CN202543383U - Compound feeder used for particle raw material - Google Patents

Compound feeder used for particle raw material Download PDF

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Publication number
CN202543383U
CN202543383U CN2012201139643U CN201220113964U CN202543383U CN 202543383 U CN202543383 U CN 202543383U CN 2012201139643 U CN2012201139643 U CN 2012201139643U CN 201220113964 U CN201220113964 U CN 201220113964U CN 202543383 U CN202543383 U CN 202543383U
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CN
China
Prior art keywords
pull bar
flange
tube
pull rod
feeding cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2012201139643U
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Chinese (zh)
Inventor
尚伟泽
谷守伟
贾海洋
申霖
高树良
沈浩平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianjin Zhonghuan Semiconductor Joint Stock Co Ltd
Original Assignee
Inner Mongolia Zhonghuan Solar Material Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN2012201139643U priority Critical patent/CN202543383U/en
Application granted granted Critical
Publication of CN202543383U publication Critical patent/CN202543383U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model relates to a compound feeder of a straight pull silicon single crystal furnace, and is characterized in that a circle of feeding cylinder flange is arranged on the upper end of a feeding cylinder, and a conical mouth is welded in a cylinder at the lower end of the feeding cylinder; a blanking machine is reverse cone shaped, and the lower end of the blanking machine is a round discharge hole; the upper end of a pull rod sleeve and a flange are welded, the lower end of the pull rod sleeve is arranged in the feeding cylinder, the flange and the feeding cylinder flange at the upper end of the feeding cylinder are connected through a screw and a nut, the lower end of the feeding cylinder and the blanking machine are connected through bayonets which are matched with each other, the lower end of a pull rod penetrates through the pull rod sleeve and is screwed with a sealed frustum arranged in the blanking machine, the pull rod and the pull rod sleeve have a sliding fit, the upper end of the pull rod is inserted into an axial through hole of a heavy punch, and is connected with the heavy punch through a bolt. The compound feeder, provided by the utility model, has better high temperature resistance, splattering of a compound raw material and melted silicon can be effectively avoided, and the compound feeder has the advantages of simple structure, easiness in implementation, simple operation and strong practicability.

