CN208901908U - A kind of water cooling equipment for Czochralski furnace - Google Patents
A kind of water cooling equipment for Czochralski furnace Download PDFInfo
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- CN208901908U CN208901908U CN201820990826.0U CN201820990826U CN208901908U CN 208901908 U CN208901908 U CN 208901908U CN 201820990826 U CN201820990826 U CN 201820990826U CN 208901908 U CN208901908 U CN 208901908U
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- water
- cooled jacket
- czochralski furnace
- spirality channel
- cooling equipment
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Abstract
The utility model provides a kind of water cooling equipment for Czochralski furnace, including water-cooled jacket, and the water-cooled jacket includes outer cylinder and the inner cylinder that is nested in outer cylinder, it is characterised in that: is provided with spirality channel between the outer cylinder and the inner cylinder；One end of the spirality channel is connect with the water inlet for being set to the water-cooled jacket；The other end of the spirality channel is connect with the water outlet for being set to the water-cooled jacket；The water-cooled jacket is removably connect with Czochralski furnace discharge port by ring flange, is the heat exchange area by increasing cooling water channel and single-crystal silicon bar materials with the novel beneficial effect of this reality, is improved cooling efficiency.
Description
Technical field
The utility model belongs to Czochralski furnace auxiliary device field, sets more particularly, to a kind of water cooling for vertical pulling outlet of still
It is standby.
Background technique
In existing technology, it is converted to during monocrystalline silicon production for polysilicon and uses Czochralski furnace, Czochralski furnace is one
Kind melts the polycrystalline materials such as polysilicon in inert gas (based on nitrogen, helium) environment, with heater, uses Grown by CZ Method
The equipment of dislocation-free monocrystalline.The temperature of the monocrystalline silicon of molten condition is higher under high temperature environment, and carrying out cooling just can be carried out
Subsequent process is often used the cooling that the water cooling tube group being arranged in below furnace body carries out single-crystal silicon bar materials, but mesh in the prior art
The preceding water cooling tube group cooling efficiency arranged in the form of water annulus used is low, and Yao Tigao cooling efficiency is needed by increasing water cooling
The volume of pipe group is to increase the heat exchange area of water cooling tube group Yu monocrystalline bar, however the space in practical applications below furnace body is past
It is past limited, therefore cooling efficiency is bad, and then affects production efficiency.
Summary of the invention
Problem to be solved in the utility model is to provide a kind of water cooling equipment for Czochralski furnace, is particluarly suitable for same
Increase the heat exchange area of water-cooled jacket and Czochralski furnace in volume, and then improves cooling efficiency.
In order to solve the above technical problems, the technical solution adopted in the utility model is:
A kind of water cooling equipment for Czochralski furnace, it is characterised in that: including water-cooled jacket and ring flange；
The water-cooled jacket includes outer cylinder and the inner cylinder that is nested in outer cylinder；
Spirality channel is provided between the outer cylinder and the inner cylinder；
One end of the spirality channel is connect with the water inlet for being set to the water-cooled jacket；
The other end of the spirality channel is connect with the water outlet for being set to the water-cooled jacket；
The water-cooled jacket is removably connect with Czochralski furnace discharge port by the ring flange.
In the technical program, cooling water channel is designed helically, it is cold with original annular under same water jacket length
But water channel is compared, and the contact area of cooling water channel and single-crystal silicon bar materials is bigger, improves cooling efficiency.
The water-cooled jacket further includes the end cap for being connected to the water-cooled jacket both ends of the surface, enhances the sealing of water-cooled jacket
Property prevents cooling water from leaking in welding gap that may be present between outer cylinder and inner cylinder.
The water-cooled jacket is removably connect by supporting element with ring flange, the model phase of the model and Czochralski furnace of ring flange
Matching, is mounted at Czochralski furnace discharge outlet for the water-cooled jacket, to realize the cooling to single-crystal silicon bar materials, improves life
Produce efficiency.
Further, preferably,
The diameter of the spirality channel is not more than the 3/4 of the water-cooled jacket thickness；
The spirality channel is arranged along circular helix；
The circular helix base radius is greater than the inner wall internal diameter, is less than the outer wall outer diameter；
The circular helix screw pitch is 1.2~1.5 times of spirality channel radiuses.
