CN103233266A - Portable silicon rod withdrawing device for increasing feeding amount of single crystal furnace - Google Patents
Portable silicon rod withdrawing device for increasing feeding amount of single crystal furnace Download PDFInfo
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- CN103233266A CN103233266A CN 201310161902 CN201310161902A CN103233266A CN 103233266 A CN103233266 A CN 103233266A CN 201310161902 CN201310161902 CN 201310161902 CN 201310161902 A CN201310161902 A CN 201310161902A CN 103233266 A CN103233266 A CN 103233266A
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- silicon rod
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Abstract
The invention relates to a portable silicon rod withdrawing device for increasing feeding amount of a single crystal furnace. The portable silicon rod withdrawing device comprises a base and a grabbing rod set which is used for clamping a silicon rod; the base can be used for fixing the silicon rod withdrawing device into a window in a subsidiary single crystal furnace room; and grabbing rods can be used for grapping the silicon rod in order to keep the stability of the silicon bar in a moving process. The silicon rod withdrawing device, provided by the invention, effectively solves the problem that a single crystal silicon rod relatively highly swings during rotary lifting, resulting in unstable rotating concentricity of the single crystal silicon rod, and the problem that the crystal rod is excessively long after increasing the feeding amount, and the height of the subsidiary single crystal furnace room is insufficient, thereby the crystal rod cannot be withdrawn normally. Therefore, the device provided by the invention reaches the purposes of increasing the feeding amount of the single furnace, improving the output and production efficiency of equipment of the single crystal furnace, saving the time cost in crystal pulling, reducing the consumption of quartz crucibles and the loss of a graphite component in a thermal field of the single crystal furnace in yield per unit, and greatly reducing the cost.
Description
Technical field
The present invention relates to vertical pulling method (Cz method) single crystal growing furnace accessory technical field, especially a kind of portable silicon rod withdrawing device for increasing charging capacity of single crystal furnace.
Background technology
Domestic for drawing 6-8 inch sun power and semiconductor grade silicon single crystal growing furnace model genus 85 stove series mostly.Its furnace binding basic parameter is;
Main stove cylinder size: Ф 850X1250mm
Flap valve latus rectum: Ф 260mm
Secondary furnace chamber size: Ф 280X2000mm
Draw crystal diameter: φ 6 " 8 "
Melt amount: 65kg--90kg(18 " crucible)
95kg--120kg(20 " crucible)
In actual production process, in order to improve output, reduce production costs, maximally utilise the volume of quartz crucible, satisfying under the situation of manufacturing technique requirent, often adopting increases secondary furnace chamber length, the method that strengthens charging capacity improves the utility value of quartz crucible, but we find in actual production, when the height of the secondary furnace chamber of single crystal growing furnace was above above 2000mm, the pulled crystal silicon rod was swung bigger in rotating and upgrading process, and silicon single crystal rod rotation concentricity is very unstable, often draw out A, the B section, ropy silicon single crystal rod such as dislocation causes damage to enterprise.
On the other hand, with 20 " (inch) quartz crucible draws 6.5 " (inch) monocrystalline the time, owing to be subjected to the restriction of the secondary furnace chamber height of single crystal growing furnace 2000mm, the charging capacity of quartzy crucible can only reach 90kg, and 20 " quartz crucible reality repeatedly charging capacity can reach 120-150kg; the reason that why can not effectively utilize the quartz crucible volume is repeatedly to feed intake can drawing length to surpass 6.5 above " (inch) silicon single crystal rods that finish up of 2100mm, add the length of crystal bar pull head and seed crystal, much larger than the size of secondary furnace chamber 2000mm.
If the space utilization of the ellipse bell (end socket) of single crystal growing furnace master furnace chamber is got up, the lifting simultaneously of secondary furnace chamber and bell unloaded get crystal bar, it is low to be subjected to the anti-lateral stressed intensity of silicon crystal again, slight crystal bar swing and external force effect all might cause the serious rod that falls to pound the stove accident from the thin neck fracture of silicon rod.
