CN113122911B - Single crystal furnace thermal field heating device and heating method thereof - Google Patents
Single crystal furnace thermal field heating device and heating method thereof Download PDFInfo
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- CN113122911B CN113122911B CN202110334151.0A CN202110334151A CN113122911B CN 113122911 B CN113122911 B CN 113122911B CN 202110334151 A CN202110334151 A CN 202110334151A CN 113122911 B CN113122911 B CN 113122911B
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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Abstract
The invention discloses a heating device of a thermal field of a single crystal furnace and a heating method thereof. According to the heating device, the base moves downwards by rotating the second rotating handle, so that the reference disc and the heating element generate a gap to place the quartz cover on the reference disc, the traditional mode that the quartz cover is dispersed into a plurality of parts and is placed from the upper side of the heating element is replaced, the operation is convenient, and the efficiency is improved; through rotating adjusting screw for the levelness of benchmark dish changes, replaces traditional gasket to adjust, convenient and fast.
Description
Technical Field
The invention relates to the field of single crystal furnaces, in particular to a heating device of a thermal field of a single crystal furnace and a heating method thereof.
Background
The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by using a Czochralski method.
When the quartz cover is placed in the heating element, all the components need to be disassembled and then placed from the upper part of the heating element in the traditional operation method, so that the operation is complicated and inconvenient; after the quartz cover is placed, the levelness of the quartz cover and the coaxiality of the quartz cover and the seed rod need to be adjusted, in the prior art, a gasket is usually placed below a reference part for adjustment, the operation is inconvenient, the accuracy is low, the requirement can be met only by adjusting the gasket, the efficiency is low, and the labor intensity of workers is high; need pack the sand in quartz cover after the calibration, traditional adoption ladle adds, and is inefficient, and the sand is very easily unrestrained moreover.
Disclosure of Invention
The invention aims to provide a single crystal furnace thermal field heating device and a heating method thereof.A base moves downwards by rotating a second rotating handle, so that a gap is generated between a reference disc and a heating element to place a quartz cover on the reference disc, the traditional method that the quartz cover is dispersed into a plurality of parts and put in the parts from the upper part of the heating element is replaced, the operation is convenient, the efficiency is improved, and the second rotating handle is rotated to insert the quartz cover into the heating element; adjusting a nut on the second threaded rod to adjust the levelness of the heating element, wherein the heating element and the seed rod are coaxial; the levelness of the reference disc is changed by rotating the adjusting screw rod, the traditional gasket adjustment is replaced, and the device is convenient and quick; moving the quartz cover to ensure that the axis of the quartz cover is the same as the axis of the seed rod, so that the quartz cover can be heated synchronously; filling sand into the quartz cover, filling sand into a placing area of the filling piece, lifting and pulling the lifting piece, sleeving the matching groove on the first support ring, loosening the lifting piece, allowing the sand to enter the quartz cover, observing the sand filling condition from the observation port, lifting and pulling the lifting piece, retaining the sand by the retaining piece, taking down the filling piece, replacing the traditional method of filling by using a spoon, and being convenient and rapid and avoiding spilling; leveling sand in the quartz cover, placing a crucible on the sand, wherein the crucible is positioned in the middle of the quartz cover; filling sand around the crucible by the method in S5; close the door body, through rotating first rotation handle, it is spacing to extrude the door body through the extrusion piece, packs graphite to the heating tube intussuseption through the intercommunication hole, replaces traditional tip to pack, is favorable to the even packing of graphite when improving the efficiency of packing, heats through the circular telegram of electrode portion.
The purpose of the invention can be realized by the following technical scheme:
the utility model provides a single crystal growing furnace thermal field heating device, heating device is located the single crystal growing furnace, be equipped with the support frame in the single crystal growing furnace, be equipped with base and regulating part on the support frame, regulating part control base is located and reciprocates on the support frame, is equipped with the benchmark dish on the base, is equipped with array distribution's adjusting screw on the base, and adjusting screw is used for adjusting the levelness of benchmark dish, is equipped with on the support frame and adds heat-insulating material, can dismantle on the heat-insulating material to be equipped with the packing, and the packing is used for filling sand all around to quartz capsule and crucible.