It is the more preferably scheme of spirality channel above, preferable cooling effect can be played.
Preferably, the flange plate edge is provided with U-type groove.Can discharge position with Czochralski furnace through the above arrangement
U-type groove match, U-type groove is passed through by bolt and connect ring flange with Czochralski furnace.It eliminates and opens up bolt in Czochralski furnace
The trouble in hole.It also avoids damaging the structural strength of Czochralski furnace simultaneously.
Preferably, ceramic coating is provided on the inner wall of the inner cylinder.With the above arrangement, reducing single-crystal silicon bar materials
With the friction of water-cooled jacket inner wall during lifting, keep lifting process more smooth, while avoiding the caused silicon single crystal rod that rubs
Material damage.
The utility model has the advantages and positive effects of: due to the adoption of the above technical scheme, by increasing cooling water
The heat exchange area in road and single-crystal silicon bar materials, improves cooling efficiency.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of an embodiment of the present invention
Fig. 2 is the water-cooled jacket structural schematic diagram of an embodiment of the present invention
Fig. 3 is the flange plate structure schematic diagram of an embodiment of the present invention
Fig. 4 is the water-cooled jacket outer cylinder schematic cross-sectional view of an embodiment of the present invention
Fig. 5 is the water-cooled jacket inner cylinder schematic cross-sectional view of an embodiment of the present invention
In figure:
1, water-cooled jacket 2, ring flange 3, supporting element
1-1, spirality channel 1-2, water inlet 1-3, water outlet
2-1, U-type groove
Specific embodiment
As Fig. 1, an embodiment of the present invention structural schematic diagram shown in, an embodiment of the utility model provides one
Kind is used for the water cooling equipment of Czochralski furnace, including water-cooled jacket 1 and ring flange 2；
Water-cooled jacket 1 includes outer cylinder and the inner cylinder being nested in outer cylinder；
Spirality channel 1-1 is provided between outer cylinder and inner cylinder；
One end of spirality channel 1-1 is connect with the water inlet 1-2 for being set to water-cooled jacket 1；
The other end of spirality channel 1-1 is connect with the water outlet 1-3 for being set to water-cooled jacket 1；
Water-cooled jacket 1 is removably connect with Czochralski furnace discharge port by ring flange 2.
Helically by cooling water channel 1-1 design, under same 1 length of water jacket, with original annular cooling water road phase
Than the contact area of cooling water channel and single-crystal silicon bar materials is bigger, improves cooling efficiency.
Water-cooled jacket 1 further includes the end cap for being connected to water-cooled jacket both ends of the surface, enhances the leakproofness of water-cooled jacket, is prevented cold
But water leaks in welding gap that may be present between outer cylinder and inner cylinder.
Such as Fig. 4, shown in Fig. 5, outer cylinder, respectively by processing a part of spirality channel on inner cylinder, through inner barrel and outer barrel
After welding, the water jacket with spirality channel can be obtained.
Water-cooled jacket is removably connect by supporting element with ring flange, the model phase of the model and Czochralski furnace of ring flange
Match, water-cooled jacket is mounted at Czochralski furnace discharge outlet, to realize the cooling to single-crystal silicon bar materials, improves production effect
Rate.
In the present embodiment, preferably,
The diameter of spirality channel is the 1/2 of water-cooled jacket thickness；
Spirality channel is arranged along circular helix；
Circular helix base radius is greater than inner wall internal diameter, is less than outer wall outer diameter；
Circular helix screw pitch is 1.3 times of spirality channel radiuses.
Above embodiments are the more preferably schemes of spirality channel, can play preferable cooling effect.
In the other embodiments of the utility model, other forms can also be used under the premise of the structural strength of water jacket
Spirality channel.
In the present embodiment, 2 edge of ring flange is provided with U-type groove 2-1.It through the above arrangement can be with Czochralski furnace discharging portion
The U-type groove of position matches, and passes through U-type groove 2-1 by bolt and connect ring flange with Czochralski furnace.It eliminates and is opened up in Czochralski furnace
The trouble of bolt hole.It also avoids damaging the structural strength of Czochralski furnace simultaneously.
