CN220564778U

CN220564778U - Seed crystal clamping device used in crystal growth equipment

Info

Publication number: CN220564778U
Application number: CN202322112633.9U
Authority: CN
Inventors: 刘景峰
Original assignee: Beijing Qifenglanda Optics Technology Development Co ltd
Current assignee: Beijing Qifenglanda Optics Technology Development Co ltd
Priority date: 2023-08-07
Filing date: 2023-08-07
Publication date: 2024-03-08
Anticipated expiration: 2033-08-07

Abstract

The utility model relates to a seed crystal clamping device that uses in crystal growth equipment relates to single crystal growth device's technical field, it includes seed chuck and seed crystal, the seed chuck includes the seed pole, outside sleeve and spacing ring, outside telescopic one end is dismantled with the seed pole and is connected, the other end is dismantled with the seed crystal and is connected, outside sleeve inboard has first shoulder hole, the aperture that first shoulder hole is close to seed pole one end is greater than the aperture of the other end, the pore wall of first shoulder hole is formed with first step owing to the aperture difference, the spacing ring is located outside sleeve inside, spacing ring and outside sleeve clearance fit and spacing ring's one end and first step butt. The stability of the relative position of the limiting ring and the axial direction of the external sleeve can be improved, and the stability of the seed crystal position is improved.

Description

Seed crystal clamping device used in crystal growth equipment

Technical Field

The application relates to the technical field of single crystal growth devices, in particular to a seed crystal clamping device used in crystal growth equipment.

Background

In the production and preparation process of single crystals, seed crystals are indispensable tools, and are mainly used for guiding crystal growth, and the use environment is crystal growth equipment which needs seeding operation by using the seed crystals, such as a crystal furnace which is needed in a Czochralski process or a kyropoulos process, and the seed crystals are fixed through a seed chuck. The seed crystal is a small crystal with the same crystal orientation as the crystal to be prepared, is a seed for growing single crystals, is also called a seed crystal, and can be used for obtaining single crystal crystals with different crystal orientations by using seed crystals with different crystal orientations as seed crystals.

The current seed chuck is generally fixed at one end of a seed rod and generally comprises an outer sleeve, the outer sleeve is provided with a middle through hole, a limiting inclined plane is arranged on the hole wall of the middle through hole, the seed chuck also generally comprises a limiting ring, the outer surface of the limiting ring is clung to a limiting inclined plate, the inner surface of the limiting ring is also an inclined plane, a seed crystal passes through the inner holes of the middle through hole and the limiting ring, an installation inclined plane matched with the inner inclined plane of the limiting ring is arranged on the outer side wall of the seed crystal, and under the action of gravity, the inner inclined plane of the limiting ring is abutted to the installation inclined plane, so that the seed chuck clamps the seed crystal.

For the related art, because the installation mode of the limiting ring is to be propped against the limiting inclined plane through the gravity action, when the limiting ring is deformed in the radial direction due to heating, the problem that the relative position of the limiting ring and the axial direction of the external sleeve is difficult to stabilize exists, and the position of the seed crystal is difficult to stabilize.

Disclosure of Invention

The utility model aims at providing a seed crystal clamping device that uses in crystal growth equipment, can improve spacing ring and the epaxial relative position's of outside sleeve stability, improves seed crystal position's stability.

The application provides a seed crystal clamping device that uses among crystal growth equipment adopts following technical scheme:

the utility model provides a seed crystal clamping device that uses in crystal growth equipment, includes seed chuck and seed crystal, the seed chuck includes seed pole, outside sleeve and spacing ring, outside telescopic one end with the seed pole can dismantle and be connected, the other end with the seed crystal can dismantle and be connected, outside sleeve inboard has first shoulder hole, first shoulder hole is close to the aperture of seed pole one end is greater than the aperture of the other end, the pore wall of first shoulder hole is formed with first step owing to the aperture difference, the spacing ring is located inside the outside sleeve, the spacing ring with outside sleeve clearance fit just the one end of spacing ring with first step butt.

Through adopting above-mentioned technical scheme, can make the end of spacing ring have fixed mounted position, reduce the radial deformation of spacing ring or the wearing and tearing of spacing ring lateral wall and take place axial displacement, improve spacing ring and the ascending stability of outside sleeve axial relative position for the position of seed crystal can be fixed, also can guarantee spacing ring and outside telescopic axiality through the butt of spacing ring and first step simultaneously, in order to avoid taking place the dead condition of seed crystal card when the installation.

