CN217231016U - Crystal pulling device - Google Patents
Crystal pulling device Download PDFInfo
- Publication number
- CN217231016U CN217231016U CN202220314832.0U CN202220314832U CN217231016U CN 217231016 U CN217231016 U CN 217231016U CN 202220314832 U CN202220314832 U CN 202220314832U CN 217231016 U CN217231016 U CN 217231016U
- Authority
- CN
- China
- Prior art keywords
- electrode
- electrode assembly
- heating
- water
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
An embodiment of the utility model provides a crystal pulling device for drawing sapphire crystal, include: the heating body is used for adjusting the temperature in the single crystal furnace, and a furnace chassis of the single crystal furnace is provided with a mounting hole; the heating body is arranged in the single crystal furnace, and the power supply is arranged outside the single crystal furnace; the electrode assembly penetrates through the mounting hole and is connected with the mounting hole in a sealing mode, one end of the electrode assembly is connected with the power supply, and the other end of the electrode assembly is connected with the heating body. Disassembly of the electrode assembly can be avoided; when the single crystal furnace is used again for drawing the sapphire crystal, the electrode assembly does not need to be installed again, the electrode assembly can be prevented from being frequently disassembled and assembled, the workload is reduced, and the service life of the electrode assembly can be prolonged.
Description
Technical Field
The utility model relates to a kyropoulos method sapphire crystal growth technical field especially relates to a crystal pulling device.
Background
With the rapid development of sapphire crystal growth technology, the application of sapphire crystals is more and more extensive. Currently, a seed crystal is usually placed in a single crystal furnace, and a heating mechanism is adopted to heat a thermal field in the single crystal furnace, so that sapphire raw materials grow around the seed crystal to obtain a sapphire crystal.
In the prior art, a heating electrode is usually installed on a side wall of a single crystal furnace to adjust the thermal field environment in the single crystal furnace. However, before taking the sapphire crystal out of the single crystal furnace, the heating electrode needs to be removed. When the single crystal furnace is used again to draw a new sapphire crystal, the heating electrode needs to be installed on the side wall of the single crystal furnace again. The workload of dismounting and mounting the heating electrode is large, and the service life of the heating electrode is easy to be damaged due to frequent dismounting and mounting of the heating electrode.
SUMMERY OF THE UTILITY MODEL
In view of the above, embodiments of the present invention have been developed to provide a crystal pulling apparatus that overcomes, or at least partially solves, the above-mentioned problems.
In order to solve the problem, the embodiment of the utility model discloses a crystal pulling device for drawing sapphire crystal, include: the heating body is used for adjusting the temperature in the single crystal furnace, and a mounting hole is formed in a furnace chassis of the single crystal furnace; wherein the content of the first and second substances,
the heating body is arranged in the single crystal furnace, and the power supply is arranged outside the single crystal furnace;
the electrode assembly penetrates through the mounting hole and is connected with the mounting hole in a sealing mode, one end of the electrode assembly is connected with the power supply, and the other end of the electrode assembly is connected with the heating body.
Optionally, the electrode assembly comprises: the heating device comprises a heating electrode and an electrode bushing, wherein one end of the heating electrode is connected with the power supply, and the other end of the heating electrode is connected with the heating body;
the electrode bushing is sleeved outside the heating electrode and is in clearance fit with the mounting hole;
wherein, the electrode bush is an insulation structure.
Optionally, the electrode assembly further comprises: the heating electrode comprises a fastening piece, a first flange and a second flange, wherein the first flange comprises a sleeving part and a fastening part which are vertically connected, a first through hole is formed in the fastening part, a second through hole is formed in the second flange, the first through hole and the second through hole are used for penetrating through the fastening piece, a protruding part is arranged on the circumferential direction of the heating electrode, and the protruding part is arranged outside the single crystal furnace;
the sleeve portion is sleeved outside the electrode bushing and embedded in the mounting hole, the fastening portion is arranged between the protruding portion and the furnace chassis, and the protruding portion is arranged between the fastening portion and the second flange.
