CN204752905U - A exhaust duct for vertical pulling silicon single crystal stove exhaust system - Google Patents
A exhaust duct for vertical pulling silicon single crystal stove exhaust system Download PDFInfo
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- CN204752905U CN204752905U CN201520385238.0U CN201520385238U CN204752905U CN 204752905 U CN204752905 U CN 204752905U CN 201520385238 U CN201520385238 U CN 201520385238U CN 204752905 U CN204752905 U CN 204752905U
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- stove
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Abstract
The utility model relates to an exhaust duct for vertical pulling silicon single crystal stove exhaust system, scaling the pipe scale pipe and stove in the stove outside, scaling the pipe in the stove and describe the flaring including gaseous approach section, contraction section and gas outgoing section, gaseous approach section for being loudspeaker, contraction section and gas outgoing section are direct pipe, and direct tub of pipe diameter of contraction section is lighter than direct tub of pipe diameter of gas outgoing section, and the stove scales the pipe outward and links to each other with the gas outgoing section, and the stove scales outward manages to the equant siphunculus of body external diameter, and the pipe inner wall face that the stove scaled the pipe outward is equipped with flange and concave reason. The speed in the mixed gas outgoing stove that can accelerate argon gas and the interior volatile substance of stove is created in the invention, shortens the volatile substance reached the pipeline mouth in the stove dwell time, reduces gathering and the deposit of volatile substance at the furnace exhaust mouth of pipe, can make intraductal gas become the torrent by the laminar flow, improve volatile substance temperature in the pipeline, be favorable to reducing the deposit of volatile substance in the pipeline, can effectively improve exhaust efficiency, reduce the probability that blocks up the fuse -element liquid level shake that arouses by exhaust duct, and then improve and become brilliant.
Description
Technical field
The invention belongs to silicon single crystal manufacturing apparatus field, especially relates to a kind of gas exhaust duct for straight pulling silicon single crystal furnace exhaust system.
Background technology
Monocrystalline growth with czochralski silicon is current manufacture order crystal silicon utilisation technology the most widely, and the exhaust system in czochralski crystal growing furnace is one of important system, and it directly affects the Cheng Jing of monocrystalline.The Main Function of exhaust takes away volatile matter in stove, exhaust freely then do not cause following some:
The first, affect the discharge of volatile matter in stove, and then affect the crystal forming rate of monocrystalline;
The second, exhaust freely can not draw local gas convection current, eddy current, thus causes mechanical shock, and then causes liquid level to shake, and is finally unfavorable for single crystal growing.
Therefore, need to improve gas barrier, reduce or avoid because exhaust is not freely on the impact of single crystal growing, and then reduce or avoid waste man-hour, improving the rate of utilization of work hour, improve production capacity, reduce costs.Disclosed in Chinese patent CN102312284B, a kind of vertical pulling silicon single crystal heater exhaust mode with multiple uniform downward gas exhaust duct, is characterized in increasing gas exhaust duct latus rectum, improves exhaust efficiency.Its deficiency is: there is larger resistance of exhaust in exhaust process on the one hand, and easily induction produces because then exhaust can make gas produce eddy current near pipeline opening, and this directly can reduce exhaust efficiency; There is larger resistance in arc exhaust pipeline on the other hand, easily induces the problems such as mechanical shock.
Summary of the invention
The invention will solve above technical problem, provides a kind of gas exhaust duct for straight pulling silicon single crystal furnace exhaust system.
For solving the problems of the technologies described above, the technical scheme that the invention adopts is: a kind of gas exhaust duct for straight pulling silicon single crystal furnace exhaust system, comprise shaped telescopic tube and the outer shaped telescopic tube of stove in stove, in described stove, shaped telescopic tube comprises the gas approach section connected successively, contraction section and gas discharge section, described gas approach section is for being trumpet-shaped enlarging, described contraction section and described gas are discharged section and are straight pipe, and the straight pipe caliber of described contraction section is less than the straight pipe caliber that described gas discharges section, the outer shaped telescopic tube of described stove is discharged section with described gas and is connected, the outer shaped telescopic tube of described stove is the isometrical siphunculus of outer tube diameter, the inboard wall of tube body face of the outer shaped telescopic tube of described stove is provided with several flange and recessed edge, each flange is alternately connected with recessed edge and forms wavy fluctuating.
Further, one end of described contraction section is connected with the contraction mouth arc transition of described enlarging, and the other end and the described gas of described contraction section are discharged section arc transition and is connected.