Furthermore, the single crystal furnace comprises a square frame body, one side of the square frame body is rotatably provided with a door body, the other side of the square frame body is provided with a locking piece, the door body comprises a door main body, one side of the door main body is fixedly connected with the square frame body, and the other side of the door main body is provided with symmetrically distributed bayonets.
Furthermore, the locking piece includes a rotation piece and a locking unit, the rotation piece includes a first rotation axis connected with the rotation of the square frame body, a first threaded rod is vertically arranged on the first rotation axis, a first connecting rod is arranged on the locking unit, a first threaded hole matched with the first threaded rod is arranged at one end of the first connecting rod, a first rotation handle is arranged at the other end of the first connecting rod, and an extrusion block is arranged on the first connecting rod.
Furthermore, the support frame includes the supporting disk, is equipped with the second threaded rod of symmetric distribution on the supporting disk, is equipped with first through hole and second through hole on the supporting disk, and the below of supporting disk is equipped with first connecting block, is equipped with the third through hole on the first connecting block.
Furthermore, the regulating part comprises a second rotating shaft and a third rotating shaft, the second rotating shaft is located in the second through hole to rotate, one end of the second rotating shaft is provided with a second rotating handle, the other end of the second rotating shaft is provided with a first bevel gear, the third rotating shaft is located in the third through hole to rotate, one end of the third rotating shaft is provided with a second bevel gear which is meshed with the first bevel gear to transmit, and the other end of the third rotating shaft is provided with a gear.
Further, the base comprises a sliding shaft in sliding connection with the first through hole, a first placing groove is formed in the sliding shaft, a rack which is meshed with the gear for transmission is arranged in the first placing groove, a base main body is arranged at one end of the sliding shaft, second threaded holes which are distributed in an array mode are formed in the base main body, and the adjusting screw is matched with the second threaded holes.
Further, the reference disc is placed on the base main body, and the levelness of the reference disc is adjusted by rotating the adjusting screw rod.
Furthermore, the heating element comprises a heating element, the heating element and the seed crystal rod are coaxial, the heating element comprises heating tubes distributed spirally, two ends of each heating tube are respectively provided with an electrode part, the heating element is provided with second connecting blocks distributed symmetrically, two ends of each second connecting block are respectively provided with a first supporting ring, a communication hole is formed in each second connecting block and communicated with the heating tubes, a second connecting rod is arranged on each second connecting block, and each second connecting rod is provided with a sleeving hole;
the heating member passes through suit hole suit on the second threaded rod, fixes the heating member through the cooperation of second threaded rod and nut, adjusts the levelness of heating member simultaneously.