Optionally, a first insulating sheet is arranged between the boss and the fastening portion, a second insulating sheet is arranged between the boss and the second flange, and a third insulating sheet is arranged between the boss and the fastening member;
and a fourth insulating sheet is arranged between the heating electrode and the second flange.
Optionally, a sealing ring is arranged between the fastening portion and the protruding portion, and the sealing ring is of an insulating structure.
Optionally, a water-cooling cavity is arranged in the electrode assembly, and a water-cooling pipe is arranged in the water-cooling cavity; the two opposite ends of the water-cooled tube are respectively provided with a water inlet and a water outlet, one end of the water-cooled tube, which is provided with the water inlet, penetrates through the water-cooled cavity, the water outlet is arranged close to the other end of the electrode assembly, and the water outlet is communicated with the water-cooled cavity.
Optionally, one end of the electrode assembly is further provided with a mounting block;
the mounting block is connected with the power supply;
the water cooling device is characterized in that a water inlet hole used for being connected with a water inlet connector and a water outlet hole used for being connected with a water outlet connector are formed in the mounting block, the water inlet hole is opposite to a water inlet of the water cooling pipe, and the water outlet hole is communicated with the water cooling cavity.
Optionally, the water inlet hole is formed in the bottom wall of the mounting block, and the water outlet hole is formed in the side wall of the mounting block.
Optionally, the electrode assembly comprises: the mounting hole comprises a first mounting hole for embedding the first electrode assembly and a second mounting hole for embedding the second electrode assembly;
one end of the first electrode assembly is connected with the positive electrode of the power supply, and the other end of the first electrode assembly is connected with the heating body;
one end of the second electrode assembly is connected with the negative electrode of the power supply, and the other end of the second electrode assembly is connected with the heating body.
Optionally, the number of the first electrode assemblies is at least two;
the first electrode assemblies are respectively arranged in one-to-one correspondence with the second electrode assemblies and the heating bodies;
the first electrode assembly and the second electrode assembly, which are disposed correspondingly, are connected to a corresponding one of the heating bodies.
The embodiment of the utility model provides a include following advantage:
in an embodiment of the present invention, the electrode assembly has one end connected to the power supply and the other end connected to the heating member, so that the power supply can pass through the electrode assembly to the heating member supplies power. Because the heating body is arranged in the single crystal furnace, the temperature in the single crystal furnace can be adjusted by the heating body. The mounting hole is formed in the furnace chassis of the single crystal furnace, and the electrode assembly penetrates through the mounting hole, so that the electrode assembly is arranged close to the bottom of the single crystal furnace, and the electrode assembly can be prevented from being disassembled when a sapphire crystal is pulled and taken out of the single crystal furnace; when the single crystal furnace is used again for drawing the sapphire crystal, the electrode assembly does not need to be installed again, the electrode assembly can be prevented from being frequently disassembled and assembled, the workload is reduced, and the service life of the electrode assembly can be prolonged.
Drawings
FIG. 1 is a schematic view of a crystal pulling apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an electrode assembly according to an embodiment of the present invention.
The attached drawings of the specification:
1-single crystal furnace, 11-furnace chassis, 2-electrode assembly, 21-heating electrode, 211-boss, 22-electrode bushing, 23-fastener, 24-first flange, 241-fastening part, 242-sleeve part, 25-second flange, 26-first electrode assembly, 27-second electrode assembly, 31-first insulating sheet, 32-second insulating sheet, 33-third insulating sheet, 34-fourth insulating sheet, 4-sealing ring, 51-water cooling cavity, 52-water cooling tube, 6-mounting block, 71-water inlet joint and 72-water outlet joint.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
In the description of the present application, it is to be understood that the terms "length," "width," "thickness," "upper," "lower," "top," "bottom," "inner," "outer," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be constructed in an operation, and are not to be construed as limiting the present application.
