JP2001319610A - Charged-particle beam apparatus - Google Patents
Charged-particle beam apparatusInfo
- Publication number
- JP2001319610A JP2001319610A JP2000136528A JP2000136528A JP2001319610A JP 2001319610 A JP2001319610 A JP 2001319610A JP 2000136528 A JP2000136528 A JP 2000136528A JP 2000136528 A JP2000136528 A JP 2000136528A JP 2001319610 A JP2001319610 A JP 2001319610A
- Authority
- JP
- Japan
- Prior art keywords
- inner cylinder
- particle beam
- charged particle
- outer cylinder
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000002245 particle Substances 0.000 title claims description 29
- 238000001816 cooling Methods 0.000 claims abstract description 35
- 239000002826 coolant Substances 0.000 claims abstract description 6
- 238000003466 welding Methods 0.000 claims abstract description 6
- 239000003507 refrigerant Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 9
- 229920005989 resin Polymers 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 abstract description 15
- 230000006866 deterioration Effects 0.000 abstract 1
- 238000011109 contamination Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- -1 for example Inorganic materials 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する分野】本発明は、被照射対象物の汚染を
防止する機構を備えた荷電粒子ビーム装置に関する。The present invention relates to a charged particle beam apparatus provided with a mechanism for preventing contamination of an irradiation target.
【０００２】[0002]
【従来の技術】例えば、走査電子顕微鏡により試料を観
察したり、電子ビーム描画装置により半導体材料上にＩ
Ｃパターンを描いたり、集束イオンビーム装置により材
料上の所定の箇所をエッチングする等、荷電粒子ビーム
装置を使用して、試料や材料等の被照射対象物の観察や
加工等を行うことは良く知られている。2. Description of the Related Art For example, a sample is observed with a scanning electron microscope, or an I-beam is written on a semiconductor material by an electron beam drawing apparatus.
Observation or processing of an object to be irradiated such as a sample or a material is often performed using a charged particle beam apparatus, such as drawing a C pattern or etching a predetermined location on a material with a focused ion beam apparatus. Are known.
【０００３】この様な荷電粒子ビーム装置においては、
被照射対象物を汚染から保護する機構が設けられてい
る。[0003] In such a charged particle beam apparatus,
A mechanism is provided for protecting the irradiation target from contamination.
【０００４】この様な汚染防止機構を有する荷電粒子ビ
ーム装置について、例えば、走査電子顕微鏡を例に上げ
て説明する。[0004] A charged particle beam apparatus having such a contamination prevention mechanism will be described by taking a scanning electron microscope as an example.
【０００５】図１は走査電子顕微鏡の１概略例を示して
いる。図中１は試料室で、２は該試料室の上に載置され
た電子光学系鏡筒である。該試料室１及び光学系鏡筒２
内は共に排気装置（図示せず）により高真空状態になる
ように排気されている。FIG. 1 shows a schematic example of a scanning electron microscope. In the figure, reference numeral 1 denotes a sample chamber, and 2 denotes an electron optical system barrel mounted on the sample chamber. The sample chamber 1 and the optical system barrel 2
The inside is evacuated by an exhaust device (not shown) so as to be in a high vacuum state.
【０００６】図示されていないが、該電子光学系鏡筒内
には、電子ビームを発生させるための電子銃、該電子銃
からの電子ビームを集束させるための集束レンズ、前記
試料室１内に配置された試料Ｓ上を電子ビームで走査さ
せるための偏向器、電子ビームを該試料Ｓ上に集束させ
るための対物レンズ等が設けられている。Although not shown, an electron gun for generating an electron beam, a converging lens for converging an electron beam from the electron gun, and A deflector for scanning the placed sample S with an electron beam, an objective lens for focusing the electron beam on the sample S, and the like are provided.
【０００７】前記試料室１内には試料傾斜台３が設けら
れており、該傾斜台上にＹ方向に動くＹ方向プレート４
が、該Ｙ方向プレート上にＸ方向に動くＸプレート５
が、該Ｘ方向プレート上にＸ−Ｙ平面に垂直な軸を中心
に回転する回転プレート６が、それぞれ取り付けられて
いる。又、前記回転プレート６の上には試料Ｓが装着さ
れた試料ホルダ７が装着されている。尚、試料室内と試
料室外との間で試料ホルダーの出し入れが出来るよう
に、例えば、試料室側壁に開閉可能なゲート（図示せ
ず）が設けられており、試料ホルダーを把持した搬送機
構のアーム（図示せず）が該ゲートを通過出来るように
なっている。又、前記Ｘ方向プレート４，Ｙ方向プレー
ト５，回転プレート６はそれぞれ図示しないＸ方向移動
駆動機構、Ｙ方向移動駆動機構、回転駆動機構によって
それぞれ駆動される様に成っている。A sample tilting table 3 is provided in the sample chamber 1, and a Y-direction plate 4 that moves in the Y direction on the tilting table.