Furthermore, the filling part comprises a supporting part, intercepting parts distributed in an array mode are rotationally arranged below the supporting part, and a lifting part is arranged on the supporting part;
the supporting piece comprises a conical sleeve and a supporting shell, a second supporting ring is arranged below the conical sleeve, an observation port is arranged above the conical sleeve, the outer wall of the conical sleeve is provided with supporting sleeves distributed in an array manner, sliding holes are formed in the supporting sleeves, and third connecting rods distributed in an array manner are arranged between the second supporting ring and the supporting shell;
a placing area for placing sand is formed between the conical sleeve and the supporting shell, and a flowing area for flowing the sand is formed between the second supporting ring and the supporting shell;
third connecting blocks distributed in an array mode are arranged below the supporting shell, second placing grooves are formed in the third connecting blocks, and rotating connecting holes are formed in the third connecting blocks;
a third support ring is sleeved outside the support shell, a matching groove is arranged below the third support ring, the filling piece is sleeved on the first support ring through the matching groove, and fourth connecting rods distributed in an array manner are arranged between the support shell and the third support ring;
the interception piece comprises interception main bodies, and an annular structure is formed between the interception main bodies and is positioned below the circulation area for interception;
the intercepting body is provided with a connecting column, one side of the intercepting body is provided with a fourth connecting block, a fixing shaft is arranged on the fourth connecting block, and the intercepting part is positioned in the rotating connecting hole through the fixing shaft and rotates;
carry and draw the piece including array distribution's connection rope, the fixed lifting rope that is equipped with of one end of connecting the rope, the other end is fixed in the spliced pole, it is located the sliding hole to connect the rope, lifting rope's one end and connecting rope fastening connection, the other end is equipped with lifting ring, portable lifting ring, the packing part is under the effect of gravity, hold back the piece and hold back to the circulation district, the sand of avoiding placing in the district flows, with the cooperation groove suit back on first supporting ring, hold back the piece and take place to rotate under the pressure effect of gravity and sand, the sand flows from the circulation district.
A heating method of a single crystal furnace thermal field heating device comprises the following steps:
s1 Quartz cover Placement
The second rotating handle is rotated to enable the base to move downwards, so that a gap is formed between the reference disc and the heating element to place the quartz cover on the reference disc, the traditional mode that the quartz cover is dispersed into a plurality of parts to be placed from the upper side of the heating element is replaced, the operation is convenient, the efficiency is improved, and the second rotating handle is rotated to enable the quartz cover to be inserted into the heating element;
s2 horizontal adjustment
Adjusting a nut on the second threaded rod to adjust the levelness of the heating element, wherein the heating element and the seed rod are coaxial;
s3 horizontal adjustment of quartz cover
The levelness of the reference disc is changed by rotating the adjusting screw rod, the traditional gasket adjustment is replaced, and the device is convenient and quick;
s4 axle center adjustment
Moving the quartz cover to ensure that the axis of the quartz cover is the same as the axis of the seed rod, so that the quartz cover can be heated synchronously;
s5 Sand filling
Filling sand into the quartz cover, filling sand into a placing area of the filling piece, lifting and pulling the lifting piece, sleeving the matching groove on the first support ring, loosening the lifting piece, allowing the sand to enter the quartz cover, observing the sand filling condition from the observation port, lifting and pulling the lifting piece, retaining the sand by the retaining piece, taking down the filling piece, replacing the traditional method of filling by using a spoon, and being convenient and rapid and avoiding spilling;
s6 crucible Placement
Leveling sand in the quartz cover, placing a crucible on the sand, wherein the crucible is positioned in the middle of the quartz cover;
s7 filling sand again
Filling sand around the crucible by the method in S5;
s8 heating operation
Close the door body, through rotating first rotation handle, it is spacing to extrude the door body through the extrusion piece, packs graphite to the heating tube intussuseption through the intercommunication hole, replaces traditional tip to pack, is favorable to the even packing of graphite when improving the efficiency of packing, heats through the circular telegram of electrode portion.
The invention has the beneficial effects that:
1. according to the heating device, the base moves downwards by rotating the second rotating handle, so that the reference disc and the heating element generate a gap to place the quartz cover on the reference disc, the traditional mode that the quartz cover is dispersed into a plurality of parts and is placed from the upper side of the heating element is replaced, the operation is convenient, and the efficiency is improved;
2. the heating device adjusts the levelness of the heating element by adjusting the nut on the second threaded rod, and the heating element and the seed crystal rod are coaxial at the moment; the levelness of the reference disc is changed by rotating the adjusting screw rod, the traditional gasket adjustment is replaced, and the device is convenient and quick;
3. according to the heating device, the placing area of the filling piece is filled with sand, the lifting piece is lifted, the matching groove is sleeved on the first support ring, the lifting piece is loosened, the sand enters the quartz cover, the sand filling condition is observed from the observation port, the lifting piece is lifted, the interception piece intercepts the sand, the filling piece is taken down, the traditional spoon filling is replaced, convenience and rapidness are achieved, and the situation that the sand is spilled is avoided.