In the description of the present application, it should be noted that, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
A crystal pulling apparatus according to an embodiment of the present invention will be described with reference to fig. 1 to 2. One of the core concepts of the embodiment of the present invention is to disclose a crystal pulling apparatus.
Referring to fig. 1, showing a structural schematic diagram of a crystal pulling device of an embodiment of the present invention, referring to fig. 2, showing a structural schematic diagram of an electrode assembly of an embodiment of the present invention, as shown in fig. 1 and 2, the crystal pulling device may be used for pulling sapphire crystals, and specifically may include: the single crystal furnace comprises a heating body, an electrode assembly 2, a power supply and a single crystal furnace 1, wherein the heating body can be used for adjusting the temperature in the single crystal furnace 1, and a furnace chassis 11 of the single crystal furnace 1 can be provided with mounting holes; wherein, the heating body can be arranged in the single crystal furnace 1, and the power supply can be arranged outside the single crystal furnace 1; the electrode assembly 2 may be inserted into the mounting hole and may be hermetically connected to the mounting hole, one end of the electrode assembly 2 may be connected to the power supply, and the other end may be connected to the heating body.
In the embodiment of the present invention, one end of the electrode assembly 2 is connected to the power supply, and the other end is connected to the heating body, so that the power supply can supply power to the heating body through the electrode assembly 2. Because the heating body is arranged in the single crystal furnace 1, the heating body can adjust the temperature in the single crystal furnace 1. Because the installation hole is formed in the furnace chassis 11 of the single crystal furnace 1, and the electrode assembly 2 is arranged in the installation hole in a penetrating manner, the electrode assembly 2 is arranged close to the bottom of the single crystal furnace 1, so that the electrode assembly 2 can be prevented from being disassembled when the sapphire crystal is pulled and taken out of the single crystal furnace 1; when the single crystal furnace 1 is used again for drawing the sapphire crystal, the electrode assembly 2 does not need to be installed again, the electrode assembly 2 can be prevented from being frequently disassembled and assembled, the workload is reduced, the drawing efficiency of the sapphire crystal is improved, and the service life of the electrode assembly 2 can be prolonged.
The embodiment of the utility model provides an in single crystal growing furnace 1 can be one kind in inert gas (nitrogen gas, helium are given first place to) environment, melt the sapphire raw materials and grow the equipment of no dislocation sapphire crystal with the graphite heating member, specifically can be the sapphire furnace. Further, the interior of the single crystal furnace 1 can be vacuumized to prevent impurities from being mixed into the sapphire crystal, and the quality of the sapphire crystal is improved.
The embodiment of the utility model provides an in the heating member can set up in single crystal growing furnace 1, under the circular telegram circumstances, the heating member can adjust the temperature in single crystal growing furnace 1 to satisfy and melt the seed crystal and grow sapphire crystal's purpose. Specifically, the heating member can be graphite structure spare or coil etc. specifically can set up according to the actual demand, the embodiment of the utility model provides a do not do specifically to this and restrict.
The embodiment of the present invention provides an electrode assembly 2 respectively with the power supply with the heating member is connected, can play electrically conductive effect. Specifically, the heating body is arranged in the single crystal furnace 1, the power supply is arranged outside the single crystal furnace 1, and the electrode assembly 2 is arranged in a mounting hole in a furnace chassis 11 of the single crystal furnace 1 in a penetrating manner, so that the electrode assembly 2 is conveniently connected with the heating body and the power supply respectively.
Specifically, the furnace chassis 11 is a bottom structure of the single crystal furnace 1, and can be used for bearing a body structure of the single crystal furnace 1.
Specifically, the electrode assembly 2 is hermetically connected with the mounting hole, so that the sealing performance of the single crystal furnace 1 can be effectively ensured, and impurities are prevented from being mixed into the sapphire crystal.
