CN216514248U - Sectional type outer guide cylinder for single crystal furnace - Google Patents
Sectional type outer guide cylinder for single crystal furnace Download PDFInfo
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- CN216514248U CN216514248U CN202121848240.9U CN202121848240U CN216514248U CN 216514248 U CN216514248 U CN 216514248U CN 202121848240 U CN202121848240 U CN 202121848240U CN 216514248 U CN216514248 U CN 216514248U
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Abstract
The utility model relates to a sectional outer draft tube for a single crystal furnace, which comprises: the device comprises a cylinder body (1) and a cylinder bottom (2) arranged at the lower end of the cylinder body (1); the barrel bottom (2) is coaxially and detachably connected with the barrel body (1). When the bottom of the guide shell is damaged and failed, only the bottom of the guide shell needs to be replaced, the whole outer guide shell cannot be scrapped, the use cost of the guide shell is effectively reduced, and the service life of the guide shell is prolonged.
Description
Technical Field
The utility model relates to an outer guide cylinder, in particular to a sectional outer guide cylinder for a single crystal furnace.
Background
About 85% of single crystal silicon is produced by the Czochralski method (CZ method). Silicon crystal bar size is becoming bigger day by day, in order to guarantee the quality of silicon crystal, the energy saving reduces carbon dioxide and discharges, silicon crystal growth furnace thermal field generally uses draft tube to play the high-temperature gas water conservancy diversion effect. Therefore, it is required to have good heat resistance and certain mechanical properties; and the silicon rod pulling device also has heat preservation and heat insulation properties so as to ensure that the silicon liquid in the crucible has proper temperature gradient along the radial direction and the silicon liquid in the pulled silicon rod and the crucible along the axial direction. In addition, the guide cylinder can reduce the flow vortex cells of argon gas at the upper part of the furnace body, thereby reducing the deposition of SiO at the upper part of the single crystal furnace and ensuring that the pulled single crystal silicon rod has high quality.
At present, most of guide cylinders of czochralski silicon crystal growing furnaces are combined guide cylinders consisting of thin-walled conical outer graphite cylinders, felt body sandwiches and thin-walled conical inner graphite cylinders. Because the graphite product has low strength, poor high-temperature thermal shock performance, high thermal conductivity coefficient, short service life (generally about 3 months), and frequent replacement; in addition, the crystal pulling size of the existing monocrystalline silicon is larger and larger, and the size of the guide cylinder is required to be increased, so that the consumption of the graphite guide cylinder material is increased, the yield is low in the processing process of the graphite guide cylinder, the graphite guide cylinder is easy to damage in the transportation, carrying and using processes, and the requirements of the CZ czochralski method monocrystalline silicon production on the service performance and the reliability of the guide cylinder are more and more difficult to meet.
In addition, the guide cylinder made of the carbon-carbon composite material is used for controlling the temperature gradient of the thermal field and guiding argon flow in the single crystal pulling thermal field; in the crystal pulling process, the guide cylinder is corroded by silicon vapor, silicon carbide is easily formed at the lower part of the guide cylinder, carbon fibers are not silicided, and then the silicon carbide is small in adhesive force on the surface of the guide cylinder and easily falls into a fused silicon material of a quartz crucible, so that the carbon content of a silicon rod is high, even the silicon rod grows into polycrystalline silicon, and the guide cylinder made of the carbon-carbon composite material needs to be scrapped integrally after being corroded in order to ensure the crystal pulling purity and the crystal forming rate. At present, a carbon-carbon composite guide cylinder is mostly adopted in a domestic monocrystalline silicon furnace to realize the functions of controlling the temperature gradient of a thermal field and guiding the flow of protective gas argon, the average time of integral scrapping caused by corrosion of the lower part of the guide cylinder is 4-8 months, but the service life of a cylinder part of the guide cylinder which is not corroded can be more than 60 months on average. Therefore, the corrosion of the lower part of the guide shell is the main reason for scrapping the whole guide shell, so that the production cost is high. In view of the above, it is necessary to design a split guide cylinder for a single crystal silicon furnace.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a sectional type outer guide cylinder for a single crystal furnace, which solves the problem of short service life of the outer guide cylinder.
