CN207347692U - The lifting gear of single crystal growing furnace silica crucible - Google Patents
The lifting gear of single crystal growing furnace silica crucible Download PDFInfo
- Publication number
- CN207347692U CN207347692U CN201721408207.8U CN201721408207U CN207347692U CN 207347692 U CN207347692 U CN 207347692U CN 201721408207 U CN201721408207 U CN 201721408207U CN 207347692 U CN207347692 U CN 207347692U
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- single crystal
- crystal growing
- growing furnace
- drawbar
- crucible
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Abstract
The utility model discloses a kind of lifting gear for the single crystal growing furnace silica crucible that be able to can be adjusted to the height of silica crucible in the vertical direction in single crystal growing furnace.The lifting gear of the single crystal growing furnace silica crucible, including crucible pallet；Drawbar is provided with below the crucible pallet；The drawbar passes through the bottom of single crystal growing furnace；Crucible rotation system is provided with below the single crystal growing furnace；The drawbar is connected with crucible rotation drive system；The single crystal growing furnace intracavity bottom is provided with annular convex platform；The rotary sleeve with annular convex platform thread fitting is provided with the inner ring of the annular convex platform；The rotary sleeve is connected with crucible pallet by clutch；The control device of clutch is provided with the drawbar.Using the lifting gear of the single crystal growing furnace silica crucible, easy to the taking-up of monocrystalline silicon in single crystal growing furnace, easy to the installation and debugging to equipment.
Description
Technical field
The crucible technique that the utility model is related in single crystal growing furnace improves, the lifting dress of especially a kind of single crystal growing furnace silica crucible
Put.
Background technology
It is well-known：Silica crucible has strong high-purity, temperature tolerance, the big precision height of size, good heat preservation performance, saving energy
The advantages that source, stable quality, application is more and more extensive.Especially produce the important component in the single crystal growing furnace of monocrystalline silicon.It is but existing
In some single crystal growing furnaces, silica crucible is fixedly mounted in single crystal growing furnace, and the height of silica crucible in the vertical direction can not be adjusted
Section；Therefore when liquid is less in silica crucible, the monocrystalline silicon of precipitation is located at position relatively low in single crystal growing furnace, causes monocrystalline silicon
Take out difficult.
Utility model content
Technical problem to be solved in the utility model is to provide one kind can be to silica crucible in single crystal growing furnace in vertical side
The lifting gear for the single crystal growing furnace silica crucible that upward height can be adjusted.
Technical solution is used by the utility model solves its technical problem：The lifting gear of single crystal growing furnace silica crucible,
Insulation cover is provided with the inner wall of the monocrystalline furnace chamber；The interior intracavitary of the single crystal growing furnace is provided with silica crucible；Silica crucible
Lifting gear include crucible pallet；Drawbar is provided with below the crucible pallet；The drawbar passes through the bottom of single crystal growing furnace；Institute
State and be provided with crucible rotation system below single crystal growing furnace；The drawbar is connected with crucible rotation drive system；
The single crystal growing furnace intracavity bottom is provided with annular convex platform；It is provided with the inner ring of the annular convex platform and annular convex platform
The rotary sleeve of thread fitting；The rotary sleeve is connected with crucible pallet by clutch；The drawbar passes through rotary sleeve；It is described to drag
Bar is provided with centre bore；Pull rod is provided with the centre bore, is provided between one end of the pull rod and the bottom of centre bore
First spring, and one end of pull rod is provided with and extends drawbar, the slide bar that can be slided up and down along drawbar axis；
The other end of the pull rod, which is provided with, extends drawbar, and the compression bar that can be slided up and down along drawbar axis；It is described
The mandril contacted with clutch is provided with compression bar.
Further, it is provided with second spring between rotary sleeve and the single crystal growing furnace intracavity bottom；The second spring position
In in annular convex platform.
Further, it is provided with gasket between the second spring and rotary sleeve.
Further, it is provided with drawbar set between drawbar and the monocrystalline furnace bottom.
The beneficial effects of the utility model are：The lifting gear of single crystal growing furnace silica crucible described in the utility model due to
Monocrystalline furnace bottom sets annular convex platform, rotary sleeve is set in annular convex platform, rotary sleeve is connected with crucible pallet by clutch；
So that the folding by controlling clutch, the crucible rotation system having in itself using single crystal growing furnace, realize quartzy earthenware
The position of crucible in the vertical direction in single crystal growing furnace is adjusted.Consequently facilitating in single crystal growing furnace monocrystalline silicon taking-up, easy to equipment
Installation and debugging.