Further, the mounting hole is provided on the furnace base plate 11 of the single crystal furnace 1, and the electrode assembly 2 may be disposed at the bottom of the single crystal furnace 1. And a seed crystal is generally put into the single crystal furnace 1 from the top of the single crystal furnace 1, and after the seed crystal grows into the sapphire crystal, the sapphire crystal is also taken out from the top of the single crystal furnace 1. Thus, the electrode assembly 2 is arranged at the bottom of the single crystal furnace 1, the electrode assembly 2 does not need to be frequently assembled and disassembled, the installation position of the electrode assembly 2 does not need to be frequently positioned, and the workload can be reduced.
Alternatively, the electrode assembly 2 may include: a heating electrode 21 and an electrode bushing 22, one end of the heating electrode 21 can be connected with the power supply, and the other end can be connected with the heating body; the electrode bush 22 can be sleeved outside the heating electrode 21, and the electrode bush 22 can be in clearance fit with the mounting hole; the electrode bushing 22 may be an insulating structure.
In the embodiment of the present invention, one end of the heating electrode 21 is connected to the power supply, and the other end is connected to the heating member, so that the heating member is powered on to generate heat. The electrode bushing 22 is sleeved outside the heating electrode 21 and is in clearance fit with the mounting hole, so that the electrode bushing 22 can be arranged between the heating electrode 21 and the furnace wall of the single crystal furnace 1, and the electrode bushing 22 is of an insulating structure, so that the heating electrode 21 and the single crystal furnace 1 can be effectively prevented from conducting electricity.
Specifically, the electrode bushing 22 may be an annular plate, or the electrode bushing 22 may be composed of two parts, an annular plate and a limiting plate, which may extend away from the annular plate along one end of the annular plate. The electrode bushing 22 may be 95 alumina ceramic, 96 alumina ceramic or 99 alumina ceramic, and may be specifically set according to actual requirements, which is not specifically limited by the embodiment of the present invention.
In particular, the electrode bushing 22 is clearance fitted with the mounting hole, and the ease of mounting the electrode assembly 2 in the mounting hole can be further improved. Further, along the axis direction of single crystal growing furnace 1, the length of electrode bush 22 can with the degree of depth adaptation of mounting hole, and the length of electrode bush 22 specifically can set up according to actual need, the embodiment of the utility model does not do specifically and restrict to this.
Specifically, heating electrode 21 can be metal structure spare such as copper, silver, nickel, and single crystal growing furnace 1 can be the stainless steel construction, specifically can set up according to actual need, the embodiment of the utility model does not do specifically and restrict to this.
Alternatively, the electrode assembly 2 may include: the heating electrode 21 comprises a fastening piece 23, a first flange 24 and a second flange 25, wherein the first flange 24 can comprise a vertically connected sleeve part 242 and the fastening piece 23, a first through hole can be formed in the fastening part 241, a second through hole can be formed in the second flange 25, both the first through hole and the second through hole can be used for penetrating the fastening piece 23, a protruding part 211 can be formed in the circumferential direction of the heating electrode 21, and the protruding part 211 can be arranged outside the single crystal furnace 1; the sheathing part 242 may be sheathed outside the electrode bushing 22 and embedded in the mounting hole, the fastening part 241 may be disposed between the protrusion part 211 and the furnace chassis 11, and the protrusion part 211 may be disposed between the fastening part 241 and the second flange 25.
In the embodiment of the present invention, the heating electrode 21 and the single crystal furnace 1 are fixed by using the first flange 24 and the second flange 25, so that the stability of fixing the heating electrode 21 on the furnace bottom plate 11 of the single crystal furnace 1 can be improved.
Specifically, the first through holes and the second through holes have the same number and can be arranged corresponding to the fastening members 23, and one fastening member 23 can penetrate through a group of the first through holes and the second through holes which are correspondingly arranged.
Specifically, the first flange 24 includes a fastening portion 241 and a sleeve portion 242 that are vertically connected, the fastening portion 241 and the sleeve portion 242 may be an integrally formed structure, and the cross-sectional shape of the first flange 24 may be a T-shaped structure.
