CN203999899U - A kind of crystal-cut device for zone melting furnace - Google Patents
A kind of crystal-cut device for zone melting furnace Download PDFInfo
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- CN203999899U CN203999899U CN201420438574.2U CN201420438574U CN203999899U CN 203999899 U CN203999899 U CN 203999899U CN 201420438574 U CN201420438574 U CN 201420438574U CN 203999899 U CN203999899 U CN 203999899U
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- support chip
- crystal
- motor
- melting furnace
- support
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Abstract
The utility model is created provides a kind of crystal-cut device for zone melting furnace, comprise cutting unit and clamping device, cutting unit comprises cutting blade, pneumatic motor, mechanical arm and motor, and clamping device comprises clamp body, holding piece, tail rod, support chip support, clamper pallet, support chip and orienting lug.After single crystal growing failure, use cutting blade to block the thin neck cutting of crystal, and the conehead blocking is collected, cancelled the process of tearing stove, shove charge open, realize and do not tear stove, crystal pulling again open.Clamping device is improved, make the tail rod can full stroke lifting and holding piece can landing, and guarantee that holding piece angle immobilizes.Cutting unit can be hidden in furnace wall when stopping using, and effectively avoids the impact of thermal radiation on device internal structure.Utilize semi-annular shape plate as to cutting the collection of rear conehead, to prevent that it from dropping, affect the transmission of lower shaft, also reached provide protection, and can be to conehead second stage employ.
Description
Technical field
The invention relates to semiconductor material preparing technical field, discloses a kind of crystal-cut device for zone melting furnace.
Background technology
In existing zone melting furnace crystal pulling production technique, if produce dislocation in crystal pulling process, can cause crystal to be grown unsuccessfully (being called disconnected rib and disconnected bud), now need operator to tear stove open, the conehead that produces dislocation is taken out, and zone melting furnace is carried out could again carrying out crystal-pulling after prepurging.Each manipulation require is through tearing stove---conehead taking-up---shove charge---crystal pulling open.Such production technique has been wasted a large amount of man-hours, and after tearing stove open needs the shielding gas argon gas in body of heater to discharge at every turn, when then shove charge, pulling monocrystal, again in body of heater, be full of shielding gas argon gas, causes the serious waste of argon gas.For example, when actual production; if average every disconnected bag of equipment disconnected rib every day 4 times; each dismounting stove needs spended time 30min; monthly every equipment dismounting stove time that this kind of situation causes is approximately 3600min (8.33% while accounting for chief engineer); consume shielding gas argon gas 7100L more, caused the serious waste of production hour and cost.
Summary of the invention
The problem that the invention will solve is not affect under brilliant prerequisite, zone melting furnace furnace binding is optimized to transformation, increase the devices such as mechanical arm, cutting blade, reach and do not tear stove open and just conehead can be taken, continue away crystal pulling, saving man-hour, the object reducing costs.
For solving the problems of the technologies described above, the technical scheme that the invention adopts is: a kind of crystal-cut device for zone melting furnace, comprise zone melting furnace body, cutting unit and clamping device, described zone melting furnace body comprises furnace wall and internal cavity, described cutting unit and clamping device are all arranged in described internal cavity
Described cutting unit comprises cutting blade, pneumatic motor, mechanical arm and motor, described pneumatic motor is connected with described cutting blade, the rotation of drive cutting blade, described pneumatic motor is connected with one end of mechanical arm, described motor is connected with the other end of described mechanical arm, drive described mechanical arm to move forwards, backwards along motor shaft, described motor is positioned on furnace wall, described clamping device comprises clamp body, clamper pallet, holding piece, tail rod, support chip support, support chip and orienting lug, described holding piece, tail rod, support chip support, support chip and orienting lug are several,
The end face of described clamper pallet is provided with described clamp body and some support chip supports, and it is peripheral that described some support chip supports are positioned at described clamp body,
Described clamp body upper side is provided with a loop projection, described circular protrusion is provided with some through holes, one end of described support chip penetrates the top of described support chip support, and described support chip is flexibly connected with the top of described support chip support, the other end of described support chip is provided with projection, described projection stretches into the head lower end of described tail rod, support described tail rod, the head side wall of described tail rod is provided with groove, described orienting lug is provided with protruding one end with described support chip and is connected, described orienting lug and described groove fit, and described orienting lug can slide in described groove, the afterbody of described tail rod penetrates the through hole on described circular protrusion from bottom to top, and be connected with described holding piece.
Further, on described furnace wall, be also provided with flange, in described internal cavity, be provided with lower shaft, described motor is connected with described flange, the bottom surface of described clamper pallet is connected with described lower shaft, and be synchronized with the movement with it, described support chip penetrates one end of described support chip support and one end of steel wire is connected, and the other end of described steel wire is connected to and is positioned at described internal cavity bottom and synchronizes with described lower shaft on the pallet rotating.
Further, also comprise two blocks of semi-circular shape plates, the splicing of described semi-circular shape plate forms annular disc, and by lower shaft and Steel Traveler, in centre, described annular disc is arranged in described internal cavity, and is positioned at described clamping device below.
Further, described pneumatic motor is piston type pneumatic motor.
Further, described flange footpath is greater than described furnace wall thickness deeply.
Further, described flange top is also provided with viewing window.
Further, described motor is stepper-motor.
Advantage and positively effect that the invention has are: a kind of crystal-cut device for zone melting furnace, after single crystal growing failure, use cutting blade to block the thin neck cutting of crystal, and the conehead blocking is collected, by original " tear stove open---conehead taking-up---shove charge---crystal pulling " process simplification be " cutting conehead---crystal pulling again ", cancelled the process of tearing stove, shove charge open, realized and do not tear stove, crystal pulling again open.On the other hand, clamping device is effectively improved, make the support chip can full stroke lifting and holding piece can landing, can guarantee that holding piece angle immobilizes when lifting simultaneously.In addition, cutting unit can be hidden in zone melting furnace furnace wall under stopping using state, can effectively avoid the impact of thermal radiation on device internal structure.Two blocks of semi-annular shape plates of splicing have mutually been installed in lower furnace chamber corresponding position, as to cutting the collection of rear conehead, to prevent that it from dropping, affect the transmission of lower shaft, have also reached provide protection.After crystal pulling finishes, plate is taken out, can collect the cut conehead in the inside, and be secondary use.
Accompanying drawing explanation
Fig. 1 is the invention perspective view;
Fig. 2 is cut state schematic diagram;
Fig. 3 is guide block structure schematic diagram.
In figure:
1, cutting blade 2, pneumatic motor 3, mechanical arm
4, motor 5, clamp body 6, holding piece
7, tail rod 8, support chip support 9, clamper pallet
10, support chip 11, orienting lug 12, steel wire
13, flange 14, lower shaft 15, semi-circular shape plate
16, screw rod 17, monocrystalline
Embodiment
As Figure 1-3, a kind of crystal-cut device for zone melting furnace, comprise zone melting furnace body, cutting unit and clamping device, described zone melting furnace body comprises furnace wall and internal cavity, described cutting unit and clamping device are all arranged in described internal cavity, cutting unit is fixed in body of heater internal cavity, and position is arranged in furnace chamber part (during crystal pulling, clamping device is positioned at furnace chamber) under equipment.When needs cut conehead, lower shaft 14 need to be moved to the position of mating cutting unit vertically downward.Therefore when cutting, cutting unit is positioned at clamping device top.
Described cutting unit comprises cutting blade 1, pneumatic motor 2, mechanical arm 3 and motor 4, described pneumatic motor 2 is connected with described cutting blade 1, drive cutting blade 1 rotation, described pneumatic motor 2 is connected with one end of mechanical arm 3, described motor 4 is connected with the other end of described mechanical arm 3, drive described mechanical arm 3 axially to move forward and backward along motor 4, described motor 4 is positioned on furnace wall, described clamping device comprises clamp body 5, clamper pallet 9, holding piece 6, tail rod 7, support chip support 8, support chip 10 and orienting lug 11, described holding piece 6, tail rod 7, support chip support 8, support chip 10 and orienting lug 11 are several, the end face of described clamper pallet 9 is provided with described clamp body 5 and some support chip supports 8, described some support chip supports 8 are positioned at described clamp body 5 peripheries, described clamp body 5 upper side are provided with a loop projection, described circular protrusion is provided with some through holes, one end of described support chip 10 penetrates the top of described support chip support 8, and described support chip 10 is flexibly connected with the top of described support chip support 8, the other end of described support chip 10 is provided with projection, described projection stretches into the head lower end of described tail rod 7, support described tail rod 7, the head side wall of described tail rod 7 is provided with groove, described orienting lug 11 is provided with protruding one end with described support chip 10 and is connected, described orienting lug 11 and described groove fit, and described orienting lug 11 can slide in described groove, the afterbody of described tail rod 7 penetrates the through hole on described circular protrusion from bottom to top, and be connected with described holding piece 6.
On described furnace wall, be also provided with flange 13, in described internal cavity, be provided with lower shaft 14, described motor 4 is connected with described flange 13, the bottom surface of described clamper pallet 9 is connected with described lower shaft 14, and be synchronized with the movement with it, one end that described support chip 10 penetrates described support chip support 8 is connected with one end of steel wire 12, and the other end of described steel wire 12 is connected to and is positioned at described internal cavity bottom and synchronizes with described lower shaft 14 on the pallet rotating.
Also comprise two blocks of semi-circular shape plates 15, described semi-circular shape plate 15 splicings form annular disc, and lower shaft 14 and steel wire 12 are enclosed in centre, and described annular disc is arranged in described internal cavity, and are positioned at described clamping device below.
Described pneumatic motor 2 is piston type pneumatic motor.
Described flange 13 footpaths are greater than described furnace wall thickness deeply.
Described flange 13 tops are also provided with viewing window.
Described motor 4 is stepper-motor.
After monocrystalline 17 is grown unsuccessfully, use the thin neck cutting of 1 pair of crystal of cutting blade to block, and the conehead blocking is collected, by original " tear stove open---conehead taking-up---shove charge---crystal pulling " process simplification be " cutting conehead---crystal pulling again ", cancelled the process of tearing stove, shove charge open, realized and do not tear stove, crystal pulling again open.Cutting working process is:
(1) while there is disconnected rib, disconnected bag in expanding shoulder, by lower shaft 14 fast-descendings to corresponding position;
(2) open pneumatic motor 2 valves, make cutting blade 1 rotation (output speed 2000 ?2500rpm);
(3) press stepper-motor 4 and stretch out button, stepper-motor 4 driving mechanical arms 3 and the pneumatic motor 2 that install at lower furnace chamber flange 13 places move forward and backward, and make mechanical arm 3 be moved to thin neck place, and pneumatic motor 2 drives cutting blade 1 rotation, thin neck is cut, complete the conehead process of cutting off;
(4) press stepper-motor 4 and return button, mechanical arm 3 is return;
(5) due to the restorability of clamping device, lower shaft 14 is rapidly increased to corresponding position and continue crystal pulling.
After conehead is cut, need to do corresponding collection to conehead.Two blocks of semi-annular shape plates 15 of splicing have mutually been installed in the invention smelting furnace corresponding position under zone melting furnace, as to cutting the collection of rear conehead, to prevent that it from dropping, affect the transmission of lower shaft 14, have also reached a kind of provide protection.After crystal pulling finishes, annular disc is taken out, can collect the cut conehead in the inside, and be secondary use.
The invention on the other hand, is that clamping device has been carried out to effective improvement.Old type clamper, support chip support 8 is connected on clamper pallet 9, clamper pallet 9 is connected with lower shaft 14, and be synchronized with the movement with it, one end of support chip 10 and tail rod 7 head bottom surface clampings, support chip 10 middle parts are used screw rod 16 that support chip 10 is penetrated and is arranged on support chip support 8, can rotate around support chip support 8, support chip 10 rear ends connect steel wire 12, and the other end of steel wire 12 is connected to and is positioned at internal cavity bottom and synchronizes with lower shaft 14 on the pallet rotating.When lower shaft 14 rises to upper limit, steel wire 12 is tightened, support chip 10 and one end of tail rod 7 clampings are raised up, support chip 10 drives tail rod 7 also to raise up under the state of circular protrusion that penetrates clamp body 5 upper ends simultaneously, until support chip 10 holds out against the bottom surface of circular protrusion, tail rod 7 heads are positioned at through hole, and afterbody is in the upper limit position state with respect to circular protrusion, and now the end of support chip 10 holds out against tail rod 7 head bottom surfaces.When needs discharge clamper, lower shaft 14 starts to move downward, make steel wire 12 lax gradually from tensioned state, support chip 10 be take studdle 16 as axle down sliding at a slow speed, make support chip 10 sagging with one end of tail rod 7 clampings, due to support chip 10 sagging before, only by its end, hold out against tail rod 7 head bottom surfaces, therefore along with after the sagging segment distance of support chip 10, the end of support chip 10 can be extracted out from tail rod 7 head bottom surfaces, and then cause tail rod 7 to lose anchorage force and freely glide, until holding piece 6 drops on the circular protrusion of clamp body 5 upper side, under the supporting role of the circular protrusion of clamp body 5 upper side, tail rod 7 stops gliding, be now that tail rod 7 is with respect to the lower position state of circular protrusion, now holding piece 6 is clamped monocrystalline.Because support chip 10 has departed from the head bottom surface of tail rod 7, cannot recover the supporting role to tail rod 7, to the uplink state of tail rod 7, cannot automatically recover.
The invention arranges projection in support chip 10 one end, and projection stretches into tail rod 7 head lower ends, for support guide bar 7.The head side wall of tail rod 7 is provided with groove, and sheet orienting lug 11 is positioned at support chip 10 and is provided with protruding one end, and orienting lug 11 matches with groove, and orienting lug 11 can slide in groove.Orienting lug 11 not only can prevent that tail rod 7 from causing the problem that clamps monocrystalline 17 shakinesses in downslide process owing to rolling.In addition, owing to adding orienting lug 11, in the time of need to discharging clamper, lower shaft 14 starts to move downward, make steel wire 12 lax gradually from tensioned state, support chip 10 be take studdle 16 as axle slow rotation, make support chip 10 sagging with one end of tail rod 7 clampings, due to support chip 10 sagging before, the projection only arranging by its end holds out against tail rod 7 head bottom surfaces, therefore along with after the sagging segment distance of support chip 10, there will be projection to skid off tail rod 7 head bottom surfaces, and then make tail rod 7 lose supporting role, and freely glide.But because the design of orienting lug 11 is used, orienting lug 11 is stuck in the groove of tail rod 7 head side wall, therefore under the clamping effect of orienting lug 11, make support chip 10 never depart from tail rod 7, therefore tail rod 7 can be subject to anchorage force always, and then avoided tail rod 7 freely to glide owing to losing supporting role, until lowermost end.Therefore the design of sheet orienting lug 11 is used, the position that can make tail rod 7 full stroke liftings and can guarantee holding piece 6 can landing between buck stay and clamping angle can not change.In the time of need to recovering position, lower shaft 14 is risen.Why will guarantee the invariant position of holding piece 6, be to be provided with imploded arcs v notch v because holding piece 6 closes on the direction of monocrystalline 17, and the angle of breach (position) is to need assurance relative with monocrystalline 17 centers.If there is no the orienting lug 11 adding after the invention transformation, be easy to make the angle (position) of holding piece 6 to change when again rising.The orienting lug 11 that support chip 10 can arrange by end stretches in the circular protrusion hole of clamp body 5 upper ends, guarantees to move up and down all recoverable states of total travel; Meanwhile, between support chip 10 and tail rod 7, there is sheet orienting lug 11, can guarantee that the angle of holding piece 6 immobilizes when lifting.
Flange 13 is arranged under zone melting furnace on furnace chamber furnace wall, the invention is done flange 13 holes to do greatly and is grown and exceed body of heater, object is for cutting unit is ensconced in furnace wall, and in corresponding position, viewing window is installed, and can effectively avoid like this impact of thermal radiation on device internal structure.
Above the embodiment of the invention is had been described in detail, but described content is only the preferred embodiment of the invention, can not be considered to for limiting practical range of the present invention.All equalization variations of doing according to the invention scope and improvement etc., within all should still belonging to this patent covering scope.
Claims (7)
1. for a crystal-cut device for zone melting furnace, it is characterized in that: comprise zone melting furnace body, cutting unit and clamping device, described zone melting furnace body comprises furnace wall and internal cavity, and described cutting unit and clamping device are all arranged in described internal cavity,
Described cutting unit comprises cutting blade (1), pneumatic motor (2), mechanical arm (3) and motor (4), described pneumatic motor (2) is connected with described cutting blade (1), drive cutting blade (1) rotation, described pneumatic motor (2) is connected with one end of mechanical arm (3), described motor (4) is connected with the other end of described mechanical arm (3), drive described mechanical arm (3) axially to move forward and backward along motor (4), described motor (4) is positioned on furnace wall, described clamping device comprises clamp body (5), clamper pallet (9), holding piece (6), tail rod (7), support chip support (8), support chip (10) and orienting lug (11), described holding piece (6), tail rod (7), support chip support (8), support chip (10) and orienting lug (11) are several,
The end face of described clamper pallet (9) is provided with described clamp body (5) and some support chip supports (8), described some support chip supports (8) are positioned at described clamp body (5) periphery, described clamp body (5) upper side is provided with a loop projection, described circular protrusion is provided with some through holes, one end of described support chip (10) penetrates the top of described support chip support (8), and described support chip (10) is flexibly connected with the top of described support chip support (8), the other end of described support chip (10) is provided with projection, described projection stretches into the head lower end of described tail rod (7), support described tail rod (7), the head side wall of described tail rod (7) is provided with groove, described orienting lug (11) is provided with protruding one end with described support chip (10) and is connected, described orienting lug (11) and described groove fit, and described orienting lug (11) can slide in described groove, the afterbody of described tail rod (7) penetrates the through hole on described circular protrusion from bottom to top, and be connected with described holding piece (6).
2. a kind of crystal-cut device for zone melting furnace according to claim 1, it is characterized in that: on described furnace wall, be also provided with flange (13), in described internal cavity, be provided with lower shaft (14), described motor (4) is connected with described flange (13), the bottom surface of described clamper pallet (9) is connected with described lower shaft (14), and be synchronized with the movement with it, one end that described support chip (10) penetrates described support chip support (8) is connected with one end of steel wire (12), the other end of described steel wire (12) is connected to and is positioned at described internal cavity bottom and synchronizes with described lower shaft (14) on the pallet rotating.
3. a kind of crystal-cut device for zone melting furnace according to claim 2, it is characterized in that: also comprise two blocks of semi-circular shape plates (15), described semi-circular shape plate (15) splicing forms annular disc, lower shaft (14) and steel wire (12) are enclosed in centre, described annular disc is arranged in described internal cavity, and is positioned at described clamping device below.
4. a kind of crystal-cut device for zone melting furnace according to claim 1, is characterized in that: described pneumatic motor (2) is piston type pneumatic motor.
5. a kind of crystal-cut device for zone melting furnace according to claim 2, is characterized in that: described flange (13) footpath is greater than described furnace wall thickness deeply.
6. a kind of crystal-cut device for zone melting furnace according to claim 2, is characterized in that: described flange (13) top is also provided with viewing window.
7. a kind of crystal-cut device for zone melting furnace according to claim 1, is characterized in that: described motor (4) is stepper-motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420438574.2U CN203999899U (en) | 2014-08-06 | 2014-08-06 | A kind of crystal-cut device for zone melting furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420438574.2U CN203999899U (en) | 2014-08-06 | 2014-08-06 | A kind of crystal-cut device for zone melting furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203999899U true CN203999899U (en) | 2014-12-10 |
Family
ID=52039927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420438574.2U Withdrawn - After Issue CN203999899U (en) | 2014-08-06 | 2014-08-06 | A kind of crystal-cut device for zone melting furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203999899U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104178804A (en) * | 2014-08-06 | 2014-12-03 | 天津市环欧半导体材料技术有限公司 | Crystal cutting device for zone melting furnace |
| CN105835246A (en) * | 2016-05-14 | 2016-08-10 | 洛阳金诺机械工程有限公司 | Cutting device for crystalline silicon bar and cutting method for cutting device |
-
2014
- 2014-08-06 CN CN201420438574.2U patent/CN203999899U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104178804A (en) * | 2014-08-06 | 2014-12-03 | 天津市环欧半导体材料技术有限公司 | Crystal cutting device for zone melting furnace |
| CN104178804B (en) * | 2014-08-06 | 2017-05-24 | 天津市环欧半导体材料技术有限公司 | Crystal cutting device for zone melting furnace |
| CN105835246A (en) * | 2016-05-14 | 2016-08-10 | 洛阳金诺机械工程有限公司 | Cutting device for crystalline silicon bar and cutting method for cutting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20141210 Effective date of abandoning: 20170524 |