CN108486646B - Zone-melting monocrystal small head cutting device and device for improving cutting efficiency - Google Patents

Zone-melting monocrystal small head cutting device and device for improving cutting efficiency Download PDF

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Publication number
CN108486646B
CN108486646B CN201810517849.4A CN201810517849A CN108486646B CN 108486646 B CN108486646 B CN 108486646B CN 201810517849 A CN201810517849 A CN 201810517849A CN 108486646 B CN108486646 B CN 108486646B
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China
Prior art keywords
tool rest
blade
fixed shaft
zone
central fixed
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CN201810517849.4A
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CN108486646A (en
Inventor
李伟凡
涂颂昊
郝大维
边智学
刘愿
郭宝川
王遵义
孙晨光
王彦君
孙健
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Zhonghuan Leading Semiconductor Technology Co ltd
Tianjin Zhonghuan Advanced Material Technology Co Ltd
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Tianjin Zhonghuan Advanced Material Technology Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting

Abstract

The invention provides a zone-melting monocrystal small head cutting device and a device for improving cutting efficiency, which comprise a central fixed shaft, an impact rod, an elastic device and a cutter rest mechanism capable of moving forwards and backwards; the front end of the tool rest mechanism is provided with a blade mechanism, the elastic device is arranged at the rear end of the tool rest mechanism, the central fixed shaft is rotationally connected with the tool rest mechanism, the striking rod is fixedly connected with the central fixed shaft, and the driving mechanism drives the tool rest to move forwards and backwards. The small end cutting device for the zone-melting monocrystal and the device for improving the cutting efficiency can reduce dust generated in the cutting process of the small end of the monocrystal under the condition that a furnace is not disassembled when the small end of the monocrystal is cut, and further ensure that the hearth environment meets the requirements of high-quality zone-melting monocrystal processing.

Description

Zone-melting monocrystal small head cutting device and device for improving cutting efficiency
Technical Field
The invention belongs to the field of single crystal processing and manufacturing, and particularly relates to a small head cutting device for a zone-melting single crystal and a device for improving cutting efficiency.
Background
When the zone-melting suspension method is adopted to manufacture single crystals, the broken edges or broken buds are caused when the furnace leaves and expands shoulders due to the factors of furnace chamber atmosphere, mechanical stability, thermal field stability and the like, and in order to continue production, small single crystal heads formed by the broken edges or broken buds are required to be cut off.
In the prior art, in order to improve the efficiency of cutting off the small single crystal head, it is generally adopted to cut off the small single crystal head without disassembling the furnace. The existing cutting device adopts a pneumatic motor to drive a grinding wheel slice to cut, and although a furnace is not required to be disassembled, a large amount of dust is generated in the cutting process, the environment of a hearth is polluted, and the existing high-quality zone-melting monocrystal requirement cannot be met; and the existing single crystal small head is cut off after the furnace is disassembled, and most of the single crystal small head is cut off manually, so that the waste of working hours is caused, and the production efficiency is reduced.
Disclosure of Invention
In view of the above, the invention aims to provide a small head cutting device for zone-melting single crystals and a device for improving cutting efficiency, which can reduce dust generated in the cutting process of small heads of single crystals under the condition that a furnace is not disassembled when small heads of single crystals are cut off, thereby ensuring that the hearth environment meets the requirements of high-quality zone-melting single crystal processing.
In order to achieve the above purpose, the technical scheme of the invention is realized as follows:
a small head cutting device for zone-melting single crystals comprises a central fixed shaft, an impact rod, an elastic device and a tool rest mechanism capable of moving forwards and backwards;
the front end of the tool rest mechanism is provided with a blade mechanism, the elastic device is arranged at the rear end of the tool rest mechanism, the central fixed shaft is rotationally connected with the tool rest mechanism, and the striking rod is fixedly connected with the central fixed shaft.
Further, the tool rest mechanism comprises a first tool rest and a second tool rest, and the first tool rest and the second tool rest are sleeved in the middle of the central fixed shaft and can rotate mutually.
Further, the blade mechanism comprises a first blade and a second blade, the first blade is arranged at the front end of the second blade holder, the second blade is arranged at the front end of the first blade holder, the first blade is rotationally connected with the second blade holder, and the second blade is rotationally connected with the first blade holder.
Further, the elastic device is a spring, one end of the elastic device is fixedly connected with the first tool rest, and the other end of the elastic device is fixedly connected with the second tool rest.
Further, a groove is formed in the top of the central fixing shaft, the striking rod is fixedly connected with the central fixing shaft through the groove, and a hexagonal screw penetrates through the striking rod and the central fixing shaft.
The device for improving the small head cutting efficiency of the zone-melting single crystal comprises a driving mechanism and the small head cutting device of the zone-melting single crystal, wherein the driving mechanism drives the knife rest mechanism to move forwards and backwards.
Further, a knife rest connecting rod is arranged at the bottom of the central fixed shaft and fixedly connected with the central fixed shaft, the driving mechanism is an electric cylinder, and the knife rest connecting rod is detachably connected with the electric cylinder.
Compared with the prior art, the device for cutting the small head of the zone-melting monocrystal and the device for improving the cutting efficiency have the following advantages:
according to the small head cutting device for the zone-melting monocrystal and the device for improving the cutting efficiency, the mode of generating scratches on the monocrystal and impacting the monocrystal is adopted, grinding treatment on the monocrystal is avoided, a furnace chamber is avoided to be dismantled, the whole structure of the device is compact, the cutter rest can have stronger flexibility through the rotary connection of the central fixed shaft and the cutter rest, and the cutter rest can be detachably connected with different driving devices through the cutter rest connecting rod.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention. In the drawings:
FIG. 1 is a schematic view of a small end cutting device for a zone-melting single crystal according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a small end cutting device for a single crystal of zone melting according to an embodiment of the present invention;
FIG. 3 is a schematic operation diagram of an apparatus for improving the efficiency of small end ablation of a single crystal in zone melting according to an embodiment of the present invention;
FIG. 4 is a schematic view of a tool holder connecting rod of a device for improving the cutting efficiency of small heads of zone-melting single crystals according to an embodiment of the invention;
FIG. 5 is a schematic view of an upper tool holder of a device for improving the efficiency of cutting small heads of zone-melting single crystals according to an embodiment of the present invention;
FIG. 6 is a schematic view of a lower tool holder of an apparatus for improving the efficiency of small end ablation of a single crystal melt in accordance with an embodiment of the present invention;
FIG. 7 is a schematic view of a central fixed axis of a device for improving the efficiency of small end ablation of a single crystal in zone melting according to an embodiment of the present invention;
FIG. 8 is a schematic view of an impact bar of an apparatus for improving the efficiency of small end ablation of a single crystal melt according to an embodiment of the present invention.
Reference numerals illustrate:
1-a first tool holder; 2-a second tool holder; 3-a central fixed shaft; 4-a knife rest connecting rod; 5-striking a rod; 6-elastic means; 7-a first blade; 8-a second blade; 9-an electric cylinder; 10-single crystal neck.
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art in a specific case.
The invention will be described in detail below with reference to the drawings in connection with embodiments.
Example 1
A small end cutting device of zone-melting monocrystal, as shown in figure 1, comprises a central fixed shaft 3, an impact rod 5, an elastic device 6 and a cutter rest mechanism capable of moving back and forth;
the front end of the tool rest mechanism is provided with a blade mechanism, an elastic device 6 is arranged at the rear end of the tool rest mechanism, the central fixed shaft 3 is rotationally connected with the tool rest mechanism, and the striking rod 5 is fixedly connected with the central fixed shaft 3.
The tool rest mechanism comprises a first tool rest 1 and a second tool rest 2, wherein the first tool rest 1 and the second tool rest 2 are sleeved at the middle part of a central fixed shaft 3 and can mutually rotate.
The blade mechanism comprises a first blade 7 and a second blade 8, wherein the first blade 7 is arranged at the front end of the second blade rest 2, the second blade 8 is arranged at the front end of the first blade rest 1, the first blade 7 is rotationally connected with the second blade rest 2, and the second blade 8 is rotationally connected with the first blade rest 1.
The elastic device 6 is a spring, one end of the elastic device 6 is fixedly connected with the first tool rest 1, and the other end is fixedly connected with the second tool rest 2.
The top of the central fixed shaft 3 is provided with a groove, the striking rod 5 is fixedly connected with the central fixed shaft 3 through the groove, and a hexagonal screw penetrates through the striking rod 5 and the central fixed shaft 3.
The working mode of this example
Through the rigid coupling of electric jar and knife rest mechanism, drive arrangement promotes knife rest mechanism, and knife rest mechanism drives blade mechanism and cuts single crystal small head 10, and when drive arrangement continued to promote knife rest mechanism, striking rod 5 bumps into broken single crystal small head 10.
Example two
A device for improving the cutting efficiency of small heads of zone-melting single crystals comprises a driving mechanism and a small head cutting device of zone-melting single crystals, wherein the driving mechanism drives a knife rest mechanism to move forwards and backwards.
The bottom of the central fixed shaft 3 is provided with a knife rest connecting rod 4, the knife rest connecting rod 4 is fixedly connected with the central fixed shaft 3, the driving mechanism is an electric cylinder 9, and the knife rest connecting rod 4 is detachably connected with the electric cylinder 9.
The working mode of this example
When the monocrystal small head is cut, a lower shaft is given to rotate at a certain speed to drive the monocrystal small head to rotate, the knife rest connecting rod 4 is driven by the electric cylinder 9 to push the first blade 7 and the second blade 8 to approach the part of the monocrystal small head, which is 3-4mm, when the monocrystal small neck 10 contacts with the first blade 7 and the second blade 8, the elastic device 6 starts to bear force to store elastic potential energy, and conversely drives the first blade 7 and the second blade 8 to apply reaction force to the monocrystal small neck 10, so that the first blade 7 and the second blade 8 generate scratches on the part of the monocrystal small neck 10 to damage the crystal surface structure, and then the part of the monocrystal small neck 10 is impacted by the impact rod 5 of the device to collide the monocrystal small neck 10, so that the purpose of cutting the small head is achieved.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.

Claims (3)

1. A zone-melting monocrystal small head cutting device is characterized in that: comprises a central fixed shaft (3), an impact rod (5), an elastic device (6) and a tool rest mechanism capable of moving back and forth;
the front end of the tool rest mechanism is provided with a blade mechanism, the elastic device (6) is arranged at the rear end of the tool rest mechanism, the central fixed shaft (3) is rotationally connected with the tool rest mechanism, and the striking rod (5) is fixedly connected with the central fixed shaft (3);
the tool rest mechanism comprises a first tool rest (1) and a second tool rest (2), wherein the first tool rest (1) and the second tool rest (2) are sleeved at the middle part of the central fixed shaft (3) and can mutually rotate;
the blade mechanism comprises a first blade (7) and a second blade (8), the first blade (7) is arranged at the front end of the second blade holder (2), the second blade (8) is arranged at the front end of the first blade holder (1), the first blade (7) is rotationally connected with the second blade holder (2), and the second blade (8) is rotationally connected with the first blade holder (1);
the elastic device (6) is a spring, one end of the elastic device (6) is fixedly connected with the first tool rest (1), and the other end of the elastic device is fixedly connected with the second tool rest (2);
the top of the central fixed shaft (3) is provided with a groove, the striking rod (5) is fixedly connected with the central fixed shaft (3) through the groove, and a hexagonal screw penetrates through the striking rod (5) and the central fixed shaft (3).
2. The utility model provides an improve device of district's melt single crystal small end excision efficiency which characterized in that: comprising a driving mechanism and the small end cutting device for the zone-melting monocrystal according to claim 1, wherein the driving mechanism drives the knife rest mechanism to move back and forth.
3. The apparatus for improving the efficiency of small end ablation of a single crystal in zone melting according to claim 2, wherein: the bottom of the center fixed shaft (3) is provided with a tool rest connecting rod (4), the tool rest connecting rod (4) is fixedly connected with the center fixed shaft (3), the driving mechanism is an electric cylinder (9), and the tool rest connecting rod (4) is detachably connected with the electric cylinder (9).
CN201810517849.4A 2018-05-25 2018-05-25 Zone-melting monocrystal small head cutting device and device for improving cutting efficiency Active CN108486646B (en)

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Application Number Priority Date Filing Date Title
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CN108486646B true CN108486646B (en) 2023-08-04

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62246893A (en) * 1986-04-15 1987-10-28 Kyushu Denshi Kinzoku Kk Method and apparatus for producing single crystal
CN103451718A (en) * 2013-09-05 2013-12-18 浙江晶盛机电股份有限公司 Zone melting furnace device capable of continuous production and process control method thereof
CN104178804A (en) * 2014-08-06 2014-12-03 天津市环欧半导体材料技术有限公司 Crystal cutting device for zone melting furnace
CN107173175A (en) * 2017-07-05 2017-09-19 浙江农林大学暨阳学院 A kind of vapour-pressure type bamboo harvester
CN206525199U (en) * 2016-12-29 2017-09-29 深圳市升源园林生态有限公司 A kind of horticultural averruncator
CN109348889A (en) * 2018-11-05 2019-02-19 李学滨 A kind of length-adjustable horticultural averruncator cutting apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62246893A (en) * 1986-04-15 1987-10-28 Kyushu Denshi Kinzoku Kk Method and apparatus for producing single crystal
CN103451718A (en) * 2013-09-05 2013-12-18 浙江晶盛机电股份有限公司 Zone melting furnace device capable of continuous production and process control method thereof
CN104178804A (en) * 2014-08-06 2014-12-03 天津市环欧半导体材料技术有限公司 Crystal cutting device for zone melting furnace
CN206525199U (en) * 2016-12-29 2017-09-29 深圳市升源园林生态有限公司 A kind of horticultural averruncator
CN107173175A (en) * 2017-07-05 2017-09-19 浙江农林大学暨阳学院 A kind of vapour-pressure type bamboo harvester
CN109348889A (en) * 2018-11-05 2019-02-19 李学滨 A kind of length-adjustable horticultural averruncator cutting apparatus

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Country or region after: China

Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd.

Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside.

Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd.

Country or region before: China

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