Drawings
The invention will be further described with reference to the accompanying drawings.
FIG. 1 is a schematic view of the heating apparatus of the present invention;
FIG. 2 is an enlarged view of the structure of FIG. 1 at A according to the present invention;
FIG. 3 is a schematic view of the locking element of the present invention;
FIG. 4 is a schematic view of a portion of the heating apparatus of the present invention;
FIG. 5 is a schematic view of a portion of the heating apparatus of the present invention;
FIG. 6 is a schematic view of the support frame of the present invention;
FIG. 7 is a schematic view of the base structure of the present invention;
FIG. 8 is a schematic view of a heating element construction of the present invention;
FIG. 9 is a schematic view of the packing of the present invention;
FIG. 10 is a schematic view of the packing of the present invention;
FIG. 11 is a cross-sectional view of the filling member of the present invention;
FIG. 12 is a schematic view of the support structure of the present invention;
FIG. 13 is an enlarged view of FIG. 12 at B in accordance with the present invention;
FIG. 14 is a schematic view of the packing of the present invention;
FIG. 15 is a schematic view of the construction of a trap according to the present invention;
fig. 16 is a schematic view of a pull of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The utility model provides a single crystal growing furnace thermal field heating device, heating device is located single crystal growing furnace 1, as shown in figure 1, figure 2, figure 4, figure 5, be equipped with support frame 4 in the single crystal growing furnace 1, be equipped with base 6 and regulating part 5 on the support frame 4, regulating part 5 control base 6 is located and reciprocates on the support frame 4, be equipped with benchmark dish 7 on the base 6, be equipped with array distribution's adjusting screw 10 on the base 6, adjusting screw 10 is used for adjusting the levelness of benchmark dish 7, be equipped with heating member 8 on the support frame 4, can dismantle on the heating member 8 and be equipped with filler 9, filler 9 is used for filling sand around quartz capsule and the crucible.
The single crystal furnace 1 comprises a square frame body 11, a door body 2 is rotatably arranged on one side of the square frame body 11, a locking piece 3 is arranged on the other side of the square frame body, the door body 2 comprises a door main body 21, one side of the door main body 21 is fixedly connected with the square frame body 11, and bayonets 22 which are symmetrically distributed are arranged on the other side of the door main body.
The locking element 3 includes a rotating member 31 and a locking unit 32, as shown in fig. 3, the rotating member 31 includes a first rotating shaft 311 rotatably connected to the square frame 11, a first threaded rod 312 is vertically disposed on the first rotating shaft 311, a first connecting rod 321 is disposed on the locking unit 32, a first threaded hole 323 engaged with the first threaded rod 312 is disposed at one end of the first connecting rod 321, a first rotating handle 322 is disposed at the other end of the first connecting rod 321, and a pressing block 324 is disposed on the first connecting rod 321.
The supporting frame 4 includes a supporting plate 41, as shown in fig. 6, second threaded rods 42 are symmetrically disposed on the supporting plate 41, a first through hole 43 and a second through hole 46 are disposed on the supporting plate 41, a first connecting block 44 is disposed below the supporting plate 41, and a third through hole 45 is disposed on the first connecting block 44.
The adjusting member 5 includes a second rotating shaft 51 and a third rotating shaft 54, the second rotating shaft 51 is located in the second through hole 46 for rotation, one end of the second rotating shaft 51 is provided with a second rotating handle 53, the other end is provided with a first bevel gear 52, the third rotating shaft 54 is located in the third through hole 45 for rotation, one end of the third rotating shaft 54 is provided with a second bevel gear 55 engaged with the first bevel gear for transmission, and the other end is provided with a gear 56.
The base 6 includes a sliding shaft 61 slidably connected to the first through hole 43, as shown in fig. 7, a first placing groove 62 is provided on the sliding shaft 61, a rack 63 engaged with the gear 56 for transmission is provided in the first placing groove 62, a base main body 64 is provided at one end of the sliding shaft 61, second threaded holes 65 distributed in an array are provided on the base main body 64, and the adjusting screw 10 is engaged with the second threaded holes 65.
The reference plate 7 is placed on the base main body 64, and the levelness of the reference plate 7 is adjusted by rotating the adjusting screw 10.
The heating member 8 comprises a heating member, the heating member and the seed rod are coaxial, the heating member comprises a heating tube 81 which is spirally distributed, as shown in fig. 8, two ends of the heating tube 81 are respectively provided with an electrode part 82, the heating member is provided with a second connecting block 83 which is symmetrically distributed, two ends of the second connecting block 83 are respectively provided with a first supporting ring 84, a communicating hole 85 is arranged in the second connecting block 83, the communicating hole 85 is communicated with the heating tube 81, the second connecting block 83 is provided with a second connecting rod 86, and the second connecting rod 86 is provided with a sleeving hole 87.
The heating member 8 is sleeved on the second threaded rod 42 through the sleeving hole 87, the heating member 8 is fixed through the cooperation of the second threaded rod 42 and a nut, and the levelness of the heating member 8 is adjusted simultaneously.
The filling member 9 includes a support member 91, as shown in fig. 9, 10 and 11, an array of retaining members 93 is rotatably disposed below the support member 91, and a pulling member 92 is disposed on the support member 91.
The supporting member 91 includes a conical sleeve 911 and a supporting housing 916, as shown in fig. 12 and 13, a second supporting ring 912 is disposed below the conical sleeve 911, an observation port 913 is disposed above the conical sleeve 911, the supporting sleeves 914 are disposed on the outer wall of the conical sleeve 911 in an array distribution, a sliding hole 915 is disposed in the supporting sleeves 914, and third connecting rods 917 are disposed between the second supporting ring 912 and the supporting housing 916 in an array distribution.
A placing area 94 for placing sand is formed between the conical sleeve 911 and the support housing 916, and a flow-through area 95 for flowing sand is formed between the second support ring 912 and the support housing 916.
The below of support housing 916 is equipped with the third connecting block 9161 that the array distributes, is equipped with second standing groove 9162 on the third connecting block 9161, is equipped with rotation connecting hole 9163 on the third connecting block 9161.
The supporting housing 916 is externally sleeved with a third supporting ring 918, as shown in fig. 14, a fitting groove 9181 is provided below the third supporting ring 918, the filling member 9 is sleeved on the first supporting ring 84 through the fitting groove 9181, and fourth connecting rods 919 are arranged between the supporting housing 916 and the third supporting ring 918 in an array distribution.
The interception member 93 includes interception bodies 931 as shown in fig. 15, and the interception bodies 931 form an annular structure therebetween to intercept below the passing area 95.
Intercept and be equipped with spliced pole 932 on the main part 931, the one side of intercepting main part 931 is equipped with fourth connecting block 933, is equipped with fixed axle 934 on the fourth connecting block 933, intercepts 93 and lies in rotation connecting hole 9163 internal rotation through fixed axle 934.
Carry and draw piece 92 including array distribution's connection rope 921, as shown in fig. 16, the fixed lifting rope 922 that is equipped with of one end of connecting rope 921, the other end is fixed in spliced pole 932, it is located the sliding hole 915 to connect the rope 921, the one end and the connection rope 921 fastening connection of lifting rope 922, the other end is equipped with lifting ring 923, portable lifting ring 923, packing 9 is under the effect of gravity, hold-back 93 holds back to circulation district 95, avoid placing the sand outflow in the district 94, with cooperation groove 9181 suit back on first support ring 84, hold-back 93 takes place to rotate under the pressure effect of gravity and sand, the sand flows out from circulation district 95.
A heating method of a single crystal furnace thermal field heating device comprises the following steps:
s1 Quartz cover Placement
Rotate second twist grip 53 for base 6 moves down, makes benchmark dish 7 and heating member 8 produce the clearance and place the quartz capsule on benchmark dish 7, replaces the tradition to disperse the quartz capsule into a plurality of parts and puts into from the top of heating member 8, and convenient operation is favorable to raising the efficiency, rotates second twist grip 53, makes the quartz capsule insert in the piece that generates heat.
S2 horizontal adjustment
And adjusting the levelness of the heating element 8 by adjusting the nut on the second threaded rod 42, wherein the heating element and the seed rod are coaxial.
S3 horizontal adjustment of quartz cover
Through rotating adjusting screw 10 for the levelness of benchmark dish 7 changes, replaces traditional gasket to adjust, convenient and fast.
S4 axle center adjustment
And moving the quartz cover to ensure that the axis of the quartz cover is the same as the axis of the seed rod, so that the quartz cover can be synchronously heated.
S5 Sand filling
Pack the sand to quartzy cover intussuseption, with the district 94 intussuseption of placing of packing 9 full of sand, carry and draw piece 92, with cooperation groove 9181 suit on first support ring 84, loosen and carry and draw piece 92, in the sand gets into quartzy cover, observe the sand filling condition from observing mouth 913, carry and draw piece 92, hold back 93 and hold back the sand, take off packing 9, replace traditional adoption ladle to fill, convenient and fast avoids unrestrained.
S6 crucible Placement
And (3) leveling sand in the quartz cover, and placing a crucible on the sand, wherein the crucible is positioned in the middle of the quartz cover.
S7 filling sand again
The periphery of the crucible was filled with sand by the method in S5.
S8 heating operation
The door body 2 is closed, the first rotating handle 322 is rotated, the door body 2 is extruded and limited through the extruding block 324, graphite is filled into the heating tube 81 through the communicating hole 85, the traditional end filling is replaced, the filling efficiency is improved, meanwhile, the uniform filling of the graphite is facilitated, and the heating is carried out through the electrifying of the electrode part 82.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.
Claims (10)
1. A heating device for a thermal field of a single crystal furnace is positioned in the single crystal furnace (1) and is characterized in that a support frame (4) is arranged in the single crystal furnace (1), a base (6) and an adjusting piece (5) are arranged on the support frame (4), the adjusting piece (5) controls the base (6) to move up and down on the support frame (4), a reference disc (7) is arranged on the base (6), adjusting screws (10) distributed in an array mode are arranged on the base (6), the adjusting screws (10) are used for adjusting the levelness of the reference disc (7), a heating piece (8) is arranged on the support frame (4), a filling piece (9) is detachably arranged on the heating piece (8), and the filling piece (9) is used for filling sand to the periphery of a quartz cover and a crucible;
the heating element (8) comprises a heating element, the heating element is provided with second connecting blocks (83) which are symmetrically distributed, and two ends of each second connecting block (83) are respectively provided with a first supporting ring (84);
the filling part (9) comprises a support part (91), interception parts (93) distributed in an array manner are rotatably arranged below the support part (91), and a lifting part (92) is arranged on the support part (91);
the support piece (91) comprises a conical sleeve (911) and a support shell (916), and a second support ring (912) is arranged below the conical sleeve (911);
a placing area (94) for placing sand is formed between the conical sleeve (911) and the supporting shell (916), a flowing area (95) for flowing sand is formed between the second supporting ring (912) and the supporting shell (916), and third connecting blocks (9161) distributed in an array are arranged below the supporting shell (916);
a third support ring (918) is sleeved outside the support shell (916), a matching groove (9181) is arranged below the third support ring (918), and the filling piece (9) is sleeved on the first support ring (84) through the matching groove (9181);
the interception member (93) comprises interception bodies (931), and an annular structure is formed between the interception bodies (931) and positioned below the flowing area (95) for interception;
the intercepting main body (931) is provided with a connecting column (932), one side of the intercepting main body (931) is provided with a fourth connecting block (933), the fourth connecting block (933) is provided with a fixing shaft (934), and the intercepting part (93) is positioned in the rotating connecting hole (9163) to rotate through the fixing shaft (934);
the lifting piece (92) comprises connecting ropes (921) distributed in an array manner, one end of each connecting rope (921) is fixedly provided with a lifting rope (922), and the other end of each connecting rope (921) is fixed in a connecting column (932);
filling member (9) are under the effect of gravity, hold back piece (93) convection current district (95) and are held back, avoid placing the sand in district (94) and flow out, with cooperation groove (9181) suit back on first support ring (84), hold back piece (93) and take place to rotate under the pressure effect of gravity and sand, the sand flows out from circulation district (95).
