CN207347705U - The erecting device of single crystal growing furnace silica crucible - Google Patents
The erecting device of single crystal growing furnace silica crucible Download PDFInfo
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- CN207347705U CN207347705U CN201721408252.3U CN201721408252U CN207347705U CN 207347705 U CN207347705 U CN 207347705U CN 201721408252 U CN201721408252 U CN 201721408252U CN 207347705 U CN207347705 U CN 207347705U
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- crucible
- single crystal
- silica crucible
- crystal growing
- growing furnace
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Abstract
It is easy to position in silica crucible installation process the utility model discloses one kind, while improves the erecting device of the single crystal growing furnace silica crucible of the silica crucible efficiency of heating surface.The erecting device of the single crystal growing furnace silica crucible, is arranged in single crystal growing furnace, and insulation cover is provided with the inner wall of the monocrystalline furnace chamber；The interior intracavitary of the single crystal growing furnace is provided with silica crucible and graphite heater；The erecting device of silica crucible includes crucible pallet；The crucible tray bottom is provided with drawbar；The drawbar passes through the bottom of single crystal growing furnace；The crucible pallet has and silica crucible is matched pulls the melody；The through hole that connection is pulled the melody is provided with the crucible pallet；The outer surface of the pot body sets fluted；Alignment pin is provided with the crucible pallet；The alignment pin is extended in the groove of pot body outer surface through crucible pallet.Using the erecting device of the single crystal growing furnace silica crucible installation of silica crucible can be easy to position, improve the efficiency of heating surface of silica crucible.
Description
Technical field
The crucible technique that the utility model is related in single crystal growing furnace improves, the installation dress of especially a kind of single crystal growing furnace silica crucible
Put.
Background technology
It is well-known：Silica crucible has strong high-purity, temperature tolerance, the big precision height of size, good heat preservation performance, saving energy
The advantages that source, stable quality, application is more and more extensive.Especially produce the important component in the single crystal growing furnace of monocrystalline silicon.It is but existing
In some single crystal growing furnaces, silica crucible is fixedly mounted in single crystal growing furnace by crucible pallet, and the bottom of a pan of silica crucible is located at crucible
In pallet, therefore during heating, the bottom of a pan heating of silica crucible is slower；Need heating crucible pallet first, Ran Houtong
Cross crucible pallet and transfer heat to silica crucible；So as to which the efficiency of heating surface is relatively low.Simultaneously because process of the silica crucible in work
In need to rotate, it is therefore desirable to ensure the center line of silica crucible and the centerline collineation of drawbar, avoid occurring in rotation process
Silica crucible eccentric rotary.
Utility model content
Technical problem to be solved in the utility model is to provide one kind and is easy to position in silica crucible installation process, at the same time
Improve the erecting device of the single crystal growing furnace silica crucible of the silica crucible efficiency of heating surface.
Technical solution is used by the utility model solves its technical problem：The erecting device of single crystal growing furnace silica crucible,
It is arranged in single crystal growing furnace, insulation cover is provided with the inner wall of the monocrystalline furnace chamber；The interior intracavitary of the single crystal growing furnace is provided with stone
English crucible and graphite heater；The erecting device of silica crucible includes crucible pallet；The crucible tray bottom, which is provided with, drags
Bar；The drawbar passes through the bottom of single crystal growing furnace；The silica crucible bottom is the bottom of a pan, more than bottom is pot body；
The crucible pallet has and silica crucible is matched pulls the melody, and the crucible pallet is pulled the melody the opening extension having
To the pot body position of silica crucible；The through hole that connection is pulled the melody is provided with the crucible pallet；
The outer surface of the pot body sets fluted；Alignment pin is provided with the crucible pallet；The alignment pin
In the groove for extending to pot body outer surface through crucible pallet.
Further, graphite heating rod is provided with the through hole.
Further, the silica crucible bottom is provided with centering boss, and the crucible tray bottom is provided with and centering
Boss is matched to further groove.
Further, it is provided with drawbar set between drawbar and the monocrystalline furnace bottom.
The beneficial effects of the utility model are：The erecting device of single crystal growing furnace silica crucible described in the utility model due to
Positioning pin is provided with crucible pallet, while sets in the pot body of silica crucible fluted, therefore is passed through in installation process
Positioning pin, can be easy to the installation of silica crucible to position；Through hole is provided with crucible pallet at the same time, so that silica crucible
Base section is directly exposed to heating environment energy, can realize and crucible bottom is directly heated, so as to improve quartzy earthenware
The efficiency of heating surface of crucible.
Brief description of the drawings
Fig. 1 is the structure diagram of the erecting device of single crystal growing furnace silica crucible in the utility model embodiment；
Fig. 2 is that installation graphite adds in the crucible pallet of the erecting device of single crystal growing furnace silica crucible in the utility model embodiment
The structure diagram of hot pin；
Indicated in figure：1- single crystal growing furnaces, 2- insulation covers, 3- graphite heaters, 4- silica crucibles, 5- crucible pallets, 51- lead to
Hole, 6- positioning pins, 7- drawbars, 8- drawbar sets.
Embodiment
The utility model is further illustrated with reference to the accompanying drawings and examples.