Optionally, the outer sleeve includes first sleeve and second sleeve, first sleeve one end with seed rod can dismantle the connection, the other end with the second sleeve can dismantle the connection, first shoulder hole is located the second sleeve is inboard.

Through adopting above-mentioned technical scheme, can make operating personnel be convenient for install or dismantle the seed crystal, divide into first sleeve and second sleeve with outside sleeve and can be convenient for operating personnel adjust the installation gesture of seed crystal to be convenient for change or adjust the inside spacing ring of outside sleeve.

Optionally, a second stepped hole is formed in the inner side of the limiting ring, the aperture of the second stepped hole close to one end of the first sleeve is larger than that of the other end of the second sleeve, and a second step is formed on the hole wall of the second stepped hole due to the aperture difference.

Through adopting above-mentioned technical scheme, the spacing ring can improve stable hanging mounted position for the seed crystal, provides even temperature field environment for the seed crystal simultaneously, can improve the utilization efficiency of seed crystal.

Optionally, a third step is arranged on the outer side wall of the second sleeve, and the third step is abutted with one end, far away from the seed rod, of the first sleeve.

Through adopting above-mentioned technical scheme, can make the second sleeve have fixed axial position for first sleeve to the axial position of second sleeve for first sleeve when avoiding installing makes the spacing ring or the seed crystal of installing in the second sleeve receive the extrusion and thereby damage in suitable within range.

Optionally, the seed crystal includes installation department, reducing portion and crystallization portion, the one end of reducing portion with installation department fixed connection, the other end with crystallization portion fixed connection, the external diameter of installation department is greater than the external diameter of crystallization portion, the installation department is located in the second shoulder hole, the lateral wall of reducing portion with the second step is hugged closely.

Through adopting above-mentioned technical scheme, can make seed crystal shape easy to process, the smooth-going two positions that have different external diameters of connection installation department of reducing portion and crystallization portion also provide the supporting position that can be used to hang for the seed crystal simultaneously reducing portion, and overall structure can reduce material consumption to reduction in production cost.

Optionally, a limiting gasket is installed on the end face of the seed crystal located at one end of the installation portion.

Through adopting above-mentioned technical scheme, can avoid the seed crystal top to receive and collide with and wearing and tearing when the installation, make the seed crystal can contact with the seed crystal pole through spacing gasket simultaneously, increased the conduction heat radiating area of seed crystal, latent heat that produces when being favorable to crystallization releases through the seed crystal pole.

Optionally, the height of the mounting portion is smaller than the depth of the second stepped hole near one end of the first sleeve, and the limiting gasket is located in the second stepped hole.

By adopting the technical scheme, the stable installation position of the limiting gasket can be provided, so that the limiting gasket is prevented from being greatly deviated due to shaking or friction with the seed rod during installation.

Optionally, thermal expansion gaps are reserved between the outer side wall of the mounting portion and the hole wall of the second stepped hole, which is close to one end of the first sleeve, and between the outer side wall of the crystallization portion and the hole wall of the second stepped hole, which is far away from one end of the first sleeve.

Through adopting above-mentioned technical scheme, can prevent that seed crystal from breaking because the extrusion of spacing ring takes place after being heated expansion, thermal expansion clearance can calculate according to the thermal expansion characteristic of seed crystal and spacing ring's material simultaneously for can with spacing ring tight fit and not by the crowded garrulous after seed crystal heated expansion.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the first stepped hole and the first step formed on the hole wall of the first stepped hole due to the aperture difference of the first stepped hole are arranged in the outer sleeve, so that a stable mounting position can be provided for the limiting ring, the axial position of the limiting ring relative to the outer sleeve is less influenced by abrasion or radial deformation of the limiting ring, the stability of the relative position of the limiting ring and the outer sleeve in the axial direction can be improved, and the stability of the seed crystal position is improved;

2. the first sleeve and the second sleeve which are detachably connected are arranged, so that the purpose of facilitating the installation or the disassembly of seed crystals can be achieved, and meanwhile, the limiting ring is convenient to replace or the gesture of the limiting ring is convenient to adjust;

3. the variable diameter part is arranged on the seed crystal, so that the seed crystal is convenient to hang, the whole structure of the seed crystal can reduce material consumption, the seed crystal is easy to process, and the production cost can be reduced;

4. thermal expansion gaps are reserved between the outer side wall of the mounting part and the hole wall of the second stepped hole, which is close to one end of the first sleeve, and between the outer side wall of the crystallization part and the hole wall of the second stepped hole, which is far away from one end of the first sleeve, so that seed crystals can be prevented from being broken after being heated and expanded due to extrusion of the limiting ring, and meanwhile, the reasonable thermal expansion gaps can be calculated according to the thermal expansion characteristics of the seed crystals and the material of the limiting ring, so that the seed crystals can be clamped by the limiting ring after being heated and expanded and are not extruded to be broken.

Drawings

FIG. 1 is a schematic view of the overall structure of embodiment 1 of the present application;

FIG. 2 is a schematic cross-sectional view of the seed chuck according to example 1 of the present application;

FIG. 3 is a schematic view showing the overall structure of the seed crystal in example 1 of the present application;

FIG. 4 is a schematic cross-sectional view of embodiment 1 of the present application;

FIG. 5 is a schematic cross-sectional view of embodiment 2 of the present application;

FIG. 6 is a schematic cross-sectional view of embodiment 3 of the present application;

fig. 7 is a schematic view showing the overall structure of the retainer ring in embodiment 3 of the present application.

In the figure, 1, a seed chuck; 11. seed rods; 12. an outer sleeve; 121. a first sleeve; 1211. an internal thread; 122. a second sleeve; 1221. a first stepped hole; 1222. a first step; 1223. a third step; 1224. chamfering; 1225. an external thread; 13. a limiting ring; 131. a second stepped hole; 132. a second step; 133. a semicircular ring; 1331. a semicircular step; 2. seed crystal; 21. a mounting part; 22. a variable diameter portion; 23. a crystallization section; 3. a limiting gasket; 4. thermal expansion gap.

Detailed Description

The present application is described in further detail below with reference to fig. 1-7.

Example 1: referring to fig. 1, a seed crystal clamping device used in crystal growth equipment comprises a seed chuck 1 and a seed crystal 2, wherein one end of the seed crystal 2 is clamped by the seed chuck 1, the seed chuck 1 can adopt a material which is not easy to react with the seed crystal 2, the material of the seed crystal 2 is consistent with a single crystal material to be prepared, when the single crystal to be prepared is a calcium fluoride single crystal, the material of the seed crystal 2 is calcium fluoride, the seed chuck 1 can adopt high-purity graphite, and the high-purity graphite is relatively stable in a high-temperature environment and is not easy to react with the calcium fluoride.

Referring to fig. 1, a seed chuck 1 includes a seed rod 11 and an outer sleeve 12, one end of the outer sleeve 12 is connected to the seed rod 11 by screw, the other end is connected to a seed crystal 2, the outer sleeve 12 may have a cylindrical shape, the outer sleeve 12 includes a first sleeve 121 and a second sleeve 122, one end of the first sleeve 121 is connected to one end of the second sleeve 122, the first sleeve 121 and the second sleeve 122 are coaxially installed, an outer sidewall of one end of the second sleeve 122 remote from the first sleeve 121 has a chamfer 1224, and the chamfer 1224 may reduce a sharp portion at an edge of the outer sleeve 12, and may also reduce a mass of the outer sleeve 12.

Referring to fig. 2, one end of the first sleeve 121 is connected with the seed rod 11 through threads, an inner thread 1211 is formed on the inner side wall of the other end of the first sleeve 121, a third step 1223 is formed on the outer side wall of the second sleeve 122, the third step 1223 is abutted against one end, far away from the seed rod 11, of the first sleeve 121, an outer thread 1225 which can be matched with the inner thread 1211 is formed on the area, corresponding to the inner thread 1211, of the outer side wall of the second sleeve 122, the first sleeve 121 and the second sleeve 122 are connected through the matching of the inner thread 1211 and the outer thread 1225, the width of the third step 1223 can be consistent with the thickness of one end, far away from the seed rod 11, of the first sleeve 121 and the second sleeve 122, which are formed after being screwed, of the outer side wall of the outer sleeve 12 is flat, and protruding and sharp parts on the outer sleeve 12 can be reduced.

Referring to fig. 2, a first stepped hole 1221 is formed in the inner side of the second sleeve 122, the aperture of the first stepped hole 1221 near one end of the seed rod 11 is larger than that of the other end, a first step 1222 is formed on the hole wall of the first stepped hole 1221 due to the difference of apertures, holes on two sides of the first step 1222 can be cylindrical holes, the first stepped hole 1221 can be coaxial with the second sleeve 122, the cylindrical outer sleeve 12 and the first stepped hole 1221 formed by cylindrical holes with different apertures are beneficial to forming a uniform temperature field in the outer sleeve 12, and meanwhile, latent heat generated during crystallization can be uniformly released when being transferred to the outer sleeve 12 through the seed crystal 2, so that deformation of the outer sleeve 12 caused by uneven heat at each place during crystallization reaction can be reduced, and even cracks are generated on the outer sleeve 12 due to the difference of temperature.