Description

Be used for answering of particulate material and add glassware
Technical field
The utility model relates to answering of a kind of straight pulling silicon single crystal furnace and adds glassware, relates in particular to a kind ofly to be used for answering of particulate material and to add glassware.
Background technology
At present, feeding quantity is not enough first in producing in order to solve czochralski silicon monocrystal, improves single stove monocrystalline output, and a lot of manufacturers adopt throws technology again, promptly after changing material first, utilizes to throw device again an amount of raw material is added molten silicon once more.In order farthest to improve the crucible utilization ratio, reduce production costs and enhance productivity, the manufacturer that has then adopts throws technology continuously again.Owing to throw the extensive employing of technology again, develop efficient, practical answering and add glassware and become significant work.
The composite feeding-material of throwing technology again and being adopted comprises block material, particulate material and three kinds of forms of particle.Molten silicon splashes and is prone to injure by a crashing object crucible block material because of volume causes greatly easily, is unfavorable for producing.Particle is generally in the course of processing and obtains, and the amount that can be used for multiple throwing very little.Owing to being easy to control when throwing in, particulate material is used widely.At present, actual production is developed and be applied to the existing multiple feeder of dissimilar composite feeding-materials that is applicable to.Wherein modal device adopts complete quartzy structure, and its resistance to elevated temperatures is good, and discharge port can be at utmost near molten silicon face during operation; Thereby avoid composite feeding-material and molten silicon to splash; But high, the difficult processing of complete quartzy structure manufacturing cost, and quartzy frangible, operational stability is poor.
Patent of invention CN 201277809Y has announced a kind of device of throwing again; This device is structured material with the stainless steel; Low cost of manufacture, be easy to processing; But the hinge of bottom discharge mouth structure and member thereof are complicated, and in hot environment, are prone to produce deformation, so the stability in use of this device is poor.
This device of patent of invention CN102011177A is structured material with the stainless steel, low cost of manufacture, is easy to processing, and the member of bottom discharge mouth is simple; Stable operation; But particulate material directly falls along the frustum side when feeding intake, and feeds intake not concentrate, and feed particles is prone to splash.
Summary of the invention
The purpose of the utility model is to provide answering of a kind of straight pulling silicon single crystal furnace to add glassware; Especially a kind of simple in structure, with low cost and practical stable answering of particulate material that be used for adds glassware, reborns again and throws the problem that raw material, molten silicon splash in the prodn. art again to solve czochralski silicon monocrystal.
The utility model in order to achieve the above object; The technical scheme that is adopted is; A kind ofly be used for answering of particulate material and add glassware, it is characterized in that, comprise weight, latch, screw and nut, flange, pull bar sleeve pipe, pull bar, the tube that feeds intake, blanking device, back cover frustum; The said upper end that feeds intake tube is provided with one and encloses the drum flange that feeds intake, and in the tube of a lower end that feeds intake, is welded with the awl mouth; Said blanking device is an inverted-cone shape, and the lower end is circular discharge port; Said pull bar telescopic upper end and flange welding; Pull bar telescopic lower end places in the tube that feeds intake, and said flange is connected through screw and nut with the drum flange that feeds intake of the tube upper end of feeding intake, and is connected with the bayonet socket that cooperatively interacts between feed intake a lower end and the blanking device; The lower end of said pull bar is passed the seal frustum of pull bar sleeve pipe in being arranged on blanking device and is screwed onto; Pull bar and pull bar sleeve pipe are slidingly matched between the two, and the axially extending bore of weight is inserted in the upper end of pull bar, is connected with weight through latch.
Compare with other known technologies, the utlity model has following advantage:
1. throw device again and processed by unlike material, blanking device adopts high purity quartz to process, and has high-temperature stability preferably, and discharge port can be near molten silicon face, effectively to avoid splashing of multiple throwing raw material, molten silicon when therefore feeding intake.
2. receive the lateral buffering of back cover frustum when the particle composite feeding-material falls, fall into molten silicon again along the blanking device inwall from discharge port.Because the shock absorption of back cover frustum has further been avoided splashing of multiple throwing raw material, molten silicon.
In a word, the utility model has not only effectively been avoided splashing of multiple throwing raw material, molten silicon, and simple in structure, be easy to realize, simultaneously easy and simple to handle, practical.
Description of drawings
Fig. 1 is the utility model structural representation.
Embodiment
As shown in Figure 1; A kind ofly be used for answering of particulate material and add glassware; Comprise weight 1, latch 2, screw and nut 3, flange 4, pull bar sleeve pipe 5, pull bar 6, tube 7, blanking device 8, back cover frustum 9 feed intake; Tube 7 the port that the feeds intake welding one circle drum flange 7-1 that feeds intake is welded with an awl mouthful 7-2 in the tube of tube 7 lower ends that feeds intake; Blanking device 8 is an inverted-cone shape, and the lower end is circular discharge port 8-1; The upper end of pull bar sleeve pipe 5 and flange 4 welding; The lower end of rod bush 5 places in the tube 7 that feeds intake; Flange 4 is connected through screw and nut 3 with the drum flange 7-1 that feeds intake of tube 7 upper ends that feed intake; Feeding intake is connected with the bayonet socket that cooperatively interacts between tube 7 lower ends and the blanking device 8, and the lower end of pull bar 6 is passed pull bar sleeve pipe 5 and is screwed onto with being arranged on the blanking device 8 interior frustums 9 that seal, and pull bar 6 and pull bar sleeve pipe 5 are slidingly matched between the two; The axially extending bore of weight 1 is inserted in the upper end of pull bar 6, is connected with weight 1 through latch 2.
Weight 1, latch 2, screw and nut 3, flange 4, pull bar sleeve pipe 5, pull bar 6, feed intake tube 7 and back cover frustum 9 all adopt stainless steel to process, and blanking device 8 adopts high purity quartzs to process.
Principle of work: on pull bar 6, carry, back cover frustum 9 is sealed awl mouthful 7-2, falls to stop composite feeding-material.When feeding intake, back cover frustum 9 descends with pull bar 6, and awl mouthful 7-2 opens; Simultaneously, exist between proper air between back cover frustum 9 and blanking device 8 inwalls.Composite feeding-material at first receives the buffering of back cover frustum 9 sidewalls when falling, again along blanking device 8 conical inboard wall landings, fall into molten silicon through blanking device 8 circular discharge port 8-1 at last.Because blanking device 8 adopts high purity quartzs to process, guaranteeing to throw again device can make composite feeding-material concentrate and throw in more near molten silicon face, has effectively avoided splashing of raw material and molten silicon in the process that feeds intake.In addition, composite feeding-material receives the buffering of back cover frustum 9 sides and blanking device 8 inwalls successively when falling, and has further avoided splashing of raw material and molten silicon in the process that feeds intake.
Method of use: at first, after changing material and accomplishing, the particle composite feeding-material packed into above-mentionedly adds the glassware tube 7 that feeds intake again, and will add each parts of glassware again and install as described above.Then, utilize seed crystal rope will add the glassware lifting again and place the single crystal growing furnace concubine, wait to take a breath and open the flapper valve between single crystal growing furnace main chamber and concubine after accomplishing, decline seed crystal rope is to adding the glassware plane contact on tube 7 flanges and the single crystal growing furnace concubine inwall boss that feeds intake again.
Then, rising crucible position to fusion silicon liquid level is about 15-20cm with blanking device 8 distances from bottom that add glassware again.
Again it, the about 10cm of decline seed crystal rope, back cover frustum 9 descends thereupon; The welding awl mouthful 7-2 of tube 7 lower end inwalls of feeding intake opens; Composite feeding-material falls through back cover frustum 9 sidewalls buffering, through the space between back cover frustum 9 and blanking device 8 inwalls, along blanking device 8 conical inboard wall landings; Fall into molten silicon through blanking device 8 circular discharge port 8-1 at last, accomplish the process of throwing again.
Through the production practice checking; It is rational in infrastructure, simple, with low cost that the utility model adds glassware again, is easy to make; Stable operation, easy; Utilizing this device to add again and expect that the molten silicon of nothing, raw material splash, given full play to the meliority of the prodn. art of reborning again, is that a kind of universal answering that be worthy to be popularized adds glassware.

Claims (2)

1. one kind is used for answering of particulate material and adds glassware; It is characterized in that; Comprise weight (1), latch (2), screw and nut (3), flange (4), pull bar sleeve pipe (5), pull bar (6), tube (7), a blanking device (8), back cover frustum (9) feed intake; The said upper end that feeds intake tube (7) is provided with one and encloses the drum flange (7-1) that feeds intake, and in the tube of tube (7) lower end that feeds intake, is welded with awl mouthful (7-2); Said blanking device (8) is an inverted-cone shape, and the lower end is circular discharge port (8-1); The upper end of said pull bar sleeve pipe (5) and flange (4) welding; The lower end of pull bar sleeve pipe (5) places in the tube (7) that feeds intake; Said flange (4) is connected through screw and nut (3) with the drum flange that feeds intake (7-1) of tube (7) upper end that feeds intake; Feeding intake is connected with the bayonet socket that cooperatively interacts between tube (7) lower end and the blanking device (8), and the lower end of said pull bar (6) is passed pull bar sleeve pipe (5) and is screwed onto with being arranged on the interior frustum (9) that seals of blanking device (8), and pull bar (6) and pull bar sleeve pipe (5) are slidingly matched between the two; The axially extending bore of weight (1) is inserted in the upper end of pull bar (6), is connected with weight (1) through latch (2).
2. according to claim 1ly be used for answering of particulate material and add glassware; It is characterized in that; Said weight (1), latch (2), screw and nut (3), flange (4), pull bar sleeve pipe (5), pull bar (6), feed intake tube (7) and back cover frustum (9) all adopt stainless steel to process, and said blanking device (8) adopts high purity quartz to process.
CN2012201139643U 2012-03-23 2012-03-23 Compound feeder used for particle raw material Expired - Lifetime CN202543383U (en)

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Application Number Priority Date Filing Date Title
CN2012201139643U CN202543383U (en) 2012-03-23 2012-03-23 Compound feeder used for particle raw material

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Application Number Priority Date Filing Date Title
CN2012201139643U CN202543383U (en) 2012-03-23 2012-03-23 Compound feeder used for particle raw material

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CN202543383U true CN202543383U (en) 2012-11-21

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103849927A (en) * 2012-11-30 2014-06-11 有研半导体材料股份有限公司 Doping device and doping method using vertical pulling method to grow low resistivity single crystal silicon
CN104233467A (en) * 2013-06-11 2014-12-24 Lg矽得荣株式会社 Recharging apparatus
CN104384100A (en) * 2014-10-30 2015-03-04 内蒙古中环光伏材料有限公司 Device and method for removing powder and dust attached to re-put silicon raw materials
CN105133010A (en) * 2015-08-31 2015-12-09 中卫市银阳新能源有限公司 Repeated charging device for single-crystal furnace
CN105821220A (en) * 2016-05-19 2016-08-03 益阳生力材料科技股份有限公司 Antimony ingot feeding method of antimony smelting
CN110869541A (en) * 2017-07-07 2020-03-06 信越半导体株式会社 Refill tube and method for producing single crystal
CN111850679A (en) * 2020-08-14 2020-10-30 内蒙古中环领先半导体材料有限公司 Semiconductor-grade straight-pulling re-casting barrel
CN116377563A (en) * 2023-06-02 2023-07-04 苏州晨晖智能设备有限公司 Monocrystalline silicon feeding method
TWI845224B (en) * 2022-03-24 2024-06-11 中國大陸商中環領先半導體科技股份有限公司 Feeding assembly, single crystal growth device and feeding method having the same

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103849927A (en) * 2012-11-30 2014-06-11 有研半导体材料股份有限公司 Doping device and doping method using vertical pulling method to grow low resistivity single crystal silicon
CN104233467A (en) * 2013-06-11 2014-12-24 Lg矽得荣株式会社 Recharging apparatus
CN104384100B (en) * 2014-10-30 2016-08-24 内蒙古中环光伏材料有限公司 A kind of device and method removing the unqualified and dust adhered on multiple throwing silicon raw material
CN104384100A (en) * 2014-10-30 2015-03-04 内蒙古中环光伏材料有限公司 Device and method for removing powder and dust attached to re-put silicon raw materials
CN105133010B (en) * 2015-08-31 2017-12-26 中卫市银阳新能源有限公司 A kind of single crystal growing furnace composite feeding-material device
CN105133010A (en) * 2015-08-31 2015-12-09 中卫市银阳新能源有限公司 Repeated charging device for single-crystal furnace
CN105821220A (en) * 2016-05-19 2016-08-03 益阳生力材料科技股份有限公司 Antimony ingot feeding method of antimony smelting
CN105821220B (en) * 2016-05-19 2018-04-13 益阳生力材料科技股份有限公司 The antimony slab feed process that a kind of antimony is smelted
CN110869541A (en) * 2017-07-07 2020-03-06 信越半导体株式会社 Refill tube and method for producing single crystal
CN111850679A (en) * 2020-08-14 2020-10-30 内蒙古中环领先半导体材料有限公司 Semiconductor-grade straight-pulling re-casting barrel
CN111850679B (en) * 2020-08-14 2024-08-02 内蒙古中环领先半导体材料有限公司 Semiconductor-level straight-pulling re-casting cylinder
TWI845224B (en) * 2022-03-24 2024-06-11 中國大陸商中環領先半導體科技股份有限公司 Feeding assembly, single crystal growth device and feeding method having the same
CN116377563A (en) * 2023-06-02 2023-07-04 苏州晨晖智能设备有限公司 Monocrystalline silicon feeding method
CN116377563B (en) * 2023-06-02 2023-09-05 苏州晨晖智能设备有限公司 Monocrystalline silicon feeding method

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20210623

Address after: 300384 No.12 Haitai East Road, Huayuan Industrial Zone, New Technology Industrial Park, Binhai New Area, Tianjin

Patentee after: TIANJIN ZHONGHUAN SEMICONDUCTOR Co.,Ltd.

Address before: 010070 the Inner Mongolia Autonomous Region Hohhot Jinqiao Development Zone Industrial two district treasure street

Patentee before: INNER MONGOLIA ZHONGHUAN SOLAR MATERIAL Co.,Ltd.

TR01 Transfer of patent right
CX01 Expiry of patent term

Granted publication date: 20121121

CX01 Expiry of patent term