CN207062417U - Single crystal growing furnace - Google Patents
Single crystal growing furnace Download PDFInfo
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- CN207062417U CN207062417U CN201720950684.0U CN201720950684U CN207062417U CN 207062417 U CN207062417 U CN 207062417U CN 201720950684 U CN201720950684 U CN 201720950684U CN 207062417 U CN207062417 U CN 207062417U
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- felt
- shaping felt
- shaping
- single crystal
- guide shell
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Abstract
The utility model discloses a kind of single crystal growing furnace, it is related to technical field of crystal growth.Including：Body of heater, shaping felt group, guide shell, storing apparatus and the 3rd shaping felt, the inboard wall of furnace body is provided with the shaping felt, the shaping felt includes the first shaping felt and the second shaping felt, first shaping felt is shaped as L-type, it is arranged on the upside of the inboard wall of furnace body, second shaping felt is arranged on the downside of first shaping felt and matched with first shaping felt, the guide shell is arranged in the body of heater, the 3rd shaping felt is provided with the outside of the guide shell, the guide shell bottom is provided with the storing apparatus.After such scheme, the sealing of single crystal growing furnace can be increased, reduce thermal convection current and heat losses, reduce monocrystalline broken string probability, improve the speed of growth and quality of monocrystalline.
Description
Technical field
Technical field of crystal growth is the utility model is related to, more particularly to a kind of single crystal growing furnace.
Background technology
Single crystal growing furnace be one kind in inert gas (based on nitrogen, helium) environment, it is with graphite heater that polysilicon etc. is more
Brilliant melt material, with the equipment of Grown by CZ Method dislocation-free monocrystalline.
Existing single crystal growing furnace is due to poor sealing, it is easy to causes thermal convection current and heat losses, and originaling forming felt
Binding site easily produce air-flow, airflow influence monocrystalline broken string probability, reduce the speed of growth and quality of monocrystalline.
Utility model content
The technical problems to be solved in the utility model is to be directed to above-mentioned the deficiencies in the prior art, there is provided a kind of single crystal growing furnace, energy
Increase the sealing of single crystal growing furnace, reduce thermal convection current and heat losses, reduce monocrystalline broken string probability, improve the speed of growth of monocrystalline with
Quality.
Technical solution adopted in the utility model is：A kind of single crystal growing furnace, including：Body of heater, shaping felt group, guide shell, appearance
Receive device and the 3rd shaping felt, the inboard wall of furnace body is provided with the shaping felt, the shaping felt group include the first shaping felt and
Second shaping felt, first shaping felt are shaped as L-type, and first shaping felt is arranged on the upside of the inboard wall of furnace body,
Second shaping felt is arranged on the downside of first shaping felt and matched with first shaping felt, and the guide shell is set
Put in the body of heater, be provided with the 3rd shaping felt on the outside of the guide shell, the guide shell bottom is provided with the storing apparatus.
As further technical scheme, the single crystal growing furnace also includes adjusting means, and the storing apparatus connects the tune
Regulating device, the adjusting means adjust the position of the storing apparatus.
As further technical scheme, the adjusting means is crucible lifting mechanism.
As further technical scheme, the guide shell is shaped as taper.
As further technical scheme, the storing apparatus includes graphite crucible and crucible seat, the graphite crucible connection
The crucible seat, the graphite crucible are arranged on the bottom of the guide shell.
As further technical scheme, the single crystal growing furnace also includes bell, and the bell is arranged on the top of the body of heater
Portion.
As further technical scheme, first shaping felt, second shaping felt and the 3rd shaping felt
Material is hard composite felt material.
As further technical scheme, the side of the body of heater is provided with gas outlet.
The utility model embodiment provides a kind of single crystal growing furnace, by setting the first shaping felt and second on inboard wall of furnace body
Shaping felt, the first shaping felt match with the second shaping felt, and the 3rd shaping felt is set on the outside of guide shell, can increase single crystal growing furnace
Sealing, thermal convection current and heat losses are reduced, reduce monocrystalline broken string probability, improve the speed of growth and quality of monocrystalline.
Brief description of the drawings
Fig. 1 is a kind of structural representation for single crystal growing furnace that the utility model embodiment provides；
Fig. 2 is the structural representation of the second shaping felt in the utility model embodiment；
Fig. 3 is the structural representation of the 3rd shaping felt in the utility model embodiment.