In order to achieve the above object, the present invention provides a sectional outer draft tube for a single crystal furnace, comprising: the barrel is arranged at the barrel bottom at the lower end of the barrel;
the barrel bottom is coaxially and detachably connected with the barrel body.
According to one aspect of the utility model, the cartridge includes a cartridge wall portion, a coupling lug, and a transition portion;
the connecting lug is arranged on the outer side of the upper end of the cylindrical wall part;
the transition part is arranged at the lower end of the cylindrical wall part;
the cylindrical wall part and the transition part are both arranged coaxially in an annular manner;
the barrel bottom and the transition part are detachably and coaxially connected.
According to one aspect of the utility model, the transition portion is a tapered annular structure having a large diameter end fixedly connected to the lower end of the wall portion, and the bottom bearing is detachably connected to the small diameter end of the transition portion.
According to one aspect of the utility model, the base comprises: the bearing part, the limiting part and the leading-out part;
the bearing part, the limiting part and the leading-out part are all in a conical annular structure and are coaxially arranged in sequence;
the small-diameter end of the limiting part is connected with the small-diameter end of the bearing part, and the large-diameter end of the limiting part is connected with the large-diameter end of the leading-out part;
the small-diameter end of the guiding part is bent to form a tapered surrounding edge towards the direction close to the large-diameter end of the guiding part, and the large-diameter end of the tapered surrounding edge is a free end.
According to one aspect of the utility model, the outer side face of the bearing part bears against the inner side face of the transition part;
the outer side surface of the limiting part is in contact with the side surface of the end part of the small-diameter end of the transition part.
According to one aspect of the utility model, the taper of the bearing portion is the same as the taper of the lead-out portion;
the taper of the limiting part is complementary with that of the bearing part.
According to one aspect of the utility model, a mounting groove is arranged at the position where the transition part is contacted with the bearing part, and a first connecting hole is arranged on the mounting groove;
the bearing part is arranged in the mounting groove in a bearing way, and a second connecting hole is formed in the bearing part and corresponds to the first connecting hole;
and connecting pieces are adopted to be connected with the second connecting holes and the first connecting holes and used for fixing the bearing parts.
According to one aspect of the utility model, the barrel is made of a carbon-carbon composite material;
the connecting piece is made of one of carbon-carbon composite materials and molybdenum;
the cylinder bottom is made of one of molybdenum, tungsten and iridium;
the density of the carbon-carbon composite material is greater than or equal to 1.3g/cm3The bending strength is greater than or equal to 80 MPa.
According to one aspect of the utility model, the diameter of the connector is 6mm to 10 mm;
the number of the first connecting holes is 3 to 10;
the number of the connecting pieces is 3 to 10.
According to one aspect of the utility model, the surface of the cylinder is provided with an oxidation resistant coating;
the thickness of the oxidation resistant coating is 4 to 100 μm.
According to the scheme of the utility model, when the bottom of the guide shell is damaged and fails, only the shell bottom needs to be replaced, the whole outer guide shell cannot be scrapped, the use cost of the guide shell is effectively reduced, and the service life of the guide shell is prolonged.
According to one scheme of the utility model, the cylinder bottom is made of one of a molybdenum plate, a tungsten plate and an iridium plate, so that the carbon content of the silicon rod can be reduced, and the crystal pulling purity and the crystal forming rate can be ensured.
According to one scheme of the utility model, the bearing part, the limiting part and the leading-out part are sequentially connected in a conical ring shape, so that a bent limiting connection structure is formed at the position of the cylinder bottom in line connection with the transition part, the cylinder bottom can be more accurately and stably arranged on the transition part, and the structural precision of the whole outer guide cylinder is ensured. Meanwhile, the sealing function can be achieved under the condition of realizing stable connection.
According to one scheme of the utility model, the bearing area of the cylinder bottom is effectively increased by adopting the bearing part with the whole outer side surface of the bearing part in contact with the inner side surface of the transition part, so that the installation stability of the cylinder bottom is ensured.
According to one scheme of the utility model, the bearing part is borne on the transition part, and the same taper is arranged to ensure that the bearing part, the leading-out part and the transition part are inclined consistently, so that the stable and continuous outflow is facilitated. In addition, the taper of the limiting part and the taper of the bearing part are complementary, so that the outer side surface of the limiting part and the outer side surface of the bearing part can be kept vertical, and the limiting part and the outer side surface of the bearing part are effectively in close fit with the end part of the transition part.
