CN211367796U - Straight-pull silicon single crystal furnace splicing guide cylinder - Google Patents
Straight-pull silicon single crystal furnace splicing guide cylinder Download PDFInfo
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- CN211367796U CN211367796U CN201921775434.3U CN201921775434U CN211367796U CN 211367796 U CN211367796 U CN 211367796U CN 201921775434 U CN201921775434 U CN 201921775434U CN 211367796 U CN211367796 U CN 211367796U
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Abstract
The utility model provides a straight-pull silicon single crystal furnace splicing guide cylinder, which comprises a first guide cylinder, a second guide cylinder, a connecting piece and a fixing piece, wherein the connecting piece is arranged between the first guide cylinder and the second guide cylinder, and two ends of the connecting piece are respectively in contact fit with the first guide cylinder and the second guide cylinder, so that the stress release is conveniently relieved; the fixing piece is connected with the first guide cylinder and the second guide cylinder respectively, so that the first guide cylinder and the second guide cylinder can be connected into a whole conveniently. The utility model has the advantages of simple structure, convenient use, convenient installation, disassembly and maintenance, split structure, and the guide cylinder adopts an upper and lower splicing structure, so that the height of the raw material is lower, the raw material consumption is less, and the manufacturing cost is reduced compared with the existing integrated guide cylinder during manufacturing; meanwhile, after the furnace platform is stopped, when the draft tube is reduced to the room temperature from high temperature, the splicing structure can relieve the stress release of the draft tube, prolong the service life of the draft tube, reduce the probability of generating cracks of the draft tube and reduce the manufacturing and production cost of the single crystal.
Description
Technical Field
The utility model belongs to the technical field of the vertical pulling single crystal, especially, relate to a vertical pulling silicon single crystal furnace concatenation draft tube.
Background
The czochralski method for growing single crystal silicon is the most widely applied technology for producing single crystal silicon at present, and the cost pressure is increased along with the market competition, so that the cost is reduced by reducing the price of a thermal field element by a single crystal silicon manufacturer. The guide cylinder is added to maintain the normal growth of the single crystal, so the guide cylinder becomes one of the important systems of the current czochralski crystal growing furnace. The guide shell mainly has the following functions:
firstly, isolating heat radiation of a heater to the single crystal, ensuring the temperature gradient required by the growth of the single crystal and ensuring the stable crystallization rate of the single crystal;
secondly, the flowing direction of the protective gas in the furnace is ensured, and the formation of vortex is avoided, so that the growth of the single crystal is not influenced;
the defects are as follows: the large-size thermal field guide cylinder is of a bowl-shaped structure, so that graphite raw materials required by processing are processed into round ingots with the height of 840mm and the diameter of 780mm, the consumed raw materials are large in specification, and the price is high. The structure of the guide shell is an integral structure, and when the guide shell is reduced to room temperature from high temperature after the furnace platform is stopped, the guide shell is easy to crack due to stress release.
SUMMERY OF THE UTILITY MODEL
In view of the above problem, the to-be-solved problem of the utility model is to provide a czochralski silicon single crystal stove concatenation draft tube uses when being applied to the czochralski single crystal, adopts split type draft tube, can alleviate the stress of the release of draft tube when reducing to the room temperature by high temperature, extension draft tube life.
In order to solve the technical problem, the utility model discloses a technical scheme is: a splicing guide shell of a czochralski silicon single crystal furnace comprises a first guide shell, a second guide shell, a connecting piece and a fixing piece, wherein,
the connecting piece is arranged between the first guide cylinder and the second guide cylinder, and two ends of the connecting piece are respectively in contact fit with the first guide cylinder and the second guide cylinder, so that the stress release is conveniently relieved;
the fixing piece is connected with the first guide cylinder and the second guide cylinder respectively, so that the first guide cylinder and the second guide cylinder can be connected into a whole conveniently.
Furthermore, the end part of one end of the first guide cylinder connected with the second guide cylinder is provided with a first bulge, the end part of one end of the second guide cylinder connected with the first guide cylinder is provided with a second bulge, and the first bulge and the second bulge are respectively spliced with the connecting piece.