Is an X plate 5 that moves in the X direction on the Y direction plate.
However, a rotating plate 6 that rotates about an axis perpendicular to the XY plane is mounted on the X-direction plate. A sample holder 7 on which a sample S is mounted is mounted on the rotating plate 6. An openable / closable gate (not shown) is provided on the side wall of the sample chamber, for example, so that the sample holder can be taken in and out between the sample chamber and the outside of the sample chamber. (Not shown) can pass through the gate. The X-direction plate 4, the Y-direction plate 5, and the rotation plate 6 are respectively driven by an X-direction movement drive mechanism, a Y-direction movement drive mechanism, and a rotation drive mechanism (not shown).
【０００８】前記試料傾斜台３にはロッド８が取り付け
られており、該ロッドは試料室１の側壁１Ｓに設けられ
た孔を貫通するように取り付けられている。該側壁１Ｓ
とロッド８の間には真空を保つためのＯリング９が設け
られている。該ロッドは図示しない傾斜駆動機構により
中心軸Ｑを基準にして適宜角度回転される様に成ってい
る。尚、試料室１には図示しないが、試料Ｓを電子ビー
ムで走査した時に試料Ｓから発生した二次電子を検出す
る二次電子検出器等が取り付けられている。A rod 8 is attached to the sample tilting table 3, and the rod 8 is attached so as to pass through a hole provided in the side wall 1 S of the sample chamber 1. The side wall 1S
An O-ring 9 for keeping a vacuum is provided between the O-ring 9 and the rod 8. The rod is adapted to be appropriately rotated about the center axis Q by a tilt drive mechanism (not shown). Although not shown, the sample chamber 1 is provided with, for example, a secondary electron detector that detects secondary electrons generated from the sample S when the sample S is scanned with an electron beam.
【０００９】前記試料室１の上壁１Ｕには冷媒容器１０
が支持されている。該冷媒容器は外筒１１と内筒１２を
有しており、内筒１２内に液体窒素の如き冷媒 が収容
されており、後述する様に前記内筒１２は外筒１１に支
持される様に構成されている。前記内筒１２の下面には
上蓋１Ｕに開けられた孔１３を通して試料室内に伸びる
熱伝導棒１４が取り付けられている。該熱伝導棒の下端
と、前記試料傾斜台３に取り付けられた冷却板１５との
間は熱伝導網線１６で接続されている。尚、上蓋１Ｕと
外筒１１の間には真空を保っためのＯリング１７が設け
られている。A refrigerant container 10 is provided on the upper wall 1U of the sample chamber 1.
Is supported. The refrigerant container has an outer cylinder 11 and an inner cylinder 12, and a refrigerant such as liquid nitrogen is stored in the inner cylinder 12, and the inner cylinder 12 is supported by the outer cylinder 11 as described later. Is configured. A heat conducting rod 14 extending into the sample chamber through a hole 13 formed in the upper lid 1U is attached to the lower surface of the inner cylinder 12. The lower end of the heat conducting rod and the cooling plate 15 attached to the sample tilting table 3 are connected by a heat conducting net 16. An O-ring 17 is provided between the upper lid 1U and the outer cylinder 11 to maintain a vacuum.
【００１０】図２は前記冷媒容器１０の、特に、外筒１
１と内筒１２との接続部を詳細に示したものである。外
筒１１と内筒１２は共にステンレスの如き金属材料製で
あり、外筒１１の上端の開口１８には蓋１９が嵌入され
ている。この蓋１９を外すことにより、外部から該開口
１８及び前記内筒１２の上端の開口２０を介して液体窒
素の如き冷媒が内筒内に入れられる様に成っている。FIG. 2 shows the refrigerant container 10, in particular, the outer cylinder 1.
FIG. 2 shows a connection portion between the inner cylinder 1 and the inner cylinder 12 in detail. The outer cylinder 11 and the inner cylinder 12 are both made of a metal material such as stainless steel, and a lid 19 is fitted into an opening 18 at the upper end of the outer cylinder 11. By removing the lid 19, a refrigerant such as liquid nitrogen can be introduced into the inner cylinder from outside through the opening 18 and the opening 20 at the upper end of the inner cylinder 12.
【００１１】前記外筒１１と内筒１２の接続は、エポキ
シ樹脂の如き樹脂製の筒状体２１の一方の端部と外筒の
開口１８に近い部分を接着剤で繋ぎ、該筒状体２１の他
方の端部と内筒の開口２０に近い部分を接着剤で繋ぐこ
とによって行っており、この様な接続により、前記内筒
１２は前記外筒１１に支持されると同時に、外筒１１と
内筒１２との間の熱絶縁性、及び、前記試料室１内に繋
がっている真空空間部２２に対する真空シール性を高め
ている。The outer cylinder 11 and the inner cylinder 12 are connected by connecting one end of a cylindrical body 21 made of a resin such as epoxy resin and a portion near the opening 18 of the outer cylinder with an adhesive. The other end of the inner cylinder 21 and the portion near the opening 20 of the inner cylinder are connected by an adhesive. By such a connection, the inner cylinder 12 is supported by the outer cylinder 11 and The thermal insulation between the inner tube 11 and the inner tube 12 and the vacuum sealing to the vacuum space 22 connected to the sample chamber 1 are enhanced.
【００１２】上記の様な汚染防止機構において、試料表
面の近傍に配置された冷却板１５の熱は熱伝導網線１
６、熱伝導棒１４及び内筒１２を伝導して冷媒容器１０
内の冷媒に吸収されるので、冷却板１５は極めて低温に
維持されることになる。従って、試料Ｓ近辺の有機ガス
などが冷却板１５に吸着され、それにより試料Ｓに付着
する汚染物（コンタミネーション）を減らすことが出来
る。In the above-described contamination prevention mechanism, the heat of the cooling plate 15 arranged near the surface of the sample is transferred by the heat conduction net 1.
6. Conducting the heat conduction rod 14 and the inner cylinder 12 to allow the refrigerant container 10
The cooling plate 15 is maintained at an extremely low temperature because it is absorbed by the refrigerant inside. Therefore, the organic gas in the vicinity of the sample S is adsorbed on the cooling plate 15, and contaminants (contamination) attached to the sample S can be reduced.
【００１３】[0013]
【発明が解決しようとする課題】さて、前記汚染防止機
構において、上述した様に、外筒１１と内筒１２はステ
ンレスの如き金属製であるが、外筒１１と内筒１２を接
続する筒状体２１は、外筒１１と内筒１２との間の熱絶
縁性を上げるために樹脂材料で形成されている。しか
し、金属と樹脂との間の熱膨張係数の隔たりが大きいこ
とから、急な温度変化があると、筒状体２１と外筒１
１，及び筒状体２１と内筒１２との間に熱膨張量の大き
なずれが発生し、筒状体２１と外筒１１、及び筒状体２
１と内筒１２間の接続部の真空シール性が悪化すること
がある。As described above, the outer cylinder 11 and the inner cylinder 12 are made of metal such as stainless steel. The state body 21 is formed of a resin material in order to increase the thermal insulation between the outer cylinder 11 and the inner cylinder 12. However, since there is a large difference in thermal expansion coefficient between the metal and the resin, if there is a sudden temperature change, the cylindrical body 21 and the outer cylinder 1
1 and a large amount of thermal expansion occurs between the tubular body 21 and the inner barrel 12, and the tubular body 21, the outer barrel 11, and the tubular body 2
In some cases, the vacuum sealing performance of the connection between the first and inner cylinders 12 may be deteriorated.
【００１４】そこで、この様な真空シール性の悪化を防
ぐために、筒状体２１をステンレスの如き金属で作成
し、該筒状体と外筒１１、及び該筒状体と内筒１２とを
溶接などで繋ぐと、反面において、金属製の筒状体２１
は熱伝導率が高いので、冷媒が収容された内筒１２と外
筒１１間の熱絶縁性が著しく低下し、冷媒の消費量が極
めて多くなってしまう。場合によっては、この様な著し
い量の冷媒の消費に伴って冷媒ガスの泡が多量に発生
し、その為に、振動が発生し、試料像観察等に悪影響を
与える。Therefore, in order to prevent such a vacuum sealing property from being deteriorated, the cylindrical body 21 is made of a metal such as stainless steel, and the cylindrical body and the outer cylinder 11 and the cylindrical body and the inner cylinder 12 are formed. When connected by welding or the like, on the other hand, a metal tubular body 21 is formed.
Has a high thermal conductivity, the thermal insulation between the inner cylinder 12 and the outer cylinder 11 in which the refrigerant is accommodated is significantly reduced, and the consumption of the refrigerant becomes extremely large. In some cases, a large amount of refrigerant gas bubbles are generated with the consumption of such a remarkable amount of refrigerant, which causes vibration and adversely affects sample image observation and the like.
【００１５】本発明は、この様な問題点を解決する為に
なされたもので、新規な荷電粒子ビーム装置を提供する
ことを目的とするものである。The present invention has been made to solve such problems, and has as its object to provide a novel charged particle beam device.
【００１６】[0016]
【課題を解決するための手段】本発明の荷電粒子ビーム
装置は、荷電粒子ビームが照射される被照射物が配置さ
れるように成された被照射物チャンバーを備えており、
冷却媒体を収容した内筒，該内筒との間に空間を保ち且
つ該内筒を支持するように成した外筒，及び前記内筒に
取り付けられており且つ前記被照射物チャンバー内に配
置される冷却体を取り付けた熱伝導棒を備えた冷却容器
を該被照射物チャンバーに固定するように成した荷電粒
子ビーム装置において、前記外筒と内筒との接続を金属
製のベローズを介して行うように成したことを特徴とす
る。The charged particle beam apparatus according to the present invention includes an object chamber in which an object to be irradiated with the charged particle beam is arranged.
An inner cylinder containing a cooling medium, an outer cylinder configured to maintain a space between the inner cylinder and support the inner cylinder, and mounted on the inner cylinder and arranged in the irradiation target chamber. In a charged particle beam apparatus configured to fix a cooling container having a heat conducting rod to which a cooling body to be attached is attached to the irradiation object chamber, the outer cylinder and the inner cylinder are connected via a metal bellows. It is characterized by having done so.
【００１７】本発明の荷電粒子ビーム装置は、荷電粒子
ビームが照射される被照射物が配置されるように成され
た被照射物チャンバーを備えており、冷却媒体を収容し
た内筒，該内筒との間に空間を保ち且つ該内筒を支持す
るように成した外筒，及び前記内筒に取り付けられてお
り且つ前記被照射物チャンバー内に配置される冷却体を
取り付けた熱伝導棒を備えた冷却容器を該被照射物チャ
ンバーに固定するように成した荷電粒子ビーム装置にお
いて、前記外筒と内筒との接続を金属製の多重筒状体を
介して行うように成したことを特徴とする。The charged particle beam apparatus according to the present invention includes an irradiation object chamber in which an irradiation object to be irradiated with the charged particle beam is disposed, and includes an inner cylinder containing a cooling medium, and an inner cylinder. An outer tube configured to maintain a space between the tube and the inner tube and to support the inner tube; and a heat conducting rod mounted on the inner tube and having a cooling body disposed in the irradiation target chamber. In the charged particle beam device configured to fix the cooling container provided with the irradiation object chamber to the irradiation object chamber, the connection between the outer cylinder and the inner cylinder is performed through a metal multiple cylindrical body. It is characterized by.
【００１８】[0018]
【発明の実施の形態】以下、図面を参照して本発明の実
施の形態を詳細に説明する。Embodiments of the present invention will be described below in detail with reference to the drawings.
【００１９】図３は本発明の荷電粒子ビーム装置の主要
部の一例を示したもので、図４は図３のＡ−Ａ断面図、
図５は図３のＢ−Ｂ断面図である。図中前記図１及び図
２と同一記号の付されたものは同一構成要素を示す。FIG. 3 shows an example of a main part of the charged particle beam apparatus according to the present invention. FIG. 4 is a sectional view taken along line AA of FIG.
FIG. 5 is a sectional view taken along line BB of FIG. In the drawings, the same reference numerals as those in FIGS. 1 and 2 denote the same components.
【００２０】図中３０は径の僅かずつ異なるステンレス
の如き金属製の薄肉（肉厚が薄い）の筒状体３０Ａ，３
０Ｂ，３０Ｃ，３０Ｄ，３０Ｅが、中心軸Ｏに対して同
心円状に配置され、隣り合う筒状体が交互に一方の端部
か他方の端部の何れかに繋がった、いわゆる多重筒状体
である。この多重筒状体の一方の端部は外筒１１の開口
１８に近い部分に、他方の端部は内筒１２の開口２０に
近い部分にそれぞれ溶接で繋がれている。In the drawing, reference numeral 30 denotes a thin (thin wall) cylindrical body 30A, 3 made of metal such as stainless steel having a slightly different diameter.
A so-called multiple cylindrical body in which 0B, 30C, 30D, and 30E are arranged concentrically with respect to the central axis O, and adjacent cylindrical bodies are alternately connected to either one end or the other end. It is. One end of the multi-tubular body is connected to a portion of the outer cylinder 11 near the opening 18 and the other end is connected to a portion of the inner cylinder 12 near the opening 20 by welding.
【００２１】３１は内筒２２の下面に取り付けられ、試
料室１の上蓋１Ｕの孔１３を通して試料室内に伸びた熱
伝導棒で、その先端には冷却棒３２が取り付けられてお
り、更に該冷却棒の先端に、冷却板３３が取り付けられ
ている。該冷却板３３には電子ビーム通過孔３４が開け
られており、該電子ビーム通過孔３４の中心が電子ビー
ム中心軸Ｏと一致するように冷却板３３が配置されてい
る。Reference numeral 31 denotes a heat conducting rod which is attached to the lower surface of the inner cylinder 22 and extends into the sample chamber through the hole 13 of the upper lid 1U of the sample chamber 1. A cooling rod 32 is attached to the tip of the heat conductive rod. A cooling plate 33 is attached to the tip of the rod. The cooling plate 33 is provided with an electron beam passage hole 34, and the cooling plate 33 is arranged such that the center of the electron beam passage hole 34 coincides with the electron beam center axis O.
