CN117646273A - Integrated water cooling jacket applied to ultra-high vacuum environment - Google Patents
Integrated water cooling jacket applied to ultra-high vacuum environment Download PDFInfo
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- CN117646273A CN117646273A CN202410115478.2A CN202410115478A CN117646273A CN 117646273 A CN117646273 A CN 117646273A CN 202410115478 A CN202410115478 A CN 202410115478A CN 117646273 A CN117646273 A CN 117646273A
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- knife edge
- edge flange
- inner cylinder
- outer cylinder
- cylinder
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 83
- 238000001816 cooling Methods 0.000 title claims abstract description 36
- 239000002184 metal Substances 0.000 claims abstract description 48
- 238000007789 sealing Methods 0.000 claims abstract description 10
- 239000002826 coolant Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 3
- 238000010168 coupling process Methods 0.000 claims 3
- 238000005859 coupling reaction Methods 0.000 claims 3
- 238000001451 molecular beam epitaxy Methods 0.000 abstract description 8
- 238000003466 welding Methods 0.000 abstract description 8
- 230000017525 heat dissipation Effects 0.000 abstract description 2
- 238000005192 partition Methods 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000000498 cooling water Substances 0.000 description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 229910052698 phosphorus Inorganic materials 0.000 description 5
- 239000011574 phosphorus Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000000047 product Substances 0.000 description 3
- 230000001174 ascending effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
- F27D2009/0002—Cooling of furnaces
- F27D2009/001—Cooling of furnaces the cooling medium being a fluid other than a gas
- F27D2009/0013—Cooling of furnaces the cooling medium being a fluid other than a gas the fluid being water
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
- F27D2009/0002—Cooling of furnaces
- F27D2009/0018—Cooling of furnaces the cooling medium passing through a pattern of tubes
- F27D2009/0035—Cooling of furnaces the cooling medium passing through a pattern of tubes arranged for the covering of a cylindrical surface
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Particle Accelerators (AREA)
Abstract
The invention relates to the technical field of beam source furnace accessories of molecular beam epitaxy equipment, in particular to an integrated water cooling jacket applied to an ultrahigh vacuum environment, wherein the top and the bottom of an inner cylinder and an outer cylinder are respectively welded with an ultrahigh vacuum knife edge flange or an end plug, a metal pipe with an opening at the highest point at an axial vertical position is attached to the wall surfaces of the inner cylinder and the outer cylinder and spirally wound at equal intervals to form a spiral annular water channel, so that inflow cold water and return hot water are uniformly distributed at intervals, and uniform cooling on the circumferential direction of the beam source furnace is ensured to the greatest extent while effective heat removal is realized. Compared with similar design products, the spiral annular water channel is formed by using the metal pipe, has lighter weight, easier processing and better sealing performance, effectively avoids slit leakage among the water channels, furthest ensures high-point circulation of clean cold water, reduces the welding quality requirement of the water channels, has better expandable heat dissipation performance, effectively resists fatigue strength and prolongs the service life.
Description
Technical Field
The invention relates to the technical field of beam source furnace accessories of molecular beam epitaxy equipment, in particular to an integrated water cooling jacket applied to an ultrahigh vacuum environment.
Background
The vacuum beam source furnace is used as a core component of the molecular beam epitaxy equipment, and the performance and the characteristics of the vacuum beam source furnace directly influence the quality of a finished product of the molecular beam epitaxy coating. The beam source furnace accessory water cooling jacket is used as an important accessory for adjusting the working temperature gradient of the beam source furnace, and the novel design mode and the simplified manufacturing method are one of the continuous research and update technologies in the field of the beam source furnace accessory of the molecular beam epitaxy equipment at present.
