CN203530478U

CN203530478U - Quartz pin used in single crystal furnace

Info

Publication number: CN203530478U
Application number: CN201320599816.1U
Authority: CN
Inventors: 陈小林; 贺贤汉; 顾燕滨
Original assignee: Shanghai Shenhe Thermo Magnetics Electronics Co Ltd
Current assignee: Ningxia Shenhe New Material Technology Co ltd; Ningxia Yinhe Semiconductor Technology Co ltd
Priority date: 2013-09-27
Filing date: 2013-09-27
Publication date: 2014-04-09
Anticipated expiration: 2023-09-27

Abstract

The utility model discloses a quartz pin used in a single crystal furnace. The quartz pin comprises an inserting part, a contact part and a hook, wherein one end of the inserting part is inserted into a groove in the bottom of a thermal screen; one end of the contact part is connected with the other end of the inserting part; the non-connecting end of the contact part stretches outside the bottom of the thermal screen downwards; the hook is arranged at the connecting part of the inserting part and the contact part; and the distance of the bottom of the contact part to the bottom of the thermal screen is 15mm. After materials in the single crystal furnace are molten, the quartz pin is used for judging and adjusting the position of a molten silicon liquid level through the relative distance between a crucible and the thermal screen, the function of controlling the position of the molten silicon liquid level in the single crystal silicon preparation process is achieved, and the situation that the molten silicon liquid level is on the same position in each single crystal silicon preparation process is ensured.

Description

Quartz pins for single crystal growing furnace

Technical field

The utility model relates to a kind of position control, particularly a kind of quartz pins for single crystal growing furnace.

Background technology

Existing monocrystalline is produced in process, because of operator's difference and equipment error factor, affects material and finishes the rear position control to fusion silicon liquid level and have deviation.So, process variations while easily causing silicon single crystal to be produced, it is unstable that silicon single crystal is produced environment of living in, produces that to obtain silicon single crystal quality variant, and monocrystalline quality repeatability is not strong.

Utility model content

The purpose of this utility model is to provide a kind of such such environmental effects of minimizing, guarantees the strong quartz pins for single crystal growing furnace of monocrystalline quality repeatability.

For solving the problems of the technologies described above, the utility model, for the quartz pins of single crystal growing furnace, comprising: insertion section, and insert in the groove of heat shielding bottom one end of described insertion section; Contact part, one end of described contact part is connected with the other end of described insertion section, and the front of motor of described contact part leans out described heat shielding bottom downwards; Hook, described hook is arranged on the junction of described insertion section and described contact part.

The distance of the top of described contact part and described heat shielding bottom is 15 millimeters.

The utility model is used for the quartz pins of single crystal growing furnace after single crystal growing furnace material finishes, utilize crucible and heat shielding relative distance, use quartzy steady brace to judge, regulate the position of fusion silicon liquid level, can produce to play in process at silicon single crystal and control the effect of fusion silicon liquid level position, guarantee that each monocrystalline fusion silicon liquid level processed gets all at same position.

Accompanying drawing explanation

Fig. 1 is that the utility model is for the quartz pins structural representation of single crystal growing furnace;

Fig. 2 is that the utility model is used schematic diagram for the quartz pins of single crystal growing furnace.

The utility model is used for the quartz pins accompanying drawing description of reference numerals of single crystal growing furnace:

1-insertion section 2-heat shielding 3-groove

4-contact part 5-hook

Embodiment

Below in conjunction with accompanying drawing, to the utility model, the quartz pins for single crystal growing furnace is described in further detail.

As shown in Figure 1 and Figure 2, the utility model, for the quartz pins of single crystal growing furnace, comprising: insertion section 1, and insert in the groove 3 of heat shielding 2 bottoms one end of insertion section 1; Contact part 4, one end of contact part 4 is connected with the other end of insertion section 1, and in insertion section, 1 is provided with hook 5 with the junction of contact part 4.Meanwhile, the front of motor of contact part 4 leans out heat shielding 2 bottoms downwards, and the distance of the top of front of motor and heat shielding 2 bottoms is 15 millimeters.

During work, the confirmation of quartz pins steady brace original state, the bottom of contact part 4 front of motors is apart from 15 millimeters of heat shielding 2 bottoms; Material finishes, and rising crucible to silicon liquid level touches quartz pins bottom; After quartz pins contact liquid level, bushing position declines 5 millimeters, is fixed on bushing position, starts crystal pulling process seeding, shouldering, isometrical, ending, and whole process is constant.

Below the preferred embodiment of the utility model having been created illustrates, but the utility model is created and is not limited to described embodiment, those of ordinary skill in the art also can make all modification being equal to or replacement under the prerequisite without prejudice to the utility model creative spirit, and the modification that these are equal to or replacement are all included in the application's claim limited range.

Claims

1. for the quartz pins of single crystal growing furnace, it is characterized in that, comprising:

Insertion section, insert in the groove of heat shielding bottom one end of described insertion section;

Contact part, one end of described contact part is connected with the other end of described insertion section, and the front of motor of described contact part leans out described heat shielding bottom downwards;

Hook, described hook is arranged on the junction of described insertion section and described contact part.

2. the quartz pins for single crystal growing furnace according to claim 1, is characterized in that, the distance of the bottom of described contact part and described heat shielding bottom is 15 millimeters.