【００２２】３５Ａ，３５Ｂ，３５Ｃは光軸Ｏに対して
垂直方向から、その先端が前記熱伝導棒３１に接触する
様に外筒壁に螺合された軸合わせ用調整ネジである。こ
れらの調整用ネジ３５Ａ，３５Ｂ，３５Ｃは光軸Ｏに垂
直な面上で互いに１２０゜の間隔を有して外筒壁に螺合
されている。又、これらの調整用ネジは接触している熱
伝導棒３１に対して熱抵抗が大きくなるように、例え
ば、樹脂材料で作製されている。Numerals 35A, 35B and 35C are adjusting screws for axial alignment screwed to the outer cylinder wall so that the tips thereof come into contact with the heat conducting rod 31 from the direction perpendicular to the optical axis O. These adjusting screws 35A, 35B, 35C are screwed to the outer cylinder wall at an interval of 120 ° from each other on a plane perpendicular to the optical axis O. These adjusting screws are made of, for example, a resin material so as to increase the thermal resistance with respect to the contacting heat conductive rod 31.
【００２３】さて、冷却容器１０を試料室上蓋１Ｕ上に
取り付けた時に、冷却板３３に開けられた電子ビーム通
過孔３４の中心が電子ビーム光軸Ｏと一致するように、
冷却容器１０，熱伝導棒３１，冷却棒３２及び冷却板３
３の各大きさや取り付け位置等を設計しておく。しか
し、実際に前記各ユニットを取り付けた場合、設計通り
には行かないことがある。そこで、軸合わせ用調整ネジ
３５Ａ，３５Ｂ及び３５Ｃを調整することにより熱伝導
棒３１を移動させ、電子ビーム通過孔３４の中心と電子
ビーム光軸Ｏが一致するように軸合わせ調整を行う。こ
の様な調整においては、冷却容器１０の外において、軸
合わせ用調整用ネジ３５を回すことにより、その先端で
熱伝導棒３１を押圧することになる。この際、熱伝導棒
３１を取り付けた内筒１２は肉厚の薄い多重筒状体３０
により外筒１１に支持されているので、内筒１２が外筒
１１に対してフレキシブルに移動できるようになってい
るので、熱伝導棒３１をスムーズに移動（微動）させる
ことが出来る。When the cooling container 10 is mounted on the sample chamber upper lid 1U, the center of the electron beam passage hole 34 formed in the cooling plate 33 is aligned with the electron beam optical axis O.
Cooling vessel 10, heat conducting rod 31, cooling rod 32, and cooling plate 3
3 are designed in terms of size, mounting position, and the like. However, when each of the above units is actually attached, it may not go as designed. Therefore, by adjusting the adjusting screws 35A, 35B and 35C for axial alignment, the heat conducting rod 31 is moved, and the axial alignment is adjusted so that the center of the electron beam passage hole 34 and the optical axis O of the electron beam coincide. In such an adjustment, by turning the adjusting screw 35 for axis alignment outside the cooling vessel 10, the heat conductive rod 31 is pressed by the tip thereof. At this time, the inner cylinder 12 to which the heat conduction rod 31 is attached is a thin multi-layer cylindrical body 30.
As a result, the heat transfer rod 31 can be smoothly moved (slightly moved) because the inner cylinder 12 can be flexibly moved with respect to the outer cylinder 11.
【００２４】しかして、試料Ｓ表面の近傍に配置された
冷却板３３の熱は冷却棒３２、熱伝導棒３１及び内筒１
２を伝導して冷媒容器１０内の冷媒に吸収されるので、
冷却板１５は極めて低温に維持されることになる。従っ
て、試料Ｓ近辺の有機ガスなどが冷却板１５に吸着さ
れ、それにより試料Ｓに付着する汚染物（コンタミネー
ション）を減らすことが出来る。The heat of the cooling plate 33 arranged near the surface of the sample S is transferred to the cooling rod 32, the heat conducting rod 31, and the inner cylinder 1
2 and is absorbed by the refrigerant in the refrigerant container 10,
The cooling plate 15 will be maintained at a very low temperature. Therefore, the organic gas in the vicinity of the sample S is adsorbed on the cooling plate 15, and contaminants (contamination) attached to the sample S can be reduced.
