Monocrystalline pre-installs material clamp
Technical field
The utility model is related to monocrystalline and field of semiconductor processing, more particularly to a kind of monocrystalline prepackage material clamp.
Background technology
Single crystal growing furnace is after blowing out, and temperature is higher after just being opened due to body of heater, and furnace body temperature is in 400 degrees centigrades, personnel
Charging work can not be carried out;Traditional method is, with thermal field in blower fan blown converter, to wait the interior cooling of stove 2 hours, i.e. temperature to be down to 50 Celsius
Degree left and right, then carry out charging work;Such operating method, adds table standby time, while increasing the dirt to silicon material
Dye, influences product quality.
The content of the invention
In view of the shortcomings of the prior art, technical problem to be solved in the utility model is to provide a kind of monocrystalline prepackage feed collet
Tool, steps up after crucible to be adjusted in stove by crane, is not affected by high temperatures, reduce table standby time, and will not be because of personnel's relation
Silicon material is polluted.
The utility model solves the technical scheme that its technical problem used:
A kind of monocrystalline pre-installs material clamp, and crucible is lived in clamping, monocrystalline prepackage material clamp include hanging pawl, retainer plate, fixed support,
Rotating spanner, adjustable shelf, back-moving spring, hang pawl and are fixed on retainer plate top, at least two fixed supports are fixed on retainer plate
Bottom, adjustable shelf includes crucible buckle that is long-armed and being fixed on long-armed one end, and the long-armed other end is connected with fixed support axle, earthenware
Outstanding steady pin is fixed with the inside of crucible buckle, crucible outer wall has the jack matched with steady pin, and steady pin insertion is inserted
Shape and the shape of crucible outer wall on the inside of Kong Zhong, crucible buckle match, and are in close contact, so that fixture can pick up crucible
Mobile, fixed support is connected with long arm axle, and extends downwardly one section of section vertically downward, and rotating spanner includes rotating shaft, props protrusion
And handle, turn to take out and be arranged on fixed support section vertically downward, turn to take out two ends and be connected with fixed support axle, and be fixed between turn drawing
Arc props protrusion, and one end of rotating shaft extends into handle through fixed support, back-moving spring one end in extended state with
Fixed support is connected, and the other end and long-armed connection, when handle drives rotating shaft rotation, is propped protrusion and is rotated with rotating shaft
To with long arm contact, prop it is prominent by long-armed jack-up, i.e., it is long-armed move to away from fixed support direction, prop protrusion with rotating shaft one
When playing rotation to long-armed separate, back-moving spring contacts long-armed be pulled to fixed support.
Optimal, the retainer plate is consistent with crucible shape, and the fixed support of three or more than three is evenly distributed on
On retainer plate, fixed support is welded on retainer plate.
Optimal, the pawl that hangs includes the clip and at least three pawls of cylinder, and the center of clip and retainer plate exists
On straight line, pawl one end and the clip of strip are welded and fixed, and the other end is welded and fixed with retainer plate, clip distance
The distance of plane is more than 10 centimetres where retainer plate.
Optimal, to there is bar shaped through hole in the middle part of the fixed support, through hole connection inner side and outer side connects close
Crucible side and remote crucible side, fixed support side view are that p-type, i.e. upper thickness are more than bottom thickness, and close to crucible one
Side length is more than away from crucible side, and long-armed, long-armed two end axles are accommodated in the through hole on fixed support top and are connected branch
Accommodated in frame, fixed support bottom through hole and turn to take out, rotating shaft and it is long-armed be arranged side by side, rotating shaft is located at inner side, i.e., close crucible one
Side, it is long-armed to be located at outside, i.e., away from crucible side.
Optimal, one end of the rotating shaft extends through fixed support and is bent into handle, handle to away from crucible side
End outer sheath is equipped with anti-scald thermal insulation layer.
Optimal, on the inside of the fixed support, i.e., it is welded with spring anchor block A, spring anchor block A length close to crucible side
Degree matches with fixed support width, the long-armed outside, i.e., be welded with spring anchor block B away from crucible side, spring is fixed
Block B length matches with long-armed width, and spring anchor block A and spring anchor block B's is provided at both ends with annular clip, described multiple
Spring anchor block A annular clip is caught in one end of position spring, and the other end catches on spring anchor block B annular clip,
Two back-moving springs are separately positioned on fixed support and long-armed both sides.
Optimal, the distance of the retainer plate to crucible buckle bottom is 471.11 millimeters, and the crucible buckle is length
It is to be fixed with two steady pins on 143.07 millimeters of strip, crucible buckle.
As shown from the above technical solution, the monocrystalline prepackage material clamp that the utility model is provided is directly sharp when feeding operation
The material for needing to fill is hung in stove safely with fixture and driving, it is not necessary to wait body of heater to cool, effectively raise the profit of table
With rate, fed without the need for staff in workshop, greatly reduce the pollution of silicon material, so as to effectively reduce cost
And improve product quality.
Brief description of the drawings
Accompanying drawing 1 is the structural representation that monocrystalline pre-installs material clamp.
Accompanying drawing 2 is the partial enlarged drawing in accompanying drawing 1.
Accompanying drawing 3 is the partial sectional view that monocrystalline pre-installs material clamp.
In figure:Hang pawl 10, clip 11, pawl 12, retainer plate 20, fixed support 30, rotating spanner 40, rotating shaft 41, prop
Prominent 42, handle 43, adjustable shelf 50, long-armed 51, crucible buckle 52, back-moving spring 60.
Embodiment
With reference to accompanying drawing of the present utility model, the technical scheme to utility model embodiment is further elaborated.
Referring to the drawings shown in 1, the monocrystalline for living crucible for clamping pre-installs material clamp, including hangs pawl 10, retainer plate 20, fixes
Support 30, rotating spanner 40, adjustable shelf 50, back-moving spring 60.
Hang pawl 10 and be fixed on the top of retainer plate 20, hanging pawl 10 includes the pawl 12 of clip 11 and at least three of cylinder, Gu
Surely button 11 with the center of retainer plate 20 point-blank, the one end of pawl 12 and the clip 11 of strip are welded and fixed, and another
End is welded and fixed with retainer plate 20, and clip 11 is more than 10 centimetres apart from the distance of the place plane of retainer plate 20.
Retainer plate 20 is consistent with crucible shape, and the fixed support 30 of three or more than three is evenly distributed on retainer plate 20
On, fixed support 30 is welded on retainer plate 20, relative to the bottom for hanging the fixed support 30 of pawl 10 and being fixed on retainer plate 20.It is described
Is there is bar shaped through hole at the middle part of fixed support 30, and through hole connection inner side and outer side is connected close to crucible side and away from earthenware
Crucible side, the side view of fixed support 30 is that p-type, i.e. upper thickness are more than bottom thickness, and close to the side length of crucible one more than remote
Crucible side.
Adjustable shelf 50 includes long-armed 51 and is fixed on the crucible buckle 52 of long-armed 51 one end, and long-armed 51 other end is located at admittedly
In the through hole on the top of fixed rack 30, and two end axles are connected support 30, and the inner side of crucible buckle 52 is fixed with outstanding
Steady pin, crucible outer wall has a jack matched with steady pin, in steady pin insertion jack, the shape of the inner side of crucible buckle 52 with
The shape of crucible outer wall matches, and is in close contact, so that fixture can pick up crucible mobile crucible buckle 52 is for length
Be fixed with two steady pins on 143.07 millimeters of strip, crucible buckle 52, retainer plate 20 to the bottom of crucible buckle 52 away from
From for 471.11 millimeters.
Rotating spanner 40 includes rotating shaft 41, props prominent 42 and handle 43, turns to take out to be arranged on fixed support 30 vertically downward
Section, turns to take out two ends and be connected with the axle of fixed support 30, and be fixed with arc between turn drawing prop protrusion 42, one end of rotating shaft 41 is worn
Cross fixed support 30 to extend and be bent into handle 43 to away from crucible side, the end outer sheath of handle 43 is equipped with anti-scald thermal insulation layer,
Rotating shaft 41 and long-armed 51 is arranged side by side, and rotating shaft 41 is located at inner side, i.e., close to crucible side, and long-armed 51 are located at outside, i.e., away from earthenware
Crucible side.
One end of back-moving spring 60 in extended state is connected with fixed support 30, and the other end is connected with long-armed 51, Gu
The inner side of fixed rack 30, i.e., be welded with spring anchor block A, spring anchor block A length and the width of fixed support 30 close to crucible side
Match, long-armed 51 outside is welded with spring anchor block B, spring anchor block B length and long-armed 51 away from crucible side
Width matches, and spring anchor block A and spring anchor block B's is provided at both ends with annular clip 11, the back-moving spring 60
Spring anchor block A annular clip 11 is caught in one end, and the other end catches on spring anchor block B annular clip 11, two
Back-moving spring 60 is separately positioned on fixed support 30 and long-armed 51 both sides.
What crane clamped monocrystalline prepackage material clamp hangs pawl 10, and the steady pin of monocrystalline prepackage material clamp crucible buckle 52 is fixed
In the jack of pin insertion crucible outer wall, the shape and the shape of crucible outer wall of the inner side of crucible buckle 52 match, in stretching shape
The back-moving spring 60 of state makes crucible buckle 52 be in close contact with crucible, so that fixture can clamp crucible, so that crane mobile crucible,
When handle 43 drives the rotation of rotating shaft 41, prominent 42 are propped with the rotation of rotating shaft 41 to being contacted with long-armed 51, protrusion is propped
42 move long-armed 51 jack-up, i.e., long-armed 51 to away from the direction of fixed support 30, so that jack of the steady pin from crucible outer wall
In out, you can with by monocrystalline prepackage material clamp separated with crucible.