CN102605419B - Adjustable polycrystal material clamping device for crystal pulling equipment - Google Patents

Adjustable polycrystal material clamping device for crystal pulling equipment Download PDF

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Publication number
CN102605419B
CN102605419B CN201210081835.5A CN201210081835A CN102605419B CN 102605419 B CN102605419 B CN 102605419B CN 201210081835 A CN201210081835 A CN 201210081835A CN 102605419 B CN102605419 B CN 102605419B
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China
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material folding
straight trough
folding dish
curved groove
polycrystal
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CN201210081835.5A
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Chinese (zh)
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CN102605419A (en
Inventor
傅林坚
曹建伟
石刚
欧阳鹏根
王丹涛
陈明杰
蒋庆良
邱敏秀
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杭州慧翔电液技术开发有限公司
浙江晶盛机电股份有限公司
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Priority to CN201210081835.5A priority Critical patent/CN102605419B/en
Publication of CN102605419A publication Critical patent/CN102605419A/en
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Abstract

The invention relates to manufacturing equipment of non-metal crystals and aims to provide an adjustable polycrystal material clamping device for crystal pulling equipment. The adjustable polycrystal material clamping device comprises a straight groove material clamping disk, a bent groove material clamping disk and a fixed material clamping disk which all have disk-shaped main bodies, wherein radial straight grooves are arranged on the straight groove material clamping disk; curve-shaped bent grooves are arranged on the bent groove material clamping disk; blank clamping heads with step-shaped bumps at a lower end penetrate through the straight grooves and the bent grooves, and work with clamping screws to realize movable connection and plane bonding of the straight groove material clamping disk and the bent groove material clamping disk; and the blank clamping heads, the straight grooves and the bent grooves are of the corresponding quantity and are corresponding to each other in a one-to-one manner. According to the adjustable polycrystal material clamping device for the crystal pulling equipment, the blank clamping heads are connected with polycrystal materials by a clamping groove type structure, so that the polycrystal materials can be stably and reliably clamped, and the crystal pulling process can be guaranteed to be smoothly carried out; and under the guidance of the straight grooves and the bent grooves, the polycrystal materials of different sizes can be clamped by movement of the blank clamping heads, so that the stability of the polycrystal materials in the crystal pulling process can be guaranteed.

Description

For the adjustable polycrystal clamping device of pulled crystal device

Technical field

The present invention relates to the producing apparatus of nonmetal crystal, especially a kind of adjustable polycrystal clamping device for pulled crystal device.

Background technology

Silicon materials are bases of advanced information society, and it is not only the major function material of the industries such as photovoltaic generation, are also semiconductor industries, particularly the base mateiral of power electronic devices.Zone melting method (FZ) manufacture order crystal silicon is a kind of novel method for monocrystal growth being different from Czochralski furnace (CZ), it utilizes high-frequency induction heating coil by local melting for highly purified polycrystal, the magnetic supporting power that melting zone relies on the surface tension of molten silicon and heater coil to provide and be in suspended state, then utilizes seed crystal that molten silicon is drawn into monocrystalline from the below in melting zone.Owing to not having crucible to pollute, the purity of monocrystalline silicon of zone melting furnace growth is high, good uniformity, low microdefect, and its excellent electric property is applicable to making high back-pressure, big current, powerful power electronic devices very much.

The process that general zone melting single-crystal is produced is carried out according to following order: furnace chamber is cleared up, and------crystal growth---blowing out cooling---takes out monocrystalline in polycrystal shove charge.It is higher that the preparation work times such as wherein furnace chamber cleaning, charging account for whole production cycle ratio, causes production efficiency not high.Simultaneously because zone melting method produce single crystal purity, uniformity requirement are higher, and growing by zone melting method melting zone is suspended state, and the vibrations that polycrystalline silicon material is small all may break the equilibrium state in melting zone.This stablizes the clamping of polycrystal, reliability and clamping time is proposed higher requirement, otherwise easily causes single crystal growing failure, or even the damage of equipment.

