CN202090094U - Hook-shaped electromagnetic field device of large-diameter single crystal furnace - Google Patents
Hook-shaped electromagnetic field device of large-diameter single crystal furnace Download PDFInfo
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- CN202090094U CN202090094U CN2011201379017U CN201120137901U CN202090094U CN 202090094 U CN202090094 U CN 202090094U CN 2011201379017 U CN2011201379017 U CN 2011201379017U CN 201120137901 U CN201120137901 U CN 201120137901U CN 202090094 U CN202090094 U CN 202090094U
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Abstract
The utility model relates to process devices of silicon single crystal materials, in particular to a hook-shaped electromagnetic field device of a large-diameter single crystal furnace, which comprises direct current coils used for producing a hook-shaped electromagnetic field, and further comprises at least two annular closed containing cavities filled with cooling oil. The two containing cavities are vertically overlapped to form a hollow cylinder shape. Each closed containing cavity is formed by connecting a half-enclosed shielding body arranged on the outside, an inner cylinder arranged on the inside and two clamping plates in welding mode, and the containing cavities, pipelines, an oil pump, an oil cooling device together form a forced oil cooling system. Each closed containing cavity is internally provided with a group of direct current coils formed by winding solid copper pipes. The hook-shaped electromagnetic field device adopts a mode that the two coils are vertically arranged in parallel, so that produced magnetic lines of force are distributed axially and symmetrically. Simultaneously, magnetic field intensity is continuous and adjustable, axial and radial uniformity of a crystal bar is guaranteed, and single crystal oxygen content control effects are good. The electromagnetic field device adopts a two-fraction structure, and the two containing cavities are connected through bolts when used. The electromagnetic field device is simpler and more convenient to transport, disassemble, assemble and debug.
Description
Technical field
The utility model relates to the silicon single crystal material processing units, is specifically related to the supporting type that the colludes electromagnetic field device of a kind of major diameter single crystal stove.
Background technology
Silicon single crystal material is most important semiconductor material, is the basic substance of information society.Be subjected to the stimulation with the profit factor of impelling of unicircuit fast development, the scientific research of silicon single crystal material will develop towards high purity, high integrality, high uniformity and large diameter direction.And in the vertical pulling method produce single crystal, owing to thermograde, gravity, the rotation of crucible crystal bar etc., melt exists complicated convection current in the crucible, and this convection current is more violent in the major diameter single crystal stove.When these thermal convections will cause crystallization single crystal rod axially and radial inhomogeneous, cause single crystal rod resistivity inhomogeneous even defective occurs, the while also can be caused single crystal rod oxygen level height, does not satisfy requirement.In crystal growing process, add magnetic field and can effectively suppress thermal convection.What use in the major diameter single crystal stove at present, is a kind of advanced non-uniform magnetic-field---collude type magnetic field (CUSP magnetic field).This magnetic field magnetic line is distributed as rotational symmetry, and the axial-radial homogeneity of crystal bar is guaranteed; Longitudinal magnetic field is zero substantially on crystal pulling face, can not influence the evaporation of oxygen; Magnetic field is vertical substantially with it on sidewall of crucible, can reduce the dissolving of crucible; In other most of zones stronger axial and radial magnetic field is arranged, can effectively suppress thermal convection.Compare traditional not adding magnetic field or add single single crystal growing furnace horizontal, longitudinal magnetic field and compare, this monocrystalline all is greatly improved on performances such as oxygen level, homogeneity and integrity.
The type that the colludes magnetic field of using in the present major diameter single crystal stove all is to adopt air core solenoid usually, in the middle of the copper pipe enough hollow coolings that guarantees coil must be arranged.The defective of this mode is: hollow copper tubing must meet a minimum size, therefore under the restriction of actual installation size, adopt air core solenoid mode coil turn to be restricted, because magneticstrength is to be directly proportional with coil turn with by the long-pending of coil current, and in order to guarantee that magneticstrength is enough big, then must improve the electrical current I of coil, so just must increase the power consumption of coil.
Simultaneously, integrated shielding body in the prior art, because the gap is smaller between coil and the shielding, two coils assemble trouble together up and down, are not easy to I﹠ M.And integrated shielding body total mass is big, crane is required high.Therefore the shielding of two coils is divided into binary and will helps assembling and lifting, can reduce the requirement of factory building crane, be adapted to common installation factory building more.And for routine maintenance and maintenance, the magnetic shield of catamaran type is very beneficial for dismounting separately and maintenance.
The utility model content
The technical problems to be solved in the utility model is, overcomes deficiency of the prior art, provides a kind of major diameter single crystal stove to collude the type electromagnetic field device, improving the quality of monocrystalline, and reduces the power consumption in magnetic field.
Be the technical solution problem, the technical scheme that the utility model adopted is:
Provide a kind of major diameter single crystal stove to collude the type electromagnetic field device, comprise being used to produce the dc coil that colludes the type electromagnetic field, this device comprises at least two airtight cavity volumes of ring-type that are full of cooling oil, and stack is the cylindric of hollow up and down; Each airtight cavity volume by the shielding of the semi-surrounding formula that is positioned at the outside, be positioned at inboard inner core and two blocks of plates in distress and be interconnected to form with Type of Welding, and form but system of forced oil cooling jointly by pipeline and oil pump, oil cooler; One group of dc coil that turns to solid copper pipe is set respectively in the described airtight cavity volume.
As a kind of improvement, described dc coil adopts non-complete symmetric parallel arrangement; The radius of each dc coil, radially the number of turn, wire glass etc. are all identical, will be more than the dc coil that is positioned at the top but be positioned at the axial number of turn of the dc coil of below.
As a kind of improvement, described shielding periphery is equipped with water jacket.
As a kind of improvement, described device has a locating device that is used for fixing installation, up and down two airtight cavity volumes by Bolt Connection in locating device.
As a kind of improvement, described shielding is the shielding that DT4 pure iron material is made.
As a kind of improvement, described oil cooler is a plate-type heat exchanger.
As a kind of improvement, the lifting fixed position that described airtight cavity volume outer setting is used to lift.
As a kind of improvement, temperature measurer is equipped with at the cooling-oil outlet place of described airtight cavity volume, and links to each other with the electric-controlled switch of device by signal wire.
The beneficial effects of the utility model are:
1, owing to adopted two coil parallel arrangements up and down, the magnetic line of force of generation is distributed as rotational symmetry, and magneticstrength is adjustable continuously simultaneously, and the axial-radial homogeneity of crystal bar is guaranteed; Longitudinal magnetic field is zero substantially on crystal pulling face, can not influence the evaporation of SiO; Magnetic field is vertical substantially with it on sidewall of crucible, can reduce the dissolving of crucible; In other most of zones stronger axial and radial magnetic field is arranged, can effectively suppress thermal convection.Do not apply magnetic field or add laterally or the monocrystalline of longitudinal magnetic field with respect to tradition, applying the monocrystalline Control for Oxygen Content effect of colluding type magnetic field will get well.
2, adopt the dichotomic type structure, get up by Bolt Connection during use, transportation, dismounting, installation and debugging are all simpler, convenient.
3, dc coil adopts the forced convection type of cooling, conduct heat, temperature rise is low, simple in structure; Compare the air core solenoid of general employing, water flowing refrigerative mode, this mode is simple and reliable, has lacked complicated water route and has distributed, and solid copper pipe technique for coiling is also simple a lot.
4, dc coil adopts non-complete symmetric form, and the lower coil number of turn is many, saves material; Can be optimized coil diameter, coil-span, the coil axial-radial number of turn etc., magnetic field device is producing under the same magneticstrength, and power consumption reduces more than 20% compared with similar products.
Description of drawings
Fig. 1 is the vertical view of the installation profile of the utility model patent;
Fig. 2 is the cross-sectional view of the utility model patent;
Fig. 3 is the cooling system synoptic diagram of the utility model patent;
Fig. 4 is the utility model patent and the power consumption comparison diagram in existing similar magnetic field.
Reference numeral among the figure is:
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is explained.
Major diameter single crystal stove in the present embodiment colludes the type electromagnetic field device and comprises two airtight cavity volumes of ring-type that are full of cooling oil, and the airtight cavity volume of ring-type superposes up and down and is the cylindric of hollow; Each airtight cavity volume by the shielding (go up coil shielding 1 or lower coil shielding 7) of the semi-surrounding formula that is positioned at the outside, be positioned at inboard inner core 12 and two blocks plate in distress 11 and be interconnected to form with Type of Welding, and form but systems of forced oil coolings jointly by pipeline and oil pump, oil cooler 13, the shielding periphery is equipped with water jacket 3.Oil cooler 13 in the present embodiment is plate-type heat exchangers.This device has a locating device that is used for fixing installation, and two airtight cavity volumes are connected in locating device by bolt 5 up and down.
One group of dc coil 6 that turns to solid copper tube is set respectively in two airtight cavity volumes, and every circle copper pipe axially and all leave certain interval radially is beneficial to the cooling oil cooling.Every circle coil is all fixed by the insulcrete that is welded on the inner core 12, and reducing may be because of the outer high-frequency vibration that causes that disturbs.And the coil that this solid copper pipe coiling forms just can solve this problem, and than similar products at home and abroad, power consumption reduces more than 20%.
As shown in Figure 1, the whole type magnetic field device that colludes is a tubular, integral body can be enclosed within single crystal growing furnace body of heater outside, and certain interval is arranged with furnace body outer wall, whole magnetic field device can promote by the lifting fixed position that airtight cavity volume outside is located in four spiral lifts 14 suspention and descend, and adjusts the relative position of magnetic field and body of heater.
What shielding was selected for use is the high DT4 type pure iron material of high magnetic permeability, because the shielding magnetic resistance that DT4 pure iron material constitutes is well below air reluctance, the magnetic line of force of coil nearly all can be shielded from the shielding, and it is very small to drain to airborne magnetic line of force.Can improve the magneticstrength in the single crystal growing furnace like this, and avoid magnetic field pollution to external world.
Temperature measurer is equipped with at the cooling-oil outlet place of airtight cavity volume, and links to each other with the electric-controlled switch of device by signal wire.Too high when unusual when oil temperature, start alarm, close the whole type magnetic field device that colludes.The shielding outside surface is equipped with one deck water jacket 3, guarantees that the shielding hull-skin temperature is no more than preset value.
The contrast of the power consumption of magnetic field device and KAYEX company same model device as shown in Figure 4 in the present embodiment, as can be seen from the figure, in the magnetic field range that the single crystal growing furnace works better requires (500-800G), magnetic field device of the present utility model is more energy-conservation more than 20% than external same model magnetic field device.
The above, it only is several preferable case study on implementation of the present utility model, be not that the utility model is done any pro forma restriction, though the utility model discloses as above with preferable case study on implementation, yet be not in order to limit the utility model, any those skilled in the art, in not breaking away from the technical solutions of the utility model scope, when the structure that can utilize above-mentioned announcement and technology contents are made a little change or be modified to the equivalent case study on implementation of equivalent variations, but every content that does not break away from technical solutions of the utility model, any simple modification that foundation technical spirit of the present utility model is done above case study on implementation, equivalent variations and modification all still belong in the technical solutions of the utility model scope.
Claims (8)
1. the major diameter single crystal stove colludes the type electromagnetic field device, comprises being used to produce the dc coil that colludes the type electromagnetic field, it is characterized in that, this device comprises at least two airtight cavity volumes of ring-type that are full of cooling oil, and stack is the cylindric of hollow up and down; Each airtight cavity volume by the shielding of the semi-surrounding formula that is positioned at the outside, be positioned at inboard inner core and two blocks of plates in distress and be interconnected to form with Type of Welding, and form but system of forced oil cooling jointly by pipeline and oil pump, oil cooler; One group of dc coil that turns to solid copper pipe is set respectively in the described airtight cavity volume.