Further, first flange 24 and furnace chassis 11 can be integrated into one piece structure, perhaps first flange 24 can welded connection in furnace chassis 11, specifically can set up according to the actual demand, the embodiment of the utility model discloses do not do specifically to this and restrict.
Specifically, the fastening member 23 may be a screw, a threaded rod, or the like, and may be specifically configured according to actual requirements.
Specifically, the heating electrode 21 is provided with a projection 211 in the circumferential direction, the heating electrode 21 and the projection 211 may be of an integrally molded structure, and the cross-sectional shape of the heating electrode 21 may be a cross structure. Further, the electrode bushing 22 may abut against the convex portion 211.
Alternatively, a first insulation sheet 31 may be disposed between the boss 211 and the fastening portion 241, a second insulation sheet 32 may be disposed between the boss 211 and the second flange 25, and a third insulation sheet 33 may be disposed between the boss 211 and the fastening portion 23; a fourth insulation sheet 34 may be disposed between the heating electrode 21 and the second flange 25.
In the embodiment of the present invention, the first insulating sheet 31 is disposed between the protruding portion 211 and the fastening portion 241, so that the electric conduction between the protruding portion 211 and the first flange 24 can be avoided. The second insulating sheet 32 is provided between the convex portion 211 and the second flange 25, and it is possible to avoid conduction between the convex portion 211 and the second flange 25. The third insulation sheet 33 is disposed between the boss 211 and the fastener 23, so that the conduction between the boss 211 and the fastener 23 can be avoided. The fourth insulating sheet 34 is provided between the heating electrode 21 and the second flange 25, so that the electric conduction between the heating electrode 21 and the second flange 25 can be avoided.
Alternatively, a sealing ring 4 may be disposed between the fastening portion 241 and the protrusion 211 of the first flange 24, and the sealing ring 4 may be an insulating structure.
In the embodiment of the present invention, the sealing ring 4 is disposed between the fastening portion 241 of the first flange 24 and the protruding portion 211, so that the sealing performance of the single crystal furnace 1 can be further improved. And the sealing ring 4 is of an insulating structure, so that the first flange 24 and the bulge 211 can be prevented from conducting electricity.
Specifically, the sealing ring 4 may be an O-ring or a plastic ring, and the embodiment of the present invention is not limited to this specifically.
Alternatively, a water cooling chamber 51 may be provided in the electrode assembly 2, and a water cooling tube 52 may be provided in the water cooling chamber 51; the opposite ends of the water-cooled tube 52 may be respectively provided with a water inlet and a water outlet, one end of the water-cooled tube 52 provided with the water inlet is inserted into the water-cooled cavity 51, the water outlet may be disposed near the other end of the electrode assembly 2, and the water outlet may be communicated with the water-cooled cavity 51.
The embodiment of the utility model provides an in, water-cooling chamber 51 is worn to locate by water-cooling tube 52's water inlet, and water-cooling tube 52's delivery port is close to the other end setting of electrode subassembly 2, just delivery port and water-cooling chamber 51 intercommunication, like this, cooling water can follow electrode subassembly 2's one end process water cooling tube 52 is flowed into to the water inlet, then flows to electrode subassembly 2's the other end and follows water-cooling chamber 51 is flowed into to the delivery port, flows to electrode subassembly 2's one end again and flows from water-cooling chamber 51's opening, can effectively cool off electrode subassembly 2.
Optionally, one end of the electrode assembly 2 may be further provided with a mounting block 6; the mounting block 6 can be connected to the power supply; the mounting block 6 may be provided with a water inlet hole for connecting to the water inlet joint 71 and a water outlet hole for connecting to the water outlet joint 72, the water inlet hole may be opposite to the water inlet of the water cooling pipe 52, and the water outlet hole may be communicated with the water cooling chamber 51.