In general cylinder blank clamping device, the most classical is lathe chuck formula method of clamping, employing be by the pressurization clamping of the mechanism such as chuck by clamping polycrystal, utilize and realized clamping by the crimp of holder.Clamping device for zone melting single-crystal stove polycrystal not yet has been reported.Disclosing a kind of clamping device of column form object in Chinese patent CN 1413785A, is the improvement to lathe chuck formula method of clamping, and can adapt to the occasion that end forms the column form object of bead, clamping effect is ideal.But, traditional this clamping device realizing clamping by the circular material distortion of extruding cannot meet the requirement of present zone melting furnace polycrystal clamping: this clamping device generally all have employed linkage assembly, comparatively complicated, size is larger, and the zone melting single-crystal stove stove interior space is less, be difficult to the installation requirement meeting zone melting furnace; Employing crimp clamps, reliability is not high, because in zone melting single-crystal stove is produced, polycrystal can be locally heated to more than 1450 DEG C, by modes such as radiation thermal conduction, retaining part also can temperature rise, and thermal distortion and crimp influence each other and clamping may be caused unreliable, cause damage to equipment; Clamping and adjustment comparatively bother, and affect production efficiency.

Summary of the invention

The technical problem to be solved in the present invention is, overcomes deficiency of the prior art, provides a kind of reliable and stable adjustable polycrystal clamping device for pulled crystal device.In zone melting single-crystal is produced, by simple operation realize polycrystal clamping, to the heart and horizontal adjustment, the polycrystal requirement of different size can be adapted to simultaneously, reduce crystal pulling setup time, enhance productivity.

In order to technical solution problem, the technical solution used in the present invention is:

There is provided a kind of adjustable polycrystal clamping device for pulled crystal device, comprise blank chuck, step-like projection is established in its lower end; This device also comprises straight trough material folding dish, curved groove material folding dish and the retaining clip charging tray all with disk-shaped main body, and wherein: the center of straight trough material folding dish is provided with cylindrical section, the upper end of cylindrical section is bulb, and the diameter of bulb is greater than the cross-sectional diameter of cylindrical section; Disk-shaped main body is provided with the straight trough of at least one radial direction, and this straight trough is through perforate; Curved groove material folding dish has the curvilinear curved groove corresponding with straight trough quantity on straight trough material folding dish, and this curved groove is through perforate, has the direction extended to edge from the center of curved groove material folding dish; Be positioned at the retaining clip charging tray above straight trough material folding dish, there is the through groove of a radial direction from the center to edge; Be provided with the ball recess of through perforate in the center of disk-shaped main body, the cylindrical section of straight trough material folding dish can enter ball recess place by the groove of retaining clip charging tray; The diameter of the bulb of straight trough material folding dish is greater than the width of described groove and the bore size of ball recess, and bulb and ball recess are matching relationship, and makes bulb be nested in wherein; Curved groove material folding dish is positioned at the below of straight trough material folding dish, and described blank chuck runs through straight trough and curved groove, and by realizing being flexibly connected of straight trough material folding dish and curved groove material folding dish with the cooperation of tightening screw and plane is fitted; Blank chuck and straight trough have corresponding quantity, and one_to_one corresponding.

The step-like projection of blank chuck lower end can embed in the groove of polycrystal head well cutting in advance, realizes clamping and location.

In the present invention, described straight trough material folding dish and curved groove material folding dish are located by matter mouth, that is: respectively arrange the protruding part and depressed area that cooperatively interact at the center of both relative sides, realize location when plane is fitted by this protruding part and depressed area.

In the present invention, the straight trough quantity on described straight trough material folding dish is 3 ~ 5, and each straight trough is completely the same, is distributed on straight trough material folding dish; Therewith adaptably, curved groove material folding dish has the curved groove of equal amts, and each curved groove is completely the same, is distributed on curved groove material folding dish.

In the present invention, the length of the curved groove on described curved groove material folding dish is 50 ~ 400mm, and on described straight trough material folding dish, the length of straight trough is 50 ~ 400mm, can adapt to the clamping requirement of 2 ~ 15 inches of polycrystals.

In the present invention, on described curved groove material folding dish, the curve shape of curved groove has following feature: the radius of curve increases along with angle change.

As preferably, curved groove curve can be Archimedes's line of fall, and radius of curve increases along with along with angle change linear homogeneous, namely meets following polar equation: r (θ)=a+b (θ).

As preferably, curved groove curve can be involute urve, namely meets following polar equation:

r(k)=r(b)/cosα(k),θ(k)=tanα(k)-α(k)。

In the present invention, the groove of described retaining clip charging tray, the end being positioned at outer rim at it is provided with targeting port, and this targeting port has the opening shape of V-type or arc transition.

In the present invention, described retaining clip charging tray is arranged the level-off screw that at least one runs through, the end of level-off screw connects with the upper surface of straight trough material folding dish.

In the present invention, a uniform 3-5 threaded block on described retaining clip charging tray, threaded block and level-off screw are matching relationship.

In the present invention, be provided with the adjustment component for assisting to change straight trough material folding dish and curved groove material folding dish relative rotation angle at the edge of straight trough material folding dish or curved groove material folding dish.

In the present invention, described adjustment component is adjustment screw, pin or handle, and its quantity is 1 ~ 5.

Relative to prior art, beneficial effect of the present invention is:

The invention provides a kind of simple and reliable adjustable polycrystal clamping device.Adopt card slot type structure to connect between blank chuck and polycrystal, reliable and stable clamping can be realized to polycrystal, ensure that crystal pulling process can be carried out smoothly.Blank chuck runs through the straight trough of straight trough material folding dish and the curved groove of curved groove material folding dish, unclamp tightening screw, the angle of straight trough material folding dish and curved groove material folding dish is adjusted by adjustment screw, under the guiding of straight trough and curved groove, blank chuck along straight trough and the level and smooth movement of curved groove, can realize the clamping of the polycrystal to different size size.After completing the clamping of polycrystal, tighten tightening screw, straight trough material folding dish and curved groove material folding dish can not rotate each other, can ensure the stability of polycrystal in crystal pulling process.Straight trough material folding dish adopts location at spherical surface with retaining clip charging tray and is connected, and can realize automatic centering, reduces crystal pulling preparation work, enhances productivity.Meanwhile, retaining clip charging tray is provided with level-off screw, coordinates the horizontal adjustment realizing polycrystal by simple tools such as water transfer level, simple and convenient.

Accompanying drawing explanation

Fig. 1 is stereographic map of the present invention;

Fig. 2 is polycrystal clamping device vertical view of the present invention;

Fig. 3 is straight trough material folding dish schematic diagram of the present invention;

Fig. 4 is curved groove material folding dish schematic diagram of the present invention;

Fig. 5 is polycrystal clamping device case one schematic diagram of the present invention;

Fig. 6 is polycrystal clamping device case two schematic diagram of the present invention.

In the drawings: 1 retaining clip charging tray, 2 level-off screws, 3 tightening screws, 4 straight trough material folding dishes, 5 curved groove material folding dishes, 6 blank chucks, 7 adjustment screws, 8 polycrystals.

Embodiment

Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described.

As Figure 1-4.Adjustable polycrystal clamping device of the present invention, comprises straight trough material folding dish 4 and retaining clip charging tray 1, and the main body of straight trough material folding dish 4 is the component of disk, and roundlet shell of column is established in centre, and its upper end is bulb, and the diameter of bulb is greater than the cross-sectional diameter of cylindrical section.Be provided with curved groove material folding dish 5 in the below of straight trough material folding dish 4, straight trough material folding dish 4 and curved groove material folding dish 5 are plane laminating, adopt matter mouth location.Straight trough material folding dish 4 disk is laid with the straight trough of some amount one fixed width certain diameter scope, curved groove material folding dish 5 is laid with the curved groove of respective numbers, width and diameter range.Curved groove curve is spiral of Archimedes or involute urve etc., and the radius of curve increases along with angle change; Blank chuck 6 runs through the straight trough of straight trough material folding dish 4 and the curved groove of curved groove material folding dish 5, and by realizing straight trough material folding dish 4 with the cooperation of tightening screw 3 and curved groove material folding dish 5 is connected, blank chuck 6 can along straight trough and level and smooth the moving of curved groove; The head of polycrystal 8 has the groove of one fixed width in advance, the lower end of blank chuck 6 is provided with the step-like projection of corresponding size, realizes the clamping of polycrystal 8 and fixing by the card slot type structure of the groove step-like for uniform blank chuck 6 lower end projection being embedded polycrystal 8; Straight trough material folding dish 4 and curved groove material folding dish 5 disk circumference face being also equipped with adjustment screw 7, by twisting adjustment screw 7, the relative angle of adjustable straight trough material folding dish 4 and curved groove material folding dish 5, thus driving blank chuck 6 to move along straight trough and curved groove.

