CN202595336U - Seed crystal clamping structure - Google Patents

Seed crystal clamping structure Download PDF

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Publication number
CN202595336U
CN202595336U CN 201220091147 CN201220091147U CN202595336U CN 202595336 U CN202595336 U CN 202595336U CN 201220091147 CN201220091147 CN 201220091147 CN 201220091147 U CN201220091147 U CN 201220091147U CN 202595336 U CN202595336 U CN 202595336U
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CN
China
Prior art keywords
seed
seed crystal
chuck
rod
crystal
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Expired - Fee Related
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CN 201220091147
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Chinese (zh)
Inventor
郑伟
罗平
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XUZHOU GCL PHOTOELECTRIC TECHNOLOGY Co Ltd
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XUZHOU GCL PHOTOELECTRIC TECHNOLOGY Co Ltd
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Priority to CN 201220091147 priority Critical patent/CN202595336U/en
Application granted granted Critical
Publication of CN202595336U publication Critical patent/CN202595336U/en
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Abstract

The utility model provides a seed crystal clamping structure for clamping a seed crystal. The upper part of the seed crystal is provided with a boss part; the seed crystal clamping structure comprises a seed crystal rod and a seed crystal chuck, wherein the seed crystal chuck is connected to the lower part of the seed crystal rod, and a vertically communicated first cavity for accommodating the seed crystal is formed in the seed crystal chuck along the axial direction; and a supporting part matched with the boss part of the seed crystal and used for installing the upper part of the seed crystal in the first cavity is arranged at the lower end of the inner wall of the first cavity. The seed crystal clamping structure is simple, binding of a tungsten-molybdenum wire is eliminated, deformation of the seed crystal chuck is effectively reduced, the fixing strength of the seed crystal is met, and the seed crystal is prevented from slipping and dropping; concentricity and vertical stress of the seed crystal and the seed crystal rod are ensured, the heat exchange effect of the seed crystal is obvious, and seeding operation is facilitated; and adhesive deformation of the seed crystal chuck and the seed crystal rod is effectively avoided, and the structure is convenient to detach.

Description

The seed crystal clamp structure
Technical field
The utility model relates to the seed crystal clamp structure that a kind of single crystal growing is used, and belongs to the crystal growth equipment technical field.
Background technology
In recent years, along with development of modern science and technology, sapphire is widely used in military project, window material and LED substrate material etc.Sapphire demand in the international market is more and more big, and is also more and more high to the requirement of crystalline quality and size simultaneously.At present, the growing technology of suitable growing large-size, high quality sapphire crystal mainly contains kyropoulos, heat-exchanging method and vertical pulling method.But; Adopt in kyropoulos and the Grown by CZ Method large size sapphire crystal process to run into many problems, as: large size sapphire crystal is because weight is bigger, in crystal growing process; Be easy to cause the seed chuck distortion under the hot environment; Constant intensity to seed crystal weakens, and causes seed crystal to glide, even ruptures, comes off.
At present, most seed chucks is all driven a webge slot in the one of which side seed crystal is installed, and bundlees, fixes seed crystal with the tungsten silk, often also passes through a tungsten union lever transition between seed crystal and the seed rod.The seed crystal fixed form of this structure is easy to cause seed crystal and seed rod decentraction and seed crystal non-vertical stressed, and seed crystal cooling contact area is little and not direct, and the heat exchange poor effect is difficult for seeding; Simultaneously, under the hot environment cycle of growing crystal longer, very easily cause seed chuck and seed rod adhesion distortion, dismounting difficulty.
The utility model content
Adopt the tungsten silk to bundle problems such as the seed crystal that is caused is prone to come off in order to solve the seed crystal that the seed crystal clamp structure exists in the above-mentioned prior art; The utility model provides a kind of seed crystal clamp structure; It has simple in structure, advantages such as seed crystal fixation, difficult drop-off.
The technical scheme that the utility model provided is:
A kind of seed crystal clamp structure is used for the clamping seed crystal, and the top of said seed crystal has boss portion, and said seed crystal clamp structure comprises:
Seed rod; And,
Seed chuck; Be connected the below of said seed rod; Its inside has first cavity that is used to hold said seed crystal of a up/down perforation vertically, and the inwall lower end of said first cavity is provided with and is used for cooperating with the boss portion of said seed crystal and the top of said seed crystal is installed in the support portion in first cavity.
