which is far away from the magnetic fluid rotary sealing piece, through a seed crystal rope pressing plate;
the seed crystal rope baffle is detachably connected with the reel, and the seed crystal rope baffle and the wire groove clamp and fix the end part of the seed crystal rope.
6. The seed crystal pulling mechanism of a semiconductor silicon single crystal furnace as defined in claim 1, wherein: the left end of the inner ring of the magnetic fluid rotary sealing element exceeds the outer ring of the magnetic fluid rotary sealing element;
the belt pulley is sleeved in the region of the inner ring of the magnetic fluid rotary sealing piece, which exceeds the outer ring of the magnetic fluid rotary sealing piece, and is linked with the detection belt pulley through a belt;
the belt pulley also comprises a sensor for sensing the rotation number of the belt pulley.
7. The seed crystal pulling mechanism of a semiconductor silicon single crystal furnace as defined in claim 1, wherein: the driving mechanism comprises a speed reducer, and a power output shaft of the speed reducer is connected with the rotating shaft;
the end part of the rotating shaft is detachably connected with the shaft end gland.
8. The seed crystal pulling mechanism of a semiconductor silicon single crystal furnace as defined in claim 1, wherein: the right end of the protective cover is detachably connected with a cover plate.
9. The seed crystal pulling mechanism of a semiconductor silicon single crystal furnace as defined in claim 1, wherein: the cavity is a vacuum closed cavity, and the opening is provided with an insulating sealing ring;
and the protective cover is provided with a vacuumizing air port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210595903.3A CN114959883B (en) | 2022-05-17 | 2022-05-17 | Seed crystal lifting mechanism of semiconductor silicon single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210595903.3A CN114959883B (en) | 2022-05-17 | 2022-05-17 | Seed crystal lifting mechanism of semiconductor silicon single crystal furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114959883A CN114959883A (en) | 2022-08-30 |
| CN114959883B true CN114959883B (en) | 2024-02-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210595903.3A Active CN114959883B (en) | 2022-05-17 | 2022-05-17 | Seed crystal lifting mechanism of semiconductor silicon single crystal furnace |
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| CN (1) | CN114959883B (en) |
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| WO2009014961A1 (en) * | 2007-07-20 | 2009-01-29 | Bp Corporation North America Inc. | Methods and apparatuses for manufacturing cast silicon from seed crystals |
| CN202039156U (en) * | 2011-04-22 | 2011-11-16 | 宁夏日晶新能源装备股份有限公司 | Rope pulley synchronizer of single crystal furnace |
| CN111139523A (en) * | 2020-01-15 | 2020-05-12 | 长治高测新材料科技有限公司 | Intelligent single-polycrystalline silicon rod inspection, preparation and adhesion system |
| CN111334854A (en) * | 2020-03-16 | 2020-06-26 | 上海汉虹精密机械有限公司 | Seed crystal rotary pulling device of semiconductor-grade monocrystalline silicon growth furnace |
| US10844514B1 (en) * | 2019-08-21 | 2020-11-24 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
| CN217231016U (en) * | 2022-02-16 | 2022-08-19 | 连城凯克斯科技有限公司 | Crystal pulling device |
-
2022
- 2022-05-17 CN CN202210595903.3A patent/CN114959883B/en active Active
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| WO2009014961A1 (en) * | 2007-07-20 | 2009-01-29 | Bp Corporation North America Inc. | Methods and apparatuses for manufacturing cast silicon from seed crystals |
| CN202039156U (en) * | 2011-04-22 | 2011-11-16 | 宁夏日晶新能源装备股份有限公司 | Rope pulley synchronizer of single crystal furnace |
| US10844514B1 (en) * | 2019-08-21 | 2020-11-24 | Meishan Boya Advanced Materials Co., Ltd. | Open Czochralski furnace for single crystal growth |
| CN111139523A (en) * | 2020-01-15 | 2020-05-12 | 长治高测新材料科技有限公司 | Intelligent single-polycrystalline silicon rod inspection, preparation and adhesion system |
| CN111334854A (en) * | 2020-03-16 | 2020-06-26 | 上海汉虹精密机械有限公司 | Seed crystal rotary pulling device of semiconductor-grade monocrystalline silicon growth furnace |
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| Publication number | Publication date |
|---|---|
| CN114959883A (en) | 2022-08-30 |
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