Brief description of the drawings
Fig. 1 is the structure diagram of the lifting gear of single crystal growing furnace silica crucible in the utility model embodiment；
Indicated in figure：1- single crystal growing furnaces, 2- insulation covers, 3- silica crucibles, 4- crucible pallets, 5- drawbars, 6- rotary sleeves, 7- rings
Shape boss, 8- second springs, 9- gaskets, 10- clutches, 11- pull rods, 12- compression bars, 13- drawbar sets, the first springs of 14-, 15-
Crucible rotation system, 16- slide bars.
Embodiment
The utility model is further illustrated with reference to the accompanying drawings and examples.
As shown in Figure 1, the lifting gear of single crystal growing furnace silica crucible described in the utility model, is arranged in single crystal growing furnace 1, institute
State and insulation cover 2 is provided with the inner wall of 1 inner cavity of single crystal growing furnace；The interior intracavitary of the single crystal growing furnace 1 is provided with silica crucible 3；Its feature
It is：The lifting gear of silica crucible includes crucible pallet 4；The lower section of crucible pallet 4 is provided with drawbar 5；The drawbar 5 is worn
Cross the bottom of single crystal growing furnace 1；The lower section of single crystal growing furnace 1 is provided with crucible rotation system 15；The drawbar 5 and crucible rotation system 15
It is sequentially connected；
1 intracavity bottom of single crystal growing furnace is provided with annular convex platform 7；It is provided with the inner ring of the annular convex platform 7 and annular
The rotary sleeve 6 of 7 thread fitting of boss；The rotary sleeve 6 is connected with crucible pallet 4 by clutch 10；The drawbar 5 passes through rotation
Pivoted housing 6；The drawbar 5 is provided with centre bore；Pull rod 11, one end of the pull rod 11 and centre bore are provided with the centre bore
Bottom between be provided with the first spring 14, and one end of pull rod 11 is provided with and extends drawbar 5, can be along 5 axis of drawbar
The slide bar 16 of lower slider；
The other end of the pull rod 11, which is provided with, extends drawbar 5, and the compression bar that can be slided up and down along 5 axis of drawbar
12；The mandril contacted with clutch 10 is provided with the compression bar 12.
Specifically, one end of pull rod 11, which is provided with, extends drawbar 5, the slide bar 16 that can be slided up and down along 5 axis of drawbar；
The wherein described slide bar 16 to be slided up and down along 5 axis of drawbar, refers to that slide bar 16 can be along 5 axis of drawbar together with pull rod 11
Lower slider；The other end of the pull rod 11, which is provided with, extends drawbar 5, and the compression bar 12 that can be slided up and down along 5 axis of drawbar；
The compression bar 12 that can be wherein slided up and down along 5 axis of drawbar；It is that thumb lever 12 drives pull rod 11 together can be along 5 axis of drawbar
Lower slider.
The other end of the pull rod 11, which is provided with, extends drawbar 5, and the compression bar that can be slided up and down along 5 axis of drawbar
12；The mandril contacted with clutch 10 is provided with the compression bar 12.
During application：
Compression bar 12 is pulled by sliding 16 pull rod 11 of slide bar, controls clutch 10 to close by compression bar 12, so that
Obtain rotary sleeve 6 to be connected as one with crucible pallet 4 so that rotary sleeve 6 can rotate together with crucible pallet 4.Due to described
The rotary sleeve 6 with 7 thread fitting of annular convex platform is provided with the inner ring of annular convex platform 7；Therefore rotary sleeve 6 is relative to annular convex platform
During 7 rotation, rotary sleeve 6 can stretch out annular convex platform 7 and jack up crucible pallet 4 so that silica crucible 3 raises, or rotary sleeve 6 is taken in
To annular convex platform 7 so that the height reduction of silica crucible 3.So as to fulfill the adjusting to 3 height of silica crucible.
By the adjusting to 3 height of silica crucible, optimum height position of the silica crucible 3 in single crystal growing furnace 1 can be tested out
Put, easy to the installation and debugging to silica crucible 3.At the same time easy to carry out work a period of time, not blow-on is carried out to silica crucible 3
Timely correct adjustment.
In conclusion the lifting gear of single crystal growing furnace silica crucible described in the utility model in monocrystalline furnace bottom due to setting
Annular convex platform, sets rotary sleeve in annular convex platform, and rotary sleeve is connected with crucible pallet by clutch；It is so that logical
Cross control clutch folding, the crucible rotation system having in itself using single crystal growing furnace, realize silica crucible in single crystal growing furnace
Position on vertical direction is adjusted.Consequently facilitating in single crystal growing furnace monocrystalline silicon taking-up, easy to the installation and debugging to equipment.
In order to enable structure is more stablized, 6 natural rotation of rotary sleeve is avoided to decline, further, the rotary sleeve 6 and list
Second spring 8 is provided between brilliant 1 intracavity bottom of stove；The second spring 8 is located in annular convex platform 7.
In order to avoid second spring 8, second spring 8 is followed and rotated together in 6 rotation process of rotary sleeve, further institute
State and gasket 9 is provided between second spring 8 and rotary sleeve 6.
In order to avoid drawbar 5 causes the abrasion between drawbar 5 and single crystal growing furnace 1 in rotary course；Further, it is described to drag
Drawbar set 13 is provided between 1 bottom of bar 5 and single crystal growing furnace.
Claims (4)
1. the lifting gear of single crystal growing furnace silica crucible, is arranged in single crystal growing furnace (1), is set on the inner wall of single crystal growing furnace (1) inner cavity
It is equipped with insulation cover (2)；The interior intracavitary of the single crystal growing furnace (1) is provided with silica crucible (3)；It is characterized in that：The liter of silica crucible
Falling unit includes crucible pallet (4)；Drawbar (5) is provided with below the crucible pallet (4)；The drawbar (5) passes through single crystal growing furnace
(1) bottom；Crucible rotation system (15) is provided with below the single crystal growing furnace (1)；The drawbar (5) and crucible rotation system
(15) it is sequentially connected；
Single crystal growing furnace (1) intracavity bottom is provided with annular convex platform (7)；It is provided with the inner ring of the annular convex platform (7) and ring
The rotary sleeve (6) of shape boss (7) thread fitting；The rotary sleeve (6) is connected with crucible pallet (4) by clutch (10)；Institute
State drawbar (5) and pass through rotary sleeve (6)；The drawbar (5) is provided with centre bore；Pull rod (11), institute are provided with the centre bore
State and the first spring (14) is provided between one end of pull rod (11) and the bottom of centre bore, and one end of pull rod (11) is provided with and prolongs
Stretch out drawbar (5), the slide bar (16) that can be slided up and down along drawbar (5) axis；
The other end of the pull rod (11), which is provided with, extends drawbar (5), and the compression bar that can be slided up and down along drawbar (5) axis
(12)；The mandril contacted with clutch (10) is provided with the compression bar (12).
2. the lifting gear of single crystal growing furnace silica crucible as claimed in claim 1, it is characterised in that：The rotary sleeve (6) and list
Second spring (8) is provided between brilliant stove (1) intracavity bottom；The second spring (8) is located in annular convex platform (7).
3. the lifting gear of single crystal growing furnace silica crucible as claimed in claim 2, it is characterised in that：The second spring (8) with
Gasket (9) is provided between rotary sleeve (6).
4. the lifting gear of single crystal growing furnace silica crucible as claimed in claim 2, it is characterised in that：The drawbar (5) and monocrystalline
Drawbar set (13) is provided between stove (1) bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721408207.8U CN207347692U (en) | 2017-10-27 | 2017-10-27 | The lifting gear of single crystal growing furnace silica crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721408207.8U CN207347692U (en) | 2017-10-27 | 2017-10-27 | The lifting gear of single crystal growing furnace silica crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207347692U true CN207347692U (en) | 2018-05-11 |
Family
ID=62353161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721408207.8U Active CN207347692U (en) | 2017-10-27 | 2017-10-27 | The lifting gear of single crystal growing furnace silica crucible |
Country Status (1)
| Country | Link |
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| CN (1) | CN207347692U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110541194A (en) * | 2019-10-11 | 2019-12-06 | 王华珍 | Height adjusting device for quartz crucible in single crystal furnace of semiconductor equipment |
| CN110967374A (en) * | 2018-09-29 | 2020-04-07 | 湖南三德科技股份有限公司 | Full-automatic test calorimeter and test method |
| CN110967373A (en) * | 2018-09-29 | 2020-04-07 | 湖南三德科技股份有限公司 | Full-automatic test calorimeter and test method |
| CN113122911A (en) * | 2021-03-29 | 2021-07-16 | 浙江晶阳机电股份有限公司 | Single crystal furnace thermal field heating device and heating method thereof |
-
2017
- 2017-10-27 CN CN201721408207.8U patent/CN207347692U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110967374A (en) * | 2018-09-29 | 2020-04-07 | 湖南三德科技股份有限公司 | Full-automatic test calorimeter and test method |
| CN110967373A (en) * | 2018-09-29 | 2020-04-07 | 湖南三德科技股份有限公司 | Full-automatic test calorimeter and test method |
| CN110541194A (en) * | 2019-10-11 | 2019-12-06 | 王华珍 | Height adjusting device for quartz crucible in single crystal furnace of semiconductor equipment |
| CN113122911A (en) * | 2021-03-29 | 2021-07-16 | 浙江晶阳机电股份有限公司 | Single crystal furnace thermal field heating device and heating method thereof |
| CN113122911B (en) * | 2021-03-29 | 2022-02-18 | 浙江晶阳机电股份有限公司 | Single crystal furnace thermal field heating device and heating method thereof |
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