Further, the opening port outer wall of described enlarging connects ring plug.
Further, the tube wall of the outer shaped telescopic tube of described stove is provided with heat preservation carbon felt.
The advantage that the invention has and positively effect are: a kind of gas exhaust duct for straight pulling silicon single crystal furnace exhaust system, the speed in the mixed gas discharge stove of volatile matter in argon gas and stove can be accelerated on the one hand, shorten volatile matter in stove and the residence time of pipeline opening, reduce volatile matter in the gathering of burner hearth exhaust pipe mouth and deposition; On the other hand, the outer shaped telescopic tube of stove can make gas in pipe become turbulent flow from laminar flow, thinning boundary layer thickness, improve volatile matter temperature in pipeline simultaneously, be conducive to reducing the deposition of volatile matter in pipeline, can effectively improve exhaust efficiency, reduce the probability being blocked the melt liquid level shake caused by gas exhaust duct, and then improve into crystalline substance.
Accompanying drawing explanation
Fig. 1 is convergent-divergent tubular construction schematic diagram in stove;
Fig. 2 is the outer convergent-divergent tubular construction schematic diagram of stove;
Fig. 3 is the invention using state schematic diagram.
In figure: 1, enlarging; 2, contraction section; 3, gas discharges section; 4, flange;
5, recessed edge; 6, ring plug.
Embodiment
Elaborate below in conjunction with the specific embodiment of accompanying drawing to the invention.
A kind of gas exhaust duct for straight pulling silicon single crystal furnace exhaust system, comprise shaped telescopic tube and the outer shaped telescopic tube of stove in stove, in described stove, shaped telescopic tube comprises the gas approach section connected successively, contraction section 2 and gas discharge section 3, described gas approach section is for being trumpet-shaped enlarging 1, described contraction section 2 and described gas are discharged section 3 and are straight pipe, and the straight pipe caliber of described contraction section 2 is less than the straight pipe caliber that described gas discharges section 3, the outer shaped telescopic tube of described stove is discharged section 3 with described gas and is connected, the outer shaped telescopic tube of described stove is the isometrical siphunculus of outer tube diameter, the inboard wall of tube body face of the outer shaped telescopic tube of described stove is provided with several flange 4 and recessed edge 5, each flange 4 is alternately connected with recessed edge 5 and forms wavy fluctuating.
One end of described contraction section 2 is connected with the contraction mouth arc transition of described enlarging 1, and the other end and the described gas of described contraction section 2 are discharged section 3 arc transition and is connected.
The opening port outer wall of described enlarging 1 connects ring plug 6.
The tube wall of the outer shaped telescopic tube of described stove is provided with heat preservation carbon felt.
A kind of gas exhaust duct for straight pulling silicon single crystal furnace exhaust system effectively can discharging volatile matter in stove fast that the invention provides, this pipeline is mainly divided into two portions, a part is scaling pipe in stove, and as shown in Figure 1, it is discharged section 3 by enlarging 1, contraction section 2 and gas and forms; Another part is the outer shaped telescopic tube of stove, and as shown in Figure 2, its structure external diameter is isometrical, internal diameter is corrugated siphunculus, the outer convergent-divergent pipeline tube wall of stove increases insulation charcoal felt simultaneously.
Shaped telescopic tube in stove, it is discharged section 3 by enlarging 1, contraction section 2 and gas and forms, and pipeline material is high purity graphite material.After czochralski crystal growing furnace charging, material, doping, volatile matter volatilizees by raw material and auxiliary material, is mixed into mixed gas by argon gas, and is discharged to the outer shaped telescopic tube of stove by shaped telescopic tube in stove, and is taken away by off-gas pump.Trumpet flare 1 and contraction section 2, the mixed gas can accelerating volatile matter in argon gas and stove discharges the speed in stove, shortens volatile matter in stove and the residence time of pipeline opening, reduces volatile matter in the gathering of burner hearth exhaust pipe mouth and deposition.The outer shaped telescopic tube of stove, inboard wall of tube body be provided with by the flange 4 alternately connected and recessed edge 5 form wavy, the eddy current of exhaust ports gas in burner hearth can be reduced, reduce the residence time, and then reduce the deposition of volatile matter herein, reduce by being vented the brilliant bad problem of the not smooth one-tenth caused.As shown in Figure 3, the concrete use procedure of the invention is: enlarging 1 is inlet end, and gas enters fast from trumpet flare 1, via the speed-raising of contraction section 2 reducing, then is delivered to shaped telescopic tube stove from gas discharge section 3.The outer convergent-divergent tube material of stove is stainless steel, outside stove Outer Tube, separately wrap up in insulation charcoal felt.The opening port outer wall of enlarging 1 connects ring plug 6, and object facilitates enlarging 1 to stretch in insulated tank.
