CN103993352A - Silicon core pulling method for rotating seed crystals - Google Patents
Silicon core pulling method for rotating seed crystals Download PDFInfo
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- CN103993352A CN103993352A CN201410169007.6A CN201410169007A CN103993352A CN 103993352 A CN103993352 A CN 103993352A CN 201410169007 A CN201410169007 A CN 201410169007A CN 103993352 A CN103993352 A CN 103993352A
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- seed crystal
- fuel rod
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- frequency coil
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Abstract
A silicon core pulling method for rotating seed crystals relates to the field of artificial crystals. A seed crystal rotating device (9) drives the seed crystals (4) and pulled silicon cores to rotate in a silicon core (5) pulling process, and the rotation of the seed crystals makes up the problem of non-uniformity of the temperature in high frequency coil (6) pulling holes, so silicon cores with good circularity can be pulled. The method has the characteristics of simple operation, high production efficiency and the like.
Description
[technical field]
The present invention relates to artificial lens field, relate in particular to a kind of drawing method of silicon core, be specifically related to a kind of silicon core drawing method that makes seed crystal rotate in drawing silicon core process.
[background technology]
Known, the drawing method of existing silicon core 5 as shown in Figure 1, below radio-frequency coil 6, be provided with fuel rod 7, above radio-frequency coil 6, be provided with seed chuck, described seed chuck comprises hanging mechanisms 1, terminal pad 2 and holder 3, and wherein the bottom surfaces at terminal pad 2 is fixed with at least two holders 3 by screw, and the upper side of terminal pad 2 is provided with hanging mechanisms 1, described hanging mechanisms 1 connect mechanical manipulator, then in each holder 3, are respectively equipped with seed crystal 4; Further, upper end by 6 pairs of fuel rods 7 of radio-frequency coil heats and makes its thawing, then seed chuck drives seed crystal 4 to decline and inserts melting in liquid of fuel rod 7 upper ends until pass the drawing hole of radio-frequency coil 6, until the termination of seed crystal 4 and melting after liquid fusion of fuel rod 7 upper ends, by seed chuck, drive seed crystal 4 to rise, now seed crystal 4 drives simultaneously and melts liquid rising crystallization again, finally forms the silicon core of desired length; But because the temperature in drawing hole on radio-frequency coil 6 is inconsistent, and then cause silicon core 5 ellipses that draw out, take diameter as
silicon core be example, the difference of its major axis and minor axis is about 0.5mm, diameter is
its major axis of silicon core and the difference of minor axis reach 1mm left and right, and diameter is
its major axis of silicon core and the difference of minor axis reach 2mm left and right, and oval silicon core is difficult for clamping in reduction furnace, the ovality problem of so how improving silicon core has just become those skilled in the art's long-term technology demand.
[summary of the invention]
In order to realize described goal of the invention, the invention provides a kind of silicon core drawing method that seed crystal is rotated, the present invention is in silicon core pulling process, by swivel arrangement, drive the brick core of seed crystal and new crystallization to rotate, and then draw out circularity silicon core relatively preferably, the present invention has easy and simple to handle, production efficiency high.
For achieving the above object, the present invention adopts following technical scheme:
The silicon core drawing method that seed crystal is rotated, described method specifically comprises the steps:
The first step, first fuel rod is delivered to the bottom of radio-frequency coil;
Second step, connect step, radio-frequency coil is carried out to water flowing energising, utilize radio-frequency coil to heat fuel rod;
The 3rd step, connect step, after the upper end of fuel rod melts near the position below radio-frequency coil, seed crystal swivel arrangement declines with seed crystal, make seed crystal pass the drawing hole on radio-frequency coil and be inserted into the melting in liquid of fuel rod termination, after the melting liquid and combine together of the termination of seed crystal and fuel rod termination, by seed crystal swivel arrangement, drive seed crystal to rotate, in seed crystal rotation, utilize pulling apparatus by seed crystal pull-up, now fuel rod top melts liquid and can follow seed crystal and rise, the lower shaft of its fuel rod bottom is also corresponding follows synchronous rising, that now follows that seed crystal mentions melts liquid by after the drawing hole of radio-frequency coil, due to weakening of magnetic line of force, condensation forms silicon core.
The described silicon core drawing method that seed crystal is rotated, the replacement method of described the 3rd step is after melt near the position below radio-frequency coil fuel rod termination, seed crystal by seed crystal swivel arrangement driven rotary is declined, make seed crystal pass the drawing hole on radio-frequency coil and be inserted into the melting in liquid of fuel rod termination, after the melting liquid and combine together of the termination of seed crystal and fuel rod termination, in seed crystal rotation, utilize pulling apparatus by seed crystal pull-up, now fuel rod top melts liquid and can follow seed crystal and rise, the lower shaft of its fuel rod bottom is also corresponding follows synchronous rising, that now follows that seed crystal mentions melts liquid by after the drawing hole of radio-frequency coil, due to weakening of magnetic line of force, condensation forms silicon core.
