CN220364620U - Thermal field split type outer guide cylinder for producing single crystal based on Czochralski method - Google Patents
Thermal field split type outer guide cylinder for producing single crystal based on Czochralski method Download PDFInfo
- Publication number
- CN220364620U CN220364620U CN202322359587.2U CN202322359587U CN220364620U CN 220364620 U CN220364620 U CN 220364620U CN 202322359587 U CN202322359587 U CN 202322359587U CN 220364620 U CN220364620 U CN 220364620U
- Authority
- CN
- China
- Prior art keywords
- cylinder body
- czochralski method
- thermal field
- pipeline
- outer guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 claims abstract description 6
- 238000001816 cooling Methods 0.000 claims description 31
- 230000017525 heat dissipation Effects 0.000 claims description 6
- 238000012423 maintenance Methods 0.000 abstract description 4
- 239000000498 cooling water Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a thermal field split type external guide cylinder for producing single crystals based on a Czochralski method, and particularly relates to the technical field of production of single crystals. According to the utility model, the second cylinder body is rotated and the threaded ring is extended into the first cylinder body, so that the second cylinder body is fixed with the first cylinder body, four bolts are inserted into four mounting grooves, and the mounting plate is fixed through the four bolts, so that the first cylinder body is fixed, the first cylinder body and the second cylinder body are disassembled in the same way, and the damaged first cylinder body or the damaged second cylinder body is disassembled and replaced, so that the split type structure is low in maintenance cost.
Description
Technical Field
The utility model relates to the technical field of monocrystalline silicon production, in particular to a thermal field split type outer guide cylinder for producing monocrystalline based on a Czochralski method.
Background
The Czochralski method is a common and mature single crystal growth method and is widely applied to the fields of semiconductors, optoelectronics and material science. The silicon single crystal growth device can realize large-size and high-quality single crystal growth, provides an important material basis for high-performance devices and research, and can control the growth of silicon crystals by reducing the temperature to ensure that the temperature of the center of the liquid surface of the molten silicon is lower than the melting point of silicon during the growth of the single crystal silicon.
The utility model discloses a single crystal furnace heat shield guide cylinder with an authorized publication number of CN213652720U, which comprises a guide cylinder body, wherein the guide cylinder body comprises an outer heat shield and an inner heat shield, a heat insulation layer structure is arranged between the outer heat shield and the inner heat shield, a cavity is arranged in the inner heat shield, a cooling device is arranged in the cavity of the inner heat shield, the cooling device is fixed with the guide cylinder body through a connecting rod, the cooling device is adopted to increase longitudinal temperature distribution and separate the cooling device from the heat insulation heat shield, a protective gas channel is formed while the heat insulation performance is enhanced, so that the production of single crystals is more stable, the consumption of a heater is reduced, the growth speed of the crystals is increased, the production cost is saved, and the three of heat insulation, stability and growth speed are increased in the same single product furnace heat shield guide cylinder.
When the cooling device is used, the cooling device is fixed with the guide cylinder body through the connecting rods, namely, the cooling device is fixed on the guide cylinder heat shield through the four connecting rods, the cooling device is of an integrated structure, different positions can be corroded to different degrees in the long-term use process, and if the whole guide cylinder is replaced, the maintenance cost is high.
Disclosure of Invention
In order to overcome the defects in the prior art, the utility model provides a thermal field split type outer guide cylinder for producing single crystals based on a Czochralski method, which aims to solve the problems in the prior art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a split type outer draft tube of thermal field based on Czochralski production single crystal, includes first barrel, first barrel bottom is equipped with the second barrel, second barrel top extends into inside the first barrel, second barrel top fixedly connected with screwed ring, just screwed ring and first barrel threaded connection, be equipped with radiator unit on the first barrel, radiator unit includes cooling tank, first pipeline and second pipeline.
Further, the cooling box is movably sleeved on the first cylinder, and the first pipeline and the second pipeline are fixedly communicated with the cooling box.
Further, the opposite sides of the first pipeline and the second pipeline are fixedly communicated with connectors.
Further, four pole setting of equal fixedly connected with in cooling tank top and bottom, a plurality of pole setting one end is fixedly connected with cushion all.
Further, the cooling box top is equipped with the mounting panel, the fixed cover of mounting panel is established on first barrel, four mounting grooves have been seted up on the mounting panel.
Further, a supporting plate is fixedly sleeved on the second cylinder body, and the supporting plate is contacted with the bottom end of the first cylinder body.
It can be seen that in the above technical scheme, through setting up the backup pad, the backup pad supports four cushion among them to support the cooler bin.
Further, the top of the threaded ring is provided with a limiting plate, and the limiting plate is fixedly arranged inside the first cylinder.
It can be seen that in the above technical scheme, the limiting plate is arranged to limit the upward moving distance of the threaded ring.