Furthermore, a first groove and a second groove are respectively arranged at two ends of the connecting piece, the first groove is in plug-in fit with the first protrusion, and the second groove is in plug-in fit with the second protrusion.
Furthermore, a first clamping block is arranged on the side wall of one end, connected with the second guide cylinder, of the first guide cylinder, a second clamping block is arranged on the side wall of one end, connected with the first guide cylinder, of the second guide cylinder, and the first clamping block and the second clamping block are respectively connected with the fixing piece.
Further, the fixing member includes a first fixing member, a second fixing member and a locking member, wherein,
the first fixing piece is connected with the first clamping block, so that the first fixing piece is conveniently connected with the first guide cylinder;
the second fixing piece is connected with the second clamping block, so that the second fixing piece is conveniently connected with the second guide cylinder;
the first fixing piece and the second fixing piece are respectively connected with the locking piece, so that the first guide cylinder and the second guide cylinder are conveniently connected together.
Furthermore, the first fixing piece is provided with a first clamping hook, and the first clamping hook is clamped with the first clamping block.
Furthermore, the second fixing piece is provided with a second clamping hook, and the second clamping hook is clamped with the second clamping block.
Furthermore, the cross section of the connecting piece is H-shaped.
Furthermore, one end of the first guide cylinder, which is far away from the end connected with the second guide cylinder, is provided with a lug, so that the first guide cylinder is conveniently connected with a lifting device.
Due to the adoption of the technical scheme, the spliced guide cylinder of the czochralski crystal growing furnace is simple in structure, convenient to use, convenient to mount, dismount and maintain, and low in raw material consumption and manufacturing cost, and compared with the existing integrated guide cylinder, the guide cylinder is of a split structure and adopts an up-and-down spliced structure during manufacturing; meanwhile, after the furnace platform is stopped, when the draft tube is reduced to the room temperature from high temperature, the splicing structure can relieve the stress release of the draft tube, prolong the service life of the draft tube, reduce the probability of generating cracks of the draft tube and reduce the manufacturing and production cost of the single crystal.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention;
fig. 2 is an exploded schematic view of an embodiment of the present invention.
In the figure:
1. first draft tube 2, second draft tube 3 and connecting piece
4. Fixing piece 10, first protrusion 11 and first clamping block
20. Second protrusion 21, second latch 40, locking member
41. First fixing part 42 and second fixing part
Detailed Description
The invention will be further described with reference to the accompanying drawings and specific embodiments.
FIG. 1 shows a schematic structural diagram of an embodiment of the present invention, specifically showing the structure of the embodiment, the embodiment relates to a splicing draft tube of a Czochralski silicon single crystal furnace, which is used for Czochralski single crystal, isolating heat radiation of a heater to the single crystal, ensuring the temperature gradient required by the growth of the single crystal and ensuring the stable crystallization rate of the single crystal; the flowing direction of the protective gas in the furnace is ensured, and the formation of vortex to influence the growth of the single crystal is avoided; the guide cylinder is split, the connecting piece and the fixing piece are connected into a whole, so that after the furnace platform is stopped, when the guide cylinder is reduced to room temperature from high temperature, the stress of the guide cylinder is released, the service life of the guide cylinder is prolonged, and cracks are avoided.
A splicing guide cylinder of a czochralski silicon single crystal furnace is shown in figures 1 and 2 and comprises a first guide cylinder 1, a second guide cylinder 2, a connecting piece 3 and a fixing piece 4, wherein the connecting piece 3 is arranged between the first guide cylinder 1 and the second guide cylinder 2, and two ends of the connecting piece 3 are respectively contacted with the first guide cylinder 1 and the second guide cylinder 2, so that the stress release is conveniently relieved; the fixing piece 4 is respectively connected with the first guide cylinder 1 and the second guide cylinder 2, so that the first guide cylinder 1 and the second guide cylinder 2 are connected into a whole, the first guide cylinder 1 and the second guide cylinder 2 are connected together through the fixing piece 4 to form a guide cylinder integral structure, and when the first guide cylinder 1 and the second guide cylinder 2 are connected and contacted, the connecting piece 3 is arranged at the contact position, and the stress release of the spliced guide cylinder in use is relieved.