Owing to adopting technical scheme as above, the present invention has following beneficial effect:
A kind of silicon core drawing method that seed crystal is rotated of the present invention, the present invention is in silicon core pulling process, by seed crystal swivel arrangement, drive the silicon core of seed crystal and drawing to rotate, the object of now seed crystal rotation is that the rotation by seed crystal makes up the problem due to non-uniform temperature in radio-frequency coil drawing hole, and then draw out circularity silicon core relatively preferably, the present invention has easy and simple to handle, production efficiency high.
[accompanying drawing explanation]
Fig. 1 is the schematic diagram that existing silicon core draws;
Fig. 2 is that silicon core of the present invention draws schematic diagram;
In figure: 1, hanging mechanisms; 2, terminal pad; 3, holder; 4, seed crystal; 5, silicon core; 6, radio-frequency coil; 7, fuel rod; 8, pulling apparatus; 9, seed crystal swivel arrangement.
[embodiment]
By the following examples, can explain in more detail the present invention, disclose object of the present invention and be intended to protect all changes and improvements in the scope of the invention, the present invention is not limited to the following examples;
A kind of described in 2 makes the silicon core drawing method that seed crystal rotates by reference to the accompanying drawings, and described method specifically comprises the steps:
The silicon core drawing method that seed crystal is rotated, described method specifically comprises the steps:
The first step, first by Controlling System, control down shaft drive and fuel rod 7 is delivered to the bottom of radio-frequency coil 6;
Second step, connect step, radio-frequency coil 6 is carried out to water flowing energising, utilize 6 pairs of fuel rods 7 of radio-frequency coil to heat;
The 3rd step, connect step, after the upper end of fuel rod 7 melts near the position below radio-frequency coil 6, seed crystal swivel arrangement 9 declines with seed crystal 4, make seed crystal 4 through the drawing hole on radio-frequency coil 6 and be inserted into the melting in liquid of fuel rod 7 terminations, after the melting liquid and combine together of the termination of seed crystal 4 and fuel rod 7 terminations, by seed crystal swivel arrangement 9, drive seed crystal 4 rotations, the object of now seed crystal 4 rotations is to revise the problem due to non-uniform temperature in radio-frequency coil 6 drawing holes by the rotation of seed crystal 4, if the non-uniform temperature in radio-frequency coil 6 drawing holes, when silicon core 5 crystallization drawing out, silicon core 5 is slower towards the high position crystallization velocity of temperature, and it is very fast towards the low position crystallization velocity of temperature, and then make the brick core drawing out produce oval, further, in seed crystal 4 rotations, utilize pulling apparatus 8 by seed crystal 4 pull-ups, now fuel rod 7 tops melts liquid and can follow seed crystal 4 and rise, the lower shaft of its fuel rod 7 bottoms is also corresponding follows synchronous rising, but its fuel rod must not contact with radio-frequency coil, that now follows that seed crystal 4 mentions melts liquid by after the drawing hole of radio-frequency coil 7, and due to weakening of magnetic line of force, condensation forms silicon core 5.
Wherein the replacement method of the 3rd step of the present invention is after melt near the position below radio-frequency coil 6 fuel rod 7 terminations, seed crystal by seed crystal swivel arrangement 9 driven rotary 4 is declined, make seed crystal 4 through the drawing hole on radio-frequency coil 6 and be inserted into the melting in liquid of fuel rod 7 terminations, after the melting liquid and combine together of the termination of seed crystal 4 and fuel rod 7 terminations, in seed crystal 4 rotations, utilize pulling apparatus 8 by seed crystal 4 pull-ups, now fuel rod 7 tops melts liquid and can follow seed crystal 4 and rise, the lower shaft of its fuel rod 7 bottoms is also corresponding follows synchronous rising, but its fuel rod must not contact with radio-frequency coil, that now follows that seed crystal 4 mentions melts liquid by after the drawing hole of radio-frequency coil 6, due to weakening of magnetic line of force, condensation forms silicon core 5.
Implement silicon core drawing method of the present invention, at drawing diameter, be
silicon core 5 time, the ovality major axis of silicon core 5 and the difference of minor axis are in 0.3mm.
The present invention is not only applicable to the drawing of silicon core, can also be suitable for the drawing of other crystal simultaneously.
In above content, carefully do not state part for prior art, therefore run business into particular one, do not state.
The embodiment selecting in this article in order to disclose object of the present invention, currently thinks suitablely, still, will be appreciated that, the present invention is intended to comprise that all belong to all changes and the improvement of the embodiment in this design and invention scope.