Referring to fig. 2, the seed chuck 1 further includes a stop collar 13, where the stop collar 13 may be a circular ring, the stop collar 13 is located inside the outer sleeve 12, the stop collar 13 is in clearance fit with the second sleeve 122, and one end of the stop collar 13 abuts against the first step 1222. The inner side of the limiting ring 13 is provided with a second stepped hole 131, the aperture of the second stepped hole 131 near one end of the first sleeve 121 is larger than that of the other end, the hole wall of the second stepped hole 131 is provided with a second step 132 due to the aperture difference, and the second step 132 can be perpendicular to the hole wall of the second stepped hole 131.

Referring to fig. 3, the seed crystal 2 includes a mounting portion 21, a reducing portion 22, and a crystallization portion 23, one end of the reducing portion 22 is integrally formed with the mounting portion 21, the other end is integrally formed with the crystallization portion 23, an outer diameter of the mounting portion 21 is larger than an outer diameter of the crystallization portion 23, and an outer sidewall of the reducing portion 22 may be perpendicular to a central axis of the seed crystal 2.

Referring to fig. 4, the mounting portion 21 is mounted in the second stepped hole 131, the outer side wall of the reducing portion 22 is tightly attached to the second step 132, the spacing pad 3 is mounted on the end face of the seed crystal 2 at one end of the mounting portion 21, the height of the mounting portion 21 is smaller than the depth of the second stepped hole 131 near one end of the first sleeve 121, the spacing pad 3 is located in the second stepped hole 131, and the spacing ring 13 can also limit the spacing pad 3 in the radial direction of the spacing pad 3.

Referring to fig. 4, thermal expansion gaps 4 are left between the outer side wall of the mounting portion 21 and the hole wall of the second stepped hole 131 near one end of the first sleeve 121, and between the outer side wall of the crystallization portion 23 and the hole wall of the second stepped hole 131 far from one end of the first sleeve 121. The thermal expansion gap 4 may be calculated by calculating an expansion value of the outer diameter of the mounting portion 21 of the seed crystal 2 from normal temperature to seeding temperature according to the material of the seed crystal 2, calculating an expansion value of the inner diameter of the stop ring 13 from normal temperature to seeding temperature according to the material of the stop ring 13, and calculating a difference between the outer diameter of the mounting portion 21 or the crystallization portion 23 and the inner diameter of the stop ring 13 at normal temperature according to the expansion value of the outer diameter of the mounting portion 21 or the crystallization portion 23 and the expansion value of the inner diameter of the stop ring 13, wherein the difference is the value of the thermal expansion gap 4.

The implementation principle of the embodiment of the application is as follows: the limiting ring 13 is mounted on the first step 1222 of the second sleeve 122, then the seed crystal 2 passes through the limiting ring 13, the crystallization part 23 is arranged outside the second sleeve 122, the outer diameter of the variable diameter part 22 is abutted against the second step 132, the mounting part 21 is positioned in the limiting ring 13, the limiting gasket 3 is mounted in the limiting ring 13 and placed on the end face of the seed crystal 2 at one end of the mounting part 21, the first sleeve 121 and the second sleeve 122 are screwed tightly, and the first sleeve 121 is mounted at one end of the seed rod 11 through threads; the seed chuck 1 has larger diameter relative to the seed 2 and the seed rod 11, so that impurities such as volatile matters and the like caused by air flow in the direction of the seed rod 11 can be blocked by the upper surface of the seed chuck 1 when flowing in the direction of the seed 2, the seed 2 is protected, the seed 2 is not bonded by the volatile matters, the quality of the surface of the seed 2 during seeding is improved, and the quality of monocrystal crystals generated on the surface of the seed 2 is further improved; when the temperature of the seed crystal 2 and the seed chuck 1 rises in the crystallization reaction process, the seed crystal 2 and the seed chuck 1 are heated and expanded, and as a thermal expansion gap 4 is reserved between the seed crystal 2 and the seed chuck 1, the seed crystal 2 and the seed chuck 1 are mutually compressed after being heated and expanded, and the seed crystal 2 is fixed.

Example 2: referring to fig. 5, a seed clamping device used in a crystal growth apparatus, this embodiment differs from embodiment 1 in that: the second step 132 forms an included angle of 60 ° with the hole wall of the second stepped hole 131, and the second step 132 is inclined from the large-aperture end of the second stepped hole 131 to the small-aperture end of the second stepped hole 131, the outer side wall of the reducing portion 22 of the seed crystal 2 forms an included angle of 60 ° with the central axis direction of the seed crystal 2, and the outer side wall of the reducing portion 22 is inclined from the end connected with the mounting portion 21 to the end connected with the crystallization portion 23.