The beneficial effect of technique scheme is: simple in structure, the fixation of the utility model seed crystal clamp structure; It is to come the support fixation seed crystal through in seed chuck, offering one first cavity and the support portion being set in first cavity; Seed crystal is processed as the structure with boss portion, can seed crystal be installed on the seed chuck through the cooperating of support portion and boss portion; Replaced and bundled the structure that seed crystal is installed through the tungsten silk in the prior art, saved the tungsten silk.
On the basis of technique scheme, the utility model can also carry out following further improvement.
Further, said support portion is the annular back-up block that circumferentially is provided with along said first cavity inner wall, and the medullary ray of said annular back-up block overlaps with the axial line of said seed chuck.
Adopt the beneficial effect of above-mentioned further technical scheme to be: annular back-up block structure is adopted in the support portion, and annular back-up block medullary ray overlaps with the seed chuck axial line, thereby the assurance seed crystal is stressed even, and concentric with seed chuck.
On the basis of technique scheme, the utility model can also carry out following further improvement.
Further, the bearing surface of the said support portion conical surface shape that is downwards and tightens up towards axis direction; The boss portion of said seed crystal and the contact surface of said support portion are the conical surface shape with said bearing surface structure matching.
Adopt the beneficial effect of above-mentioned further technical scheme to be: the bearing surface of support portion is designed to downwards and towards the conical surface shape that axis direction tightens up, has increased the stressed area of seed crystal, and seed crystal is stressed evenly, easy fracture not.
On the basis of technique scheme, the utility model can also carry out following further improvement.
Further, the lower end of said seed rod has one and is used for fixing said seed crystal and makes said seed crystal and vertical stressed fixed sturcture concentric with said seed rod.
Adopt the beneficial effect of above-mentioned further technical scheme to be: can guarantee that through fixed sturcture is set in the seed rod lower end seed crystal is concentric with seed rod and seed crystal is vertical stressed.
On the basis of technique scheme, the utility model can also carry out following further improvement.
Further, said fixed sturcture be arranged at said seed rod lower end and with the trough body structure of said seed rod and said seed chuck concentric; Said trough body structure cooperates up and down with the support portion of said seed chuck, forms the lock chamber that is used for fixing said seed crystal of a structure and said seed crystal structure matching, and the top of said seed crystal is installed in the said lock chamber.
Adopt the beneficial effect of above-mentioned further technical scheme to be: to adopt to cooperate up and down with the support portion of seed chuck to fix seed crystal with the trough body structure of seed rod concentric; Simple in structure, fixation, simultaneously; Guaranteed that seed crystal and seed rod and seed crystal and seed chuck are concentric, seed crystal is vertically stressed.
On the basis of technique scheme, the utility model can also carry out following further improvement.
Further, have on the said seed rod one be used to cool off said seed rod cooling structure.
Adopt the beneficial effect of above-mentioned further technical scheme to be: through cooling structure cooling seed rod is set on seed rod; And then the cooling seed crystal and the seed chuck that are connected with seed rod; Can in single crystal growth process, take away crystalline latent heat; Be convenient to the operation of seed crystal seeding, prevent the appearance of problems such as seed chuck distortion and seed rod and seed chuck adhesion.
On the basis of technique scheme, the utility model can also carry out following further improvement.
Further; Said cooling structure is the double-jacket cooling structure; Comprise overcoat and be sheathed on the inner interior cover of said overcoat; Said overcoat and said in the interlayer that form to connect between the cover, and said interlayer with said in the inner chamber that overlaps connect each other and form a refrigerant medium channel, said refrigerant medium channel has import of refrigerant medium and refrigerant media outlet.
Adopt the beneficial effect of above-mentioned further technical scheme to be: cooling structure preferably adopts the double-jacket cooling structure, and it is to utilize round-robin refrigerant medium to come seed rod is cooled off, and is simple in structure, and heat exchange efficiency is high.
On the basis of technique scheme, the utility model can also carry out following further improvement.
Further, the upper end of said seed chuck is connected with the overcoat of said seed rod, is used for the junction of cooling off said seed chuck and said seed rod through said double-jacket cooling structure.
Adopt the beneficial effect of above-mentioned further technical scheme to be: seed chuck is connected with the overcoat of said seed rod; Can directly cool off the junction of seed chuck and seed rod through the double-jacket cooling structure; Thereby prevent seed chuck and seed rod adhesion, distortion, be convenient to dismounting.
On the basis of technique scheme, the utility model can also carry out following further improvement.
Further, the bottom end face of said trough body structure contacts with the bearing surface of said support portion, is used to isolate the inwall of said seed crystal and said first cavity, and between the inwall of first cavity of said trough body structure and said seed chuck, leaves the space.
Adopt the beneficial effect of above-mentioned further technical scheme to be: the trough body structure bottom contacts with the support portion and makes the lock chamber sealing that is used to install seed crystal; Thereby increased the contact area of seed crystal and trough body structure; Promptly increase the cooling contact area of seed crystal, heat exchange is more direct, good effect of heat exchange; In addition; Lock chamber has been isolated seed crystal and seed chuck; And seed chuck and seed rod junction are positioned at the top of trough body structure; Thereby between the inwall of trough body structure and seed chuck, leave the space, can further cool off, to prevent seed rod and seed chuck adhesion to the junction of seed rod and seed chuck.
On the basis of technique scheme, the utility model can also carry out following further improvement.
Further, said seed rod, said seed chuck are columnar structured, and said seed rod and said seed chuck are for being threaded.
Adopt the beneficial effect of above-mentioned further technical scheme to be: seed rod, seed chuck are preferably round shape, utilize to guarantee seed rod, seed chuck concentric, and employing is threaded for convenience detach.
In sum, the utility model seed crystal clamp structure simple in structure saved the binding of tungsten silk, and the seed crystal shape more is prone to processing, reduced operation easier and production cost; Reduce the distortion of seed chuck effectively, satisfy its constant intensity seed crystal, prevent seed crystal downslide, come off; Guaranteed that seed crystal is vertical stressed with the concentric and seed crystal of seed rod, seed crystal cooling contact area is big and directly, the heat exchange effect is obvious, is convenient to the seeding operation; Effectively avoided seed chuck and seed rod adhesion distortion, it is convenient to dismantle.
Description of drawings
Fig. 1 representes the structural representation of the utility model seed crystal clamp structure;
Fig. 2 representes the structural representation of seed rod;
Fig. 3 representes the structural representation of seed chuck;
Fig. 4 representes the structural representation of seed crystal.
Embodiment
Below in conjunction with accompanying drawing the principle and the characteristic of the utility model are described, institute gives an actual example and only is used to explain the utility model, is not the scope that is used to limit the utility model.
Shown in Fig. 1 to 4; A kind of seed crystal clamp structure; Be used at single crystal growth process clamping seed crystal 3; The top of seed crystal 3 has the boss portion 3a with the support portion 2b structure matching of seed chuck 2, and said seed crystal clamp structure comprises: seed rod 1 (seed rod is whole not shown among the figure, only it is illustrated with the part that seed crystal 3 chucks are connected); And,
Seed chuck 2; Be connected the below of seed rod 1; Its inside has the first cavity 2a that is used to hold seed crystal 3 of a up/down perforation vertically, and the inwall lower end of the first cavity 2a is provided with and is used for cooperating with boss portion 3a and the top of seed crystal 3 is installed in the support portion 2b in the first cavity 2a of seed chuck 2.
Simple in structure, the fixation of the utility model seed crystal 3 clamp structures; It is to come support fixation seed crystal 3 through in seed chuck 2, offering one first cavity 2a and in the first cavity 2a, support portion 2b being set; Seed crystal 3 is processed as the structure with boss portion 3a, can seed crystal 3 be installed on the seed chuck 2 through the cooperating of support portion 2b and boss portion 3a; Replaced and bundled the structure that seed crystal 3 is installed through the tungsten silk in the prior art, saved the tungsten silk.
In the preferred embodiment of the utility model, as illustrated in fig. 1 and 2, support portion 2b is the annular back-up block that circumferentially is provided with along the first cavity 2a inwall, and the medullary ray of annular back-up block overlaps with the axial line of seed chuck 2.Adopt the support portion 2b of this structure can guarantee that seed crystal 3 is stressed even, and concentric with seed chuck 2.Certainly, in practical application, the structure of support portion 2b can also be for a plurality of back-up blocks of circumferentially distributing along the first cavity 2a inwall etc., do not enumerate one by one at this.
In the preferred embodiment of the utility model, as illustrated in fig. 1 and 2, the conical surface shape that the bearing surface 2c of support portion 2b is downwards and tightens up towards axis direction, promptly support portion 2b is a wedge-type shape; Correspondingly, the contact surface of the boss portion 3a of seed crystal 3 and support portion 2b is the conical surface shape with bearing surface 2c structure matching.The bearing surface 2c of support portion 2b is designed to downwards and towards the conical surface shape that axis direction tightens up, has increased the stressed area of seed crystal 3, and seed crystal 3 is stressed evenly, easy fracture not.
In the preferred embodiment of the utility model, in order to guarantee that seed crystal 3 and seed rod are 1 concentric, and guarantee that further seed crystal 3 is vertical stressed, has one in the lower end of seed rod 1 and is used for fixing seed crystal 3 and makes seed crystal 3 and seed rod 1 concentric and vertical stressed fixed sturcture.
In the preferred embodiment of the utility model, as depicted in figs. 1 and 2, this fixed sturcture be arranged at seed rod 1 lower end and with the trough body structure 11 of seed rod 1 and seed chuck 2 concentrics; This trough body structure 11 cooperates up and down with the support portion 2b of seed chuck 2, forms the lock chamber that is used for fixing seed crystal 3 of a structure and seed crystal 3 structure matching, and the top of seed crystal 3 is installed in the lock chamber.Adopt to cooperate up and down with the support portion 2b of seed chuck 2 with the trough body structure 11 of seed rod 1 concentric to fix seed crystal 3, simple in structure, fixation simultaneously, has guaranteed that seed crystal 3 and seed rod 1 and seed crystal 3 are concentric with seed chuck 2, and seed crystal 3 is vertically stressed.Certainly, in practical application, this fixed sturcture can also adopt other structure formations to realize.
As shown in Figure 1, the bottom of this trough body structure 11 is contacted with the support portion 2b of the first cavity 2a inwall of seed chuck 2, and seed crystal 3 is installed in this lock chamber, and with the structure matching of this lock chamber.What certainly can understand is that in practical application, the bottom of this trough body structure 11 can also not contact with the support portion 2b of seed chuck 2.
In the preferred embodiment of the utility model, the top of seed rod 1 can also be provided with one be used to cool off seed rod 1 cooling structure.Through cooling structure cooling seed rod 1 is set on seed rod 1; And then the seed crystal that is connected with seed rod 1 of cooling 3 and seed chuck 2; In single crystal growth process, to take away crystalline latent heat; Be convenient to the operation of seed crystal 3 seedings, prevent the appearance of seed chuck 2 distortion and problems such as seed rod 1 and seed chuck 2 adhesions.
In the preferred embodiment of the utility model, as depicted in figs. 1 and 2, cooling structure adopts the double-jacket cooling structure, and it is realized through following fit:
This double-jacket cooling structure comprises the overcoat 12 of hollow and the interior cover 13 of hollow; Interior cover 13 is sheathed on overcoat 12 inside; Between interior cover 13 and said overcoat 12, form the interlayer A that connects; This interlayer A connects through the opening of interior cover 13 bottoms and the inner chamber of interior cover 13, and forms the refrigerant medium channel of a perforation, and this refrigerant medium channel has import of refrigerant medium and refrigerant media outlet.Shown in Fig. 1 and Fig. 2, in the present embodiment, the import of refrigerant medium is the top end opening of interior cover 13, and the refrigerant media outlet is the interlayer A top end opening of interior cover 13 and overcoat 12.The refrigerant medium gets into interior cover from the top end opening of interior cover 13; And after the bottom end opening of interior cover gets into interlayer A; Discharge from the top end opening of interlayer A, accomplish the working cycle of refrigerant medium, in the working cycle of refrigerant medium; The refrigerant medium flows in seed rod 1 and takes away the heat of seed rod 1, and seed rod 1 is cooled off.The refrigerant medium can be selected water coolant or gas.
What certainly can understand is, in practical application, cooling structure can also adopt other structure formations, as is arranged at the outside and constantly seed rod 1 is carried out refrigerative refrigerating unit etc., enumerates no longer one by one at this.
In the preferred embodiment of the utility model; As shown in Figure 1, the upper end of seed chuck 2 is connected with the overcoat 12 of seed rod 1, can directly cool off the junction of seed chuck 2 and seed rod 1 through the double-jacket cooling structure; Thereby prevent seed chuck 2 and seed rod 1 adhesion, distortion, be convenient to dismounting.What certainly can understand is that the upper end of seed chuck 2 is opened and can be connected with the trough body structure 11 of seed rod 1, at this, does not limit the position of the junction 4 of seed chuck 2 and seed rod 1.
In the preferred embodiment of the utility model, as shown in Figure 1, because the bottom end face of trough body structure 11 contacts with the bearing surface 2c of support portion 2b; Increased the contact area of seed crystal 3 with trough body structure 11; Promptly increase the cooling contact area of seed crystal 3, heat exchange is more direct, good effect of heat exchange.In addition; As shown in Figure 1, the bottom end face of trough body structure 11 contacts with the bearing surface of support portion 2a, can isolate seed crystal 3 and seed chuck 2; And the junction of seed chuck 2 and seed rod 1 is positioned at the top of trough body structure 11; Thereby between the inwall of trough body structure 11 and seed chuck 2, leave space 5, can further cool off the junction of seed rod 1 and seed chuck 2, to prevent seed rod 1 and seed chuck 2 adhesions.What certainly can understand is that the bottom end face of trough body structure 11 can also not contact with the bearing surface 2c of support portion 2b.
In addition; In the preferred embodiment of the utility model, seed rod 1, seed chuck 2 are preferably columnar structured, and the trough body structure 11 of seed rod 1 lower end is preferably the tubular groove; Have like this utilize to guarantee seed rod 1, seed chuck 2 and seed crystal 3 with one heart and seed crystal 3 vertically stressed, the convenient installation; Correspondingly, as shown in Figure 3, the structure optimization of seed crystal 3 is a T type structure; Its top is the socket cap 31 with trough body structure 11 structure matching; Its underpart is square, and the transition shoulder between its top and the bottom promptly forms boss portion 3a, and the socket cap structure needs to mate fully with the bearing surface structure of support portion.Simultaneously, seed rod 1 is preferably with the mode of connection of seed chuck 2 and is threaded.Employing is threaded for convenience detach.
Seed crystal clamp structure in the above-mentioned preferred embodiment at first, is installed in seed crystal 3 in the first cavity 2a of seed chuck 2 when mounted, then seed chuck 2 is connected fixing with seed rod 1.In single crystal growth process, the utility model seed crystal clamp structure has guaranteed the concentric and vertical stressed of seed crystal 3 and seed rod 1, has save the binding of tungsten silk; The seed crystal constant intensity is good; Difficult drop-off, fracture, and the easier processing of seed crystal shape have reduced operation easier and production cost; Simultaneously, mobile refrigerant medium can play cooling seed rod 1 and seed crystal 3 in the seed rod 1, takes away the effect of crystals latent heat; Can cool off seed chuck 2 preferably again, prevent seed chuck 2 and seed rod 1 adhesion, distortion, be convenient to dismounting; And; The cooling contact area of seed crystal 2 is big and directly, good effect of heat exchange is convenient to the seeding operation.
The seed crystal clamp structure of the utility model is applicable to adopting method for monocrystal growth growing sapphire commonly used such as kyropoulos, crystal pulling method, YAG series, silicon single-crystal, titanium jewel, scintillation crystal etc.
It more than is the preferred implementation of the utility model; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; Can also make some improvement and retouching, these improvement and retouching also should be regarded as the protection domain of the utility model.