In the embodiment of the present invention, the water inlet hole is used for connecting the water inlet joint 71, and is opposite to the water inlet of the water cooling pipe 52, so as to introduce the cooling water into the water cooling pipe 52. The water outlet hole is used for being connected with the water outlet joint 72 and is opposite to the opening of the water-cooling cavity 51, so that cooling water can be conveniently led out of the water-cooling cavity 51.
Further, the water inlet joint 71 may be a straight joint or a pagoda joint, and the water outlet joint 72 may be a straight joint or an elbow, and may be specifically set according to actual requirements, which is not specifically limited in the embodiment of the present invention.
Specifically, the mounting block 6 may be fixed at one end of the heating electrode 21 by screws, bolts, or the like, and the mounting block 6 may be connected to the power supply by a copper bar.
Specifically, the inlet opening with the apopore all can set up in one side of installation piece 6, perhaps the inlet opening can set up in the bottom of installation piece 6, the apopore can set up in one side of installation piece 6, specifically can set up according to the actual demand, the embodiment of the utility model provides a do not do specifically to this and restrict.
Alternatively, the water inlet hole may be provided on the bottom wall of the mounting block 6, and the water outlet hole may be provided on the side wall of the mounting block 6.
The embodiment of the utility model provides an in, set up on the diapire of installation piece 6 the inlet opening sets up on the lateral wall of installation piece 6 the apopore can be avoided the inlet opening with the apopore is concentrated and is set up, improves the structural strength of mounting hole.
Alternatively, the electrode assembly 2 may include a first electrode assembly 26 and a second electrode assembly 27, and the mounting holes may include a first mounting hole for embedding the first electrode assembly 26 and a second mounting hole for embedding the second electrode assembly 27; one end of the first electrode assembly 26 may be connected to the positive electrode of the power supply, and the other end may be connected to the heating body; one end of the second electrode assembly 27 may be connected to the negative electrode of the power supply, and the other end may be connected to the heating body.
In the embodiment of the present invention, the heating body may be connected to the positive electrode of the power source through the first electrode assembly 26, and may be connected to the negative electrode of the power source through the second electrode assembly 27, so that the heating body generates heat when it is electrified.
Specifically, the first electrode assembly 26 and the second electrode assembly 27 may be disposed in one-to-one correspondence, the first electrode assembly 26 and the second electrode assembly 27 may be disposed in pairs, and a pair of the first electrode assembly 26 and the second electrode assembly 27 may correspond to one of the heating bodies. Further, the number of the first electrode assemblies 26 may be one, two, or three, and the like, and may be specifically set according to actual needs, which is not specifically limited by the embodiment of the present invention.
Specifically, the first mounting holes are arranged in one-to-one correspondence with the first electrode assemblies 26, and the second mounting holes are arranged in one-to-one correspondence with the second electrode assemblies 26.
Alternatively, the number of the first electrode assemblies 26 may be at least two; the first electrode assemblies 26 may be disposed in one-to-one correspondence with the second electrode assemblies 27 and the heating bodies, respectively; the first electrode assembly 26 and the second electrode assembly 27, which are disposed correspondingly, are connected to a corresponding one of the heating bodies.
In the embodiment of the present invention, the number of the first electrode assemblies 26 is at least two, and correspondingly, the number of the heating members is at least two, which can improve the reliability of adjusting the temperature in the single crystal furnace 1 by using the heating members.
The embodiment of the utility model provides an in crystal pulling device include following advantage at least:
in an embodiment of the present invention, the electrode assembly has one end connected to the power supply and the other end connected to the heating member, so that the power supply can pass through the electrode assembly to the heating member supplies power. Because the heating body is arranged in the single crystal furnace, the temperature in the single crystal furnace can be adjusted by the heating body. The mounting hole is formed in the furnace chassis of the single crystal furnace, and the electrode assembly penetrates through the mounting hole, so that the electrode assembly is arranged close to the bottom of the single crystal furnace, and the electrode assembly can be prevented from being disassembled when a sapphire crystal is pulled and taken out of the single crystal furnace; when the single crystal furnace is used again for drawing the sapphire crystal, the electrode assembly does not need to be installed again, the electrode assembly can be prevented from being frequently disassembled and assembled, the workload is reduced, and the service life of the electrode assembly can be prolonged.
