CN104746132B - The adjustment control device of pin is clamped in zone melting single-crystal stove - Google Patents
The adjustment control device of pin is clamped in zone melting single-crystal stove Download PDFInfo
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- CN104746132B CN104746132B CN201310626975.0A CN201310626975A CN104746132B CN 104746132 B CN104746132 B CN 104746132B CN 201310626975 A CN201310626975 A CN 201310626975A CN 104746132 B CN104746132 B CN 104746132B
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- support block
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- zone melting
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Abstract
The adjustment control device of pin is clamped in a kind of zone melting single-crystal stove, including clamping needle holder bar, clamping needle rack and clamping pin traction steel wire, the one end for clamping needle holder bar is located at clamping pin lower section, other end connection clamping pin traction steel wire, the clamping needle rack is provided with guide rail, and removable support block is provided with the guide rail, and the upper end of the removable support block is connected with clamping needle holder bar using axostylus axostyle, the clamping needle holder bar can vertically swing up and down with the axostylus axostyle junction as the center of circle；The lower end connection drive link of removable support block, drive link connection mobile motor.The present invention once clamps pin for fixed clamp needle rack is designed in changing original clamping device, is changed to removable design.Operating personnel can be by controlling clamp bracket mobile motor, the removable support block in clamping needle rack guide rail is produced to move up and down, so as to realize dynamically setting and once clamp the human intervention in pin launch process to once clamping pin initial position, the adaptability of clamping device is enhanced.
Description
Technical field
A kind of adjustment control device the present invention relates to clamp pin in zone melting single-crystal stove, system is clamped for zone-melted silicon single crystal stove
The mobile control of pin is once clamped in system.
Background technology
With the raising of area's melting apparatus ability and the level of technique, the major diameter single crystal production of 6 inches and the above is increasingly general
And.Due to single crystal diameter continue to increase and zone melting single-crystal draw in rotating technique application, to crystal growth in it is steady
Qualitative, reliability requirement is improved constantly.At present, in large-scale zone melting single-crystal Preparation equipment, more popular clamping device pattern
For：Twice, bikini.Main forced position is once retained as, it is secondary to be retained as Auxiliary support.It is same when once clamping pin is delivered
Step property and clamping pin and monocrystalline contact position height, angle and symmetry, have a significant impact for clamping effect.Above-mentioned clamping
Although mode substantially disclosure satisfy that the firm requirement in single crystal growth process, we have found in long-term production and application
Or there are problems that particularly one time clamping device relates generally to problems with：
1st, in ongoing clamp system, because clamping needle rack is designed for fixed, its is initial after the completion of once clamping pin is placed
Position can not change, therefore monocrystalline is certain by diameter, when single crystal diameter kind has the list that larger adjustment and clamping pin can pass through
When brilliant diametric requirements change, adjustment is got up comparatively laborious.
2nd, after once clamping starts to deliver, three once clamp pin and can only move down simultaneously, clamping pin such as occur different
Shi Yidong, it is impossible to carry out human intervention.
3rd, pulling monocrystal is particularly<111>During monocrystalline, when due to thermal field is set the problems such as and cause crystal be distorted or
Monocrystalline envelope curve occur position and envelope curve relief intensity it is excessive and when causing monocrystalline profile asymmetric, be easily caused once clamping and be forced to carry
Preceding dispensing, is caused by that a clip position is too low so that clamping stability declines, serious to result even in clamping failure, makes
Occur monocrystalline during into crystal-pulling and rock even lodging phenomenon, greater loss is brought to production, equipment is caused damage.
The content of the invention
It is molten single it is an object of the invention to provide a kind of area for defect present in existing zone melting single-crystal stove clamping device
The adjustment control device of pin is clamped in brilliant stove, the device can be realized once clamping quantifying, orienting and move for pin in zone melting single-crystal stove
It is dynamic, strengthen the adaptation of clamping device.
To achieve the above object, the present invention uses following technical scheme：
The adjustment control device of pin, including clamping needle holder bar, clamping needle rack and clamping are clamped in a kind of zone melting single-crystal stove
Pin traction steel wire, wherein, the one end for clamping needle holder bar is located at clamping pin lower section, other end connection clamping pin traction steel wire, the folder
Hold needle rack and be provided with guide rail, removable support block is provided with the guide rail, upper end and the clamping needle holder bar of the removable support block
Connected using axostylus axostyle, the clamping needle holder bar can vertically swing up and down with the axostylus axostyle junction as the center of circle；Removable support
The lower end connection drive link of block, drive link connection mobile motor.
The adjustment control device is operated in zone melting single-crystal stove loading furnace process or crystal-pulling process to the adjustment for clamping pin
In carry out.
The distance that the removable support block is moved up and down is 0~30mm.Translational speed is controlled for 0~30mm/min, speed
Degree adjustment amplitude is 0.05~2mm/min.
The advantage of the invention is that：
The present invention once clamps pin for fixed clamp needle rack is designed in changing original clamping device, is changed to removable setting
Meter.Operating personnel can by controlling clamp bracket mobile motor, make the removable support block in clamping needle rack guide rail produce it is upper,
Lower movement, so that realize dynamically setting and once clamp the human intervention in pin launch process to once clamping pin initial position,
Enhance the adaptability of clamping device.Using the present invention, during crystal-pulling, the orientation that pin is once clamped by regulation is moved
Move to solve because crystal shape is asymmetric, clamping pin moves the uncertain factor such as asynchronous, influence grasping system stability
Problem, so as to improve the antijamming capability of grasping system, for large diameter single crystals growth provides convenience.
Brief description of the drawings
Fig. 1 is the structural representation of an existing clamping device.
Fig. 2 is the structural representation using a clamping device of the invention.
Specific embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail.
As shown in figure 1, an existing clamping device includes clamping needle holder bar 1, clamping needle rack 2 and clamping pin traction steel
Silk 3, clamping needle rack therein is designed for fixed.After once clamping starts to deliver, clamping pin traction steel wire 3 relaxes, and once presss from both sides
Pin 4 is held to move down and contacted with monocrystalline in the presence of deadweight.The fixed design for clamping needle rack can only make three once to press from both sides
Hold pin to move down, it is impossible to which moving direction and amount of movement to clamping pin carry out human intervention.
The present invention is improved to existing clamping needle rack, as shown in Fig. 2 the adjustment control dress of the clamping pin after improving
Put including clamping needle holder bar 5, clamping needle rack 6 and clamping pin traction steel wire 7, wherein, one end of clamping needle holder bar 5 is located at clamping
The lower section of pin 8, other end connection clamping pin traction steel wire 7, the clamping needle rack 6 is provided with guide rail 9, is provided with removable in the guide rail 9
Dynamic support block 10, the upper end of the removable support block 10 is connected with clamping needle holder bar 5 using axostylus axostyle, and the clamping needle holder bar is with axostylus axostyle
Junction is the center of circle, can vertically be swung up and down, and may move the lower end connection drive link 11 of support block 10, the drive link 11
Connection mobile motor 12.
The distance that removable support block is moved up and down is 0~30mm.Control translational speed for 0~30mm/min, speed is adjusted
0.05~2mm/min of view picture degree.
After three clamping pins in clamping device are set, in zone melting single-crystal stove loading furnace process or crystal-pulling process
In, as desired by independent or synchronous edge parallel to lower direction of principal axis, move up or down removable support block and clamping pin
Pressure pin clamps pin movement to drive, can be by diameter by the mobile change monocrystalline for clamping pin；And it is excessive with this to avoid monocrystalline
Envelope curve and wreath piece so that clamping device can again be delivered in efficiency optimum position.In addition when three once clamping pin shiftings of discovery
When dynamic position is asynchronous, can also be adjusted like this makes clamping pin as far as possible while being come in contact with monocrystalline, reduces due to list
Brilliant discontinuity and occur it is crooked, lodging probability.
The present invention once clamps pin for fixed clamp needle rack is designed in changing original clamping device, is changed to removable setting
Meter.Operating personnel can by controlling clamp bracket mobile motor, make the removable support block in clamping needle rack guide rail produce it is upper,
Lower movement, so as to realize dynamically setting and once clamp the human intervention in pin launch process to once clamping pin initial position.
Claims (4)
1. the adjustment control device of pin, including clamping needle holder bar, clamping needle rack and clamping pin are clamped in a kind of zone melting single-crystal stove
Traction steel wire, it is characterised in that one end of clamping needle holder bar is located at clamping pin lower section, the other end connects clamping pin traction steel wire,
The clamping needle rack is provided with guide rail, and removable support block is provided with the guide rail, upper end and the clamping pin of the removable support block
Pressure pin is connected using axostylus axostyle, and the clamping needle holder bar can vertically swing up and down with the axostylus axostyle junction as the center of circle；It is removable
The lower end connection drive link of support block, drive link connection mobile motor.
2. the adjustment control device of pin is clamped in zone melting single-crystal stove according to claim 1, it is characterised in that the adjustment
Control device is carried out to the adjustment operation for clamping pin during zone melting single-crystal stove loading furnace process or crystal-pulling.
3. the adjustment control device of pin is clamped in zone melting single-crystal stove according to claim 1, it is characterised in that described removable
The distance that dynamic support block is moved up and down is 0~30mm.
4. the adjustment control device of pin is clamped in zone melting single-crystal stove according to claim 3, it is characterised in that described removable
The translational speed of dynamic support block is 0~30mm/min, and speed adjustment amplitude is 0.05~2mm/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310626975.0A CN104746132B (en) | 2013-11-28 | 2013-11-28 | The adjustment control device of pin is clamped in zone melting single-crystal stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310626975.0A CN104746132B (en) | 2013-11-28 | 2013-11-28 | The adjustment control device of pin is clamped in zone melting single-crystal stove |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104746132A CN104746132A (en) | 2015-07-01 |
| CN104746132B true CN104746132B (en) | 2017-06-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310626975.0A Active CN104746132B (en) | 2013-11-28 | 2013-11-28 | The adjustment control device of pin is clamped in zone melting single-crystal stove |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108588815A (en) * | 2018-06-29 | 2018-09-28 | 天津市环欧半导体材料技术有限公司 | A kind of adjustable monocrystalline clamping device of zone melting single-crystal stove |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101768773A (en) * | 2008-12-26 | 2010-07-07 | 北京有色金属研究总院 | Method and device for improving stability of single crystal when in running of zone-melting single crystal furnace |
| CN202492611U (en) * | 2012-02-08 | 2012-10-17 | 浙江晶盛机电股份有限公司 | Holding device for single crystals for zone melting furnace |
| CN202658261U (en) * | 2012-05-23 | 2013-01-09 | 刘剑 | Novel single crystal bar clamping mechanism for zone melting furnace |
| CN102943302A (en) * | 2012-10-24 | 2013-02-27 | 北京京运通科技股份有限公司 | Crystal clamping apparatus and zone melting single crystal furnace |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE202010002486U1 (en) * | 2009-03-31 | 2010-06-10 | Centrotherm Sitec Gmbh | Clamping and contacting device for silicon thin rods |
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2013
- 2013-11-28 CN CN201310626975.0A patent/CN104746132B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101768773A (en) * | 2008-12-26 | 2010-07-07 | 北京有色金属研究总院 | Method and device for improving stability of single crystal when in running of zone-melting single crystal furnace |
| CN202492611U (en) * | 2012-02-08 | 2012-10-17 | 浙江晶盛机电股份有限公司 | Holding device for single crystals for zone melting furnace |
| CN202658261U (en) * | 2012-05-23 | 2013-01-09 | 刘剑 | Novel single crystal bar clamping mechanism for zone melting furnace |
| CN102943302A (en) * | 2012-10-24 | 2013-02-27 | 北京京运通科技股份有限公司 | Crystal clamping apparatus and zone melting single crystal furnace |
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| CN104746132A (en) | 2015-07-01 |
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Owner name: GRINM SEMICONDUCTOR MATERIALS CO., LTD. Free format text: FORMER OWNER: GRINM ADVANCED MATERIALS CO., LTD. Effective date: 20150713 Free format text: FORMER OWNER: GRINM SEMICONDUCTOR MATERIALS CO., LTD. Effective date: 20150713 |
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Effective date of registration: 20150713 Address after: 101300 Beijing city Shunyi District Shuanghe Linhe Industrial Development Zone on the south side of the road Applicant after: You Yan Semi Materials Co., Ltd. Address before: 100088 Beijing city Xicheng District Xinjiekou Avenue No. 2 Applicant before: YOUYAN NEW MATERIAL CO., LTD. Applicant before: You Yan Semi Materials Co., Ltd. |
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Address after: 101300 south side of Shuanghe Road, Linhe Industrial Development Zone, Shunyi District, Beijing Patentee after: Youyan semiconductor silicon materials Co.,Ltd. Address before: 101300 south side of Shuanghe Road, Linhe Industrial Development Zone, Shunyi District, Beijing Patentee before: GRINM SEMICONDUCTOR MATERIALS Co.,Ltd. |