CN202849587U - Seed holder for growing silicon single crystals by zone-melting method - Google Patents
Seed holder for growing silicon single crystals by zone-melting method Download PDFInfo
- Publication number
- CN202849587U CN202849587U CN201220480830.5U CN201220480830U CN202849587U CN 202849587 U CN202849587 U CN 202849587U CN 201220480830 U CN201220480830 U CN 201220480830U CN 202849587 U CN202849587 U CN 202849587U
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- Prior art keywords
- seed
- chuck
- notch
- seed crystal
- holder
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- Expired - Lifetime
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- 239000013078 crystal Substances 0.000 title claims abstract description 99
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 13
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 13
- 239000010703 silicon Substances 0.000 title claims abstract description 13
- 238000004857 zone melting Methods 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 title claims abstract description 11
- 238000007373 indentation Methods 0.000 claims 1
- 230000007246 mechanism Effects 0.000 abstract description 12
- 230000006872 improvement Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 206010040925 Skin striae Diseases 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a seed holder, and aims to provide a seed holder for growing silicon single crystals by a zone-melting method. The seed holder comprises a columnar seed holder body, wherein an inward cavity is formed in the bottom of the body; and a gap is axially formed in the upper part of the seed holder body and is provided with two intersected axial cutting faces. The seed holder further comprises a seed holder slide block. According to the seed holder provided by the utility model, the center distance between the seed holder body and the seed holder slide block can be changed by adjusting a seed holder adjusting screw, so that a seed can be clamped or loosened. A clamping mechanism can clamp seeds in various sizes when the tail parts of the seeds are processed to be cuboid. The seeds are in surface contact with the clamping mechanism, so that the seeds are firmly clamped and are free from swinging and stress concentration. A seed fixing height can be adjusted by changing the relative height of the seed holder slide block and the seed holder body.
Description
Technical Field
The utility model relates to a seed crystal holder, in particular to a seed crystal holder for growing silicon single crystal by a zone melting method.
Background
The silicon single crystal is pulled by a zone melting method, namely, a polycrystalline silicon material is heated by a high-frequency heating coil in an argon atmosphere or a doping gas atmosphere, and is contacted with a seed crystal below after being melted, so that the high-purity silicon single crystal is grown according to the crystal orientation structure of the seed crystal. The seed crystal is a single crystal of silicon having a particular crystal orientation, typically an elongated rectangular parallelepiped.
In the process of growing the zone-melting silicon single crystal, the seed crystal must be well fixed, and the grown single crystal needs to be supported at the beginning of crystal pulling, so a reliable seed crystal clamping mechanism is required to ensure the smooth progress of the growth process of the silicon single crystal.
The traditional seed crystal holding mechanism is generally composed of a seed crystal holder body and a metal wire. The body of the seed crystal holder is a cylinder, the upper half part of the body is vertically cut off 1/4 cylinders to form a right-angle notch. Open on the cylinder has a plurality of striae, during the installation seed crystal, cooperatees the right angle face of cuboid seed crystal and the right angle face of seed crystal holder body, then fixes both together with the wire, and the wire is along the striae on the cylinder when winding, plays and prevents gliding effect. The seed crystal clamping mechanism fixes the seed crystal by the metal wire, the seed crystal and the metal wire are in point contact, the seed crystal is stressed unevenly, the seed crystal is easy to shake or break, the metal wire is wound inconveniently, and the seed crystal is inconvenient to replace.
Chinese utility model patent CN 201605348U discloses a seed crystal fixture: the seed holder comprises a seed holder body and a fastening sleeve matched with the seed holder body, wherein the seed holder body comprises an upper cone and a lower base, the lower base is a cylinder, the outside of the lower base is provided with threads, and the inside of the fastening sleeve is provided with threads matched with the threads outside the lower base of the holder. The fastening sleeve is utilized to make the cavity of the holding part for placing the seed crystal contract, thereby achieving the purpose of clamping the seed crystal. The seed crystal clamping mechanism can only clamp the seed crystal with a certain size, and the clamping height of the seed crystal cannot be adjusted.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the utility model is to overcome the defects in the prior art and provide a seed crystal holder for growing silicon single crystal by a zone melting method. The seed crystal holder can hold seed crystals of various sizes, is convenient to operate, and simultaneously overcomes the problem of stress concentration of the traditional seed crystal holding mechanism.
For solving the technical problem, the technical scheme of the utility model is that:
provides a seed crystal holder for growing silicon single crystal by a zone melting method, which comprises a columnar seed crystal chuck body, wherein the bottom of the seed crystal chuck body is provided with an inward cavity; the upper part of the seed chuck body is provided with a notch along the axial direction, and the notch is provided with two crossed axial cutting surfaces; the seed holder further comprises a seed chuck slide having any one of the following configurations:
(1) the seed crystal chuck slide block is strip-shaped and is provided with two side surfaces; a notch is formed at the intersection of the two side surfaces along the length direction, the notch is provided with two crossed cutting surfaces, and each cutting surface is crossed with one side surface; the seed crystal holder also comprises a sleeve, the seed crystal holder body and the seed crystal holder sliding block are both positioned in the sleeve, the seed crystal holder sliding block is arranged in the gap of the seed crystal holder body, and the gap of the seed crystal holder sliding block is opposite to the gap of the seed crystal holder body; a seed chuck adjusting screw is arranged on the sleeve corresponding to the rear side of the notch of the seed chuck body and penetrates through the wall of the sleeve; or,
(2) the seed chuck sliding block is columnar in appearance, an axial through hole is formed in the seed chuck sliding block, and the seed chuck body penetrates through the through hole; a boss is arranged along the axial direction of the inner wall of the through hole, and the boss is provided with two side surfaces; a notch is formed at the intersection of the two side surfaces along the axial direction, the notch is provided with two crossed cutting surfaces, and each cutting surface is crossed with one side surface; and a seed chuck adjusting screw is arranged on the wall of the seed chuck sliding block corresponding to the rear side of the notch of the seed chuck body and penetrates through the wall of the seed chuck sliding block.
As an improvement, two axial cutting surfaces of the notch of the seed chuck body are vertically intersected; two side surfaces of the seed crystal chuck sliding block are vertical to each other; cutting surfaces of the notch of the seed chuck sliding block are vertically intersected; the cutting surface of the notch of the seed chuck sliding block is vertically intersected with the two side surfaces.
As an improvement, the seed crystal chuck body is cylindrical; the section of the notch of the seed chuck body is fan-shaped, and the maximum radius of the notch is 1/2-3/5 of the diameter of the cross section of the seed chuck body.
As an improvement, the central line of the seed chuck sliding block, the central line of the seed chuck adjusting screw and the central line of the seed chuck body are positioned in the same plane.
As an improvement, the cavity at the bottom of the seed chuck body is opened along the axial direction, and the cavity is cylindrical or conical. The cavity can be tightly matched with the top end of the inner shaft of the lower shaft of the zone melting furnace.
The utility model has the advantages that:
the center distance between the seed chuck body and the seed chuck sliding block can be changed by adjusting the adjusting screw of the seed chuck, thereby achieving the purpose of clamping or loosening the seed crystal. The holding mechanism can hold seed crystals of various sizes, and only the tail of the seed crystal needs to be processed into a cuboid. And the seed crystal is in surface contact with the clamping mechanism, so that the clamping is firm, and shaking and stress concentration cannot be generated. The fixed height of the seed crystal can be adjusted by changing the relative height of the seed crystal chuck sliding block and the seed crystal chuck body.
Drawings
FIG. 1 is a cross-sectional view of a seed holding mechanism;
FIG. 2 is an isometric view of a seed crystal holding mechanism;
fig. 3 is a sectional view of the seed holding mechanism.
Reference numerals: 1, a seed chuck body; 2, a seed crystal chuck slide block; 3 adjusting screw of seed chuck; 4, seed crystal.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
A seed crystal holder for growing silicon single crystal by zone melting method comprises a cylindrical seed crystal chuck body 1, the bottom of which is provided with an inward cavity; the cavity is opened along the axial direction and is cylindrical or conical. The cavity can be tightly matched with the top end of the inner shaft of the lower shaft of the zone melting furnace.
A notch is arranged on the upper part of the seed chuck body 1 along the axial direction, and the notch is provided with two vertical and crossed axial cutting surfaces; the section of the notch of the seed chuck body is fan-shaped because the seed chuck body is cylindrical; the maximum radius of the fan-shaped notch is 1/2-3/5 of the diameter of the cross section of the seed chuck body.
The seed crystal holder also comprises a seed crystal chuck slide block 2 which is cylindrical in shape and is internally provided with an axial through hole, and a seed crystal chuck body 1 penetrates through the through hole; a boss is arranged along the axial direction of the inner wall of the through hole, and the boss is provided with two mutually vertical side surfaces; a notch is formed at the junction of the two side surfaces along the axial direction, the notch is provided with two cutting surfaces which are vertically intersected, and each cutting surface is vertically intersected with one side surface; a seed chuck adjusting screw 3 is arranged on the seed chuck sliding block 2 corresponding to the rear side of the gap of the seed chuck body 1, and the seed chuck adjusting screw 3 penetrates through the wall of the seed chuck sliding block 2.
Before holding, the seed crystal 4 is processed to make its tail portion be rectangular parallelepiped. During the centre gripping, paste the right-angle face of seed crystal 4 and the right-angle face of seed chuck body 1 tightly, then adjust seed chuck adjusting screw 3, change the centre-to-centre spacing of seed chuck slider 2 and seed chuck body 1, until another right-angle face of seed crystal 4 and seed chuck slider 2 breach right-angle face hug closely, the fixed completion of seed crystal 4. At this time, the center line of the seed chuck slide 2, the center line of the seed chuck adjusting screw 3 and the center line of the seed chuck body 1 are located in the same plane.
Of course, the present invention may also have another variant, dividing the seed chuck slide 2 into two parts, one for fixing in a strip shape and the other for holding into an individual sleeve: at the moment, the strip-shaped seed crystal chuck sliding block is provided with two mutually vertical side surfaces; a notch is formed at the intersection of the two side surfaces along the length direction, the notch is provided with two cutting surfaces which are vertically intersected, and each cutting surface is vertically intersected with one side surface; the seed crystal holder also comprises a sleeve, the seed crystal holder body and the seed crystal holder sliding block are both positioned in the sleeve, the seed crystal holder sliding block is arranged in the gap of the seed crystal holder body, and the gap of the seed crystal holder sliding block is opposite to the gap of the seed crystal holder body; and a seed chuck adjusting screw is arranged on the sleeve corresponding to the rear side of the notch of the seed chuck body and penetrates through the wall of the sleeve.
Claims (5)
1. A seed crystal holder for growing silicon single crystal by zone melting method comprises a columnar seed crystal chuck body, wherein the bottom of the seed crystal chuck body is provided with an inward cavity; it is characterized in that a notch is axially arranged at the upper part of the seed chuck body, and the notch is provided with two crossed axial cutting surfaces; the seed holder further comprises a seed chuck slide having any one of the following configurations:
(1) the seed crystal chuck slide block is strip-shaped and is provided with two side surfaces; a notch is formed at the intersection of the two side surfaces along the length direction, the notch is provided with two crossed cutting surfaces, and each cutting surface is crossed with one side surface; the seed crystal holder also comprises a sleeve, the seed crystal holder body and the seed crystal holder sliding block are both positioned in the sleeve, the seed crystal holder sliding block is arranged in the gap of the seed crystal holder body, and the gap of the seed crystal holder sliding block is opposite to the gap of the seed crystal holder body; a seed chuck adjusting screw is arranged on the sleeve corresponding to the rear side of the notch of the seed chuck body and penetrates through the wall of the sleeve; or,
(2) the seed chuck sliding block is columnar in appearance, an axial through hole is formed in the seed chuck sliding block, and the seed chuck body penetrates through the through hole; a boss is arranged along the axial direction of the inner wall of the through hole, and the boss is provided with two side surfaces; a notch is formed at the intersection of the two side surfaces along the axial direction, the notch is provided with two crossed cutting surfaces, and each cutting surface is crossed with one side surface; and a seed chuck adjusting screw is arranged on the wall of the seed chuck sliding block corresponding to the rear side of the notch of the seed chuck body and penetrates through the wall of the seed chuck sliding block.
2. A seed holder as claimed in claim 1, wherein the two axial cutting faces of the indentation of the seed chuck body intersect perpendicularly; two side surfaces of the seed crystal chuck sliding block are vertical to each other; cutting surfaces of the notch of the seed chuck sliding block are vertically intersected; the cutting surface of the notch of the seed chuck sliding block is vertically intersected with the two side surfaces.
3. A seed holder according to claim 1 or claim 2 wherein the body of the seed chuck is cylindrical; the section of the notch of the seed chuck body is fan-shaped, and the maximum radius of the notch is 1/2-3/5 of the diameter of the cross section of the seed chuck body.
4. A seed holder as set forth in claim 3 wherein the centerline of the chuck slide, the centerline of the chuck adjustment screw and the centerline of the chuck body lie in the same plane.
5. A seed holder as set forth in claim 3 wherein the cavity in the bottom of the chuck body is open in the axial direction and is cylindrical or conical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220480830.5U CN202849587U (en) | 2012-09-19 | 2012-09-19 | Seed holder for growing silicon single crystals by zone-melting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220480830.5U CN202849587U (en) | 2012-09-19 | 2012-09-19 | Seed holder for growing silicon single crystals by zone-melting method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202849587U true CN202849587U (en) | 2013-04-03 |
Family
ID=47980806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220480830.5U Expired - Lifetime CN202849587U (en) | 2012-09-19 | 2012-09-19 | Seed holder for growing silicon single crystals by zone-melting method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202849587U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102605419A (en) * | 2012-03-25 | 2012-07-25 | 杭州慧翔电液技术开发有限公司 | Adjustable polycrystal material clamping device for crystal pulling equipment |
| CN106987903A (en) * | 2017-03-27 | 2017-07-28 | 宁夏佳晶科技有限公司 | A kind of improved large scale synthetic sapphire production technology |
-
2012
- 2012-09-19 CN CN201220480830.5U patent/CN202849587U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102605419A (en) * | 2012-03-25 | 2012-07-25 | 杭州慧翔电液技术开发有限公司 | Adjustable polycrystal material clamping device for crystal pulling equipment |
| CN102605419B (en) * | 2012-03-25 | 2015-04-22 | 杭州慧翔电液技术开发有限公司 | Adjustable polycrystal material clamping device for crystal pulling equipment |
| CN106987903A (en) * | 2017-03-27 | 2017-07-28 | 宁夏佳晶科技有限公司 | A kind of improved large scale synthetic sapphire production technology |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130403 |