Retaining clip charging tray 1 is fixed on the lower end of axle, its disk is provided with the groove together from center to edge, there is ball recess at disc centre place, straight trough material folding dish 4 bulb and retaining clip charging tray 1 ball recess are matching relationship, the cylindrical section of straight trough material folding dish 4 enters groove by the groove of retaining clip charging tray 1, and installation and the location of straight trough material folding dish 4 is realized by the cooperation of bulb and groove, and be greater than the groove width (retaining clip charging tray groove and straight trough material folding dish cylindrical section are matching relationship) of retaining clip charging tray 1 due to straight trough material folding dish 4 bulb diameter, the bulb of straight trough material folding dish 4 can not be deviate from from groove, thus the reliable retention realized polycrystal 8, the groove edge of retaining clip charging tray 1 is provided with targeting port, can be V-type opening or arc transition etc., that facilitate straight trough material folding dish 4 with installation that is retaining clip charging tray 1, retaining clip charging tray 1 disk is laid with threaded seat, level-off screw 2 and threaded block meshing relation, straight trough material folding dish 4 is pushed up in level-off screw 2 lower end, by tightening or unclamping each level-off screw 2 to adjust the height of respective points on straight trough material folding dish 4, thus realize the horizontal adjustment to straight trough material folding dish 4 and polycrystal 8.

In crystal pulling is produced, the clamping of polycrystal is undertaken by such as under type:

Straight trough material folding dish 4 and curved groove material folding dish 5 are fit together by matter mouth plane, blank chuck 6 is run through the straight trough of straight trough material folding dish 4 and the curved groove of curved groove material folding dish 5, and adjust blank chuck to suitable position by adjustment screw 7; In the groove that the step-like projection embedding polycrystal 8 of blank chuck 6 lower end is cut in advance, tighten tightening screw 3, polycrystal 8 and straight trough material folding dish 4, curved groove material folding dish 5 are fixed together; By straight trough material folding dish 4 through retaining clip charging tray 1 groove, coordinated by bulb and ball recess, realize the fixing of straight trough material folding dish 4, due to the gravity of polycrystal, straight trough material folding dish 4 bulb is embedded in the ball recess of retaining clip charging tray 1 automatically, realizes automatic centering, and be greater than groove width due to bulb diameter, straight trough material folding dish 4 can not be deviate from from groove, thus realizes the reliable retention to polycrystal 8.Level-off screw 2 and retaining clip charging tray 1 threaded block are matching relationship, straight trough material folding dish 4 is pushed up in level-off screw 2 lower end, by tightening or unclamping each level-off screw 2 to adjust the height of respective points on straight trough material folding dish 4, by simple instruments such as water level gauges, thus the horizontal adjustment to polycrystal 8 can be realized.

As shown in Figure 5, be clamping device case study on implementation one schematic diagram of the present invention: tightening screw 3, straight trough material folding dish 4, curved groove material folding dish 5, member position schematic diagram such as adjustment screw 7, polycrystal 8 etc. during clamping diameter 254mm (10 inches) polycrystal.

As shown in Figure 6, be clamping device case study on implementation two schematic diagram of the present invention: tightening screw 3, straight trough material folding dish 4, curved groove material folding dish 5, member position schematic diagram such as adjustment screw 7, polycrystal 8 etc. during clamping diameter 356mm (14 inches) polycrystal.

The clamping of the present invention to the polycrystal of different diameter realizes in the following way: when needs clamping larger diameter polycrystal, unscrew uniform tightening screw 3, straight trough material folding dish 4 and curved groove material folding dish 5 can be rotated freely, rotate adjustment screw 7 and make relative straight trough material folding dish 4 counterclockwise movement of curved groove material folding dish 5, blank chuck 6 also can move to suitable diametrical position along with straight trough, curved groove simultaneously.Step-like for blank chuck 6 lower end projection is embedded in polycrystal 8 groove, after carrying out necessary adjustment, tightens tightening screw 3, fixing straight trough material folding dish 4 and curved groove material folding dish 5.

It is to be noted; the explanation of above case study on implementation just understands method of the present invention and core concept thereof for helping; for those skilled in the art; under the premise without departing from the principles of the invention; can also carry out some improvement and modification to the present invention, these improve and modify and also fall in the protection domain of the claims in the present invention.

Claims (8)

1., for an adjustable polycrystal clamping device for pulled crystal device, comprise blank chuck, step-like projection is established in its lower end; It is characterized in that, this device also comprises straight trough material folding dish, curved groove material folding dish and the retaining clip charging tray all with disk-shaped main body, wherein:
The center of straight trough material folding dish is provided with cylindrical section, and the upper end of cylindrical section is bulb, and the diameter of bulb is greater than the cross-sectional diameter of cylindrical section; Disk-shaped main body is provided with the straight trough of at least one radial direction, and this straight trough is through perforate;
Curved groove material folding dish has the curvilinear curved groove corresponding with straight trough quantity on straight trough material folding dish, and this curved groove is through perforate, has the direction extended to edge from the center of curved groove material folding dish;
Be positioned at the retaining clip charging tray above straight trough material folding dish, there is the through groove of a radial direction from the center to edge; Be provided with the ball recess of through perforate in the center of disk-shaped main body, the cylindrical section of straight trough material folding dish can enter ball recess place by the groove of retaining clip charging tray; The diameter of the bulb of straight trough material folding dish is greater than the width of described groove and the bore size of ball recess, and bulb and ball recess are matching relationship, and makes bulb be nested in wherein;
Curved groove material folding dish is positioned at the below of straight trough material folding dish, and described blank chuck runs through straight trough and curved groove, and by realizing being flexibly connected of straight trough material folding dish and curved groove material folding dish with the cooperation of tightening screw and plane is fitted; Blank chuck and straight trough have corresponding quantity, and one_to_one corresponding;
Described straight trough material folding dish and curved groove material folding dish are located by matter mouth, that is: respectively arrange the protruding part and depressed area that cooperatively interact at the center of both relative sides, realize location when plane is fitted by this protruding part and depressed area;
On described curved groove material folding dish, the curve shape of curved groove has following feature: radius of curve increases along with angle change, is spiral of Archimedes or involute urve.
2. device according to claim 1, is characterized in that, the straight trough quantity on described straight trough material folding dish is 3 ~ 5, and each straight trough is completely the same, is distributed on straight trough material folding dish; Therewith adaptably, curved groove material folding dish has the curved groove of equal amts, and each curved groove is completely the same, is distributed on curved groove material folding dish.
3. device according to claim 1, is characterized in that, the length of the curved groove on described curved groove material folding dish is 50 ~ 400mm, and on described straight trough material folding dish, the length of straight trough is 50 ~ 400mm.
4. device according to claim 1, is characterized in that, the groove of described retaining clip charging tray, and the end being positioned at outer rim at it is provided with targeting port, and this targeting port has the opening shape of V-type or arc transition.
5. device according to claim 1, is characterized in that, described retaining clip charging tray is arranged the level-off screw that at least one runs through, and the end of level-off screw connects with the upper surface of straight trough material folding dish.
6. device according to claim 5, is characterized in that, a uniform 3-5 threaded block on described retaining clip charging tray, threaded block and level-off screw are matching relationship.
7. device according to claim 1, is characterized in that, is provided with the adjustment component for assisting to change straight trough material folding dish and curved groove material folding dish relative rotation angle at the edge of straight trough material folding dish or curved groove material folding dish.
8. device according to claim 7, is characterized in that, described adjustment component is adjustment screw, pin or handle, and its quantity is 1 ~ 5.
CN201210081835.5A 2012-03-25 2012-03-25 Adjustable polycrystal material clamping device for crystal pulling equipment CN102605419B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102849456A (en) * 2012-09-12 2013-01-02 珠海真晟机电设备有限公司 Linkage clamping mechanism
CN103981567B (en) * 2014-01-07 2016-06-29 浙江晶盛机电股份有限公司 A kind of material containing device for zone melting furnace and automatically material containing method
CN104666034B (en) * 2015-03-03 2016-10-05 天津开发区合普工贸有限公司 A kind of sizable in-vitro eyeball fixing device

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JPH10338597A (en) * 1997-06-02 1998-12-22 Komatsu Electron Metals Co Ltd Single crystal holding apparatus and single crystal holding method
US6663710B1 (en) * 1999-04-30 2003-12-16 Ebara Corporation Method for continuously pulling up crystal
CN1267751A (en) * 2000-03-30 2000-09-27 天津市半导体材料厂 Vertical pulling and zone melting process of producing monocrystalline silicon
JP2003127010A (en) * 2001-10-23 2003-05-08 Hokkai Seisakusho:Kk Grasping mechanism for columnar object
CN2578342Y (en) * 2002-10-15 2003-10-08 北京有色金属研究总院 Seed crystal holder for monocrystal silicon growth by straight pull process
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CN202849587U (en) * 2012-09-19 2013-04-03 浙江晶盛机电股份有限公司 Seed holder for growing silicon single crystals by zone-melting method

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