Finally, it should also be noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or terminal that comprises the element.
The crystal pulling device provided by the utility model is introduced in detail, and the principle and the implementation mode of the utility model are explained by applying a specific example, and the explanation of the above embodiment is only used for helping to understand the method and the core idea of the utility model; meanwhile, for the general technical personnel in the field, according to the idea of the present invention, there are changes in the specific implementation and application scope, to sum up, the content of the present specification should not be understood as the limitation of the present invention.
Claims (10)
1. A crystal pulling apparatus for pulling a sapphire crystal, comprising: the heating body is used for adjusting the temperature in the single crystal furnace, and a furnace chassis of the single crystal furnace is provided with a mounting hole; wherein the content of the first and second substances,
the heating body is arranged in the single crystal furnace, and the power supply is arranged outside the single crystal furnace;
the electrode assembly penetrates through the mounting hole and is connected with the mounting hole in a sealing mode, one end of the electrode assembly is connected with the power supply, and the other end of the electrode assembly is connected with the heating body.
2. A crystal puller as set forth in claim 1 wherein the electrode assembly comprises: the heating device comprises a heating electrode and an electrode bushing, wherein one end of the heating electrode is connected with the power supply, and the other end of the heating electrode is connected with the heating body;
the electrode bushing is sleeved outside the heating electrode and is in clearance fit with the mounting hole;
wherein, the electrode bushing is an insulating structure.
3. A crystal puller as set forth in claim 2 wherein the electrode assembly further comprises: the heating electrode comprises a fastening piece, a first flange and a second flange, wherein the first flange comprises a sleeving part and a fastening part which are vertically connected, a first through hole is formed in the fastening part, a second through hole is formed in the second flange, the first through hole and the second through hole are used for penetrating through the fastening piece, a protruding part is arranged on the circumferential direction of the heating electrode, and the protruding part is arranged outside the single crystal furnace;
the sleeve portion is sleeved outside the electrode bushing and embedded in the mounting hole, the fastening portion is arranged between the protruding portion and the furnace chassis, and the protruding portion is arranged between the fastening portion and the second flange.
4. A crystal puller as set forth in claim 3 wherein a first insulating sheet is disposed between the boss and the fastening portion, a second insulating sheet is disposed between the boss and the second flange, and a third insulating sheet is disposed between the boss and the fastening member;
and a fourth insulating sheet is arranged between the heating electrode and the second flange.
5. A crystal puller as set forth in claim 3 wherein a seal is disposed between the fastening portion and the boss and the seal is of insulating construction.
6. A crystal puller as set forth in claim 1 wherein a water cooled chamber is disposed in the electrode assembly, a water cooled tube being disposed in the water cooled chamber;
the two opposite ends of the water-cooled tube are respectively provided with a water inlet and a water outlet, one end of the water-cooled tube, which is provided with the water inlet, penetrates through the water-cooled cavity, the water outlet is arranged close to the other end of the electrode assembly, and the water outlet is communicated with the water-cooled cavity.
7. A crystal puller as set forth in claim 6 wherein the electrode assembly is further provided with a mounting block at one end;
the mounting block is connected with the power supply;
the water cooling device is characterized in that a water inlet hole used for being connected with a water inlet connector and a water outlet hole used for being connected with a water outlet connector are formed in the mounting block, the water inlet hole is opposite to a water inlet of the water cooling pipe, and the water outlet hole is communicated with the water cooling cavity.
8. A crystal puller as set forth in claim 7 wherein the water inlet is disposed in a bottom wall of the mounting block and the water outlet is disposed in a side wall of the mounting block.