Foretell first draft tube 1 is cylindrical structure, keeps away from the one end of being connected with second draft tube 2 at first draft tube 1 and is equipped with the lug, is convenient for be connected with hoisting device, and the other end of first draft tube 1 is connected through connecting piece 3 with second draft tube 2, and second draft tube 2 is the annular structure, and is the same with current integral type draft tube substructure, and it is no longer repeated here.
Specifically, the end of the first guide cylinder 1 connected to the second guide cylinder 2 is provided with a first protrusion 10, the end of the second guide cylinder 2 connected to the first guide cylinder 1 is provided with a second protrusion 20, the first protrusion 10 and the second protrusion 20 are respectively inserted into the connecting piece 3, the first protrusion 10 is of a cylindrical structure, the first protrusion 10 is fixedly connected to the end of the first guide cylinder 1 connected to the second guide cylinder 2, the first protrusion 10 is fixedly connected to the end of the first guide cylinder 1 by a connecting piece such as a screw, or is integrally formed, or is in other fixed connection modes, and is selected according to actual requirements, and no specific requirement is made here; the second protrusion 20 is of a cylindrical structure, and the second protrusion 20 is fixedly connected with one end of the second guide cylinder 2 connected with the first guide cylinder 1, and the fixed connection mode of the second protrusion 20 and the second guide cylinder 2 may be through a connecting piece such as a screw, or integrally formed, or other fixed connection modes, and is selected according to actual requirements, and no specific requirement is made here. Preferably, the second protrusion 20 corresponds to the first protrusion 10, so that the first protrusion 10 and the second protrusion 20 are in contact fit through a connector to be clamped.
The two ends of the connecting piece 3 are respectively provided with a first groove and a second groove, the first groove is in plug-in fit with the first protrusion 10, the second groove is in plug-in fit with the second protrusion 20, the shape and the size of the first groove are matched with the shape and the size of the first protrusion 10, the shape and the size of the second groove are matched with the shape and the size of the second protrusion 20, the first protrusion 10 can be conveniently inserted into the first groove, the second protrusion 20 can be conveniently inserted into the second groove, and the first guide cylinder 1 and the second guide cylinder 2 can be in contact fit through the connecting piece 3 and are connected together.
The connecting piece 3 is made of the same material as the first guide shell 1 and the second guide shell 2 and is made of graphite.
Preferably, the connecting member 3 has a ring-shaped structure, and the cross-sectional shape of the connecting member 3 is H-shaped.
The side wall of one end of the first guide cylinder 1 connected with the second guide cylinder 2 is provided with a first fixture block 11, the side wall of one end of the second guide cylinder 2 connected with the first guide cylinder 1 is provided with a second fixture block 21, and the first fixture block 11 and the second fixture block 21 are respectively connected with the fixing part 4. The side wall of one end of the first fixture block 11, which is connected with the first guide cylinder 1 and the second guide cylinder 2, is flush with the end of the first guide cylinder 1, so that the first protrusion 10 is conveniently inserted into the connecting piece 3, the other end of the first fixture block 11 is a step surface, the lower surface of the end of the first fixture block 11 is connected with the side wall of the first guide cylinder 1, so that the first fixture block 11 and the side wall of the first guide cylinder 1 form a groove, and the first fixture block 10 is conveniently clamped with the fixing piece 4.
The second fixture block 21 has the same structure as the first fixture block 11, the second fixture block 21 is arranged on the side wall of one end of the second guide cylinder 2 connected with the first guide cylinder 1, and the end part of the second fixture block 21 is flush with the end part of the second guide cylinder 2, so that the second protrusion 20 is conveniently inserted into the connecting piece 3, the second fixture block 21 is symmetrically arranged with the first fixture block 11, the end surface of the other end of the second fixture block 21 is a stepped surface, and the lower surface of the second fixture block 21 is connected with the side wall of the second guide cylinder 2, so that the second fixture block 21 and the side wall of the second guide cylinder 2 form a groove, and the second fixture block 21 is conveniently clamped with the fixing piece 4.
The fixing member 4 comprises a first fixing member 41, a second fixing member 42 and a locking member 40, wherein the first fixing member 41 is connected with the first fixture block 11, so that the first fixing member 41 is conveniently connected with the first guide cylinder 1; the second fixing piece 42 is connected with the second clamping block 21, so that the second fixing piece 42 is conveniently connected with the second guide cylinder 2; the first fixing piece 41 and the second fixing piece 42 are respectively connected with the locking piece 40, so that the first guide cylinder 1 and the second guide cylinder 2 are conveniently connected together to form a guide cylinder whole; namely, the first fixing member 41 is connected with the first clamping block 11 in a clamping manner, the second fixing member 42 is connected with the second clamping block 21 in a clamping manner, and the first fixing member 41 and the second fixing member 42 are connected and locked by the locking member 40, so that the first guide cylinder 1 and the second guide cylinder 2 are connected together to form a guide cylinder main body structure.
The first fixing member 41 is provided with a first hook, and the first hook is connected with the first block 11 in a clamping manner. Specifically, first mounting 41 includes locking connection portion and joint portion, and one side of locking connection portion is located to joint portion, and joint portion and locking connection portion fixed connection, this locking connection portion be cylindric structure, and this locking connection portion are equipped with the through-hole, and the retaining member of being convenient for passes this through-hole and is connected with first mounting 41, and the inner wall of this through-hole can be equipped with the screw thread, also can not be equipped with the screw thread, selects according to the actual demand, does not do the concrete requirement here.
The clamping part is a first clamping hook, the shape of the first clamping hook is matched with that of the groove of the first clamping block 11, and the first clamping hook is conveniently clamped with the first clamping block 11.
The second fixing member 42 has a similar structure to the first fixing member 41, except that a through hole of the locking member connecting portion of the second fixing block 42 is provided with a thread, so that the second fixing member 42 is connected with the locking member 40 through the thread, the second fixing member 42 is provided with a second hook, and the second hook is connected with the second locking block 21 in a clamping manner.
Retaining member 40 is the bolt, the bolt passes through the through-hole of first mounting 41 respectively, insert passing through of second mounting 42, be connected with second mounting 42 through the screw thread, lock first mounting 41 and second mounting 42, make first mounting 41 and second mounting 42 be connected as a whole, and first mounting 41 and the first fixture block 11 joint of first draft tube 1, second mounting 42 and the second fixture block 21 joint of second draft tube 2, and then be connected as a whole first draft tube 1 and second draft tube 2, constitute the draft tube wholly, be convenient for carry out czochralski crystal.
When the spliced draft tube of the czochralski silicon single crystal furnace is used, the connecting piece 3 is placed between the first draft tube 1 and the second draft tube 2, so that the first bulge 10 of the first draft tube 1 is inserted into the groove at one end of the connecting piece 3, and the second bulge 20 of the second draft tube 2 is inserted into the other groove of the connecting piece 3, so that the first draft tube 1 and the second draft tube 2 are connected together through the connecting piece 3; meanwhile, the first fixing piece 41 is clamped with the first clamping block 11 of the first guide cylinder 1, the second fixing piece 42 is clamped with the second clamping block 21 of the second guide cylinder 2, the first fixing piece 41 and the second fixing piece 42 are connected together through the locking piece 40, the first guide cylinder 1 and the second guide cylinder 2 are connected into a whole to form a guide cylinder whole, and the guide cylinder whole is installed in a Czochralski single crystal furnace to carry out Czochralski single crystal growth.
Due to the adoption of the technical scheme, the spliced guide cylinder of the czochralski crystal growing furnace is simple in structure, convenient to use, convenient to mount, dismount and maintain, and low in raw material consumption and manufacturing cost, and compared with the existing integrated guide cylinder, the guide cylinder is of a split structure and adopts an up-and-down spliced structure during manufacturing; meanwhile, after the furnace platform is stopped, when the draft tube is reduced to the room temperature from high temperature, the splicing structure can relieve the stress release of the draft tube, prolong the service life of the draft tube, reduce the probability of generating cracks of the draft tube and reduce the manufacturing and production cost of the single crystal.