As shown in Figure 1, the erecting device of single crystal growing furnace silica crucible described in the utility model, is arranged in single crystal growing furnace 1, institute
State and insulation cover 2 is provided with the inner wall of 1 inner cavity of single crystal growing furnace；The interior intracavitary of the single crystal growing furnace 1 is provided with silica crucible 4 and graphite
Heater 3；The erecting device of silica crucible includes crucible pallet 5；5 bottom of crucible pallet is provided with drawbar 7；The drawbar
7 pass through the bottom of single crystal growing furnace 1；4 bottom of silica crucible is the bottom of a pan 41, more than bottom is pot body 42；
The crucible pallet 5 has and silica crucible 4 is matched pulls the melody, and the crucible pallet 5 is pulled the melody the opening having
Extend to 42 position of pot body of silica crucible 4；The through hole 51 that connection is pulled the melody is provided with the crucible pallet 5；
The outer surface of the pot body 42 sets fluted；Alignment pin 6 is provided with the crucible pallet 5；The positioning
Axis pin 6 is extended in the groove of 42 outer surface of pot body through crucible pallet 5.
In the installation process to silica crucible：
Silica crucible 4 is placed into the pulling the melody of crucible pallet 5, then by rotating silica crucible 4 so that crucible pallet
Positioning pin on 5 is inserted into the groove of 4 outer surface of silica crucible, so as to fulfill silica crucible 4 on crucible pallet 5
Installation positioning.
Simultaneously because the through hole 51 that connection is pulled the melody is provided with the crucible pallet 5；So that the bottom of a pan of silica crucible 4
Part is directly exposed in the heating environment of 1 inner cavity of single crystal growing furnace, so as to fulfill directly heating for the bottom of a pan 41 to silica crucible 4,
Improve the efficiency of heating surface.
In conclusion the erecting device of single crystal growing furnace silica crucible described in the utility model on crucible pallet due to setting
There is positioning pin, while set in the pot body of silica crucible fluted, therefore can be easy to by positioning pin in installation process
The installation positioning of silica crucible；Through hole is provided with crucible pallet at the same time, so that the base section of silica crucible is directly sudden and violent
Heating environment energy is exposed at, can realize and crucible bottom is directly heated, so as to improve the efficiency of heating surface of silica crucible.
For the ease of the heating in the bottom of a pan 41 to silica crucible 4, further, graphite heating is provided with the through hole 51
Rod 9.
For the ease of the centering in 4 installation process of silica crucible, avoid occurring in silica crucible rotation process eccentric；Into one
Step, 4 bottom of silica crucible is provided with centering boss 43, and 5 bottom of crucible pallet is provided with and centering boss 43
Match somebody with somebody to further groove.
In order to avoid drawbar 7 causes the abrasion between drawbar 7 and single crystal growing furnace 1 in rotary course；Further, it is described to drag
Drawbar set 8 is provided between 1 bottom of bar 7 and single crystal growing furnace.
Claims (4)
1. the erecting device of single crystal growing furnace silica crucible, is arranged in single crystal growing furnace (1), is set on the inner wall of single crystal growing furnace (1) inner cavity
It is equipped with insulation cover (2)；The interior intracavitary of the single crystal growing furnace (1) is provided with silica crucible (4) and graphite heater (3)；Its feature
It is：The erecting device of silica crucible includes crucible pallet (5)；Crucible pallet (5) bottom is provided with drawbar (7)；It is described
Drawbar (7) passes through the bottom of single crystal growing furnace (1)；Silica crucible (4) bottom is the bottom of a pan (41), more than bottom is pot body (42)；
The crucible pallet (5) has and silica crucible (4) is matched pulls the melody, and the crucible pallet (5) is pulled the melody opening of having
Mouth extends to pot body (42) position of silica crucible (4)；The through hole (51) that connection is pulled the melody is provided with the crucible pallet (5)；
The outer surface of the pot body (42) sets fluted；Alignment pin (6) is provided with the crucible pallet (5)；It is described fixed
Position axis pin (6) is extended in the groove of pot body (42) outer surface through crucible pallet (5).
2. the erecting device of single crystal growing furnace silica crucible as claimed in claim 1, it is characterised in that：Set in the through hole (51)
There is heating graphite rod (9).
3. the erecting device of single crystal growing furnace silica crucible as claimed in claim 2, it is characterised in that：Silica crucible (4) bottom
Portion is provided with centering boss (43), and crucible pallet (5) bottom is provided with matched to further groove with centering boss (43).
4. the erecting device of single crystal growing furnace silica crucible as claimed in claim 2, it is characterised in that：The drawbar (7) and monocrystalline
Drawbar set (8) is provided between stove (1) bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721408252.3U CN207347705U (en) | 2017-10-27 | 2017-10-27 | The erecting device of single crystal growing furnace silica crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721408252.3U CN207347705U (en) | 2017-10-27 | 2017-10-27 | The erecting device of single crystal growing furnace silica crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207347705U true CN207347705U (en) | 2018-05-11 |
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ID=62353183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721408252.3U Active CN207347705U (en) | 2017-10-27 | 2017-10-27 | The erecting device of single crystal growing furnace silica crucible |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113122911A (en) * | 2021-03-29 | 2021-07-16 | 浙江晶阳机电股份有限公司 | Single crystal furnace thermal field heating device and heating method thereof |
-
2017
- 2017-10-27 CN CN201721408252.3U patent/CN207347705U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113122911A (en) * | 2021-03-29 | 2021-07-16 | 浙江晶阳机电股份有限公司 | Single crystal furnace thermal field heating device and heating method thereof |
| CN113122911B (en) * | 2021-03-29 | 2022-02-18 | 浙江晶阳机电股份有限公司 | Single crystal furnace thermal field heating device and heating method thereof |
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