In figure：101st, body of heater；102nd, shaping felt group；103rd, guide shell；104th, storing apparatus；105th, adjusting means；106、
3rd shaping felt；107th, bell；108th, gas outlet；1021st, the first shaping felt；1022nd, the second shaping felt；1041st, graphite crucible；
1042nd, crucible seat.
Embodiment
The utility model is described in further detail with reference to the accompanying drawings and detailed description.
As shown in Figure 1, Figure 2 and Figure 3, it is a kind of single crystal growing furnace of the utility model, including：Body of heater 101, shaping felt group 102, lead
Flow cartridge 103, the shaping felt 106 of storing apparatus 104 and the 3rd, the inwall of body of heater 101 is provided with the shaping felt group 102, described
Shaping felt group 102 includes the first shaping felt 1021 and the second shaping felt 1022, and first shaping felt 1021 is shaped as L-type,
First shaping felt 1021 is arranged on the upside of the inwall of body of heater 101, and second shaping felt 1022 is arranged on described
The downside of one shaping felt 1021 and match with first shaping felt 1021, the guide shell 103 is arranged on the body of heater 101
Interior, the outside of guide shell 103 is provided with the 3rd shaping felt 106, and the bottom of guide shell 103 is provided with the storing apparatus 104.
Specifically, body of heater 101 is cylindrical, it is the containment vessel for carrying out crystal reaction, all reactions are in body of heater
Carried out in 101, inboard wall of furnace body is provided with shaping felt group 102, and shaping felt group 102 includes the first shaping felt 1021 and the second shaping felt
1022, the first shaping felt 1021 is L-type, and is inverted L-type, and the first shaping felt 1021 is arranged on the upside of the inwall of body of heater 101,
Second shaping felt 1022 is arranged on the downside of the first shaping felt 1021 and matches with first shaping felt 1021, i.e. L-type
First shaping felt 1021 is embedded into the second shaping felt 1022 so that the joint portion of two formation of lots felts is even closer, and it is right to reduce heat
Stream and heat losses, the specification of the first shaping felt 1021 is adjustable, it is preferred that the thickness of the first shaping felt 1021 is 40 millimeters, is erected
Nogata to length be 140 millimeters, the length of horizontal direction is 169 millimeters, and horizontal direction with vertical direction intersection in straight
Angle is set；Guide shell 103 is arranged in the body of heater 101, the upside being connected to by being flexibly connected frame inside body of heater 101, and
The guide shell 103 is dismountable, and pod apertures are had on guide shell 103, and the outside of guide shell 103 is provided with the 3rd shaping felt 106,
The insulation effect of guide shell can be strengthened, scattering and disappearing for heat is reduced, after such scheme, by setting first on inboard wall of furnace body
Shaping felt and the second shaping felt, the first shaping felt match with the second shaping felt, and the 3rd shaping felt, energy are set on the outside of guide shell
Increase the sealing of single crystal growing furnace, reduce thermal convection current and heat losses, reduce monocrystalline broken string probability, improve the speed of growth of monocrystalline with
Quality.
Guide shell 103 is shaped as taper, and the opening on top is big, and the opening of bottom is small, and the effect of guide shell is to wash away
During the stronger expansion joint for pipeline of power, wear-resisting effect can be played, guide shell also has guide effect, and the outside of guide shell 103 is provided with
3rd shaping felt 106, it can effectively prevent to radiate, the specification of guide shell can customize, it is preferred that a diameter of at the top of guide shell
427.12 millimeters, bottom is 303.9 millimeters, and the 3rd shaping felt 106 to add the shaping felt on edge, count in adding along the straight of shaping felt by top
Footpath is 527 millimeters.
Storing apparatus 104 includes graphite crucible 1041 and crucible seat 1042, and the graphite crucible 1041 connects the crucible seat
1042, the crucible seat 1042 connects the adjusting means 105, and graphite crucible 1041 sets the bottom of guide shell 103, graphite earthenware
Crucible 1041 has good thermal conductance and heat-resisting quantity, and during applied at elevated temperature, thermal coefficient of expansion is small, has to anxious heat, chilling
There is certain stain resistance energy, to acid, the corrosion resistance of alkaline solution is stronger, has excellent chemical stability.
Single crystal growing furnace also includes adjusting means 105, and storing apparatus 104 connects the adjusting means 105, and adjusting means 105 is adjusted
Save the position of storing apparatus 104.
Adjusting means 105 is crucible lifting mechanism, for adjusting the position of graphite crucible 1041.