The embodiments of the present invention have been described in detail, but the description is only for the preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.
Claims (9)
1. The utility model provides a czochralski silicon single crystal furnace concatenation draft tube which characterized in that: comprises a first guide shell, a second guide shell, a connecting piece and a fixing piece, wherein,
the connecting piece is arranged between the first guide cylinder and the second guide cylinder, and two ends of the connecting piece are respectively in contact fit with the first guide cylinder and the second guide cylinder, so that the stress release is conveniently relieved;
the fixing piece is respectively connected with the first guide cylinder and the second guide cylinder, so that the first guide cylinder and the second guide cylinder are connected into a whole.
2. The splicing guide cylinder of the czochralski silicon single crystal furnace according to claim 1, is characterized in that: the end part of one end of the first guide cylinder connected with the second guide cylinder is provided with a first bulge, the end part of one end of the second guide cylinder connected with the first guide cylinder is provided with a second bulge, and the first bulge and the second bulge are respectively connected with the connecting piece in an inserting mode.
3. The splicing guide cylinder of the czochralski silicon single crystal furnace according to claim 2, is characterized in that: the two ends of the connecting piece are respectively provided with a first groove and a second groove, the first groove is in splicing fit with the first protrusion, and the second groove is in splicing fit with the second protrusion.
4. The splicing guide cylinder of the czochralski silicon single crystal furnace according to claim 2 or 3, is characterized in that: the side wall of one end, connected with the second guide cylinder, of the first guide cylinder is provided with a first fixture block, the side wall of one end, connected with the first guide cylinder, of the second guide cylinder is provided with a second fixture block, and the first fixture block and the second fixture block are connected with the fixing piece respectively.
5. The splicing guide cylinder of the czochralski silicon single crystal furnace according to claim 4, is characterized in that: the fixing piece comprises a first fixing piece, a second fixing piece and a locking piece, wherein,
the first fixing piece is connected with the first clamping block, so that the first fixing piece is conveniently connected with the first guide cylinder;
the second fixing piece is connected with the second clamping block, so that the second fixing piece is conveniently connected with the second guide cylinder;
the first fixing piece and the second fixing piece are respectively connected with the locking piece, so that the first guide cylinder and the second guide cylinder are connected together.
6. The splicing guide cylinder of the czochralski silicon single crystal furnace according to claim 5, is characterized in that: the first fixing piece is provided with a first clamping hook, and the first clamping hook is clamped with the first clamping block.
7. The splicing guide cylinder of the czochralski silicon single crystal furnace according to claim 5 or 6, is characterized in that: the second fixing piece is provided with a second clamping hook, and the second clamping hook is clamped with the second clamping block.
8. The splicing guide cylinder of the czochralski silicon single crystal furnace according to any one of claims 1 to 3, is characterized in that: the cross section of the connecting piece is H-shaped.
9. The splicing guide cylinder of the czochralski silicon single crystal furnace according to claim 7, is characterized in that: and a lug is arranged at one end of the first guide cylinder, which is far away from the end connected with the second guide cylinder, so that the first guide cylinder is conveniently connected with a lifting device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921775434.3U CN211367796U (en) | 2019-10-22 | 2019-10-22 | Straight-pull silicon single crystal furnace splicing guide cylinder |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921775434.3U CN211367796U (en) | 2019-10-22 | 2019-10-22 | Straight-pull silicon single crystal furnace splicing guide cylinder |
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| Publication Number | Publication Date |
|---|---|
| CN211367796U true CN211367796U (en) | 2020-08-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921775434.3U Active CN211367796U (en) | 2019-10-22 | 2019-10-22 | Straight-pull silicon single crystal furnace splicing guide cylinder |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113403675A (en) * | 2021-06-21 | 2021-09-17 | 西安奕斯伟硅片技术有限公司 | Guide cylinder and crystal pulling furnace |
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2019
- 2019-10-22 CN CN201921775434.3U patent/CN211367796U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113403675A (en) * | 2021-06-21 | 2021-09-17 | 西安奕斯伟硅片技术有限公司 | Guide cylinder and crystal pulling furnace |
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