The main structure of the water cooling jacket comprises an inner layer tube barrel and an outer layer tube barrel, and a cavity for containing cooling medium is formed between the wall surfaces of the two layers of tube barrels. In the existing common industrial water cooling jacket technology, the water channel structure of the water cooling jacket is formed by a plurality of partition boards at intervals, namely, the partition boards with specific shapes and specified numbers are fixed on the wall of the inner tube in a welding mode, the outer eave of the partition boards directly abuts against the inner side of the wall of the outer tube, and the common cooling water jacket has the defects that:
a. the baffle needs to be placed between the inner cylinder wall and the outer cylinder wall, and the inner and outer diameter machining tolerance control needs to be strict, otherwise, the baffle can not be normally placed into the inner cylinder wall and the outer cylinder wall or a large gap can be generated.
b. The baffle adopts welded fastening, and the welding quality requirement of the welding quality of baffle and interior section of thick bamboo wall face is higher after welding size error is difficult to control, uses the risk such as inner tube that the inner tube appears welding easily.
c. After the partition plate is welded with the inner cylinder, the outer eave of the partition plate can only abut against the inner wall of the outer cylinder, the partition plate cannot be tightly and seamlessly attached to the outer pipe wall, water flows can pass through gaps of the upper eave of the partition plate, and water paths cannot guide the water flows strictly according to the design, so that cooling water cannot fully exchange heat with workpieces in the pipe; particularly, in molecular beam epitaxy equipment, a water chiller is used as a water source, the water flow is small, the water pressure is low, the existence of gaps between a partition plate and a wall surface can directly lead to direct short circuit of a water channel inlet and a water channel outlet, cooling water cannot fill the inside of a water cooling jacket, high-pressure water vapor is easily formed in the inside of the water cooling jacket under the high Wen Qingkuang (more than 500 ℃) condition that a beam source furnace normally works, cooling and uniform temperature control of the beam source furnace cannot be realized, and serious safety risks exist in long-time operation.
Disclosure of Invention
Aiming at the problems of the existing beam source furnace water-cooling jacket, the invention aims to provide an integrated water-cooling jacket applied to an ultra-high vacuum environment.
The aim of the invention is realized by the following technical scheme:
the invention comprises an inner cylinder and an outer cylinder sleeved on the periphery of the inner cylinder, wherein a sealing space for accommodating cooling medium is formed between the outer cylinder and the inner cylinder; a metal pipe is spirally wound in the sealing space along the axial direction of the water cooling sleeve and is respectively abutted with the outer wall of the inner cylinder and the inner wall of the outer cylinder, so that a spiral annular water channel is formed in the sealing space; one end of the outer cylinder is fixedly connected with a water inlet, one end of the water inlet is inserted by the outer cylinder and is communicated with one end of the spiral annular water channel, the other end of the spiral annular water channel is communicated with one end of a metal pipe, and the other end of the metal pipe penetrates out of the outer cylinder and is used as a water outlet; the cooling medium enters the spiral annular water channel from the water inlet, rises to the highest point of the spiral annular water channel in a unidirectional spiral mode, enters one end of the metal pipe, descends in a reverse spiral mode with the entering direction, and finally is discharged out of the water cooling jacket from the water outlet.
Wherein: one end of the metal pipe is used as a starting end and fixedly connected with the other end of the spiral annular water channel, namely the highest point in the axial direction of the spiral annular water channel, and the other end of the metal pipe is used as a tail end and fixedly connected with the outer cylinder and penetrates out of the outer cylinder.
The two ends of the outer cylinder form a sealing space with the inner cylinder through an end plug A and an end plug B respectively, the length of the outer cylinder is smaller than that of the inner cylinder, the end plug A positioned at one end of the outer cylinder is fixedly connected to the outer surface of the inner cylinder and is close to one end of the inner cylinder, and the end plug B is fixedly connected to the other end parts of the inner cylinder and the outer cylinder; the end part of one end of the inner cylinder is fixedly connected with an ultrahigh vacuum knife edge flange A, and the outer surface of the outer cylinder is fixedly connected with an ultrahigh vacuum knife edge flange B.
The two ends of the outer cylinder form a sealing space with the inner cylinder through an end plug A and an ultrahigh vacuum knife edge flange B respectively, the length of the outer cylinder is smaller than that of the inner cylinder, the end plug A positioned at one end of the outer cylinder is fixedly connected to the outer surface of the inner cylinder and is close to one end of the inner cylinder, the ultrahigh vacuum knife edge flange B is fixedly connected to the other end parts of the inner cylinder and the outer cylinder, and the ultrahigh vacuum knife edge flange A is fixedly connected to the end part of one end of the inner cylinder.
The ultrahigh vacuum knife edge flange A and the ultrahigh vacuum knife edge flange B are provided with through holes in the middle of the CF blind flange, and annular grooves for preventing heat from being transferred to the ultrahigh vacuum knife edge flange A or the ultrahigh vacuum knife edge flange B are arranged on the wall of each through hole.
The inner cylinder and the outer cylinder are hollow cylinders with openings at two ends, and the axial center lines of the inner cylinder, the outer cylinder, the ultrahigh vacuum knife edge flange A and the ultrahigh vacuum knife edge flange B are collinear.
The spiral direction of the water inlet of the cooling medium is opposite to the spiral direction of the water outlet, and reverse convection is formed on the outer surface of the metal pipe, so that the temperature field in the axial direction of the inner cylinder is kept relatively uniform.
The metal tube is a thin-wall metal tube, and the ratio of the outer diameter to the wall thickness of the metal tube is less than or equal to 6:1, the thinnest wall of the metal pipe is 0.5mm.
The invention has the advantages and positive effects that:
1. in the sealed space formed between the inner cylinder and the outer cylinder, the spiral thin-wall metal pipe is fixed on the outer wall of the inner cylinder without using a partition plate structure, the metal pipe directly divides the sealed space into a spiral ascending spiral annular water channel (water inlet flow channel) and a spiral descending water outlet flow channel which enters the metal pipe from the highest water inlet point and is opposite to the ascending spiral descending water outlet flow channel, the spiral annular water channel is integrally formed by the metal pipe, cooling water can be guided to form water inlet and outlet flows with spiral directions which are opposite to each other and uniformly distributed at intervals, and the uniform cooling on the circumferential direction of the beam source furnace is ensured to the greatest extent while the effective heat removal is realized.
2. The invention uses the metal pipe to directly pass through the outer cylinder and then is welded on the outer wall of the outer cylinder, so that the problem of direct short circuit of water in and out of the water outlet due to the gap between the partition plate and the wall surface of the water channel product of the same partition plate can be solved from the source, even if the cooling water flow is small and the water pressure is low, the cooling water can be guaranteed to flow back from the water outlet after fully filling the water cooling jacket, and the invention is more suitable for being applied to molecular beam epitaxy equipment using a water chiller as a water source, and the temperature control of a normally working high Wen Shuyuan furnace can be realized.
3. Compared with baffle-type and annular turning type water cooling jackets of similar design, the invention has lighter weight, easier processing and better sealing performance, effectively avoids slit leakage between water channels, ensures high-point circulation of clean cold water to the greatest extent, and reduces the welding quality requirement of the water channels; besides cooling water, other medium gases such as liquid nitrogen and the like can be introduced, so that the heat-dissipating device has the advantages of being expandable, better in heat dissipation performance, effective in resisting fatigue strength and long in service life.
Drawings
FIG. 1 is a schematic view of an external structure of a first embodiment of the present invention;
FIG. 2 is a front cross-sectional view of a first embodiment of the present invention;
FIG. 3 is a left side view of FIG. 2;
FIG. 4 is a schematic perspective view of a first embodiment of the present invention (transparent processing of the outer cylinder);
FIG. 5 is a second perspective view of the first embodiment of the present invention (transparent outer cylinder);
FIG. 6 is a cross-sectional view of a specific installation structure for use in an ultra-high vacuum high temperature environment according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of an external structure of a second embodiment of the present invention;
fig. 8 is a front cross-sectional view of a second embodiment of the present invention;
fig. 9 is a schematic perspective view of a second embodiment of the present invention (transparent processing of the outer cylinder);
FIG. 10 is a cross-sectional view of a specific installation structure of a second embodiment of the present invention;
FIG. 11 is a schematic perspective view of an ultra-high vacuum knife edge flange B according to the present invention;
wherein: the ultra-high vacuum knife edge flange A is adopted as a knife edge, the ultra-high vacuum knife edge flange A is adopted as an inner cylinder 1, the end plug A is adopted as an end plug 3, the ultra-high vacuum knife edge flange B is adopted as an end plug 4, the metal pipe is adopted as an end plug B is adopted as a metal pipe 5, the outer cylinder is adopted as a 7-type outer cylinder, the water inlet is adopted as a 9-type beam source furnace installation knife edge, the cavity connection pipe flange is adopted as a 10-type cavity connection pipe flange, the spiral annular water channel is adopted as a 11-type spiral annular water channel, the water outlet is adopted as a 12-type water outlet, the through hole is adopted as a 13-type through hole, and the annular groove is adopted as a 14-type through hole.
Detailed Description
The invention is described in further detail below with reference to the accompanying drawings.
Example 1
As shown in fig. 1 to 5, the integrated water cooling jacket of the present embodiment includes an inner cylinder 2 and an outer cylinder 7 sleeved on the periphery of the inner cylinder 2, and a sealed space for accommodating a cooling medium is formed between the outer cylinder 7 and the inner cylinder 2; metal pipes 5 are spirally and equidistantly wound in the sealed space along the axial direction of the water cooling jacket, and the metal pipes 5 are respectively abutted with the outer wall of the inner cylinder 2 and the inner wall of the outer cylinder 7, so that a spiral annular water channel 11 is formed in the sealed space; a water inlet 8 is welded at one end of the outer cylinder 7, one end of the water inlet 8 is inserted by the outer cylinder 7 and is communicated with one end of a spiral annular water channel 11, the other end of the spiral annular water channel 11 is communicated with one end of a metal pipe 5, and the other end of the metal pipe 5 penetrates out of the outer cylinder 7 and is used as a water outlet 12 to be welded with the outer wall of the outer cylinder 7 in a sealing way; the cooling medium enters the spiral annular water channel 11 from the water inlet 8, rises to the highest point of the spiral annular water channel 11 in a one-way spiral manner, enters one end of the metal pipe 5, descends in a reverse spiral manner with the entering direction, and finally is discharged from the water outlet 12.
In this embodiment, one end of the metal tube 5 is fixed to the inner tube 2 as a starting end (non-water outlet end) by welding or riveting, and is located at the other end of the spiral annular water channel 11, that is, the highest point in the axial direction of the spiral annular water channel 11, and the other end of the metal tube 5 is fixed to the outer tube 7 as a terminal end and is penetrated out of the outer tube 7.
In the embodiment, two ends of the outer cylinder 7 form a sealed space with the inner cylinder 2 through the end plug A3 and the end plug B6 respectively, the length of the outer cylinder 7 is smaller than that of the inner cylinder 2, the end plug A3 positioned at one end of the outer cylinder 7 is fixedly connected to the outer surface of the inner cylinder 2 and is close to one end of the inner cylinder 2, and the end plug B6 is fixedly connected to the other end parts of the inner cylinder 2 and the outer cylinder 7; an ultrahigh vacuum knife edge flange A1 is welded at the end part of one end of the inner cylinder 2, and an ultrahigh vacuum knife edge flange B4 is welded on the outer surface of the outer cylinder 7.
As shown in fig. 11, the ultra-high vacuum knife edge flange A1 and the ultra-high vacuum knife edge flange B4 are provided with a through hole 13 in the middle of the CF blind flange according to the height and diameter of the inner cylinder 2 and the outer cylinder 7, and the CF blind flange is a commercially available product in the prior art and will not be described herein; the hole wall of the through hole 13 is provided with an annular groove 14, and the annular groove 14 is favorable for preventing heat from being transferred to the ultrahigh vacuum knife edge flange A1 or the ultrahigh vacuum knife edge flange B4. The ultra-high vacuum knife edge flange A1 of the embodiment is provided with an annular groove 14 on the hole wall on one side of the through hole 13 connected with the inner barrel 2, and the annular groove 14 of the ultra-high vacuum knife edge flange B4 is arranged in the middle of the hole wall of the through hole 13. The end plugs A3 and B6 of the embodiment are annular.
The inner cylinder 2 and the outer cylinder 7 of the embodiment are hollow cylinders with two open ends, and the axial center lines of the inner cylinder 2, the outer cylinder 7, the ultrahigh vacuum knife edge flange A1 and the ultrahigh vacuum knife edge flange B4 are collinear. When in operation, the inner cylinder 2 is in an ultra-high vacuum state (P is less than 1 multiplied by 10 -5 Pa）。
The metal tube 5 of this embodiment is a thin-walled metal tube, coiled around the outer wall of the inner tube 2 into a spiral shape, and the ratio of the outer diameter to the wall thickness of the metal tube 5 is less than or equal to 6:1, the thinnest wall of the metal tube 5 can be 0.5mm.
In the embodiment, the spiral direction of water or gas cooling medium water inlet is opposite to the spiral direction of water outlet, and reverse convection is formed on the outer surface of the metal tube 5, so that the temperature field in the axial direction of the inner tube 2 is kept relatively uniform, and the influence of uneven temperature distribution on the operation of the beam source furnace is avoided. The cooling medium introduced in this embodiment may be water, liquid nitrogen or other gas-liquid cooling medium.
As shown in fig. 6, the ultra-high vacuum knife edge flange A1 of the present embodiment is connected to the beam source furnace installation knife edge 9, and is sealed by using a metal gasket, the ultra-high vacuum knife edge flange B4 is connected to the cavity connecting pipe flange 10 on the growth chamber of the molecular beam epitaxy device, the inner cylinder 2 completely wraps the beam source furnace cracking zone, a vacuum environment is provided between the two, the outer cylinder 7 and the cavity connecting pipe flange 10, the water cooling jacket and the beam source furnace are coaxially installed, a cooling medium enters the water cooling jacket from the water inlet 8, rises in a one-way spiral manner along the spiral annular water channel 11, reaches the highest point, fills the sealed space formed by the inner cylinder 2, the outer cylinder 7 and the metal pipe 5, enters the metal pipe 5 from one end (starting end) of the metal pipe 5, descends in a reverse spiral manner with the entering direction, and is discharged from the water outlet 12. In the process, the cooling medium absorbs and takes away the heat radiated by the beam source furnace outwards, so that the heat balance of the equipment is realized, the inlet water and the outlet water flow in reverse spiral, and the phenomena of excessively low inlet temperature, excessively high outlet temperature and obvious temperature gradient difference in the axial direction during cooling and heat insulation are effectively avoided.
Example two
As shown in fig. 7 to 9, the difference between the present embodiment and the first embodiment is that the two ends of the outer cylinder 7 of the present embodiment form a sealed space with the inner cylinder 2 through the end plug A3 and the ultra-high vacuum knife edge flange B4, the length of the outer cylinder 7 is smaller than that of the inner cylinder 2, the end plug A3 at one end of the outer cylinder 7 is fixedly connected to the outer surface of the inner cylinder 2 and is close to one end of the inner cylinder 2, the ultra-high vacuum knife edge flange B4 is fixedly connected to the other end of the inner cylinder 2 and the outer cylinder 7, and the ultra-high vacuum knife edge flange A1 is welded at one end of the inner cylinder 2.
The ultra-high vacuum knife edge flange A1 and the ultra-high vacuum knife edge flange B4 are provided with through holes 13 in the middle of the CF blind flange according to the height and the diameter of the inner cylinder 2 and the outer cylinder 7, and the CF blind flange is a commercial product in the prior art and is not described in detail herein; the hole wall of the through hole 13 is provided with an annular groove 14, and the annular groove 14 is favorable for preventing heat from being transferred to the ultrahigh vacuum knife edge flange A1 or the ultrahigh vacuum knife edge flange B4. The ultrahigh vacuum knife edge flange A1 of the embodiment is provided with an annular groove 14 on the hole wall on the side where the through hole 13 is connected with the inner cylinder 2, and the ultrahigh vacuum knife edge flange B4 is provided with an annular groove 14 on the hole wall on the side where the through hole 13 is connected with the inner cylinder 2 and the outer cylinder 7.
As shown in fig. 10, the ultrahigh vacuum knife edge flange A1 and the ultrahigh vacuum knife edge flange B4 of the embodiment are respectively connected to different cavity connecting pipe flanges 10, and are connected and sealed by using metal gaskets, the inside of the inner cylinder 2 is vacuum, the atmosphere environment is arranged on the outer surface of the water cooling jacket, liquid nitrogen is introduced into the water inlet 8, and equipment needing cooling can be inserted into the middle of the cavity connecting pipe or the internal environment can be directly cooled. In this embodiment, in order to clean phosphorus in the internal phosphorus-containing environment, after liquid nitrogen is introduced, the water-cooled jacket can make the internal vacuum environment of the section be in a low-temperature state, after internal circulation is started, the phosphorus in the vacuum environment of the section is cooled down and changed in phase, is condensed and adsorbed on the inner wall surface of the inner cylinder 2, and after a set time length, the water-cooled jacket is replaced for cleaning, so that the cleaning of phosphorus elements in the vacuum phosphorus-containing environment can be realized.
Claims (8)
1. An integrated water cooling jacket applied to an ultra-high vacuum environment comprises an inner cylinder (2) and an outer cylinder (7) sleeved on the periphery of the inner cylinder (2), wherein a sealing space for containing cooling medium is formed between the outer cylinder (7) and the inner cylinder (2); the method is characterized in that: a metal pipe (5) is spirally wound in the sealed space along the axial direction of the water cooling jacket, the metal pipe (5) is respectively abutted with the outer wall of the inner cylinder (2) and the inner wall of the outer cylinder (7), and a spiral annular water channel (11) is further formed in the sealed space; a water inlet (8) is fixedly connected to one end of the outer barrel (7), one end of the water inlet (8) is inserted by the outer barrel (7) and is communicated with one end of the spiral annular water channel (11), the other end of the spiral annular water channel (11) is communicated with one end of the metal pipe (5), and the other end of the metal pipe (5) penetrates out of the outer barrel (7) and serves as a water outlet (12); the cooling medium enters the spiral annular water channel (11) from the water inlet (8), rises to the highest point of the spiral annular water channel (11) in a unidirectional spiral mode, enters one end of the metal pipe (5), descends in a spiral mode in the opposite direction to the entering direction, and finally is discharged out of the water cooling jacket from the water outlet (12).
2. The integrated water cooling jacket applied to the ultra-high vacuum environment according to claim 1, wherein: one end of the metal pipe (5) is used as a starting end and fixedly connected with the other end of the spiral annular water channel (11), namely, the highest point of the spiral annular water channel (11) in the axial direction, and the other end of the metal pipe (5) is used as a tail end and fixedly connected with the outer cylinder (7) and penetrates out of the outer cylinder (7).
3. The integrated water cooling jacket applied to the ultra-high vacuum environment according to claim 1, wherein: the two ends of the outer cylinder (7) form a sealing space with the inner cylinder (2) through an end plug A (3) and an end plug B (6), the length of the outer cylinder (7) is smaller than that of the inner cylinder (2), the end plug A (3) positioned at one end of the outer cylinder (7) is fixedly connected to the outer surface of the inner cylinder (2) and is close to one end of the inner cylinder (2), and the end plug B (6) is fixedly connected to the inner cylinder (2) and the other end of the outer cylinder (7); the end part of one end of the inner cylinder (2) is fixedly connected with an ultrahigh vacuum knife edge flange A (1), and the outer surface of the outer cylinder (7) is fixedly connected with an ultrahigh vacuum knife edge flange B (4).
4. The integrated water cooling jacket applied to the ultra-high vacuum environment according to claim 1, wherein: the utility model discloses a vacuum knife edge flange structure, including inner tube (2), outer tube (7), super high vacuum knife edge flange B (4), inner tube (2), outer tube (7) both ends are respectively through end plug A (3) and super high vacuum knife edge flange B (4) and form sealed space with inner tube (2), the length of outer tube (7) is less than the length of inner tube (2), is located end plug A (3) rigid coupling of outer tube (7) one end in the surface of inner tube (2), just be close to one end of inner tube (2), super high vacuum knife edge flange B (4) rigid coupling in the other end tip of inner tube (2) and outer tube (7), the tip rigid coupling of inner tube (2) one end has super high vacuum knife edge flange A (1).
5. The integrated water cooling jacket for ultra-high vacuum environments according to claim 3 or 4, wherein: the ultrahigh vacuum knife edge flange A (1) and the ultrahigh vacuum knife edge flange B (4) are CF blind flanges, a through hole (13) is formed in the middle of each CF blind flange, and an annular groove (14) for preventing heat from being transferred to the ultrahigh vacuum knife edge flange A (1) or the ultrahigh vacuum knife edge flange B (4) is formed in the hole wall of each through hole (13).
6. The integrated water cooling jacket for ultra-high vacuum environments according to claim 3 or 4, wherein: the inner cylinder (2) and the outer cylinder (7) are hollow cylinders with openings at two ends, and the axial center lines of the inner cylinder (2), the outer cylinder (7), the ultrahigh vacuum knife edge flange A (1) and the ultrahigh vacuum knife edge flange B (4) are collinear.