Claims (10)

1. a seed crystal clamp structure is used for the clamping seed crystal, and the top of said seed crystal has boss portion, it is characterized in that, said seed crystal clamp structure comprises:
Seed rod; And,
Seed chuck; Be connected the below of said seed rod; Its inside has first cavity that is used to hold said seed crystal of a up/down perforation vertically, and the inwall lower end of said first cavity is provided with and is used for cooperating with the boss portion of said seed crystal and the top of said seed crystal is installed in the support portion in first cavity.
2. seed crystal clamp structure according to claim 1 is characterized in that: the annular back-up block of said support portion for circumferentially being provided with along said first cavity inner wall, and the medullary ray of said annular back-up block overlaps with the axial line of said seed chuck.
3. seed crystal clamp structure according to claim 2 is characterized in that: the conical surface shape that the bearing surface of said support portion is downwards and tightens up towards axis direction; The boss portion of said seed crystal and the contact surface of said support portion are the conical surface shape with said bearing surface structure matching.
4. seed crystal clamp structure according to claim 1 is characterized in that: the lower end of said seed rod has one and is used for fixing said seed crystal and guarantees said seed crystal and vertical stressed fixed sturcture concentric with said seed rod.
5. seed crystal clamp structure according to claim 4 is characterized in that: said fixed sturcture be arranged at said seed rod lower end and with the trough body structure of said seed rod and said seed chuck concentric; Said trough body structure cooperates up and down with the support portion of said seed chuck, forms the lock chamber on the top that is used for fixing said seed crystal of a structure and said seed crystal structure matching.
6. seed crystal clamp structure according to claim 5 is characterized in that: have on the said seed rod one be used to cool off said seed rod cooling structure.
7. seed crystal clamp structure according to claim 6; It is characterized in that: said cooling structure is the double-jacket cooling structure; Comprise overcoat and be sheathed on the inner interior cover of said overcoat; Said overcoat and said in the interlayer that form to connect between the cover, and said interlayer with said in the inner chamber that overlaps connect each other and form a refrigerant medium channel, said refrigerant medium channel has import of refrigerant medium and refrigerant media outlet.
8. seed crystal clamp structure according to claim 7 is characterized in that: the upper end of said seed chuck is connected with the overcoat of said seed rod, is used for the junction of cooling off said seed chuck and said seed rod through said double-jacket cooling structure.
9. seed crystal clamp structure according to claim 8; It is characterized in that: the bottom end face of said trough body structure contacts with the bearing surface of said support portion; Be used to isolate the inwall of said seed crystal and said first cavity, and between the inwall of first cavity of said trough body structure and said seed chuck, leave the space.
10. seed crystal clamp structure according to claim 1 is characterized in that: said seed rod, said seed chuck are columnar structured, and said seed rod and said seed chuck are for being threaded.
CN 201220091147 2012-03-12 2012-03-12 Seed crystal clamping structure Expired - Fee Related CN202595336U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103695996A (en) * 2013-03-12 2014-04-02 北京志光伯元科技有限公司 Double-helix seed rod device and crystal growing furnace using same
CN105458954A (en) * 2015-12-17 2016-04-06 合保电气(芜湖)有限公司 Clamping rod for electric power system
CN105803521A (en) * 2014-12-29 2016-07-27 有研光电新材料有限责任公司 Single crystal furnace for Kyropoulos method, seed crystal protection structure and crystal growth control method
CN106854773A (en) * 2016-12-29 2017-06-16 伯恩露笑蓝宝石有限公司 A kind of crystal growing crucible, device and its growing method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103695996A (en) * 2013-03-12 2014-04-02 北京志光伯元科技有限公司 Double-helix seed rod device and crystal growing furnace using same
CN105803521A (en) * 2014-12-29 2016-07-27 有研光电新材料有限责任公司 Single crystal furnace for Kyropoulos method, seed crystal protection structure and crystal growth control method
CN105458954A (en) * 2015-12-17 2016-04-06 合保电气(芜湖)有限公司 Clamping rod for electric power system
CN106854773A (en) * 2016-12-29 2017-06-16 伯恩露笑蓝宝石有限公司 A kind of crystal growing crucible, device and its growing method
CN106854773B (en) * 2016-12-29 2019-05-03 伯恩露笑蓝宝石有限公司 A kind of crystal growing crucible, device and its growing method

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Granted publication date: 20121212

Termination date: 20130312