Summary of the invention
The technical problem to be solved in the present invention is: overcome the deficiency in the prior art, provide a kind of volume little, simple to operate, the volume gain charging capacity of quartzy crucible can not only be maximally utilised and the portable silicon rod withdrawing device for increasing charging capacity of single crystal furnace of single crystal growing furnace secondary charging technique can also be used for, solve in the prior art silicon single crystal rod and swing greatlyyer in rotating and upgrading process, silicon single crystal rod rotates very problem of unstable of concentricity.
The technical solution adopted for the present invention to solve the technical problems is: the invention provides a kind of portable silicon rod withdrawing device for increasing charging capacity of single crystal furnace, what comprise pedestal and be used for the clamping silicon rod grabs the bar group, described pedestal middle part has through hole, the same side that is positioned at pedestal upper surface, through hole has two upper protruding blocks, described upper protruding block and bolt thread are connected in the upper protruding block center, and described bolt end is connected with the activity orientation piece; Described activity orientation piece has two stationary positioned pieces with respect to the correspondence position of through hole, and the stationary positioned piece is fixedly connected on pedestal upper surface; Described pedestal lower surface has two lower protruding blocks that are oppositely arranged, be equipped with rotation axis between the described lower protruding block, described rotation axis middle part is hinged with first connecting rod and second connecting rod, described first connecting rod end is hinged with third connecting rod, the second connecting rod end is hinged with the 4th connecting rod, third connecting rod and the 4th interlinking lever end are hinged, four connecting rods constitute quadrilateral structure, first connecting rod and third connecting rod hinged place are hinged with first slide block, second connecting rod and the 4th rod hinge connection place are hinged with second slide block, between first slide block and second slide block adjusting screw(rod) is housed, first slide block and adjusting screw(rod) be for fixedlying connected, and second slide block and adjusting screw(rod) are for being threaded; Describedly grab the through hole that the bar group is passed described pedestal, described first of the bar group of grabbing is grabbed bar and second and is grabbed bar and fixedly connected with second connecting rod with first connecting rod respectively
Further, the equal in length of described first connecting rod, second connecting rod, third connecting rod and the 4th connecting rod.
Further, described adjusting screw(rod) one end is fixedly connected with rotating handles.
Further, the described bar group of grabbing is a pair of semi-circular bar of grabbing.
The invention has the beneficial effects as follows: the present invention has not only effectively solved silicon single crystal rod and has swung bigger in rotating and upgrading process, silicon single crystal rod rotation concentricity is problem of unstable very, and solved because the crystal bar that causes after the increase charging capacity is long, single crystal growing furnace concubine insufficient height, the problem that crystal bar can't normally take out.Thereby realized increasing single stove charging capacity, improved single crystal furnace equipment output and production efficiency, saved the crystal pulling time, reduced the interior quartz crucible consumption of unit output and the loss of thermal field of single crystal furnace graphite piece, the purpose that reduces cost significantly.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1, Fig. 2 are the stereographic maps of the different azimuth of the portable silicon rod withdrawing device for increasing charging capacity of single crystal furnace of the present invention.
Among the figure: 1. pedestal, 2. grab the bar group, 101. through holes, 102. upper protruding blocks, 103. bolt, 104. activity orientation pieces, 105. stationary positioned pieces, 106. lower protruding block, 107. rotation axiss, 108. first connecting rods, 109. second connecting rod, 110. third connecting rods, 111. the 4th connecting rods, 112. first slide block, 113. second slide blocks, 114. adjusting screw(rod)s, 115. rotating handles, 21. first grab bar, and 22. second grab bar.
Embodiment
In conjunction with the accompanying drawings, the present invention is further detailed explanation.These accompanying drawings are the synoptic diagram of simplification, basic structure of the present invention only is described in a schematic way, so it only show the formation relevant with the present invention.
Embodiment
Referring to Fig. 1 and Fig. 2, what the present invention includes pedestal 1 and be used for the clamping silicon rod grabs bar group 2, grabbing bar group 2 is a pair of semi-circular bars of grabbing, comprise that first grabs bar 21 and second and grab bar 22, the pedestal middle part has through hole 101, the same side that is positioned at pedestal 1 upper surface, through hole 101 has two upper protruding blocks 102, and upper protruding block 102 is threadedly connected to upper protruding block 102 centers with bolt 103, and bolt 103 ends are connected with activity orientation piece 104; Activity orientation piece 104 has two stationary positioned pieces 105 with respect to the correspondence position of through hole 101, and stationary positioned piece 105 is fixedly connected on pedestal 1 upper surface; Pedestal 1 lower surface has two lower protruding blocks that are oppositely arranged 106, be equipped with rotation axis 107 between the lower protruding block 106, rotation axis 107 middle parts are hinged with first connecting rod 108 and second connecting rod 109, first connecting rod 108 ends are hinged with third connecting rod 110, second connecting rod 109 ends are hinged with the 4th connecting rod 111, third connecting rod 110 and the 4th connecting rod 111 ends are hinged, four connecting rods constitute quadrilateral structure, first connecting rod 108 is hinged with first slide block 112 with third connecting rod 110 hinged places, second connecting rod 109 and the 4th connecting rod 111 hinged places are hinged with second slide block 113, between first slide block 112 and second slide block 113 adjusting screw(rod) 114 is housed, first slide block 112 and adjusting screw(rod) 114 be for fixedlying connected, and second slide block 113 and adjusting screw(rod) 114 are for being threaded; Grab bar group 1 and pass the through hole 101 of pedestal 1, grab first of bar group 1 and grab bar 21 and second and grab bar 22 and fixedly connected with second connecting rod 109 with first connecting rod 108 respectively.
In the present embodiment, be preferably the equal in length of first connecting rod 108, second connecting rod 109, third connecting rod 110 and the 4th connecting rod 111.
The use of silicon rod withdrawing device is:
1. after the hot leak detection, unscrew 4 screws of concubine wicket, open argon gas valve applying argon gas to normal pressure, close argon gas, 4 screws of concubine wicket of outwarding winding are opened the concubine wicket.
2. promote monocrystalline to concubine, in the concubine wicket, confirm that monocrystalline rises to desired height, if it is no abnormal, the bar group 2 of grabbing of silicon rod withdrawing device is stretched in the concubine wicket, by the stationary positioned piece 105 on the pedestal 1 the silicon rod withdrawing device is fixed on the concubine window, drive activity orientation piece 104 chucking single crystal growing furnace concubine windows by screwing bolt 103, keep silicon rod withdrawing device pedestal 1 closely to fixedly connected with single crystal growing furnace concubine window.By rotating handles 115 rotation adjusting screw(rod)s 114, make first of the bar group 2 of grabbing of silicon rod withdrawing device grab bar 21 and second and grab bar 22 and tightly hold and hold silicon single crystal rod, play the fixedly effect of silicon rod.
3. open auxiliary furnace chamber and furnace cover lifting motor (hydro-pump) rise secondary furnace chamber and bell simultaneously, and slowly revolute pair furnace chamber and bell are to the body of heater side.
Be enlightenment with above-mentioned foundation desirable embodiment of the present invention, by above-mentioned description, the related work personnel can carry out various change and modification fully in the scope that does not depart from this invention technological thought.The technical scope of this invention is not limited to the content on the specification sheets, must determine its technical scope according to the claim scope.
Claims (4)
1. portable silicon rod withdrawing device for increasing charging capacity of single crystal furnace is characterized in that comprising:
Pedestal (1), described pedestal (1) middle part has through hole (101), the same side that is positioned at pedestal (1) upper surface, through hole (101) has two upper protruding blocks (102), described upper protruding block (102) is threadedly connected to upper protruding block (102) center with bolt (103), and described bolt (103) end is connected with activity orientation piece (104); Described activity orientation piece (104) has two stationary positioned pieces (105) with respect to the correspondence position of through hole (101), and stationary positioned piece (105) is fixedly connected on pedestal (1) upper surface; Described pedestal (1) lower surface has two lower protruding blocks that are oppositely arranged (106), be equipped with rotation axis (107) between the described lower protruding block (106), described rotation axis (107) middle part is hinged with first connecting rod (108) and second connecting rod (109), described first connecting rod (108) end is hinged with third connecting rod (110), second connecting rod (109) end is hinged with the 4th connecting rod (111), third connecting rod (110) is hinged with the 4th connecting rod (111) end, four connecting rods constitute quadrilateral structure, first connecting rod (108) is hinged with first slide block (112) with third connecting rod (110) hinged place, second connecting rod (109) is hinged with second slide block (113) with the 4th connecting rod (111) hinged place, between first slide block (112) and second slide block (113) adjusting screw(rod) (114) is housed, first slide block (112) and adjusting screw(rod) (114) be for fixedlying connected, and second slide block (113) and adjusting screw(rod) (114) are for being threaded;
What be used for the clamping silicon rod grabs bar group (2), describedly grab the through hole (101) that bar group (1) is passed described pedestal (1), the described bar group (2) of grabbing comprises that first grabs bar (21) and second and grab bar (22), described first grabs bar (21) fixedlys connected with first connecting rod, and second grabs bar fixedlys connected with second connecting rod (109).
2. the portable silicon rod withdrawing device for increasing charging capacity of single crystal furnace according to claim 1 is characterized in that: the equal in length of described first connecting rod (108), second connecting rod (109), third connecting rod (110) and the 4th connecting rod (111).
3. the portable silicon rod withdrawing device for increasing charging capacity of single crystal furnace according to claim 1, it is characterized in that: described adjusting screw(rod) (114) one ends are fixedly connected with rotating handles (115).
4. the portable silicon rod withdrawing device for increasing charging capacity of single crystal furnace according to claim 1, it is characterized in that: the described bar group (2) of grabbing is a pair of semi-circular bar of grabbing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201310161902 CN103233266A (en) | 2013-05-03 | 2013-05-03 | Portable silicon rod withdrawing device for increasing feeding amount of single crystal furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201310161902 CN103233266A (en) | 2013-05-03 | 2013-05-03 | Portable silicon rod withdrawing device for increasing feeding amount of single crystal furnace |
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| CN103233266A true CN103233266A (en) | 2013-08-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201310161902 Pending CN103233266A (en) | 2013-05-03 | 2013-05-03 | Portable silicon rod withdrawing device for increasing feeding amount of single crystal furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105220236A (en) * | 2014-05-27 | 2016-01-06 | 黄山市东晶光电科技有限公司 | A kind of crystal furnace furnace cover and lifting accessory |
| CN109666969A (en) * | 2019-03-01 | 2019-04-23 | 洛阳德晶智能科技有限公司 | Centralising device and application method when a kind of clamping crystal bar for single crystal growing furnace |
| CN110108641A (en) * | 2019-05-31 | 2019-08-09 | 山东志盈医学科技有限公司 | A kind of device keeping high level of accuracy lifting |
-
2013
- 2013-05-03 CN CN 201310161902 patent/CN103233266A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105220236A (en) * | 2014-05-27 | 2016-01-06 | 黄山市东晶光电科技有限公司 | A kind of crystal furnace furnace cover and lifting accessory |
| CN105220236B (en) * | 2014-05-27 | 2017-09-29 | 黄山市东晶光电科技有限公司 | A kind of crystal oven furnace cover and lifting accessory |
| CN109666969A (en) * | 2019-03-01 | 2019-04-23 | 洛阳德晶智能科技有限公司 | Centralising device and application method when a kind of clamping crystal bar for single crystal growing furnace |
| CN109666969B (en) * | 2019-03-01 | 2023-09-19 | 洛阳德晶智能科技有限公司 | Centering device for single crystal furnace during clamping of crystal bars and use method |
| CN110108641A (en) * | 2019-05-31 | 2019-08-09 | 山东志盈医学科技有限公司 | A kind of device keeping high level of accuracy lifting |
| CN110108641B (en) * | 2019-05-31 | 2024-01-30 | 山东志盈医学科技有限公司 | Device for maintaining high-precision horizontal lifting |
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Application publication date: 20130807 |