9. A crystal puller as set forth in claim 1 wherein the electrode assembly includes: the mounting hole comprises a first mounting hole for embedding the first electrode assembly and a second mounting hole for embedding the second electrode assembly;
one end of the first electrode assembly is connected with the positive electrode of the power supply, and the other end of the first electrode assembly is connected with the heating body;
one end of the second electrode assembly is connected with the negative electrode of the power supply, and the other end of the second electrode assembly is connected with the heating body.
10. A crystal puller as set forth in claim 9 wherein the number of first electrode assemblies is at least two;
the first electrode assemblies are respectively arranged in one-to-one correspondence with the second electrode assemblies and the heating bodies;
the first electrode assembly and the second electrode assembly, which are disposed correspondingly, are connected to a corresponding one of the heating bodies.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220314832.0U CN217231016U (en) | 2022-02-16 | 2022-02-16 | Crystal pulling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220314832.0U CN217231016U (en) | 2022-02-16 | 2022-02-16 | Crystal pulling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217231016U true CN217231016U (en) | 2022-08-19 |
Family
ID=82834995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220314832.0U Active CN217231016U (en) | 2022-02-16 | 2022-02-16 | Crystal pulling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217231016U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114959883A (en) * | 2022-05-17 | 2022-08-30 | 上海汉虹精密机械有限公司 | Seed crystal pulling mechanism of semiconductor silicon single crystal furnace |
-
2022
- 2022-02-16 CN CN202220314832.0U patent/CN217231016U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114959883A (en) * | 2022-05-17 | 2022-08-30 | 上海汉虹精密机械有限公司 | Seed crystal pulling mechanism of semiconductor silicon single crystal furnace |
| CN114959883B (en) * | 2022-05-17 | 2024-02-06 | 上海汉虹精密机械有限公司 | Seed crystal lifting mechanism of semiconductor silicon single crystal furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN217231016U (en) | Crystal pulling device | |
| CN220132405U (en) | Crucible for single crystal growth | |
| WO2023231928A1 (en) | Heater and heating system | |
| WO2023231927A1 (en) | Electrode device, heater power supply structure, and furnace bottom structure of single crystal furnace | |
| CN212511917U (en) | Mounting structure of liquid helium-free superconducting magnet refrigerator | |
| CN216237364U (en) | Crystal growing furnace | |
| CN213538158U (en) | Carbon fiber draft tube convenient to installation | |
| CN212834143U (en) | Graphite electrode device and silicon ingot furnace | |
| CN216074096U (en) | Combined outer guide cylinder for single crystal furnace | |
| CN211516485U (en) | Welding device for stainless steel kitchen ware production | |
| CN210718073U (en) | Gas quick heating device | |
| US20200263293A1 (en) | Apparatus for producing polycrystalline silicon and polycrystalline silicon | |
| CN209461190U (en) | A kind of coaxial water-cooled cable applied to single crystal casting furnace | |
| CN219653176U (en) | Oxygen reduction device for single crystal furnace and single crystal furnace | |
| CN212899703U (en) | Sealing structure and magnetic field heat treatment furnace with same | |
| CN220827489U (en) | Electrode sheath, bottom heat preservation assembly and single crystal furnace | |
| CN214379234U (en) | Carbon dioxide radio frequency laser closed-loop power control system | |
| CN219137009U (en) | Heater assembly for crystal growing furnace | |
| CN211903045U (en) | Wall-mounted electric heater convenient to install | |
| CN218352756U (en) | Squirrel-cage electric heater based on graphite | |
| CN220999946U (en) | Single crystal furnace heater | |
| CN115467027B (en) | Conductive structure for silicon carbide furnace chamber | |
| CN217781323U (en) | Novel single crystal furnace heating device | |
| CN219637407U (en) | Heating assembly of silicon carbide crystal growth furnace | |
| CN220564778U (en) | Seed crystal clamping device used in crystal growth equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |