CN104178804B - Crystal cutting device for zone melting furnace - Google Patents
Crystal cutting device for zone melting furnace Download PDFInfo
- Publication number
- CN104178804B CN104178804B CN201410381805.5A CN201410381805A CN104178804B CN 104178804 B CN104178804 B CN 104178804B CN 201410381805 A CN201410381805 A CN 201410381805A CN 104178804 B CN104178804 B CN 104178804B
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- motor
- melting furnace
- zone melting
- crystal
- support chip
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- 238000005520 cutting process Methods 0.000 title claims abstract description 33
- 238000004857 zone melting Methods 0.000 title claims abstract description 26
- 239000013078 crystal Substances 0.000 title abstract description 23
- 229910000831 Steel Inorganic materials 0.000 claims description 15
- 239000010959 steel Substances 0.000 claims description 15
- 230000001360 synchronised effect Effects 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 3
- 241001149930 Protura <class> Species 0.000 abstract description 21
- 238000000034 method Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 6
- 230000007246 mechanism Effects 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 2
- 230000005855 radiation Effects 0.000 abstract description 2
- 210000003739 neck Anatomy 0.000 abstract 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 238000007665 sagging Methods 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 206010016165 failure to thrive Diseases 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000003723 Smelting Methods 0.000 description 1
- 206010044565 Tremor Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention creatively provides a crystal cutting device for a zone melting furnace. The crystal cutting device comprises a cutting device and a clamping mechanism, wherein the cutting device comprises a cutting blade, a pneumatic motor, a mechanical arm and a motor; the clamping mechanism comprises a clamper main body, a clamping piece, a guide rod, a supporting piece bracket, a clamper tray, a supporting piece and a guide block. After failure of single crystal growth, fine necks of crystals are cut off by using the cutting blade, cut cone heads are collected, furnace dismounting and mounting processes are cancelled, and the purposes of not dismounting a furnace and re-pulling the crystals are achieved; the clamping mechanism is improved, so that the guide rod can be lifted in a full-travel manner, the clamping piece cannot slide down, and the angle of the clamping piece is kept unchanged; the cutting device can be hidden in a furnace wall when being out of service, so that the influence of thermal radiation on the internal structure of the device is effectively avoided; a semi-annular plate is utilized for collecting the cut cone heads and preventing the influence of falling of the cut cone heads on a lower shaft, and also achieves a protection effect, and the cone heads can be reutilized.
Description
Technical field
The invention is related to technical field of semiconductor material preparation, discloses a kind of crystal-cut dress for zone melting furnace
Put.
Background technology
In existing zone melting furnace crystal pulling production technology, if producing dislocation during crystal pulling, crystal growth can be caused
Failure (referred to as break rib and disconnected bud), now needs operating personnel to carry out tearing stove open, and the conehead of dislocation will be produced to take out, and to zone melting furnace
Crystal-pulling could be again carried out after carrying out prepurging.Operation every time is needed by tearing stove --- conehead taking-up --- shove charge --- drawing open
It is brilliant.Such production technology wastes a large amount of man-hours, and needs to discharge the protective gas argon gas in body of heater after tearing stove open every time, so
Afterwards when shove charge, pulling monocrystal, the serious waste of argon gas is caused again to protective gas argon gas is full of in body of heater.For example in reality
When border produces, if average every equipment is broken daily, rib is disconnected wraps 4 times, and dismounting stove need to spend time 30min every time, then this kind of situation
Caused monthly every equipment dismounting stove time is about 3600min (accounting for 8.33% during chief engineer), consumes protective gas argon more
Gas 7100L, causes the serious waste of production hour and cost.
The content of the invention
The invention problem to be solved is on the premise of crystalline substance is not influenceed into, zone melting furnace furnace binding to be optimized
Transformation, increases mechanical arm, the device such as cutting sheet, reaches and do not tear open stove and can just take conehead away, continue crystal pulling, saves man-hour, reduction
The purpose of cost.
In order to solve the above technical problems, the technical scheme that the invention is used is：A kind of crystal for zone melting furnace is cut
Device, including zone melting furnace body, cutter sweep and clamping device are cut, the zone melting furnace body includes furnace wall and internal cavity, institute
State cutter sweep and clamping device be respectively positioned in the internal cavity,
The cutter sweep includes cutting sheet, air motor, mechanical arm and motor, the air motor and the cutting sheet
Connection, drives cutting sheet rotation, and the air motor is connected with one end of mechanical arm, and the motor is another with the mechanical arm
End connection, drives the mechanical arm to be moved axially back and forth along motor, and the motor is located on furnace wall, and the clamping device includes folder
Holder main body, clamper pallet, holding piece, guide post, support plate rack, support chip and guide pad, the holding piece, guiding
Bar, support plate rack, support chip and guide pad are several,
The top surface of the clamper pallet is provided with the clamp body and some support plate racks, some support chips
Support is located at clamp body periphery,
The clamp body upper side is provided with a loop projection, and the circular protrusion is provided with some through holes,
One end of the support chip penetrates the top of the support plate rack, and the support chip is lived with the top of the support plate rack
Dynamic connection, the other end of the support chip is provided with projection, and the projection stretches into the head lower end of the guide post, is led described in support
To bar, the head side wall of the guide post is provided with groove, and one end that the guide pad is provided with projection with the support chip is connected, institute
State guide pad and the groove fit, and the guide pad can be slided in the groove, the afterbody of the guide post from it is lower to
On penetrate through hole on the circular protrusion, and be connected with the holding piece.
Further, flange is additionally provided with the furnace wall, lower axle, the motor and the flange is provided with the internal cavity
Connection, the bottom surface of the clamper pallet is connected with the lower axle, and is synchronized with the movement with it, and the support chip penetrates the support
One end of plate rack is connected with one end of steel wire, the other end of the steel wire be connected to positioned at the internal cavity bottom and with institute
State on the pallet of lower axle synchronous axial system.
Further, also including two blocks of semi-circular shape plates, the semi-circular shape plate splicing composition annular disk, by lower axle and steel wire
In centre, the annular disk is located in the internal cavity circle, and positioned at clamping device lower section.
Further, the air motor is piston type pneumatic motor.
Further, the flange footpath is more than the furnace wall thickness deeply.
Further, the flange top is additionally provided with observation window.
Further, the motor is stepper motor.
The invention has the advantages and positive effects that：A kind of crystal-cut device for zone melting furnace, in monocrystalline
After growth failure, cutting is carried out to the thin neck of crystal using cutting sheet and is blocked, and the conehead that will be blocked is collected, will be original
" tear stove open --- conehead taking-up --- shove charge --- crystal pulling " process simplification be " cutting conehead --- crystal pulling again ", eliminate and tear open
Stove, again crystal pulling are not torn in stove, the process of shove charge, realization open.On the other hand, clamping device is efficiently modified, enables support chip
Enough full strokes are lifted and holding piece does not fall off, while ensure that holding piece angle immobilizes in lifting.In addition,
Cutter sweep can be effectively prevented from heat radiation to device internal structure in it can be hidden in zone melting furnace furnace wall under stopping using state
Influence.Lower furnace chamber relevant position is mounted with two blocks of semi-annular shape plates of splicing mutually, as the collection to conehead after cutting, with
The transmission of its influence lower axle that drops is prevented, protective effect has also been reached.Plate is taken out after crystal pulling terminates, the inside quilt can be collected
The conehead of cutting, and be secondary use.
Brief description of the drawings
Fig. 1 is the invention dimensional structure diagram；
Fig. 2 is cut state schematic diagram；
Fig. 3 is guide block structure schematic diagram.
In figure：
1st, cutting sheet 2, air motor 3, mechanical arm
4th, motor 5, clamp body 6, holding piece
7th, guide post 8, support plate rack 9, clamper pallet
10th, support chip 11, guide pad 12, steel wire
13rd, flange 14, lower axle 15, semi-circular shape plate
16th, screw rod 17, monocrystalline
Specific embodiment
As Figure 1-3, a kind of crystal-cut device for zone melting furnace, including zone melting furnace body, cutter sweep and folder
Mechanism is held, the zone melting furnace body includes furnace wall and internal cavity, and the cutter sweep and clamping device are respectively positioned on the inside
In cavity, cutter sweep is fixed in furnace interior cavity, and positioned at furnace chamber part under equipment, (clamping device is located at during crystal pulling for position
Middle furnace chamber).When needing to cut conehead, it is necessary to lower axle 14 is moved vertically downward to match the position of cutter sweep.
Therefore in cutting, cutter sweep is located at clamping device top.
The cutter sweep include cutting sheet 1, air motor 2, mechanical arm 3 and motor 4, the air motor 2 with it is described
Cutting sheet 1 is connected, drive cutting sheet 1 rotate, the air motor 2 is connected with one end of mechanical arm 3, the motor 4 with it is described
The other end connection of mechanical arm 3, drives the mechanical arm 3 to be moved axially back and forth along motor 4, and the motor 4 is located on furnace wall, institute
Stating clamping device includes clamp body 5, clamper pallet 9, holding piece 6, guide post 7, support plate rack 8, the and of support chip 10
Guide pad 11, the holding piece 6, guide post 7, support plate rack 8, support chip 10 and guide pad 11 are several, the clamping
The top surface of device pallet 9 is provided with the clamp body 5 and some support plate racks 8, and some support plate racks 8 are located at described
The periphery of clamp body 5, the upper side of the clamp body 5 is provided with a loop projection, if the circular protrusion is provided with
Dry through hole, one end of the support chip 10 penetrates the top of the support plate rack 8, and the support chip 10 and the support
The top of plate rack 8 is flexibly connected, and the other end of the support chip 10 is provided with projection, and the projection stretches into the guide post 7
Head lower end, supports the guide post 7, and the head side wall of the guide post 7 is provided with groove, the guide pad 11 and the support
One end that piece 10 is provided with projection is connected, the guide pad 11 and the groove fit, and the guide pad 11 can be in the groove
Interior slip, the afterbody of the guide post 7 penetrates the through hole on the circular protrusion from bottom to top, and connects with the holding piece 6
Connect.
Flange 13 is additionally provided with the furnace wall, lower axle 14, the motor 4 and the flange 13 are provided with the internal cavity
Connection, the bottom surface of the clamper pallet 9 is connected with the lower axle 14, and is synchronized with the movement with it, and the support chip 10 penetrates institute
The one end for stating support plate rack 8 is connected with one end of steel wire 12, and the other end of the steel wire 12 is connected to positioned at the inner chamber
Body bottom and with the pallet of the synchronous axial system of the lower axle 14 on.
Also include two blocks of semi-circular shape plates 15, the splicing of the semi-circular shape plate 15 composition annular disk, by lower axle 14 and steel wire
In centre, the annular disk is located in the internal cavity 12 circles, and positioned at clamping device lower section.
The air motor 2 is piston type pneumatic motor.
The footpath of the flange 13 is more than the furnace wall thickness deeply.
The top of the flange 13 is additionally provided with observation window.
The motor 4 is stepper motor.
After the growth failure of monocrystalline 17, cutting is carried out to the thin neck of crystal using cutting sheet 1 and is blocked, and the conehead that will be blocked enters
Row is collected, by it is original " tear stove open --- conehead taking-ups --- shove charge --- crystal pulling " process simplification for " cutting conehead --- it is heavy
New crystal pulling ", eliminates the process for tearing stove, shove charge open, and stove, again crystal pulling are not torn in realization open.Cutting the course of work is：
(1) when the disconnected rib of generation in shoulder, disconnected bag is expanded, lower axle 14 is dropped quickly into relevant position；
(2) valve of air motor 2 is opened, cutting sheet 1 is rotated (output speed is in 2000-2500rpm)；
(3) press stepper motor 4 and stretch out button, the driving mechanical arm 3 of stepper motor 4 installed at lower furnace chamber flange 13 is gentle
Dynamic motor 2 is moved forward and backward, and mechanical arm 3 is moved at thin neck, and air motor 2 drives cutting sheet 1 to rotate, and thin neck is cut
Cut, complete cut-out conehead process；
(4) press stepper motor 4 and return button, return mechanical arm 3；
(5) due to the restorability of clamping device, lower axle 14 is rapidly increased into relevant position and continues crystal pulling.
, it is necessary to do corresponding collection to conehead after being cut to conehead.The invention smelting furnace phase under zone melting furnace
Position is answered to be mounted with two blocks of semi-annular shape plates 15 for splicing mutually, as the collection to conehead after cutting, to prevent its shadow that drops
The transmission of lower axle 14 is rung, a kind of protective effect has also been reached.Annular disk is taken out after crystal pulling terminates, the inside can be collected and cut
The conehead for cutting, and be secondary use.
The another aspect of the invention, is that clamping device is efficiently modified.Legacy clamper, supports plate rack
8 are connected on clamper pallet 9, and clamper pallet 9 is connected with lower axle 14, and is synchronized with the movement with it, one end of support chip 10 with
The head bottom surface clamping of guide post 7, the middle part of support chip 10 is penetrated on support plate rack 8 support chip 10 using screw rod 16,
Can be rotated around support plate rack 8, the rear end of support chip 10 connection steel wire 12, the other end of steel wire 12 is connected to internally positioned
Cavity bottom and with the pallet of the synchronous axial system of lower axle 14 on.When lower axle 14 rises to upper limit, steel wire 12 is tightened, and makes support chip
10 raise up with one end of the clamping of guide post 7, while support chip 10 drives guide post 7 penetrating the ring-type of the upper end of clamp body 5
Also raised up in the state of projection, until support chip 10 holds out against the bottom surface of circular protrusion, the head of guide post 7 is located in through hole, tail
Portion is in the most upper limit position state relative to circular protrusion, and now the end of support chip 10 holds out against the head bottom surface of guide post 7.When
When needing release clamper, lower axle 14 starts to move downward, and steel wire 12 is gradually relaxed from tensioned state, and support chip 10 is with support
Screw rod 16 is axle slide downward at a slow speed, makes support chip 10 sagging with one end of the clamping of guide post 7, due to support chip 10 it is sagging before,
The head bottom surface of guide post 7 is only held out against by its end, thus with the sagging segment distance of support chip 10 after, the end of support chip 10
Can be extracted out from the head bottom surface of guide post 7, in turn result in guide post 7 and lose support force and freely glide, until holding piece 6 falls in folder
On the circular protrusion of the upper side of holder main body 5, under the supporting role of the circular protrusion of the upper side of clamp body 5, lead
Stopped gliding to bar 7, now the most lower position state for guide post 7 relative to circular protrusion, now holding piece 6 clamps list
It is brilliant.The head bottom surface of guide post 7 is had been detached from due to support chip 10, it is impossible to recover the supporting role to guide post 7, i.e., to being oriented to
The uplink state of bar 7 cannot recover automatically.
The invention sets raised in the one end of support chip 10, and projection stretches into the head lower end of guide post 7, for support guide
Bar 7.The head side wall of guide post 7 is provided with groove, and sheet guide pad 11 is located at one end that support chip 10 is provided with projection, guide pad 11
Can be slided in groove with fit depressions, and guide pad 11.Guide pad 11 can not only prevent guide post 7 during downslide
The problem of the shakiness of monocrystalline 17 is clamped due to rolling with causing.In addition, due to adding guide pad 11, it is necessary to discharge folder
During holder, lower axle 14 starts to move downward, and steel wire 12 is gradually relaxed from tensioned state, and support chip 10 is with studdle 16 as axle
Slow rotation, makes support chip 10 sagging with one end of the clamping of guide post 7, due to support chip 10 it is sagging before, only set by its end
The projection put holds out against the head bottom surface of guide post 7, thus with the sagging segment distance of support chip 10 after, it may appear that projection skids off guiding
The head bottom surface of bar 7, and then guide post 7 is lost supporting role, and freely glide.But because the design of guide pad 11 is used,
Guide pad 11 is stuck in the groove of the head side wall of guide post 7, therefore under the clamping effect of guide pad 11, makes support chip 10 always
Without departing from guide post 7, therefore guide post 7 can be supported power always, and then avoid guide post 7 due to losing supporting role
And freely glide, until lowermost end.Therefore the design of sheet guide pad 11 is used, and the full stroke of guide post 7 can be made to lift and energy
The position of guarantee holding piece 6 is not fallen off during lifting and claming angle will not change.Under needing to recover to be incited somebody to action during position
Axle 14 rises.Why to ensure that the position of holding piece 6 is constant, because the direction that holding piece 6 closes on monocrystalline 17 is provided with
Indent arc notch, and the angle (position) of breach be the need to ensure that it is relative with the center of monocrystalline 17.If created without the present invention
Make the guide pad 11 added after transformation, it is easy to the angle (position) of holding piece 6 is changed when rising again.Support chip
10 guide pads 11 that can be set by end are stretched into the circular protrusion hole of the upper end of clamp body 5, it is ensured that move up and down full row
The recoverable states of Cheng Jun；Meanwhile, there is sheet guide pad 11 between support chip 10 and guide post 7, ensure that the angle of holding piece 6
Degree immobilizes in lifting.
Flange 13 on furnace chamber furnace wall under zone melting furnace, done and do greatly length and beyond stove by the invention by the hole of flange 13
Body, in order to ensconce in furnace wall cutter sweep, and observation window is installed in relevant position, can so be effectively prevented from heat
Radiate the influence to device internal structure.
The embodiment to the invention has been described in detail above, but the content is only the preferable of the invention
Embodiment, it is impossible to be considered as limiting practical range of the invention.All impartial changes made according to the invention scope with
Improve etc., all should still belong within this patent covering scope.
Claims (7)
1. a kind of crystal-cut device for zone melting furnace, it is characterised in that：Including zone melting furnace body, cutter sweep and clamping machine
Structure, the zone melting furnace body includes furnace wall and internal cavity, and the cutter sweep and clamping device are respectively positioned on the internal cavity
In,
The cutter sweep includes cutting sheet (1), air motor (2), mechanical arm (3) and motor (4), the air motor (2)
It is connected with the cutting sheet (1), drives cutting sheet (1) rotation, the air motor (2) is connected with one end of mechanical arm (3), institute
State motor (4) to be connected with the other end of the mechanical arm (3), drive the mechanical arm (3) to be moved axially back and forth along motor (4),
The motor (4) on furnace wall, the clamping device include clamp body (5), clamper pallet (9), holding piece (6),
Guide post (7), support plate rack (8), support chip (10) and guide pad (11), the holding piece (6), guide post (7), support chip
Support (8), support chip (10) and guide pad (11) are several,
The top surface of the clamper pallet (9) is provided with the clamp body (5) and some supports plate rack (8), described some
Support plate rack (8) is provided with a loop positioned at the clamp body (5) periphery, clamp body (5) upper side
Projection, the circular protrusion is provided with some through holes, and one end of the support chip (10) penetrates support plate rack (8)
Top, and the support chip (10) with it is described support plate rack (8) top be flexibly connected, the other end of the support chip (10)
Projection is provided with, the projection stretches into the head lower end of the guide post (7), supports the guide post (7), the guide post (7)
Head side wall be provided with groove, one end that the guide pad (11) is provided with projection with the support chip (10) is connected, the guiding
Block (11) and the groove fit, and the guide pad (11) can slide in the groove, the afterbody of the guide post (7) from
Under upwardly penetrate through through hole on the circular protrusion, and be connected with the holding piece (6).
2. a kind of crystal-cut device for zone melting furnace according to claim 1, it is characterised in that：On the furnace wall also
Flange (13) is provided with, lower axle (14) is provided with the internal cavity, the motor (4) is connected with the flange (13), the folder
The bottom surface of holder pallet (9) is connected with the lower axle (14), and is synchronized with the movement with it, and the support chip (10) penetrates the support
One end of plate rack (8) is connected with one end of steel wire (12), and the other end of the steel wire (12) is connected to positioned at the inner chamber
Body bottom and with the pallet of the lower axle (14) synchronous axial system on.
3. a kind of crystal-cut device for zone melting furnace according to claim 2, it is characterised in that：Also include two and half
Toroidal plate (15), semi-circular shape plate (15) the splicing composition annular disk, by lower axle (14) and steel wire (12) circle in centre, institute
Annular disk is stated in the internal cavity, and positioned at clamping device lower section.
4. a kind of crystal-cut device for zone melting furnace according to claim 1, it is characterised in that：The air motor
(2) it is piston type pneumatic motor.
5. a kind of crystal-cut device for zone melting furnace according to claim 2, it is characterised in that：The flange (13)
Footpath is more than the furnace wall thickness deeply.
6. a kind of crystal-cut device for zone melting furnace according to claim 2, it is characterised in that：The flange (13)
Top is additionally provided with observation window.
7. a kind of crystal-cut device for zone melting furnace according to claim 1, it is characterised in that：The motor (4)
It is stepper motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410381805.5A CN104178804B (en) | 2014-08-06 | 2014-08-06 | Crystal cutting device for zone melting furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410381805.5A CN104178804B (en) | 2014-08-06 | 2014-08-06 | Crystal cutting device for zone melting furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104178804A CN104178804A (en) | 2014-12-03 |
| CN104178804B true CN104178804B (en) | 2017-05-24 |
Family
ID=51960137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410381805.5A Active CN104178804B (en) | 2014-08-06 | 2014-08-06 | Crystal cutting device for zone melting furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104178804B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108486646B (en) * | 2018-05-25 | 2023-08-04 | 天津中环领先材料技术有限公司 | Zone-melting monocrystal small head cutting device and device for improving cutting efficiency |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202492611U (en) * | 2012-02-08 | 2012-10-17 | 浙江晶盛机电股份有限公司 | Holding device for single crystals for zone melting furnace |
| CN202658261U (en) * | 2012-05-23 | 2013-01-09 | 刘剑 | Novel single crystal bar clamping mechanism for zone melting furnace |
| CN102943302A (en) * | 2012-10-24 | 2013-02-27 | 北京京运通科技股份有限公司 | Crystal clamping apparatus and zone melting single crystal furnace |
| CN103451718A (en) * | 2013-09-05 | 2013-12-18 | 浙江晶盛机电股份有限公司 | Zone melting furnace device capable of continuous production and process control method thereof |
| CN203999899U (en) * | 2014-08-06 | 2014-12-10 | 天津市环欧半导体材料技术有限公司 | A kind of crystal-cut device for zone melting furnace |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH075428B2 (en) * | 1986-04-15 | 1995-01-25 | 九州電子金属株式会社 | Single crystal manufacturing method and apparatus |
-
2014
- 2014-08-06 CN CN201410381805.5A patent/CN104178804B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202492611U (en) * | 2012-02-08 | 2012-10-17 | 浙江晶盛机电股份有限公司 | Holding device for single crystals for zone melting furnace |
| CN202658261U (en) * | 2012-05-23 | 2013-01-09 | 刘剑 | Novel single crystal bar clamping mechanism for zone melting furnace |
| CN102943302A (en) * | 2012-10-24 | 2013-02-27 | 北京京运通科技股份有限公司 | Crystal clamping apparatus and zone melting single crystal furnace |
| CN103451718A (en) * | 2013-09-05 | 2013-12-18 | 浙江晶盛机电股份有限公司 | Zone melting furnace device capable of continuous production and process control method thereof |
| CN203999899U (en) * | 2014-08-06 | 2014-12-10 | 天津市环欧半导体材料技术有限公司 | A kind of crystal-cut device for zone melting furnace |
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| CN104178804A (en) | 2014-12-03 |
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