CN208567543U - A kind of cone cylinder water cooling equipment for Czochralski furnace - Google Patents
A kind of cone cylinder water cooling equipment for Czochralski furnace Download PDFInfo
- Publication number
- CN208567543U CN208567543U CN201820991832.8U CN201820991832U CN208567543U CN 208567543 U CN208567543 U CN 208567543U CN 201820991832 U CN201820991832 U CN 201820991832U CN 208567543 U CN208567543 U CN 208567543U
- Authority
- CN
- China
- Prior art keywords
- water
- cone cylinder
- cooled jacket
- czochralski furnace
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a kind of cone cylinder water cooling equipment for Czochralski furnace, including cone cylinder water-cooled jacket, and the taper of the taper and Czochralski furnace guide shell of the cone cylinder water-cooled jacket matches, and the cone cylinder water-cooled jacket can be nested in the guide shell of the Czochralski furnace；The cone cylinder water-cooled jacket includes outer cylinder and inner cylinder, is provided with cooling water channel between the outer cylinder and the inner cylinder；The cone cylinder water-cooled jacket big end offers the water inlet and water outlet being connected to respectively with the cooling water channel；The utility model has the beneficial effects that water-cooled jacket is nested into the guide shell of Czochralski furnace, furnace inner space is saved, improves cooling effect.
Description
Technical field
The utility model belongs to Czochralski furnace auxiliary device field, can be nested in Czochralski furnace guide shell more particularly, to a kind of
Cone cylinder water cooling equipment.
Background technique
In existing technology, it is converted to during monocrystalline silicon production for polysilicon and uses Czochralski furnace, Czochralski furnace is one
Kind melts the polycrystalline materials such as polysilicon in inert gas (based on nitrogen, helium) environment, with heater, uses Grown by CZ Method
The equipment of dislocation-free monocrystalline.The temperature of the monocrystalline silicon of molten condition is higher under high temperature environment, and carrying out cooling just can be carried out
Subsequent process, and straight barrel type water-cooled jacket is more to furnace inner space occupancy, influences cooling efficiency.
Summary of the invention
Problem to be solved in the utility model is to provide a kind of cone cylinder water cooling equipment for Czochralski furnace, is especially suitable for water
Cold set nests into the guide shell of Czochralski furnace, saves furnace inner space, improves cooling effect.
In order to solve the above technical problems, the technical solution adopted in the utility model is: a kind of cone cylinder water for Czochralski furnace
Cool equipment, it is characterised in that: including cone cylinder water-cooled jacket, the taper phase of the taper and Czochralski furnace guide shell of the cone cylinder water-cooled jacket
Match, the cone cylinder water-cooled jacket can be nested in the guide shell of the Czochralski furnace；The cone cylinder water-cooled jacket includes outer cylinder and inner cylinder,
Cooling water channel is provided between the outer cylinder and the inner cylinder；The cone cylinder water-cooled jacket big end offer respectively with the cooling water
The water inlet and water outlet of road connection.
There are many set-up modes of cooling water channel, actual requirement can be needed to be selected.
Multi-layer annular cooling water channel can be set, i.e., the described cooling water channel includes outer annular water channel and internal layer annular water
Road, the internal layer water annulus are socketed in the outer annular water channel.It is arranged by using double-deck water channel, enhances water
Heat exchange efficiency between road.It can reinforce cooling effect.
Spirality channel can also be set in the cooling jacket, by the way that spirality channel is arranged, be capable of increasing in list
The water channel of position water jacket length and the heat exchange area of monocrystalline bar, improve heat exchange efficiency.
Further include water inlet pipe and outlet pipe, the water inlet pipe is connected with the water inlet, the outlet pipe and it is described go out
The mouth of a river is connected.
Preferably, the water inlet pipe and the outlet pipe are arranged along the Czochralski furnace inner wall.With the above arrangement, into
Outlet pipe not only plays water conduction, also acts as support positioning action, makes installation of the cone cylinder water-cooled jacket in Czochralski furnace more
Securely.
It preferably, further include being set to the big end end cap of the cone cylinder water-cooled jacket big end and being set to the cone cylinder
The small end end cap of water-cooled jacket small end.With the above arrangement, enhance the leakproofness of cooling jacket, prevent cooling water from outer cylinder and interior
It is leaked in welding gap that may be present between cylinder.
Preferably, corrugated protrusion is provided on the inner wall of the inner cylinder.With the above arrangement, in a limited space
The heat exchange area of cooling water channel Yu monocrystalline bar is inside further increased, cooling efficiency is increased.
Preferably, TiO2 coating is provided on the inner wall of the inner cylinder.With the above arrangement, reducing single-crystal silicon bar materials
With the friction of cooling jacket inner wall during lifting, keep lifting process more smooth, while avoiding the caused monocrystalline silicon that rubs
Bar damage.
The utility model has the advantages and positive effects of: due to the adoption of the above technical scheme, water-cooled jacket being nested into
In the guide shell of Czochralski furnace, furnace inner space is saved, improves cooling effect.Have many advantages, such as that structure is simple, cooling efficiency is high.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of an embodiment of the present invention
Fig. 2 is the cone cylinder water-cooled jacket schematic diagram of an embodiment of the present invention
Fig. 3 is the cone cylinder water-cooled jacket diagrammatic cross-section of an embodiment of the present invention
Fig. 4 is the cone cylinder inner cylinder diagrammatic cross-section of an embodiment of the present invention
In figure:
1, water inlet pipe 1-1, water inlet pipe fixed block 1-2, water inlet pipe fixing glue
2, the big end cap 2-2 of cone cylinder water-cooled jacket 2-1, water-cooled jacket, water-cooled jacket inner cylinder
2-3, water-cooled jacket outer cylinder 2-4, water-cooled jacket small end cover 3, outlet pipe
3-1, outlet pipe fixed block 3-2, outlet pipe fixing glue
Specific embodiment
As Fig. 1, an embodiment of the present invention structural schematic diagram shown in, an embodiment of the utility model includes cone cylinder
The taper of water-cooled jacket 2, the taper and Czochralski furnace guide shell of cone cylinder water-cooled jacket 2 matches, and cone cylinder water-cooled jacket 2 can be nested in Czochralski furnace
Guide shell in；In the present embodiment, to match with corresponding guide shell, the taper of cone cylinder water-cooled jacket 2 is 33 degree.
Cone cylinder water-cooled jacket includes in water-cooled jacket outer cylinder 2-3 and water-cooled jacket inner cylinder 2-2, water-cooled jacket outer cylinder 2-3 and water-cooled jacket
Cooling water channel is provided between cylinder 2-2；Cone cylinder water-cooled jacket big end offers the water inlet being connected to respectively with cooling water channel and goes out
The mouth of a river.
There are many set-up modes of cooling water channel, actual requirement can be needed to be selected.
In some embodiments of the utility model, multi-layer annular cooling water channel is set, i.e. cooling water channel includes outer layer ring
Shape water channel and internal layer water annulus, internal layer water annulus are socketed in outer annular water channel.It is set by using double-deck water channel
It sets, enhances the heat exchange efficiency between water channel.It can reinforce cooling effect.
In some embodiments of the utility model, as shown in Figure 2 and Figure 3, spirality channel is set in cooling jacket,
By the way that spirality channel is arranged, it is capable of increasing the heat exchange area of the water channel and monocrystalline bar in unit water jacket length, improves heat exchange
Efficiency.
It in the present embodiment, further include water inlet pipe 1 and outlet pipe 3, the water inlet on water inlet pipe 1 and cone cylinder water-cooled jacket 2
It is connected, outlet pipe 3 is connected with the water outlet on cone cylinder water-cooled jacket 2.
Preferably, in the present embodiment, water inlet pipe 1 and outlet pipe 3 are arranged along Czochralski furnace inner wall.Water inlet pipe 1 passes through
Water inlet pipe fixed block 1-1 and water inlet pipe fixing glue 1-2 are fixed on Czochralski furnace inner wall, and outlet pipe 3 passes through outlet pipe fixed block
3-1 and outlet pipe fixing glue 3-2 are fixed on inner wall.With the above arrangement, inlet and outlet pipes not only play water conduction, also
Support positioning action is played, keeps installation of the cone cylinder water-cooled jacket in Czochralski furnace more secured.
It preferably, further include being set to the big end end cap 2-1 of 2 big end of cone cylinder water-cooled jacket and being set to cone cylinder water cooling
Cover the small end end cap 2-4 of 2 small ends.With the above arrangement, enhancing the leakproofness of cone cylinder water-cooled jacket 2, prevent cooling water from outer cylinder
It is leaked in welding gap that may be present between 2-3 and inner cylinder 2-2.
Preferably, corrugated protrusion is provided on the inner wall of inner cylinder 2-2.With the above arrangement, in a limited space
The heat exchange area of cooling water channel Yu monocrystalline bar is inside further increased, cooling efficiency is increased.
Preferably, TiO2 coating is provided on the inner wall of inner cylinder 2-2.With the above arrangement, reducing single-crystal silicon bar materials
With the friction of cooling jacket inner wall during lifting, keep lifting process more smooth, while avoiding the caused monocrystalline silicon that rubs
Bar damage.
The embodiments of the present invention are described in detail above, the content is only the preferable reality of the utility model
Example is applied, should not be considered as limiting the scope of the present invention.Equalization made according to the scope of application of this utility model
Variation and improvement etc., should still belong within the patent covering scope of the utility model.
Claims (8)
1. a kind of cone cylinder water cooling equipment for Czochralski furnace, it is characterised in that: including cone cylinder water-cooled jacket, the cone cylinder water-cooled jacket
The taper of taper and Czochralski furnace guide shell matches, and the cone cylinder water-cooled jacket can be nested in the guide shell of the Czochralski furnace；Institute
Stating cone cylinder water-cooled jacket includes outer cylinder and inner cylinder, is provided with cooling water channel between the outer cylinder and the inner cylinder；The cone cylinder water
Cold set big end offers the water inlet and water outlet being connected to respectively with the cooling water channel.
2. a kind of cone cylinder water cooling equipment for Czochralski furnace according to claim 1, it is characterised in that: the cooling water channel
Including outer annular water channel and internal layer water annulus, the internal layer water annulus is socketed in the outer annular water channel.
3. a kind of cone cylinder water cooling equipment for Czochralski furnace according to claim 1, it is characterised in that: the cooling water channel
For spiral shape cooling water channel.
4. a kind of cone cylinder water cooling equipment for Czochralski furnace as claimed in any of claims 1 to 3, feature exist
In: it further include water inlet pipe and outlet pipe, the water inlet pipe is connected with the water inlet, the outlet pipe and the water outlet
It is connected.
5. a kind of cone cylinder water cooling equipment for Czochralski furnace according to claim 4, it is characterised in that: the water inlet pipe and
The outlet pipe is arranged along the Czochralski furnace inner wall.
6. according to claim 1, a kind of cone cylinder water cooling equipment for Czochralski furnace, feature described in any one of 2,3,5
It is: further includes being set to the big end end cap of the cone cylinder water-cooled jacket big end and being set to the small of the cone cylinder water-cooled jacket small end
Hold end cap.
7. according to claim 1, a kind of cone cylinder water cooling equipment for Czochralski furnace, feature described in any one of 2,3,5
It is: is provided with corrugated protrusion on the inner wall of the inner cylinder.