According to one scheme of the utility model, the transition part is provided with the mounting groove, so that the bearing part can be embedded into the mounting groove, the inner side surface of the bearing part is flush and continuous with the inner side surface of the transition part, and the stable and continuous outflow of the whole outer guide cylinder is ensured.
According to one scheme of the utility model, the thickness of the anti-oxidation coating is set within the range of 4-100 μm, so that the anti-oxidation performance of the whole outer guide cylinder is effectively ensured, and the scheme is favorable for ensuring the service life of the scheme.
Drawings
Fig. 1 is a structural view schematically showing a segmented outer guide shell for a single crystal furnace according to an embodiment of the present invention;
FIG. 2 is a block diagram schematically illustrating a cartridge according to an embodiment of the present invention;
FIG. 3 is a block diagram schematically illustrating a cartridge base according to an embodiment of the present invention;
fig. 4 is a top view schematically illustrating a bottom of a can according to an embodiment of the present invention.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the utility model, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
In describing embodiments of the present invention, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship that is based on the orientation or positional relationship shown in the associated drawings, which is for convenience and simplicity of description only, and does not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, the above-described terms should not be construed as limiting the present invention.
The present invention is described in detail below with reference to the drawings and the specific embodiments, which are not repeated herein, but the embodiments of the present invention are not limited to the following embodiments.
As shown in fig. 1, according to an embodiment of the present invention, the segmented outer baffle for a single crystal furnace of the present invention includes: the barrel 1 is arranged at the barrel bottom 2 at the lower end of the barrel 1. In the present embodiment, the bottom 2 is coaxially and detachably connected to the cylindrical body 1.
Through the arrangement, the outer guide cylinder is of the segmented structure, so that one part can be disassembled and replaced under the condition of damage, and the maintainability and the use cost of the utility model are effectively improved.
Referring to fig. 1 and 2, according to one embodiment of the present invention, the barrel 1 includes a barrel wall 11, a coupling lug 12 and a transition portion 13. In the present embodiment, the engaging lug 12 is provided outside the upper end of the cylindrical wall portion 11; the transition portion 13 is provided at the lower end of the cylindrical wall portion 11. In the present embodiment, the cylindrical wall portion 11 and the transition portion 13 are both disposed coaxially in an annular shape. In the present embodiment, the bottom 2 and the transition portion 13 are detachably and coaxially connected.
Referring to fig. 1 and 2, according to one embodiment of the present invention, the transition portion 13 is a tapered annular structure, the large diameter end of which is fixedly connected to the lower end of the cylindrical wall portion 11, and the cylindrical bottom 2 is detachably connected to the small diameter end of the transition portion 13. In the present embodiment, the large diameter section of the transition portion 13 is fixedly connected to the lower end of the cylindrical wall portion 11 by an arc-shaped structure.
As shown in fig. 3, according to an embodiment of the present invention, the bottom 2 includes: a bearing part 21, a limiting part 22 and a leading-out part 23. In the present embodiment, the bearing portion 21, the stopper portion 22, and the lead-out portion 23 are all of a tapered annular structure, and are coaxially provided in this order. In the present embodiment, the small diameter end of the stopper portion 22 is connected to the small diameter end of the receiving portion 21, and the large diameter end of the stopper portion 22 is connected to the large diameter end of the lead-out portion 23.
Through the arrangement, the bearing portion 21, the limiting portion 22 and the guiding portion 23 are sequentially connected in a conical ring shape, so that the barrel bottom 2 forms a bent limiting connection structure at the position connected with the line of the transition portion, the barrel bottom 2 can be more accurately and stably installed on the transition portion 13, and the structural precision of the whole outer guide barrel is guaranteed. Meanwhile, the sealing function can be achieved under the condition of realizing stable connection.
In the present embodiment, the small diameter end of the lead-out portion 23 is bent in a direction close to the large diameter end thereof to form the tapered surrounding edge 231, and the large diameter end of the tapered surrounding edge 231 is a free end and has a structure with a large top and a small bottom. In the present embodiment, the lead-out passage is surrounded by the tapered surrounding edge 231 at the lower end of the lead-out portion 23.