In the other embodiments of the utility model, the ring flange that general type can also be used connects water jacket and Czochralski furnace
It connects.
In the present embodiment, ceramic coating is provided on the inner wall of inner cylinder.Exist with the above arrangement, reducing single-crystal silicon bar materials
With the friction of water-cooled jacket inner wall during lifting, keep lifting process more smooth, while avoiding the caused single-crystal silicon bar materials that rub
Damage.
The embodiments of the present invention are described in detail above, the content is only the preferable reality of the utility model
Example is applied, should not be considered as limiting the scope of the present invention.Equalization made according to the scope of application of this utility model
Variation and improvement etc., should still belong within the patent covering scope of the utility model.
Claims (6)
1. a kind of water cooling equipment for Czochralski furnace, including water-cooled jacket, the water-cooled jacket includes outer cylinder and is nested in outer cylinder
Inner cylinder, it is characterised in that:
Spirality channel is provided between the outer cylinder and the inner cylinder；
One end of the spirality channel is connect with the water inlet for being set to the water-cooled jacket；
The other end of the spirality channel is connect with the water outlet for being set to the water-cooled jacket；
The water-cooled jacket is removably connect with Czochralski furnace discharge port by ring flange.
2. a kind of water cooling equipment for Czochralski furnace according to claim 1, it is characterised in that: the water-cooled jacket further includes
It is connected to the end cap of the water-cooled jacket both ends of the surface.
3. a kind of water cooling equipment for Czochralski furnace according to claim 1, it is characterised in that: it further include supporting element, institute
Water-cooled jacket is stated removably to connect by the supporting element with the ring flange.
4. a kind of water cooling equipment for Czochralski furnace as claimed in any of claims 1 to 3, it is characterised in that:
The flange plate edge is provided with U-type groove.
5. a kind of water cooling equipment for Czochralski furnace as claimed in any of claims 1 to 3, it is characterised in that:
The diameter of the spirality channel is not more than the 3/4 of the water-cooled jacket thickness；
The spirality channel is arranged along circular helix；
The circular helix base radius is greater than the inner cylinder internal diameter, is less than the outer cylinder outer diameter；
The circular helix screw pitch is 1.2~1.5 times of spirality channel radiuses.
6. a kind of water cooling equipment for Czochralski furnace as claimed in any of claims 1 to 3, it is characterised in that:
Ceramic coating is provided on the inner wall of the inner cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820990826.0U CN208901908U (en) | 2018-06-26 | 2018-06-26 | A kind of water cooling equipment for Czochralski furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820990826.0U CN208901908U (en) | 2018-06-26 | 2018-06-26 | A kind of water cooling equipment for Czochralski furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208901908U true CN208901908U (en) | 2019-05-24 |
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ID=66566940
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820990826.0U Active CN208901908U (en) | 2018-06-26 | 2018-06-26 | A kind of water cooling equipment for Czochralski furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208901908U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113502533A (en) * | 2021-09-09 | 2021-10-15 | 江苏矽时代材料科技有限公司 | Monocrystalline silicon vertical pulling furnace with controllable cooling device |
| CN117646273A (en) * | 2024-01-29 | 2024-03-05 | 中国科学院沈阳科学仪器股份有限公司 | Integrated water cooling jacket applied to ultra-high vacuum environment |
-
2018
- 2018-06-26 CN CN201820990826.0U patent/CN208901908U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113502533A (en) * | 2021-09-09 | 2021-10-15 | 江苏矽时代材料科技有限公司 | Monocrystalline silicon vertical pulling furnace with controllable cooling device |
| CN113502533B (en) * | 2021-09-09 | 2021-11-12 | 江苏矽时代材料科技有限公司 | Monocrystalline silicon vertical pulling furnace with controllable cooling device |
| CN117646273A (en) * | 2024-01-29 | 2024-03-05 | 中国科学院沈阳科学仪器股份有限公司 | Integrated water cooling jacket applied to ultra-high vacuum environment |
| CN117646273B (en) * | 2024-01-29 | 2024-04-02 | 中国科学院沈阳科学仪器股份有限公司 | Integrated water cooling jacket applied to ultra-high vacuum environment |
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