7. The integrated water cooling jacket applied to the ultra-high vacuum environment according to claim 1, wherein: the spiral direction of the water inlet of the cooling medium is opposite to the spiral direction of the water outlet, and reverse convection is formed on the outer surface of the metal pipe (5).
8. The integrated water cooling jacket applied to the ultra-high vacuum environment according to claim 1, wherein: the metal tube (5) is a thin-wall metal tube, and the ratio of the outer diameter to the wall thickness is less than or equal to 6:1, the thinnest wall of the metal tube (5) is 0.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410115478.2A CN117646273B (en) | 2024-01-29 | 2024-01-29 | Integrated water cooling jacket applied to ultra-high vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410115478.2A CN117646273B (en) | 2024-01-29 | 2024-01-29 | Integrated water cooling jacket applied to ultra-high vacuum environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117646273A true CN117646273A (en) | 2024-03-05 |
| CN117646273B CN117646273B (en) | 2024-04-02 |
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Family Applications (1)
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| CN202410115478.2A Active CN117646273B (en) | 2024-01-29 | 2024-01-29 | Integrated water cooling jacket applied to ultra-high vacuum environment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118582790A (en) * | 2024-08-06 | 2024-09-03 | 安徽恒星世纪空调制冷设备有限公司 | Cooling device of small space mill of high integrated level |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5233970A (en) * | 1992-07-02 | 1993-08-10 | Harmony Thermal Company, Inc. | Semi-instantaneous water heater with helical heat exchanger |
| JP2001319610A (en) * | 2000-05-10 | 2001-11-16 | Jeol Ltd | Charged-particle beam apparatus |
| CN202430319U (en) * | 2011-11-29 | 2012-09-12 | 宁夏隆基硅材料有限公司 | Spiral water cooling jacket |
| CN208567543U (en) * | 2018-06-26 | 2019-03-01 | 天津环博科技有限责任公司 | A kind of cone cylinder water cooling equipment for Czochralski furnace |
| CN208649145U (en) * | 2018-07-24 | 2019-03-26 | 美尔森哈碳电碳（哈尔滨）有限公司 | The adiabatic apparatus of carbon product hot isostatic pressing, Vaccum Permeating copper machine |
| CN208901908U (en) * | 2018-06-26 | 2019-05-24 | 天津环博科技有限责任公司 | A kind of water cooling equipment for Czochralski furnace |
| WO2023221366A1 (en) * | 2022-05-18 | 2023-11-23 | 西安奕斯伟材料科技有限公司 | Water-cooled jacket device and single crystal furnace |
-
2024
- 2024-01-29 CN CN202410115478.2A patent/CN117646273B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5233970A (en) * | 1992-07-02 | 1993-08-10 | Harmony Thermal Company, Inc. | Semi-instantaneous water heater with helical heat exchanger |
| JP2001319610A (en) * | 2000-05-10 | 2001-11-16 | Jeol Ltd | Charged-particle beam apparatus |
| CN202430319U (en) * | 2011-11-29 | 2012-09-12 | 宁夏隆基硅材料有限公司 | Spiral water cooling jacket |
| CN208567543U (en) * | 2018-06-26 | 2019-03-01 | 天津环博科技有限责任公司 | A kind of cone cylinder water cooling equipment for Czochralski furnace |
| CN208901908U (en) * | 2018-06-26 | 2019-05-24 | 天津环博科技有限责任公司 | A kind of water cooling equipment for Czochralski furnace |
| CN208649145U (en) * | 2018-07-24 | 2019-03-26 | 美尔森哈碳电碳（哈尔滨）有限公司 | The adiabatic apparatus of carbon product hot isostatic pressing, Vaccum Permeating copper machine |
| WO2023221366A1 (en) * | 2022-05-18 | 2023-11-23 | 西安奕斯伟材料科技有限公司 | Water-cooled jacket device and single crystal furnace |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118582790A (en) * | 2024-08-06 | 2024-09-03 | 安徽恒星世纪空调制冷设备有限公司 | Cooling device of small space mill of high integrated level |
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| CN117646273B (en) | 2024-04-02 |
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