In the present embodiment, the bottom 2 can be integrally formed by stamping,
as shown in fig. 1, 2, 3 and 4, according to one embodiment of the present invention, the outer side surface of the bearing portion 21 bears against the inner side surface of the transition portion 13. In the present embodiment, the outer side surface of the stopper portion 22 is provided in contact with the end side surface of the small-diameter end of the transition portion 13.
Through the arrangement, the bearing area of the cylinder bottom 2 is effectively increased by adopting the bearing of the contact of the whole outer side surface of the bearing part 21 and the inner side surface of the transition part 13, and the installation stability of the cylinder bottom 2 is further ensured.
As shown in fig. 1, 2, 3 and 4, according to an embodiment of the present invention, the taper of the bearing portion 21 is the same as the taper of the leading portion 23. In the present embodiment, the taper of the stopper portion 22 is complementary to the taper of the bearing portion 21.
In the present embodiment, the outer side surface of the leading-out portion 23 of the tube bottom 2 and the outer side surface of the transition portion 13 are on the same plane, so that the continuity of the whole outer guide tube on the outer side surface of the lower end is ensured.
With the arrangement, the bearing part 21 is borne on the transition part 13, and the same taper is arranged to ensure that the bearing part 21, the leading-out part 23 and the transition part 13 are inclined uniformly, so that the stable and continuous outflow is facilitated. In addition, by setting the taper of the limiting part 22 and the taper of the bearing part 21 to be complementary, it can be ensured that the outer side surface of the limiting part 22 and the outer side surface of the bearing part 21 are kept perpendicular, so that the limiting part and the bearing part are effectively tightly matched with the end part of the transition part 13.
Referring to fig. 1, 2, 3 and 4, according to an embodiment of the present invention, a mounting groove 131 is provided at a position where the transition portion 13 contacts the bearing portion 21, and a first connection hole 132 is provided on the mounting groove 131. In the present embodiment, the support portion 21 is supported in the mounting groove 131, and the second connection hole 211 is provided on the support portion 21 corresponding to the first connection hole 132; the second connection hole 211 and the first connection hole 132 are connected with a connection member a for fixing the bearing portion 21. In the present embodiment, the connection a is a threaded connection.
Through the arrangement, the transition part 13 is provided with the mounting groove 131, so that the bearing part 21 can be embedded into the mounting groove 131, the inner side surface of the bearing part 21 is flush and continuous with the inner side surface of the transition part 13, and the stable and continuous outflow of the whole outer guide cylinder is ensured.
According to one embodiment of the present invention, the cylinder 1 is made of a carbon-carbon composite material. In the embodiment, the connecting piece a is made of one of carbon-carbon composite material and molybdenum; the connecting piece a is favorable for further reducing the carbon content of the silicon rod and ensuring the crystal pulling purity and the crystal forming rate.
In the present embodiment, the bottom 2 is made of one of molybdenum, tungsten, and iridium. In the present embodiment, the density of the carbon-carbon composite material is 1.3g/cm or more3The bending strength is greater than or equal to 80 MPa.
Through the arrangement, the structural strength and the service life of the utility model are effectively ensured.
According to one embodiment of the utility model, the diameter of the connecting piece a is 6mm to 10 mm. In the present embodiment, the diameter of the connecting member a is preferably 6mm or 8 mm.
In the present embodiment, the number of the first connection holes 132 is 3 to 10; preferably, the number of the first connection holes 132 may be set to 3, 4, 6, or 8. Correspondingly, the number of the connecting pieces a is 3 to 10; preferably, the number of the connecting members a may be set to 3, 4, 6 or 8.
According to one embodiment of the utility model, the surface of the cylinder 1 is provided with an oxidation resistant coating. In this embodiment, the oxidation resistant coating is a SiC coating. In the present embodiment, the thickness of the oxidation resistant coating layer is 4 μm to 100 μm.
Through the arrangement, the thickness of the anti-oxidation coating is set within the range from 4 mu m to 100 mu m, so that the anti-oxidation performance of the whole outer guide cylinder is effectively ensured, and the scheme is favorable for ensuring the service life of the scheme.
The foregoing is merely exemplary of particular aspects of the present invention and devices and structures not specifically described herein are understood to be those of ordinary skill in the art and are intended to be implemented in such conventional ways.