The implementation principle of the embodiment of the application is as follows: in the cold state, as the matching surface of the seed crystal 2 and the second step 132 is an inclined surface, the seed crystal 2 can be automatically centered under the action of dead weight, so that the central axis of the seed crystal 2 is aligned with the central axis of the limiting ring 13, the centering time of the seed crystal 2 can be reduced, and the production efficiency is improved.

Example 3: referring to fig. 6 and 7, the seed clamping device used in the crystal growth apparatus is different from embodiment 2 in that: the limiting ring 13 comprises two semicircular rings 133, each semicircular ring 133 is provided with a semicircular step 1331 at the same axial position of the semicircular ring 133 on the inner side wall, and planes on the side walls of the two semicircular rings 133 are oppositely abutted to form a ring.

The implementation principle of the embodiment of the application is as follows: install two semicircle rings 133 to the first step 1222 of second sleeve 122 during the installation, semicircle rings 133 easily production and convenient to detach, and when the wearing and tearing appear in needs spacing ring 13, can change the semicircle rings 133 that wearing and tearing position is located according to the position of wearing and tearing, can save material, improvement production efficiency.

The embodiments of this embodiment are all preferred embodiments of the present application, and are not intended to limit the scope of the present application, in which like parts are denoted by like reference numerals. Therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.

Claims

1. Seed clamping device who uses in crystal growth equipment, a serial communication port, including seed chuck (1) and seed (2), seed chuck (1) include seed pole (11), outside sleeve (12) and spacing ring (13), the one end of outside sleeve (12) with seed pole (11) can dismantle and be connected, the other end with seed (2) can dismantle and be connected, outside sleeve (12) inboard has first shoulder hole (1221), the aperture that first shoulder hole (1221) is close to seed pole (11) one end is greater than the aperture of the other end, the pore wall of first shoulder hole (1221) is formed with first step (1222) because the aperture difference, spacing ring (13) are located outside sleeve (12) are inside, spacing ring (13) with outside sleeve (12) clearance fit just the one end of spacing ring (13) with first step (1222) butt.

2. A seed crystal clamping device for use in a crystal growth apparatus according to claim 1, wherein the outer sleeve (12) comprises a first sleeve (121) and a second sleeve (122), one end of the first sleeve (121) is detachably connected to the seed rod (11), the other end is detachably connected to the second sleeve (122), and the first stepped hole (1221) is located inside the second sleeve (122).

3. A seed crystal clamping device used in a crystal growth apparatus according to claim 2, wherein a second stepped hole (131) is formed in the inner side of the limit ring (13), the aperture of the second stepped hole (131) near one end of the first sleeve (121) is larger than that of the other end, and a second step (132) is formed on the wall of the second stepped hole (131) due to the aperture difference.

4. A seed crystal clamping device for use in a crystal growth apparatus according to claim 3, characterised in that the outer side wall of the second sleeve (122) has a third step (1223), the third step (1223) being in abutment with an end of the first sleeve (121) remote from the seed rod (11).

5. A seed crystal clamping device used in a crystal growth apparatus according to claim 3, wherein the seed crystal (2) comprises a mounting portion (21), a reducing portion (22) and a crystallizing portion (23), one end of the reducing portion (22) is fixedly connected with the mounting portion (21), the other end is fixedly connected with the crystallizing portion (23), the outer diameter of the mounting portion (21) is larger than the outer diameter of the crystallizing portion (23), the mounting portion (21) is located in the second stepped hole (131), and the outer side wall of the reducing portion (22) is tightly attached to the second step (132).

6. A seed crystal clamping device for use in a crystal growth apparatus according to claim 5, wherein a spacing spacer (3) is mounted on an end face of the seed crystal (2) at one end of the mounting portion (21).

7. A seed crystal clamping device for use in a crystal growth apparatus according to claim 6, wherein the height of the mounting portion (21) is smaller than the depth of the second stepped hole (131) near one end of the first sleeve (121), and the limit spacer (3) is located in the second stepped hole (131).

8. The seed crystal clamping device used in the crystal growth apparatus according to claim 5, wherein a thermal expansion gap (4) is left between the outer side wall of the mounting portion (21) and the hole wall of the second stepped hole (131) near one end of the first sleeve (121) and between the outer side wall of the crystallization portion (23) and the hole wall of the second stepped hole (131) far from one end of the first sleeve (121).