8. according to claim 1, a kind of cone cylinder water cooling equipment for Czochralski furnace, feature described in any one of 2,3,5
It is: is provided with TiO2 coating on the inner wall of the inner cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820991832.8U CN208567543U (en) | 2018-06-26 | 2018-06-26 | A kind of cone cylinder water cooling equipment for Czochralski furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820991832.8U CN208567543U (en) | 2018-06-26 | 2018-06-26 | A kind of cone cylinder water cooling equipment for Czochralski furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208567543U true CN208567543U (en) | 2019-03-01 |
Family
ID=65489108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820991832.8U Active CN208567543U (en) | 2018-06-26 | 2018-06-26 | A kind of cone cylinder water cooling equipment for Czochralski furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208567543U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114963656A (en) * | 2022-06-28 | 2022-08-30 | 四川晶科能源有限公司 | Water cooling device |
| CN117646273A (en) * | 2024-01-29 | 2024-03-05 | 中国科学院沈阳科学仪器股份有限公司 | Integrated water cooling jacket applied to ultra-high vacuum environment |
-
2018
- 2018-06-26 CN CN201820991832.8U patent/CN208567543U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114963656A (en) * | 2022-06-28 | 2022-08-30 | 四川晶科能源有限公司 | Water cooling device |
| CN114963656B (en) * | 2022-06-28 | 2024-01-26 | 四川晶科能源有限公司 | Water cooling device |
| CN117646273A (en) * | 2024-01-29 | 2024-03-05 | 中国科学院沈阳科学仪器股份有限公司 | Integrated water cooling jacket applied to ultra-high vacuum environment |
| CN117646273B (en) * | 2024-01-29 | 2024-04-02 | 中国科学院沈阳科学仪器股份有限公司 | Integrated water cooling jacket applied to ultra-high vacuum environment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208567543U (en) | A kind of cone cylinder water cooling equipment for Czochralski furnace | |
| CN207452294U (en) | A kind of bell with cooling device | |
| CN214736204U (en) | Guide cylinder and guide assembly | |
| CN207452295U (en) | A kind of cooling device for improving monocrystalline silicon pulling rate | |
| CN208901908U (en) | A kind of water cooling equipment for Czochralski furnace | |
| CN205893453U (en) | Guide cylinder for single crystal furnaces | |
| CN202380126U (en) | Heat shield device for straight pull silicon single crystal furnace | |
| CN208562590U (en) | A kind of cooling device and single crystal growing furnace applied to single crystal growing furnace | |
| CN212293710U (en) | Heating passageway for distillation production of titanium sponge by combined method | |
| CN102154687B (en) | Hook-type electromagnetic field device of full-diameter single crystal furnace | |
| CN107252881A (en) | The crystallizer of copper is produced for up-drawing method | |
| WO2012163053A1 (en) | Induction furnace used for stretching large diameter preformed bars of optical fiber | |
| CN205839185U (en) | A kind of special-shaped guide shell structure | |
| WO2023142898A1 (en) | Cooling device and control method therefor, and crystal growth apparatus | |
| CN106222735A (en) | Improve the device and method of pulling of silicon single crystal pulling rate | |
| CN215628407U (en) | Cooling device for rapid growth of crystal bar and single crystal furnace | |
| CN216514245U (en) | Graphite crucible for SiC single crystal growth device | |
| CN202090094U (en) | Hook-shaped electromagnetic field device of large-diameter single crystal furnace | |
| CN202808991U (en) | Zone-melting thermal field | |
| CN207103776U (en) | A kind of crystallizer for up-drawing method production copper | |
| CN105671632B (en) | A kind of polycrystalline ingot furnace of built-in heat exchanger and carrier gas heating unit | |
| CN209978599U (en) | Mesh belt type resistance furnace cooling water tank structure | |
| CN208567544U (en) | Corrugated cone cylinder water cooling equipment in one kind | |
| CN105948478A (en) | Optical fiber production heating furnace capable of reducing usage amount of helium | |
| CN108517554A (en) | A kind of crucible device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |