CN203904500U - Zone-melting raw material crystal bar clamping device - Google Patents
Zone-melting raw material crystal bar clamping device Download PDFInfo
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- CN203904500U CN203904500U CN201420310385.7U CN201420310385U CN203904500U CN 203904500 U CN203904500 U CN 203904500U CN 201420310385 U CN201420310385 U CN 201420310385U CN 203904500 U CN203904500 U CN 203904500U
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- raw material
- crystal bar
- material crystal
- clamping
- clamping device
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Abstract
The utility model discloses a zone-melting raw material crystal bar clamping device which comprises a clamping main body, a reducing disc fixedly connected with the clamping main body and a clamping sleeve in detachable connection with the lower end of the reducing disc, wherein the clamping sleeve is used for clamping a raw material crystal bar; a groove wound with a molybdenum wire is also formed at the end part of the clamping sleeve; and the molybdenum wire is used for further binding and fixing the clamped raw material crystal bar. According to the device disclosed by the utility model, the clamping of a small-diameter raw material crystal bar can be effectively guaranteed, and the processing cost and time for groove forming and the like are saved; and moreover, the design method is reasonable, the method steps are simple and convenient to realize and easy to control, and the using effect is good.
Description
Technical field
The utility model belongs to semiconductor applications, is specifically related to the molten raw material crystal bar clamping device of using in a kind of district.
Background technology
Silicon single crystal is as a kind of semiconductor material, can not only be used for doing solar battery sheet, and can be for the production of unicircuit and electronic devices and components.In recent years, along with the need of production in market, the demand of major diameter single crystal silicon chip is increasing.
The mode of production of silicon single crystal mainly contains two kinds at present, and a kind of is vertical pulling method (CZ), and a kind of is zone melting method (FZ).Pulling of crystals is mainly used in large-scale integrated wafer, and zone melting single-crystal is mainly as high-power electric appliance element.The demand of the monocrystalline of zone melting method growth is at present increasing, so zone melting method drawing crystal pulling has very large economic benefit and social benefit.
The supporting clamping raw material of the zone melting furnace crystal bar clamping device using now, by three card columns that can regulate of chuck, guarantees that the clamping of raw material crystal bar is stable thereby screw raw material crystal bar.Due to the limitation of size of chuck and the requirement of bearing capacity, supporting chuck minimum can clamp the raw material crystal bar that diameter is 90mm, owing to will use diameter in actual crystal pulling process, be the even minimum raw material crystal bar to 20mm of 80mm, therefore supporting clamping device can not clamp the molten raw material crystal bar in community.
Utility model content
It is molten with raw material crystal bar clamping device that the technical problems to be solved in the utility model is to provide a kind of district, be mainly used in polycrystal raw material crystal bar prepared by PVA Tepla FZ-30 zone melting furnace, tooling cost and the time that can effectively guarantee the clamping of minor diameter raw material crystal bar and save cutting etc.; Its reasonable design method, method steps is simple, realizes and is conveniently easy to grasp, and result of use is good.
For achieving the above object, the technical solution of the utility model is as follows:
District is molten with a raw material crystal bar clamping device, comprising:
One clamping main body,
The one reducing dish being fixedly connected with clamping main body,
And one and the retaining sleeve that removably connects of reducing dish lower end, described retaining sleeve is used for clamping raw material crystal bar, and the groove of a winding molybdenum filament is also set in described retaining sleeve end, and further binding is fixing to clamping complete raw material crystal bar for this molybdenum filament.
In a preferred embodiment of the present utility model, described reducing dish comprises a disk body, and one is arranged at the draw-in groove of disk body both sides, and a threaded block that is arranged at disk body below.
In a preferred embodiment of the present utility model, described retaining sleeve comprises a hollow out sleeve, and one is arranged at the thread groove of hollow out sleeve upper end, and described thread groove screws and is connected with the threaded block of reducing dish.
In a preferred embodiment of the present utility model, at the bottom of described hollow out sleeve comprises a stack shell and one, the metal sheet that described stack shell is arranged side by side by several forms, and this metal sheet has contractility.
By technique scheme, the beneficial effects of the utility model are:
1, reasonable in design, input cost is low and realize convenient;
2, adopt and increase reducing dish mode, can not only guarantee not destroy existing equipment parts, and extendability is large, availability is high;
3, raw material crystal bar no longer needs cutting just can complete clamping, has saved a large amount of process periods and cost;
4, retaining sleeve can be designed to sizes, can guarantee to adapt to the raw material crystal bar clamping of various diameters, and the processing request of raw material crystal bar is reduced.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is structural representation of the present utility model.
Embodiment
For technique means, creation characteristic that the utility model is realized, reach object and effect is easy to understand, below in conjunction with concrete diagram, further set forth the utility model.
With reference to Fig. 1, a kind of district is molten with raw material crystal bar clamping device, comprising:
One clamping main body 100,
One with the reducing dish 200 that is fixedly connected with of clamping main body 100, this reducing dish 200 comprises that a disk body 210, is arranged at the draw-in groove 220 of disk body both sides, and a threaded block 230 that is arranged at disk body below,
And one and the retaining sleeve 300 that removably connects of reducing dish lower end, described retaining sleeve 300 is for clamping raw material crystal bar, the groove 310 of one winding molybdenum filament 320 is also set in described retaining sleeve 300 ends, and further binding is fixing for the complete raw material crystal bar of 320 pairs of clampings of this molybdenum filament;
This retaining sleeve 300 comprises a hollow out sleeve 330, one is arranged at the thread groove 340 of hollow out sleeve upper end, described thread groove 340 screws and is connected with the threaded block 230 of reducing dish, wherein hollow out sleeve 330 comprises at the bottom of a stack shell 331 and one 332, the metal sheet 333 that described stack shell 331 is arranged side by side by several forms, this metal sheet 333 has contractility, and this metal sheet has contractility.Wherein retaining sleeve adopts stainless steel retaining sleeve conventionally.
On reducing dish, connect stainless steel retaining sleeve, thereby guarantee that the clamping of the molten raw material crystal bar in district is stable;
Stainless steel retaining sleeve bundlees raw material crystal bar by molybdenum filament, and raw material crystal bar no longer needs cutting just can complete clamping, and can be designed to the raw material crystal bar that multiple size is applicable to manifold diameter, has saved a large amount of process periods and cost;
The utility model, by regulating three card columns of chuck, guarantees that clamping is stable thereby screw reducing dish, and screw thread is opened in reducing dish lower end, to screw stainless steel retaining sleeve; Stainless steel retaining sleeve intermediate openings is opened screw thread and can be tightened onto on reducing dish, thereby can guarantee the stable of raw material crystal bar clamping.
By the stainless steel retaining sleeve of design different diameter, the raw material crystal bar that can adapt to by changing retaining sleeve various diameters clamps.
The supporting clamping device desired raw material crystal bar using now need to be to processings of slot of raw material crystal bar, and in actual use, because the situation appearance that fluting ruptures appears in the unlikely secret meeting of raw material crystal bar; And the clamping device desired raw material crystal bar that the utility model number provides need not be slotted, utilize molybdenum filament binding to stablize raw material crystal bar by the frictional force of retaining sleeve and raw material crystal bar, saved a large amount of tooling costs and process period.
More than show and described ultimate principle of the present utility model and principal character and advantage of the present utility model.The technician of the industry should understand; the utility model is not restricted to the described embodiments; that in above-described embodiment and specification sheets, describes just illustrates principle of the present utility model; do not departing under the prerequisite of the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall within the scope of claimed the utility model.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (4)
1.Yi Zhong district is molten be is characterized in that with raw material crystal bar clamping device, comprising:
One clamping main body,
The one reducing dish being fixedly connected with clamping main body,
And one and the retaining sleeve that removably connects of reducing dish lower end, described retaining sleeve is used for clamping raw material crystal bar, and the groove of a winding molybdenum filament is also set in described retaining sleeve end, and further binding is fixing to clamping complete raw material crystal bar for this molybdenum filament.
2. a kind of district according to claim 1 is molten is characterized in that with raw material crystal bar clamping device, and described reducing dish comprises a disk body, and one is arranged at the draw-in groove of disk body both sides, and a threaded block that is arranged at disk body below.
3. a kind of district according to claim 1 is molten is characterized in that with raw material crystal bar clamping device, and described retaining sleeve comprises a hollow out sleeve, and one is arranged at the thread groove of hollow out sleeve upper end, and described thread groove screws and is connected with the threaded block of reducing dish.
4. a kind of district according to claim 3 is molten is characterized in that with raw material crystal bar clamping device, and at the bottom of described hollow out sleeve comprises a stack shell and one, the metal sheet that described stack shell is arranged side by side by several forms, and this metal sheet has contractility.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420310385.7U CN203904500U (en) | 2014-06-12 | 2014-06-12 | Zone-melting raw material crystal bar clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420310385.7U CN203904500U (en) | 2014-06-12 | 2014-06-12 | Zone-melting raw material crystal bar clamping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203904500U true CN203904500U (en) | 2014-10-29 |
Family
ID=51778791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420310385.7U Expired - Fee Related CN203904500U (en) | 2014-06-12 | 2014-06-12 | Zone-melting raw material crystal bar clamping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203904500U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108707963A (en) * | 2018-07-09 | 2018-10-26 | 天津市环欧半导体材料技术有限公司 | A kind of zone melting single-crystal stove Novel spider plant material device |
-
2014
- 2014-06-12 CN CN201420310385.7U patent/CN203904500U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108707963A (en) * | 2018-07-09 | 2018-10-26 | 天津市环欧半导体材料技术有限公司 | A kind of zone melting single-crystal stove Novel spider plant material device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141029 Termination date: 20200612 |