【００２５】この際、内筒１２は肉厚の薄い金属製の多
重筒状体３０により外筒１１に支持される様に、多重筒
状体３０の一方の端部が外筒１１に、他方の端部が内筒
１２に溶接などにより接続されているので、前述した様
に内筒１２が外筒１１に対してフレキシブルに移動出
来、軸合わせのための熱伝導棒３１の微動が可能とな
る。又、外筒１１と内筒１２を接続しているものが肉厚
の薄い金属製の多重筒状体であることから、外筒１１と
内筒１２との間の熱抵抗が極めて大きくなり、冷媒の消
費を少なく出来る。又、この際、多量の冷媒消費による
冷媒ガスの泡の発生に基づく振動発生を防止することも
出来る。更に、多重筒状体が金属製であることから、急
な温度変化があっても、多重筒状体３０と外筒１１、及
び多重筒状体３０と内筒１２の各間の熱膨張量に殆ど差
がないので、多重筒状体３０と外筒１１、及び多重筒状
体３０と内筒１２各間の真空シール性が悪化することが
防止される。At this time, one end of the multiple cylinder 30 is attached to the outer cylinder 11 and the other end is attached so that the inner cylinder 12 is supported by the outer cylinder 11 by the thin metal multiple cylinder 30. Is connected to the inner cylinder 12 by welding or the like, so that the inner cylinder 12 can be flexibly moved with respect to the outer cylinder 11 as described above, and the fine movement of the heat conducting rod 31 for axial alignment is possible. Become. Moreover, since the thing connecting the outer cylinder 11 and the inner cylinder 12 is a thin metal multi-cylindrical body, the thermal resistance between the outer cylinder 11 and the inner cylinder 12 becomes extremely large, Refrigerant consumption can be reduced. At this time, it is also possible to prevent the generation of vibrations due to the generation of bubbles of the refrigerant gas due to the consumption of a large amount of the refrigerant. Furthermore, since the multi-tubular body is made of metal, even if there is a sudden temperature change, the amount of thermal expansion between the multi-tubular body 30 and the outer cylinder 11 and between the multi-tubular body 30 and the inner cylinder 12, , There is almost no difference, so that the vacuum sealing properties between the multiple cylindrical body 30 and the outer cylinder 11 and between the multiple cylindrical body 30 and the inner cylinder 12 are prevented from being deteriorated.
【００２６】さて、前記例では、外筒１１と内筒１２の
接続を多重筒状体３０を用いて行うう様に成したが、図
６に示す様に、金属製のベローズ４０を用いて行うよう
にしても良い。即ち、図６に示す様に、金属製のベロー
ズ４０の一方の端部を外筒１１の開口１８に近い部分
に、他方の端部を内筒１２の開口２０に近い部分にそれ
ぞれ溶接で繋いでも良い。In the above-described example, the connection between the outer cylinder 11 and the inner cylinder 12 is performed by using the multiple cylindrical body 30. However, as shown in FIG. It may be performed. That is, as shown in FIG. 6, one end of the metal bellows 40 is connected to a portion near the opening 18 of the outer tube 11 and the other end is connected to a portion near the opening 20 of the inner tube 12 by welding. But it is good.
【００２７】尚、本発明は前記例の構成に限定されな
い。例えば、ベローズ若しくは筒状体はステンレス以外
の金属、例えば、アルミニウム製でも良い。The present invention is not limited to the configuration of the above example. For example, the bellows or the tubular body may be made of a metal other than stainless steel, for example, aluminum.
【００２８】又、軸合わせ調整ネジの数は３個に限定さ
れず、例えば、４個以上設けても良い。Further, the number of the shaft adjustment screws is not limited to three, but may be four or more, for example.
【００２９】又、前記例では熱伝導棒３１に冷却棒３２
を介して冷却板３３を接続するように成したが、熱伝導
棒をＬ字型に成し、熱伝導棒に直接冷却板を取り付ける
構造にしても良い。In the above example, the heat conducting rod 31 is connected to the cooling rod 32.
Although the cooling plate 33 is connected via the heat conducting rod, the heat conducting rod may be formed in an L-shape and the cooling plate may be directly attached to the heat conducting rod.
【００３０】又、前記例では本発明を走査電子顕微鏡を
例に上げて説明したが、この様な例に限定されず、電子
ビーム描画装置、集束イオンビームによる分析装置等、
他の荷電粒子ビームにも応用可能である。In the above example, the present invention has been described by taking a scanning electron microscope as an example. However, the present invention is not limited to such an example.
It can be applied to other charged particle beams.
【図１】 走査電子顕微鏡の１概略例を示している。FIG. 1 shows a schematic example of a scanning electron microscope.
【図２】 従来の冷却容器の一部詳細を示している。FIG. 2 shows some details of a conventional cooling vessel.
【図３】 本発明の主要部の一概略例を示している。FIG. 3 shows a schematic example of a main part of the present invention.
【図４】 図３のＡ−Ａ断面を示している。FIG. 4 shows an AA cross section of FIG.
【図５】 図３のＢ−Ｂ断面を示している。FIG. 5 shows a BB cross section of FIG. 3;
【図６】 本発明の他の例の主要部の一概略例を示して
いる。FIG. 6 shows a schematic example of a main part of another example of the present invention.
１…試料室 ２…電子光学鏡筒 ３…試料傾斜台 ４…Ｙ方向プレート ５…Ｘ方向プレート ６…回転プレート ７…試料ホルダ ８…ロッド ９…Ｏリング １０…冷却容器 １１…外筒 １２…内筒 １３…孔 １４…熱伝導棒 １５…冷却板 １６…熱伝導網線 １７…Ｏリング １８…開口 １９…蓋 ２０…開口 ２１…筒状体 ２２…真空空間部 ３０…多重筒状体 ３１…熱伝導棒 ３２…冷却棒 ３３…冷却板 ３４…電子ビーム通過孔 ３５Ａ，３５Ｂ，３５Ｃ…軸合わせ用調整ネジ Ｓ…試料 １Ｕ…上蓋 Ｏ…電子ビーム光軸 Ｑ…ロッド軸 ４０…ベローズ DESCRIPTION OF SYMBOLS 1 ... Sample chamber 2 ... Electron optical column 3 ... Sample tilting table 4 ... Y direction plate 5 ... X direction plate 6 ... Rotating plate 7 ... Sample holder 8 ... Rod 9 ... O ring 10 ... Cooling container 11 ... Outer tube 12 ... Inner cylinder 13 Hole 14 Heat conduction rod 15 Cooling plate 16 Heat conduction mesh wire 17 O-ring 18 Opening 19 Lid 20 Opening 21 Cylindrical body 22 Vacuum space 30 Multi-cylindrical body 31 ... Heat conduction rod 32 ... Cooling rod 33 ... Cooling plate 34 ... Electron beam passage hole 35A, 35B, 35C ... Adjustment screw for axis alignment S ... Sample 1U ... Top cover O ... Electron beam optical axis Q ... Rod axis 40 ... Bellows
Claims (12)
配置されるように成された被照射物チャンバーを備えて
おり、冷却媒体を収容した内筒，該内筒との間に空間を
保ち且つ該内筒を支持するように成した外筒，及び前記
内筒に取り付けられており且つ前記被照射物チャンバー
内に配置される冷却体を取り付けた熱伝導棒を備えた冷
却容器を該被照射物チャンバーに固定するように成した
荷電粒子ビーム装置において、前記外筒と内筒との接続
を金属製のベローズを介して行うように成した荷電粒子
ビーム装置。An object chamber provided with an object to be irradiated with a charged particle beam is provided, and an inner cylinder containing a cooling medium and a space between the inner cylinder and the inner cylinder are provided. A cooling vessel provided with a heat conducting rod attached to the inner cylinder and fitted with a cooling body disposed in the irradiation target chamber, the outer vessel being adapted to hold and support the inner cylinder; A charged particle beam device fixed to an irradiation object chamber, wherein the outer tube and the inner tube are connected via a metal bellows.
配置されるように成された被照射物チャンバーを備えて
おり、冷却媒体を収容した内筒，該内筒との間に空間を
保ち且つ該内筒を支持するように成した外筒，及び前記
内筒に取り付けられており且つ前記被照射物チャンバー
内に配置される冷却体を取り付けた熱伝導棒を備えた冷
却容器を該被照射物チャンバーに固定するように成した
荷電粒子ビーム装置において、前記外筒と内筒との接続
を金属製の多重筒状体を介して行うように成した荷電粒
子ビーム装置。2. An irradiation object chamber provided with an irradiation object to be irradiated with a charged particle beam, wherein an inner cylinder containing a cooling medium and a space between the inner cylinder and the inner cylinder are provided. A cooling vessel provided with a heat conducting rod attached to the inner cylinder and fitted with a cooling body disposed in the irradiation target chamber, the outer vessel being adapted to hold and support the inner cylinder; A charged particle beam apparatus fixed to an irradiation object chamber, wherein the connection between the outer cylinder and the inner cylinder is performed via a metal multiple cylindrical body.
内に前記熱伝導棒の少なくとも一部が位置するように前
記外筒を前記被照射物チャンバーに取り付けるように成
した請求項１若しくは２記載の荷電粒子ビーム装置。3. The irradiation object chamber according to claim 1, wherein the outer cylinder is attached to the irradiation object chamber such that at least a part of the heat conducting rod is located in a hole formed in the irradiation object chamber. A charged particle beam apparatus as described in the above.
状体がそれぞれ空間を開けて同心円上に配置されてお
り、隣り合う筒状体が交互に何れか一方の端部で接続さ
れている請求項２記載の荷電粒子ビーム装置。4. The multiple cylindrical body has a plurality of cylindrical bodies having different diameters arranged on concentric circles with a space therebetween, and adjacent cylindrical bodies are connected alternately at one end. 3. The charged particle beam device according to claim 2, wherein
されており、他方の端部が内筒に接続されている請求項
１記載の荷電粒子ビーム装置。5. The charged particle beam device according to claim 1, wherein one end of the bellows is connected to an outer cylinder, and the other end is connected to an inner cylinder.
続されており、他方の端部が内筒に接続されている請求
項２記載の荷電粒子ビーム装置。6. The charged particle beam apparatus according to claim 2, wherein one end of the multi-tubular body is connected to an outer cylinder, and the other end is connected to an inner cylinder.
項５若しくは６記載の荷電粒子ビーム装置。7. The charged particle beam apparatus according to claim 5, wherein the connection is performed by welding.
される部分は外筒に開けられた冷媒導入口に近い部分で
あり、前記ベローズの他方の端部が内筒に接続される部
分は内筒に開けられた冷媒導入口に近い部分である請求
項５記載の荷電粒子ビーム装置。8. A portion in which one end of the bellows is connected to an outer cylinder is a portion near a refrigerant introduction port opened in the outer cylinder, and the other end of the bellows is connected to an inner cylinder. 6. The charged particle beam device according to claim 5, wherein the portion is a portion near a refrigerant inlet port opened in the inner cylinder.
続される部分は外筒に開けられた冷媒導入口に近い部分
であり、前記多重筒状体の他方の端部が内筒に接続され
る部分は内筒に開けられた冷媒導入口に近い部分である
請求項６記載の荷電粒子ビーム装置。9. A portion where one end of the multi-tubular body is connected to the outer cylinder is a portion near a refrigerant introduction port opened in the outer cylinder, and the other end of the multi-tubular body is connected to the outer cylinder. 7. The charged particle beam device according to claim 6, wherein the portion connected to the inner cylinder is a portion close to a refrigerant introduction port opened in the inner cylinder.
ム光軸に垂直な方向に押圧出来る軸合わせ用調整ネジが
外筒に螺合されている請求項１若しくは２記載の荷電粒
子ビーム装置。10. The charged particle beam apparatus according to claim 1, wherein an axis adjusting screw capable of pressing the heat conducting rod in a direction perpendicular to the optical axis of the charged particle beam is screwed to the outer cylinder. .
けて複数設けられている請求項１０記載の荷電粒子ビー
ム装置。11. The charged particle beam apparatus according to claim 10, wherein a plurality of axis adjusting screws are provided at appropriate intervals.
求項１０記載の荷電粒子ビーム装置。12. The charged particle beam apparatus according to claim 10, wherein the adjusting screw for axis alignment is made of resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000136528A JP2001319610A (en) | 2000-05-10 | 2000-05-10 | Charged-particle beam apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000136528A JP2001319610A (en) | 2000-05-10 | 2000-05-10 | Charged-particle beam apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001319610A true JP2001319610A (en) | 2001-11-16 |
Family
ID=18644454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000136528A Withdrawn JP2001319610A (en) | 2000-05-10 | 2000-05-10 | Charged-particle beam apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001319610A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005100988A (en) * | 2003-09-24 | 2005-04-14 | Carl Zeiss Nts Gmbh | Particle radiating device |
| KR100841070B1 (en) | 2006-11-20 | 2008-06-24 | 재단법인서울대학교산학협력재단 | Cooling system, apparatus for analyzing material properties having the same and method for analyzing material properties using the same |
| JP2009205937A (en) * | 2008-02-28 | 2009-09-10 | Hitachi High-Technologies Corp | Charged particle device, and using method |
| JP2009245907A (en) * | 2008-04-01 | 2009-10-22 | Hitachi High-Technologies Corp | Charged particle beam device |
| JP2013537689A (en) * | 2010-07-28 | 2013-10-03 | イー エイ フィシオネ インストルメンツ インコーポレーテッド | Improved low temperature sample holder |
| JP2014521976A (en) * | 2011-08-05 | 2014-08-28 | イー エイ フィシオネ インストルメンツ インコーポレーテッド | Improved low temperature sample holder |
| CN117646273A (en) * | 2024-01-29 | 2024-03-05 | 中国科学院沈阳科学仪器股份有限公司 | Integrated water cooling jacket applied to ultra-high vacuum environment |
-
2000
- 2000-05-10 JP JP2000136528A patent/JP2001319610A/en not_active Withdrawn
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005100988A (en) * | 2003-09-24 | 2005-04-14 | Carl Zeiss Nts Gmbh | Particle radiating device |
| KR100841070B1 (en) | 2006-11-20 | 2008-06-24 | 재단법인서울대학교산학협력재단 | Cooling system, apparatus for analyzing material properties having the same and method for analyzing material properties using the same |
| JP2009205937A (en) * | 2008-02-28 | 2009-09-10 | Hitachi High-Technologies Corp | Charged particle device, and using method |
| JP2009245907A (en) * | 2008-04-01 | 2009-10-22 | Hitachi High-Technologies Corp | Charged particle beam device |
| JP2013537689A (en) * | 2010-07-28 | 2013-10-03 | イー エイ フィシオネ インストルメンツ インコーポレーテッド | Improved low temperature sample holder |
| JP2014521976A (en) * | 2011-08-05 | 2014-08-28 | イー エイ フィシオネ インストルメンツ インコーポレーテッド | Improved low temperature sample holder |
| CN117646273A (en) * | 2024-01-29 | 2024-03-05 | 中国科学院沈阳科学仪器股份有限公司 | Integrated water cooling jacket applied to ultra-high vacuum environment |
| CN117646273B (en) * | 2024-01-29 | 2024-04-02 | 中国科学院沈阳科学仪器股份有限公司 | Integrated water cooling jacket applied to ultra-high vacuum environment |
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