Above an embodiment of the invention has been described in detail, but described content being only the preferred embodiment of the invention, the practical range for limiting the invention can not being considered to.All equalization changes done according to the invention application range with improve, within the patent covering scope that still all should belong to the invention.
Claims (4)
1. the gas exhaust duct for straight pulling silicon single crystal furnace exhaust system, it is characterized in that: comprise shaped telescopic tube and the outer shaped telescopic tube of stove in stove, in described stove, shaped telescopic tube comprises the gas approach section connected successively, contraction section and gas discharge section, described gas approach section is for being trumpet-shaped enlarging, described contraction section and described gas are discharged section and are straight pipe, and the straight pipe caliber of described contraction section is less than the straight pipe caliber that described gas discharges section, the outer shaped telescopic tube of described stove is discharged section with described gas and is connected, the outer shaped telescopic tube of described stove is the isometrical siphunculus of outer tube diameter, the inboard wall of tube body face of the outer shaped telescopic tube of described stove is provided with several flange and recessed edge, each flange is alternately connected with recessed edge and forms wavy fluctuating.
2. a kind of gas exhaust duct for straight pulling silicon single crystal furnace exhaust system according to claim 1, it is characterized in that: one end of described contraction section is connected with the contraction mouth arc transition of described enlarging, the other end and the described gas of described contraction section are discharged section arc transition and are connected.
3. a kind of gas exhaust duct for straight pulling silicon single crystal furnace exhaust system according to claim 1, is characterized in that: the opening port outer wall of described enlarging connects ring plug.
4. a kind of gas exhaust duct for straight pulling silicon single crystal furnace exhaust system according to claim 1, is characterized in that: the tube wall of the outer shaped telescopic tube of described stove is provided with heat preservation carbon felt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520385238.0U CN204752905U (en) | 2015-06-04 | 2015-06-04 | A exhaust duct for vertical pulling silicon single crystal stove exhaust system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520385238.0U CN204752905U (en) | 2015-06-04 | 2015-06-04 | A exhaust duct for vertical pulling silicon single crystal stove exhaust system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204752905U true CN204752905U (en) | 2015-11-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520385238.0U Withdrawn - After Issue CN204752905U (en) | 2015-06-04 | 2015-06-04 | A exhaust duct for vertical pulling silicon single crystal stove exhaust system |
Country Status (1)
| Country | Link |
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| CN (1) | CN204752905U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104846432A (en) * | 2015-06-04 | 2015-08-19 | 天津市环欧半导体材料技术有限公司 | Exhaust pipeline for czochralski silicon single-crystal furnace exhaust system |
| CN109797426A (en) * | 2019-03-11 | 2019-05-24 | 上海新昇半导体科技有限公司 | A kind of crystal pulling apparatus |
| WO2022182534A1 (en) * | 2021-02-24 | 2022-09-01 | Globalwafers Co., Ltd. | Ingot puller apparatus having a compound exhaust tube and methods for selecting the lengths of lower and upper exhaust tube portions |
-
2015
- 2015-06-04 CN CN201520385238.0U patent/CN204752905U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104846432A (en) * | 2015-06-04 | 2015-08-19 | 天津市环欧半导体材料技术有限公司 | Exhaust pipeline for czochralski silicon single-crystal furnace exhaust system |
| CN104846432B (en) * | 2015-06-04 | 2017-08-25 | 天津市环欧半导体材料技术有限公司 | A kind of discharge duct for straight pulling silicon single crystal furnace gas extraction system |
| CN109797426A (en) * | 2019-03-11 | 2019-05-24 | 上海新昇半导体科技有限公司 | A kind of crystal pulling apparatus |
| WO2022182534A1 (en) * | 2021-02-24 | 2022-09-01 | Globalwafers Co., Ltd. | Ingot puller apparatus having a compound exhaust tube and methods for selecting the lengths of lower and upper exhaust tube portions |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20151111 Effective date of abandoning: 20170825 |