Claims (2)
1. a silicon core drawing method that makes seed crystal rotate, is characterized in that: described method specifically comprises the steps:
The first step, first fuel rod (7) is delivered to the bottom of radio-frequency coil (6);
Second step, connect step, radio-frequency coil (6) is carried out to water flowing energising, utilize radio-frequency coil (6) to heat fuel rod (7);
The 3rd step, connect step, after the upper end of fuel rod (7) melts near the position below radio-frequency coil (6), seed crystal swivel arrangement (9) declines with seed crystal (4), make seed crystal (4) through the drawing hole on radio-frequency coil (6) and be inserted into the melting in liquid of fuel rod (7) termination, after the melting liquid and combine together of the termination of seed crystal (4) and fuel rod (7) termination, by seed crystal swivel arrangement (9), drive seed crystal (4) rotation, in seed crystal (4) rotation, utilize pulling apparatus (8) by seed crystal (4) pull-up, now fuel rod (7) top melts liquid and can follow seed crystal (4) and rise, the lower shaft of its fuel rod (7) bottom is also corresponding follows synchronous rising, that now follows that seed crystal (4) mentions melts liquid by after the drawing hole of radio-frequency coil (7), due to weakening of magnetic line of force, condensation forms silicon core (5).
2. the silicon core drawing method that seed crystal is rotated according to claim 1, it is characterized in that: the replacement method of described the 3rd step is for after melt near the position below radio-frequency coil (6) fuel rod (7) termination, to be declined by the seed crystal (4) of seed crystal swivel arrangement (9) driven rotary, make seed crystal (4) through the drawing hole on radio-frequency coil (6) and be inserted into the melting in liquid of fuel rod (7) termination, after the melting liquid and combine together of the termination of seed crystal (4) and fuel rod (7) termination, in seed crystal (4) rotation, utilize pulling apparatus (8) by seed crystal (4) pull-up, now fuel rod (7) top melts liquid and can follow seed crystal (4) and rise, the lower shaft of its fuel rod (7) bottom is also corresponding follows synchronous rising, that now follows that seed crystal (4) mentions melts liquid by after the drawing hole of radio-frequency coil (6), due to weakening of magnetic line of force, condensation forms silicon core (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410169007.6A CN103993352A (en) | 2014-04-18 | 2014-04-18 | Silicon core pulling method for rotating seed crystals |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410169007.6A CN103993352A (en) | 2014-04-18 | 2014-04-18 | Silicon core pulling method for rotating seed crystals |
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| CN103993352A true CN103993352A (en) | 2014-08-20 |
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| CN201410169007.6A Pending CN103993352A (en) | 2014-04-18 | 2014-04-18 | Silicon core pulling method for rotating seed crystals |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105970288A (en) * | 2016-06-22 | 2016-09-28 | 江苏拜尔特光电设备有限公司 | Novel polycrystalline silicon core rod drawing method |
| CN109576778A (en) * | 2018-12-25 | 2019-04-05 | 内蒙古中环光伏材料有限公司 | A method of reducing the impurity content that CZ method prepares monocrystalline |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1365724A (en) * | 1970-09-26 | 1974-09-04 | Philips Electronic Associated | Methods of manufacturing single crystals of semiconductor mater ial |
| JPH0543382A (en) * | 1991-05-14 | 1993-02-23 | Sumitomo Metal Ind Ltd | Production of silicon single crystal |
| CN1748049A (en) * | 2003-02-11 | 2006-03-15 | 托普西尔半导体原料公司 | An apparatus for and a method of manufacturing a single crystal rod |
| CN102292475A (en) * | 2009-01-21 | 2011-12-21 | 光伏硅研究和生产有限责任公司 | Method and device for producing thin silicon rods |
| CN102358951A (en) * | 2011-10-11 | 2012-02-22 | 天津市环欧半导体材料技术有限公司 | Thermal system and technology for producing float zone doped single crystal silicon having size phi of 6 inches |
-
2014
- 2014-04-18 CN CN201410169007.6A patent/CN103993352A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1365724A (en) * | 1970-09-26 | 1974-09-04 | Philips Electronic Associated | Methods of manufacturing single crystals of semiconductor mater ial |
| JPH0543382A (en) * | 1991-05-14 | 1993-02-23 | Sumitomo Metal Ind Ltd | Production of silicon single crystal |
| CN1748049A (en) * | 2003-02-11 | 2006-03-15 | 托普西尔半导体原料公司 | An apparatus for and a method of manufacturing a single crystal rod |
| CN102292475A (en) * | 2009-01-21 | 2011-12-21 | 光伏硅研究和生产有限责任公司 | Method and device for producing thin silicon rods |
| CN102358951A (en) * | 2011-10-11 | 2012-02-22 | 天津市环欧半导体材料技术有限公司 | Thermal system and technology for producing float zone doped single crystal silicon having size phi of 6 inches |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105970288A (en) * | 2016-06-22 | 2016-09-28 | 江苏拜尔特光电设备有限公司 | Novel polycrystalline silicon core rod drawing method |
| CN109576778A (en) * | 2018-12-25 | 2019-04-05 | 内蒙古中环光伏材料有限公司 | A method of reducing the impurity content that CZ method prepares monocrystalline |
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Application publication date: 20140820 |