2. the type electromagnetic field device that colludes according to claim 1 is characterized in that, described dc coil adopts non-complete symmetric parallel arrangement; The radius of each dc coil, radially the number of turn, wire glass etc. are all identical, will be more than the dc coil that is positioned at the top but be positioned at the axial number of turn of the dc coil of below.
3. according to the collude type electromagnetic field device of claim 1 or 2 in described any one, it is characterized in that described shielding periphery is equipped with water jacket.
4. according to the collude type electromagnetic field device of claim 1 or 2 in described any one, it is characterized in that described device has a locating device that is used for fixing installation, up and down two airtight cavity volumes by Bolt Connection in locating device.
5. according to the collude type electromagnetic field device of claim 1 or 2 in described any one, it is characterized in that described shielding is the shielding that DT4 pure iron material is made.
6. according to the collude type electromagnetic field device of claim 1 or 2 in described any one, it is characterized in that described oil cooler is a plate-type heat exchanger.
7. according to the collude type electromagnetic field device of claim 1 or 2 in described any one, it is characterized in that the lifting fixed position that described airtight cavity volume outer setting is used to lift.
8. according to the collude type electromagnetic field device of claim 1 or 2 in described any one, it is characterized in that temperature measurer is equipped with at the cooling-oil outlet place of described airtight cavity volume, and link to each other with the electric-controlled switch of device by signal wire.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201379017U CN202090094U (en) | 2011-05-04 | 2011-05-04 | Hook-shaped electromagnetic field device of large-diameter single crystal furnace |
| PCT/CN2012/073878 WO2012149861A1 (en) | 2011-05-04 | 2012-04-12 | Cusp electromagnetic field device of large-diameter single-crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201379017U CN202090094U (en) | 2011-05-04 | 2011-05-04 | Hook-shaped electromagnetic field device of large-diameter single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202090094U true CN202090094U (en) | 2011-12-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201379017U Expired - Lifetime CN202090094U (en) | 2011-05-04 | 2011-05-04 | Hook-shaped electromagnetic field device of large-diameter single crystal furnace |
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| Country | Link |
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| CN (1) | CN202090094U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102154687A (en) * | 2011-05-04 | 2011-08-17 | 杭州慧翔电液技术开发有限公司 | Hook-type electromagnetic field device of full-diameter single crystal furnace |
| WO2012149861A1 (en) * | 2011-05-04 | 2012-11-08 | 浙江晶盛机电股份有限公司 | Cusp electromagnetic field device of large-diameter single-crystal furnace |
| CN103590109A (en) * | 2013-08-21 | 2014-02-19 | 西安隆基硅材料股份有限公司 | Czochralski crystal growing furnace magnetic field device and method for pulling crystal by using same |
-
2011
- 2011-05-04 CN CN2011201379017U patent/CN202090094U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102154687A (en) * | 2011-05-04 | 2011-08-17 | 杭州慧翔电液技术开发有限公司 | Hook-type electromagnetic field device of full-diameter single crystal furnace |
| CN102154687B (en) * | 2011-05-04 | 2012-07-04 | 杭州慧翔电液技术开发有限公司 | Hook-type electromagnetic field device of full-diameter single crystal furnace |
| WO2012149861A1 (en) * | 2011-05-04 | 2012-11-08 | 浙江晶盛机电股份有限公司 | Cusp electromagnetic field device of large-diameter single-crystal furnace |
| CN103590109A (en) * | 2013-08-21 | 2014-02-19 | 西安隆基硅材料股份有限公司 | Czochralski crystal growing furnace magnetic field device and method for pulling crystal by using same |
| CN103590109B (en) * | 2013-08-21 | 2016-04-27 | 银川隆基硅材料有限公司 | Czochralski crystal growing furnace magnetic field device and use the crystal pulling method of this magnetic field device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20111228 Effective date of abandoning: 20120704 |