The utility model has the technical effects and advantages that:
1. according to the utility model, the second cylinder body is rotated and the threaded ring is extended into the first cylinder body, so that the second cylinder body is fixed with the first cylinder body, four bolts are inserted into four mounting grooves, and the mounting plate is fixed through the four bolts, so that the first cylinder body is fixed, the first cylinder body and the second cylinder body are disassembled in the same way, and the damaged first cylinder body or the damaged second cylinder body is disassembled and replaced, so that the split type structure is low in maintenance cost;
2. according to the cooling water cooling device, the external water pipe is connected with the joint on the first pipeline, cooling water enters the cooling box through the first pipeline and flows out through the second pipeline to form a complete water channel, the cooling water dissipates heat and cools the first cylinder, and the cooling box is limited by the arrangement of the plurality of vertical rods and the plurality of cushion blocks, so that the cooling water cooling device is simple in structure and convenient to use.
Drawings
The structures, proportions, sizes, etc. shown in the present specification are shown only for the purposes of illustration and description, and are not intended to limit the scope of the utility model, which is defined by the claims, so that any structural modifications, changes in proportions, or adjustments of sizes, which do not affect the efficacy or the achievement of the present utility model, should fall within the ambit of the technical disclosure.
FIG. 1 is a schematic diagram of the overall structure of a thermal field split type outer guide cylinder for producing single crystals based on a Czochralski method;
FIG. 2 is a schematic diagram showing the sectional assembly structure of a first cylinder and a limiting plate of a split thermal field outer guide cylinder for producing single crystals based on a Czochralski method;
FIG. 3 is a schematic diagram of a heat dissipating assembly of a split type thermal field outer guide shell for producing single crystals based on a Czochralski method;
FIG. 4 is a schematic diagram showing an assembly structure of a support plate and a threaded ring of a thermal field split type outer guide cylinder for producing single crystals based on a Czochralski method;
in the figure: 1. a first cylinder; 2. a second cylinder; 3. a support plate; 4. a heat dissipation assembly; 5. a mounting plate; 6. a mounting groove; 7. a limiting plate; 8. a threaded ring; 401. a cooling box; 402. a first pipe; 403. a second pipe; 404. a joint; 405. a vertical rod; 406. and (5) cushion blocks.
Detailed Description
Other advantages and advantages of the present utility model will become apparent to those skilled in the art from the following detailed description, which, by way of illustration, is to be read in connection with certain specific embodiments, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4 of the specification, a split type thermal field external guide cylinder for producing single crystals based on the czochralski method in this embodiment comprises a first cylinder body 1, a second cylinder body 2 is arranged at the bottom of the first cylinder body 1, the top end of the second cylinder body 2 extends into the first cylinder body 1, a threaded ring 8 is fixedly connected to the top end of the second cylinder body 2, the threaded ring 8 is in threaded connection with the first cylinder body 1, a heat dissipation assembly 4 is arranged on the first cylinder body 1, and the heat dissipation assembly 4 comprises a cooling box 401, a first pipeline 402 and a second pipeline 403.
Further, the cooling box 401 is movably sleeved on the first cylinder body 1, the first pipeline 402 and the second pipeline 403 are fixedly communicated with the cooling box 401, the joints 404 are fixedly communicated with one sides of the first pipeline 402 and the second pipeline 403 opposite to each other, four vertical rods 405 are fixedly connected to the top end and the bottom end of the cooling box 401, and the cushion blocks 406 are fixedly connected to one ends of the vertical rods 405.
Wherein, connect the joint 404 on external water pipe and the first pipeline 402, the cooling water gets into cooling tank 401 through first pipeline 402 to flow out through the second pipeline 403, constitute a complete water course, the cooling water dispels the heat and cools down first barrel 1, through setting up a plurality of pole settings 405 and a plurality of cushion 406, carries out spacingly to cooling tank 401, simple structure, convenient to use.
Further, the top of the cooling box 401 is provided with a mounting plate 5, the mounting plate 5 is fixedly sleeved on the first cylinder 1, four mounting grooves 6 are formed in the mounting plate 5, the second cylinder 2 is fixedly sleeved with a supporting plate 3, the supporting plate 3 is in contact with the bottom end of the first cylinder 1, and the supporting plate 3 supports four cushion blocks 406, so that the cooling box 401 is supported.
Further, the top of the threaded ring 8 is provided with a limiting plate 7, the limiting plate 7 is fixedly installed inside the first cylinder 1, and the limiting plate 7 limits the upward moving distance of the threaded ring 8.
The application method of the embodiment is as follows:
when the novel detachable type barrel is used, the second barrel 2 is placed at the top of the first barrel 1, then the second barrel 2 is rotated, the threaded ring 8 extends into the first barrel 1, the second barrel 2 is fixed with the first barrel 1, four bolts are inserted into the four mounting grooves 6, the mounting plate 5 is fixed through the four bolts, the first barrel 1 is fixed, the first barrel 1 and the second barrel 2 are disassembled in the same way, the damaged first barrel 1 or second barrel 2 is disassembled and replaced, and the novel detachable type barrel is of a split type structure and low in maintenance cost.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (7)
1. The utility model provides a split type outer draft tube of thermal field for single crystal production based on czochralski method, includes first barrel (1), first barrel (1) bottom is equipped with second barrel (2), its characterized in that: the novel heat dissipation device is characterized in that the top end of the second cylinder body (2) extends into the first cylinder body (1), a threaded ring (8) is fixedly connected to the top end of the second cylinder body (2), the threaded ring (8) is in threaded connection with the first cylinder body (1), a heat dissipation assembly (4) is arranged on the first cylinder body (1), and the heat dissipation assembly (4) comprises a cooling box (401), a first pipeline (402) and a second pipeline (403).
2. The thermal field split outer guide cylinder for producing single crystals based on the Czochralski method as claimed in claim 1, wherein: the cooling box (401) is movably sleeved on the first cylinder body (1), and the first pipeline (402) and the second pipeline (403) are fixedly communicated with the cooling box (401).
3. The thermal field split outer guide cylinder for producing single crystals based on the Czochralski method as claimed in claim 1, wherein: and the opposite sides of the first pipeline (402) and the second pipeline (403) are fixedly communicated with connectors (404).
4. The thermal field split outer guide cylinder for producing single crystals based on the Czochralski method as claimed in claim 1, wherein: four pole settings (405) are all fixedly connected with in cooling box (401) top and bottom, a plurality of pole settings (405) one end is all fixedly connected with cushion (406).
5. The thermal field split outer guide cylinder for producing single crystals based on the Czochralski method as claimed in claim 1, wherein: the cooling box (401) top is equipped with mounting panel (5), the fixed cover of mounting panel (5) is established on first barrel (1), four mounting grooves (6) have been seted up on mounting panel (5).
6. The thermal field split outer guide cylinder for producing single crystals based on the Czochralski method as claimed in claim 1, wherein: the second cylinder body (2) is fixedly sleeved with a supporting plate (3), and the supporting plate (3) is contacted with the bottom end of the first cylinder body (1).
7. The thermal field split outer guide cylinder for producing single crystals based on the Czochralski method as claimed in claim 1, wherein: the top of the threaded ring (8) is provided with a limiting plate (7), and the limiting plate (7) is fixedly arranged inside the first cylinder body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322359587.2U CN220364620U (en) | 2023-08-31 | 2023-08-31 | Thermal field split type outer guide cylinder for producing single crystal based on Czochralski method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322359587.2U CN220364620U (en) | 2023-08-31 | 2023-08-31 | Thermal field split type outer guide cylinder for producing single crystal based on Czochralski method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220364620U true CN220364620U (en) | 2024-01-19 |
Family
ID=89516938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322359587.2U Active CN220364620U (en) | 2023-08-31 | 2023-08-31 | Thermal field split type outer guide cylinder for producing single crystal based on Czochralski method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220364620U (en) |
-
2023
- 2023-08-31 CN CN202322359587.2U patent/CN220364620U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204779922U (en) | Ingot furnace with side heater elevating gear | |
| CN112301416A (en) | Heat shield guide cylinder of single crystal furnace | |
| CN205711031U (en) | A kind of single crystal growing furnace | |
| CN103710742A (en) | Single crystal furnace capable of improving czochralski-method single crystal growth speed | |
| CN220364620U (en) | Thermal field split type outer guide cylinder for producing single crystal based on Czochralski method | |
| CN113481591A (en) | Device and method for increasing growth speed of single crystal | |
| US20210140064A1 (en) | Semiconductor crystal growth apparatus | |
| CN211872142U (en) | Single crystal furnace thermal field device and single crystal furnace | |
| CN203530480U (en) | Equipment for growing sapphire single crystals | |
| CN205839185U (en) | A kind of special-shaped guide shell structure | |
| CN208901908U (en) | A kind of water cooling equipment for Czochralski furnace | |
| CN202030855U (en) | Mono-crystal furnace thermal field capable of increasing growth rate of mono-crystal furnace | |
| CN211921735U (en) | Cooling device for improving pulling speed of monocrystalline silicon | |
| CN214654436U (en) | Overflow-method glass substrate forming thickness control device | |
| CN113954205A (en) | Split type combined quartz crucible mold | |
| CN102071455B (en) | Water cooling device for directional solidification of polycrystalline silicon | |
| CN205340868U (en) | Low -temperature constant -temperature pond experiment platform | |
| CN114737253A (en) | Single crystal furnace thermal field structure and method for growing large-size sapphire single crystal plate | |
| CN210528474U (en) | A increase device for high-purity tellurium is distilled | |
| CN209227096U (en) | Single crystal growing furnace heat shielding structure | |
| CN203668549U (en) | Cooling device capable of increasing Czochralski single crystal growth rate | |
| CN107617230B (en) | Crystallization tube structure and crystallizer adopting same | |
| TW202117098A (en) | A semiconductor crystal growth apparatus | |
| CN219032461U (en) | Crucible for silicon carbide single crystal growth and silicon carbide single crystal growth system | |
| CN211227431U (en) | Novel draft tube |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |