CN202492611U - Holding device for single crystals for zone melting furnace - Google Patents
Holding device for single crystals for zone melting furnace Download PDFInfo
- Publication number
- CN202492611U CN202492611U CN201220040563XU CN201220040563U CN202492611U CN 202492611 U CN202492611 U CN 202492611U CN 201220040563X U CN201220040563X U CN 201220040563XU CN 201220040563 U CN201220040563 U CN 201220040563U CN 202492611 U CN202492611 U CN 202492611U
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- clamping
- holding
- clamper
- clamping device
- strut member
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Abstract
The utility model relates to a manufacturing device for nonmetal crystals and aims at provides a holding device for single crystals for a zone melting furnace. The holding device comprises at least three sets of primary holders and at least three sets of secondary holders. Each primary holder comprises a primary holding shielding piece, a primary holding supporting member and a primary holder support. Each secondary holder comprises a secondary holding component and a secondary holding support, wherein the holding position of the secondary holding component is higher than that of the primary holding shielding piece. The holding device can be released in different stages of the growth of crystals as required so as to hold the crystals stably; the original three-point holding is changed into the six-point holding so that the holding is more stable; introduction of crystal impurities can be avoided because molybdenum or titanium with high melting points is adopted; and releasing time of primary holding and secondary holding can be changed conveniently through adjustment of the height of a hammer arranged at the tail end of a steel wire rope, and the holding is more flexible.
Description
Technical field
The utility model relates to the silicon single crystal processing units, particularly a kind of monocrystalline clamping device that is used for zone melting furnace.
Background technology
The zone melting method growing silicon single crystal is through in argon gas atmosphere or vacuum, with high frequency heating coil polycrystalline silicon material being heated, and contacts with the seed crystal of below after making its fusion, becomes the method for high purity silicon monocrystalline by seed crystal crystal orientation structural growth.When melted the suspension zone, the melting zone was suspended state, do not contact with any material, thereby can be not contaminated.In addition, owing to the fractional condensation effect and the evaporation effect of impurity in the silicon, the silicon single crystal purity that is therefore obtained is very high.
But the melting zone is suspended state during also just because of the zone melting method growing silicon single crystal, and any microvibration of polycrystalline silicon material or silicon single crystal all might be broken the equilibrium state in melting zone, thereby causes the failure of single crystal growing.What therefore the stable holding of silicon single crystal and polycrystalline silicon material showed is particularly important.
The process of zone melting furnace growing silicon single crystal is generally: seeding, and------shouldering is---isometrical---breaks in growth thin footpath.At the preceding three phases of single crystal growing, crystal diameter progressively increases with the carrying out of process of growth, forms a cone-shaped body structure.By the time when crystal diameter grew into a certain particular value, crystal growth got into the isometrical stage, promptly crystal diameter keeps the definite value growth.Along with crystalline is constantly grown, crystalline weight also constantly increases, and therefore depending seed crystal alone, to support the monocrystalline that whole growth becomes be unpractical.And along with the large diameter trend of single crystal growing is come obvious, the traditional monocrystalline clamping device that only has a clamping more and can not well have been met the requirement of stable holding monocrystalline.
The utility model content
The purpose of the utility model is to provide a kind of monocrystalline clamping device that is used for zone melting furnace; Has the twice clamping device; Can play the effect of stable holding to crystal in the different steps of crystal growth, overcome the defective that existing monocrystalline clamping device is not suitable for the stable holding large-diameter monocrystalline silicon.
For achieving the above object, the technical scheme of the utility model is:
A kind of monocrystalline clamping device that is used for zone melting furnace is provided, comprises clamper of at least 3 covers, a said clamper comprises a clamping catch, a clamping strut member and a gripper brackets; Said clamper also comprises at least 3 cover secondary clampers, and said secondary clamper comprises secondary hold assembly and secondary gripper brackets; The retaining part of said secondary hold assembly is higher than the retaining part of a clamping catch.
As a kind of improvement, pawl is propped up in the clamping that said secondary hold assembly is the boss shape structure, and the front end of its broad is fixed with two thimbles, and the top of thimble is taper; Its narrower rear end is installed on secondary gripper brackets top through bolt, and can rotate around bolt.
As a kind of improvement, below the pawl erection bolt is propped up in said clamping, another bolt is installed also, be used to limit the angle of rotation that pawl is propped up in clamping.
As a kind of improvement, the end of a said clamping strut member and secondary hold assembly is equipped with one piece of screw, and said screw head is connected with a long wireline, the terminal outstanding weight that has of said wireline.
As a kind of improvement, also comprise clamper body and clamper chassis; Cylindric clamper body is installed on the center on discoid clamper chassis, and a said gripper brackets and secondary gripper brackets all are fixed in the clamper chassis surface in the clamper body outside.
As a kind of improvement, a said gripper brackets and secondary gripper brackets respectively have 3 covers, and the space is evenly arranged on the clamper chassis.
As a kind of improvement, a said clamping strut member is the rectangular parallelepiped that a front end is established the depression position, and a said clamping strut member is installed in this depression position through bolt and can rotates around bolt.
As a kind of improvement, a said clamping catch, clamping strut member and secondary hold assembly are with molybdenum or titanium material cut and get.
As a kind of improvement, a said clamping catch is a disk, and its front end edge camber line cutting also presents two acute angle-shaped retaining parts; The center of a said clamping catch is connected with a cylindrical tail rod through screw, and the tail rod the other end is connected to the clamping strut member one time.
As a kind of improvement, also comprise the clamper body, establish pilot hole on its circumference; Tail rod is movably installed in the pilot hole; Angle is 15 °～30 ° between said pilot hole and the vertical line.
Compared with prior art, the utility model advantage is following:
The utility model adopts two cover clamping mechanisms, is divided into a clamping and secondary clamping, can be as required in the different steps release of crystal growth, thereby clamping crystal stably.A clamping catch changes disk into by disk and removes a fillet, makes 3 original clampings become 6 clampings, makes clamping more stable.Clamping catch, clamping strut member and clamping are propped up claw material and are adopted very high molybdenum or the titanium of fusing point, can avoid the introducing to crystal impurity.Through the height of the terminal weight of adjustment wireline, can easily change the time of releasing of a clamping and secondary clamping, make clamping more flexible.
Description of drawings
Fig. 1 is the two cover clamper structural representations of monocrystalline.
Embodiment
Below in conjunction with accompanying drawing, the embodiment of the utility model is described in further detail.Following examples are used to explain the utility model, but are not used for limiting the scope of the utility model.
The utility model embodiment a kind of is used for the two cover clampers of monocrystalline of zone melting furnace, and said clamper has the twice clamping device, is divided into clamper and secondary clamper.Clamper comprises clamping catch 1, a clamping strut member 2 and a gripper brackets 3.The secondary clamper comprises that pawl 4 is propped up in clamping and secondary gripper brackets 5 is formed.Clamper is divided by also comprising clamper body 6, clamper chassis 7 and the long wireline of the six roots of sensation outside the top, the terminal outstanding weight that has of wireline.Clamper and secondary clamper all are uniformly distributed with at a distance from 120 °.
One time clamping catch 1 is the disk of T shape umbrella-shaped structure, and its front end edge camber line cutting also presents two acute angle-shaped retaining parts; Cylindrical tail rod inserts the pilot hole on clamper body 6 circumference.
Angle is 15 °～30 ° between pilot hole and the vertical line, with close with institute growing single-crystal conical surface angle be good.
One time clamping strut member 2 usefulness bolts are installed on gripper brackets 3 one time, can rotate around bolt.One time clamping strut member 2 ends are equipped with one piece of screw, and screw head connects a wireline, the terminal outstanding weight that has of wireline.The stretching wireline of weight is upturned clamping strut member 2 heads, withstands the tail rod that is connected to a clamping catch 1.
Clamping is propped up pawl 4 and is boss shape molybdenum (titanium) piece, and its front end is fixed two thimbles, and taper is processed on the thimble top.Clamping is propped up pawl 4 and is installed on secondary gripper brackets 5 through bolt, can rotate around bolt.Clamping is propped up pawl 4 erection bolts below another bolt also is installed, and is used to limit the angle of rotation that pawl 4 is propped up in clamping.Clamping is propped up pawl 4 ends one piece of screw is installed, and screw head connects a wireline, the terminal outstanding weight that has of wireline.The stretching wireline of weight makes clamping prop up pawl 4 to open with the angle of setting.
The resistant to elevated temperatures molybdenum of material selection or the titanium of pawl 4 propped up in clamping catch 1, clamping strut member 2 and clamping.
The crystal clamping process of the two cover clampers of monocrystalline specifically describes as follows:
The two cover clampers of monocrystalline are fixed in zone melting furnace lower shaft outer shaft top through clamper chassis 7, and seed crystal is fixed in the zone melting furnace lower shaft axle top and passes two cover clamper clamper body 6 centers of monocrystalline through seedholder and rises to the crystal pulling starting altitude.
After crystal pulling began, axle and outer shaft rotated synchronously in the zone melting furnace lower shaft, and interior axle descends with the crystalline poor growth, and the outer shaft height remains unchanged.The crystal pulling initial stage is supported the crystal that grows by seed crystal.When crystal diameter grows into a certain particular value; Lower shaft outer shaft and interior axle beginning descend synchronously; One time clamping strut member 2 terminal wireline are lax, and one time clamping strut member 2 no longer plays a supportive role to a clamping catch 1, and one time clamping catch 1 slides along the pilot hole on the clamper body 6; Contact with crystal, begin crystal is played a supportive role.
Along with the crystalline growth, crystal diameter continues to increase, and axle and outer shaft continue to descend synchronously in the lower shaft.When lower shaft dropped to certain altitude, the terminal weight contact of pawl 4 wireline lower raft was propped up in clamping, and wireline is lax, and clamping is propped up pawl 4 subtended angles and diminished and contact with crystal, also begins crystal is played a supportive role.
Claims (10)
1. a monocrystalline clamping device that is used for zone melting furnace comprises clamper of at least 3 covers, and a said clamper comprises a clamping catch, a clamping strut member and a gripper brackets; It is characterized in that said clamper also comprises at least 3 cover secondary clampers, said secondary clamper comprises secondary hold assembly and secondary gripper brackets; The retaining part of said secondary hold assembly is higher than the retaining part of a clamping catch.
2. clamping device according to claim 1 is characterized in that, pawl is propped up in the clamping that said secondary hold assembly is the boss shape structure, and the front end of its broad is fixed with two thimbles, and the top of thimble is taper; Its narrower rear end is installed on secondary gripper brackets top through bolt, and can rotate around bolt.
3. clamping device according to claim 2 is characterized in that, below the pawl erection bolt is propped up in said clamping, another bolt is installed also, is used to limit the angle of rotation that pawl is propped up in clamping.
4. according to the clamping device described in any one of the claim 1 to 3; It is characterized in that; The end of a said clamping strut member and secondary hold assembly is equipped with one piece of screw, and said screw head is connected with a long wireline, the terminal outstanding weight that has of said wireline.
5. according to the clamping device described in any one of the claim 1 to 3, it is characterized in that, also comprise clamper body and clamper chassis; Cylindric clamper body is installed on the center on discoid clamper chassis, and a said gripper brackets and secondary gripper brackets all are fixed in the clamper chassis surface in the clamper body outside.
6. according to the clamping device described in any one of the claim 1 to 3, it is characterized in that a said gripper brackets and secondary gripper brackets respectively have 3 covers, and the space is evenly arranged on the clamper chassis.
7. according to the clamping device described in any one of the claim 1 to 3, it is characterized in that a said clamping strut member is the rectangular parallelepiped that a front end is established the depression position, a said clamping strut member is installed in this depression position through bolt and also can rotates around bolt.
8. according to the clamping device described in any one of the claim 1 to 3, it is characterized in that a said clamping catch, clamping strut member and secondary hold assembly are with molybdenum or titanium material cut and get.
9. according to the clamping device described in any one of the claim 1 to 3, it is characterized in that a said clamping catch is a disk, its front end edge camber line cutting also presents two acute angle-shaped retaining parts; The center of a said clamping catch is connected with a cylindrical tail rod through screw, and the tail rod the other end is connected to the clamping strut member one time.
10. clamping device according to claim 9 is characterized in that, also comprises the clamper body, establishes pilot hole on its circumference; Tail rod is movably installed in the pilot hole; Angle is 15 °～30 ° between said pilot hole and the vertical line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220040563XU CN202492611U (en) | 2012-02-08 | 2012-02-08 | Holding device for single crystals for zone melting furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220040563XU CN202492611U (en) | 2012-02-08 | 2012-02-08 | Holding device for single crystals for zone melting furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202492611U true CN202492611U (en) | 2012-10-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220040563XU Expired - Lifetime CN202492611U (en) | 2012-02-08 | 2012-02-08 | Holding device for single crystals for zone melting furnace |
Country Status (1)
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| CN (1) | CN202492611U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102943302A (en) * | 2012-10-24 | 2013-02-27 | 北京京运通科技股份有限公司 | Crystal clamping apparatus and zone melting single crystal furnace |
| CN103981567A (en) * | 2014-01-07 | 2014-08-13 | 浙江晶盛机电股份有限公司 | Material loading device for zone melting furnace and automatic material loading method thereof |
| CN104178804A (en) * | 2014-08-06 | 2014-12-03 | 天津市环欧半导体材料技术有限公司 | Crystal cutting device for zone melting furnace |
| CN104746132A (en) * | 2013-11-28 | 2015-07-01 | 有研新材料股份有限公司 | An adjusting and controlling device for a clamping needle in a zone-melting single-crystal furnace |
| CN105177697A (en) * | 2015-10-19 | 2015-12-23 | 天津市环欧半导体材料技术有限公司 | Clamping device for single crystal clamping system of zone-melting silicon single crystal furnace |
| CN114232071A (en) * | 2021-11-23 | 2022-03-25 | 浙江晶盛机电股份有限公司 | Crystal pulling device of single crystal furnace |
-
2012
- 2012-02-08 CN CN201220040563XU patent/CN202492611U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102943302A (en) * | 2012-10-24 | 2013-02-27 | 北京京运通科技股份有限公司 | Crystal clamping apparatus and zone melting single crystal furnace |
| CN104746132A (en) * | 2013-11-28 | 2015-07-01 | 有研新材料股份有限公司 | An adjusting and controlling device for a clamping needle in a zone-melting single-crystal furnace |
| CN104746132B (en) * | 2013-11-28 | 2017-06-06 | 有研半导体材料有限公司 | The adjustment control device of pin is clamped in zone melting single-crystal stove |
| CN103981567A (en) * | 2014-01-07 | 2014-08-13 | 浙江晶盛机电股份有限公司 | Material loading device for zone melting furnace and automatic material loading method thereof |
| CN103981567B (en) * | 2014-01-07 | 2016-06-29 | 浙江晶盛机电股份有限公司 | A kind of material containing device for zone melting furnace and automatically material containing method |
| CN104178804A (en) * | 2014-08-06 | 2014-12-03 | 天津市环欧半导体材料技术有限公司 | Crystal cutting device for zone melting furnace |
| CN104178804B (en) * | 2014-08-06 | 2017-05-24 | 天津市环欧半导体材料技术有限公司 | Crystal cutting device for zone melting furnace |
| CN105177697A (en) * | 2015-10-19 | 2015-12-23 | 天津市环欧半导体材料技术有限公司 | Clamping device for single crystal clamping system of zone-melting silicon single crystal furnace |
| CN105177697B (en) * | 2015-10-19 | 2023-04-14 | 天津中环领先材料技术有限公司 | Clamping device for single crystal clamping system of zone-melting silicon single crystal furnace |
| CN114232071A (en) * | 2021-11-23 | 2022-03-25 | 浙江晶盛机电股份有限公司 | Crystal pulling device of single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121017 |
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| CX01 | Expiry of patent term |