The above description is only one embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A sectional type outer guide cylinder for a single crystal furnace is characterized by comprising: the cylinder body (1) is arranged at the cylinder bottom (2) at the lower end of the cylinder body (1);
the cylinder bottom (2) is coaxially and detachably connected with the cylinder body (1);
the cylinder body (1) comprises a cylinder wall part (11), a connecting lug (12) and a transition part (13);
the connecting lug (12) is arranged on the outer side of the upper end of the cylindrical wall part (11);
the transition part (13) is arranged at the lower end of the cylindrical wall part (11);
the cylindrical wall part (11) and the transition part (13) are both arranged coaxially in an annular manner;
the barrel bottom (2) is detachably and coaxially connected with the transition part (13);
the transition part (13) is a conical annular structure, the large-diameter end of the transition part is fixedly connected with the lower end of the cylinder wall part (11), and the cylinder bottom (2) is supported against the small-diameter end of the transition part (13) and is detachably connected with the small-diameter end of the transition part;
the bottom (2) comprises: a bearing part (21), a limiting part (22) and a leading-out part (23);
the bearing part (21), the limiting part (22) and the leading-out part (23) are all in a conical annular structure and are sequentially and coaxially arranged;
the small-diameter end of the limiting part (22) is connected with the small-diameter end of the bearing part (21), and the large-diameter end of the limiting part (22) is connected with the large-diameter end of the leading-out part (23);
the outer side surface of the bearing part (21) bears against the inner side surface of the transition part (13);
the outer side surface of the limiting part (22) is in contact with the side surface of the end part of the small-diameter end of the transition part (13).
2. The segmented outer baffle for the single crystal furnace as claimed in claim 1, wherein the small diameter end of the guiding part (23) is bent to form a tapered surrounding edge (231) in a direction close to the large diameter end thereof, and the large diameter end of the tapered surrounding edge (231) is a free end.
3. The sectional outer guide shell for the single crystal furnace according to claim 2, wherein the taper of the bearing portion (21) is the same as the taper of the leading-out portion (23);
the taper of the limiting part (22) is complementary with that of the bearing part (21).
4. The sectional outer guide shell for the single crystal furnace according to claim 3, wherein a mounting groove (131) is formed at a position where the transition part (13) contacts the bearing part (21), and a first connection hole (132) is formed in the mounting groove (131);
the bearing part (21) is arranged in the mounting groove (131) in a bearing way, and a second connecting hole (211) is formed in the bearing part (21) and corresponds to the first connecting hole (132);
and connecting pieces (a) are adopted to be connected with the second connecting holes (211) and the first connecting holes (132) and used for fixing the bearing part (21).
5. The sectional outer draft tube for the single crystal furnace according to claim 4, wherein the tube body (1) is made of carbon-carbon composite material;
the connecting piece (a) is made of one of carbon-carbon composite materials and molybdenum;
the cylinder bottom (2) is made of one of molybdenum, tungsten and iridium;
the density of the carbon-carbon composite material is greater than or equal to 1.3g/cm3The bending strength is greater than or equal to 80 MPa.
6. The sectional outer draft tube for single crystal furnaces according to claim 5, wherein the diameter of the connecting piece (a) is 6mm to 10 mm;
the number of the first connection holes (132) is 3 to 10;
the number of the connecting pieces (a) is 3 to 10.
7. The sectional outer draft tube for the single crystal furnace according to any one of claims 4 to 6, wherein the surface of the tube body (1) is provided with an oxidation resistant coating;
the thickness of the oxidation resistant coating is 4 to 100 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121848240.9U CN216514248U (en) | 2021-08-09 | 2021-08-09 | Sectional type outer guide cylinder for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121848240.9U CN216514248U (en) | 2021-08-09 | 2021-08-09 | Sectional type outer guide cylinder for single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216514248U true CN216514248U (en) | 2022-05-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121848240.9U Active CN216514248U (en) | 2021-08-09 | 2021-08-09 | Sectional type outer guide cylinder for single crystal furnace |
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| Country | Link |
|---|---|
| CN (1) | CN216514248U (en) |
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2021
- 2021-08-09 CN CN202121848240.9U patent/CN216514248U/en active Active
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