Also including bell 107, the bell 107 is arranged on the top of the body of heater 101, and bell 107 is single device,
In single crystal growing furnace in use, bell 107 can be covered, and it is bolted；When not in use, you can disassemble bell, be convenient for changing.
First shaping felt 1021, second shaping felt 1022 and the material of the 3rd shaping felt 106 are that hard is compound
Felt material, it has following distinguishing feature：The small thermal conductivity factor of thermal conductivity is 0.008-0.10W/m.k, excellent thermal insulation performance, density
Uniform 0.18-0.20g/cm3, ash content≤100, the high 0.7-1.8Mpa of compression strength, the high 1.3-2.0Mpa of bending strength, amount of stored heat
Small, degassing is fast, and discharge quantity is small in vacuum, heat shock resistance, does not pollute product and burner hearth, improves the body of heater useful space, installation and maintenance
It is convenient, the needs of various monocrystal growing furnaces can be met；It is avoided that thermal field graphite product and compound felted terxture binding site gap institute
Caused thermal convection current and heat losses.
The side of body of heater 101 is provided with gas outlet 108, it is preferred that located at the bottom of body of heater, for discharging the production in crystal oven
Raw waste gas, and before waste gas is discharged, first pass through the health of filter filtering gas, conservation of nature environment and staff.
After said apparatus, by setting the first shaping felt and the second shaping felt, the first shaping felt on inboard wall of furnace body
Match with the second shaping felt, the 3rd shaping felt is set on the outside of guide shell, the sealing of single crystal growing furnace can be increased, reduce thermal convection current
And heat losses, monocrystalline broken string probability is reduced, can effectively be reduced more than power 1kw/h using after the program, improve monocrystalline
The speed of growth, increases production and improves productivity and improves production efficiency, and monocrystalline quality is improved in ash content≤100.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model
All any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in the utility model
Protection domain within.
Claims (8)
- A kind of 1. single crystal growing furnace, it is characterised in that including：Body of heater（101）, shaping felt group（102）, guide shell（103）, storing apparatus （104）With the 3rd shaping felt（106）, the body of heater（101）Inwall is provided with the shaping felt（102）, the shaping felt group （102）Including the first shaping felt（1021）With the second shaping felt（1022）, first shaping felt（1021）Be shaped as L-type, First shaping felt（1021）It is arranged on the body of heater（101）The upside of inwall, second shaping felt（1022）It is arranged on First shaping felt（1021）Downside and with first shaping felt（1021）Match, the guide shell（103）Set In the body of heater（101）It is interior, the guide shell（103）Outside is provided with the 3rd shaping felt（106）, the guide shell（103） Bottom is provided with the storing apparatus（104）.
- 2. single crystal growing furnace according to claim 1, it is characterised in that also including adjusting means（105）, the storing apparatus （104）Connect the adjusting means（105）, the adjusting means（105）Adjust the storing apparatus（104）Position.
- 3. single crystal growing furnace according to claim 2, it is characterised in that the adjusting means（105）For crucible lifting mechanism.
- 4. single crystal growing furnace according to claim 1, it is characterised in that the guide shell（103）Be shaped as taper.
- 5. single crystal growing furnace according to claim 1, it is characterised in that the storing apparatus（104）Including graphite crucible （1041）With crucible seat（1042）, the graphite crucible（1041）Connect the crucible seat（1042）, the graphite crucible（1041）If Put in the guide shell（103）Bottom.
- 6. single crystal growing furnace according to claim 1, it is characterised in that also including bell（107）, the bell（107）Set In the body of heater（101）Top.
- 7. single crystal growing furnace according to claim 1, it is characterised in that first shaping felt（1021）, it is described second shaping Felt（1022）With the 3rd shaping felt（106）Material be hard composite felt material.
- 8. single crystal growing furnace according to claim 1, it is characterised in that the body of heater（101）Side be provided with gas outlet （108）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720950684.0U CN207062417U (en) | 2017-08-01 | 2017-08-01 | Single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720950684.0U CN207062417U (en) | 2017-08-01 | 2017-08-01 | Single crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207062417U true CN207062417U (en) | 2018-03-02 |
Family
ID=61518605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720950684.0U Active CN207062417U (en) | 2017-08-01 | 2017-08-01 | Single crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207062417U (en) |
-
2017
- 2017-08-01 CN CN201720950684.0U patent/CN207062417U/en active Active
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