2. The single crystal furnace thermal field heating device according to claim 1, wherein the single crystal furnace (1) comprises a square frame body (11), one side of the square frame body (11) is rotatably provided with a door body (2), the other side of the square frame body is provided with a locking piece (3), the door body (2) comprises a door main body (21), one side of the door main body (21) is fixedly connected with the square frame body (11), and the other side of the door main body is provided with symmetrically distributed bayonets (22).
3. The single crystal furnace thermal field heating device according to claim 2, wherein the locking element (3) comprises a rotating member (31) and a locking unit (32), the rotating member (31) comprises a first rotating shaft (311) rotatably connected with the square frame body (11), a first threaded rod (312) is vertically arranged on the first rotating shaft (311), a first connecting rod (321) is arranged on the locking unit (32), one end of the first connecting rod (321) is provided with a first threaded hole (323) matched with the first threaded rod (312), the other end of the first connecting rod is provided with a first rotating handle (322), and the first connecting rod (321) is provided with an extrusion block (324).
4. The single crystal furnace thermal field heating device according to claim 3, wherein the supporting frame (4) comprises a supporting plate (41), second threaded rods (42) are symmetrically distributed on the supporting plate (41), a first through hole (43) and a second through hole (46) are formed in the supporting plate (41), a first connecting block (44) is arranged below the supporting plate (41), and a third through hole (45) is formed in the first connecting block (44).
5. The single crystal furnace thermal field heating device according to claim 4, wherein the adjusting member (5) comprises a second rotating shaft (51) and a third rotating shaft (54), the second rotating shaft (51) is located in the second through hole (46) for rotating, one end of the second rotating shaft (51) is provided with a second rotating handle (53), the other end of the second rotating shaft is provided with a first bevel gear (52), the third rotating shaft (54) is located in the third through hole (45) for rotating, one end of the third rotating shaft (54) is provided with a second bevel gear (55) which is meshed with the first bevel gear for transmission, and the other end of the third rotating shaft is provided with a gear (56).
6. The single crystal furnace thermal field heating device according to claim 5, wherein the base (6) comprises a sliding shaft (61) slidably connected with the first through hole (43), a first placing groove (62) is arranged on the sliding shaft (61), a rack (63) meshed with the gear (56) for transmission is arranged in the first placing groove (62), a base main body (64) is arranged at one end of the sliding shaft (61), second threaded holes (65) distributed in an array are arranged on the base main body (64), and the adjusting screw (10) is matched with the second threaded holes (65).
7. The single crystal furnace thermal field heating device according to claim 6, wherein the reference plate (7) is placed on the base main body (64), and the levelness of the reference plate (7) is adjusted by rotating the adjusting screw (10).
8. The single crystal furnace thermal field heating device according to claim 7, wherein the heating element is coaxial with the seed rod, the heating element comprises heating tubes (81) which are spirally distributed, two ends of each heating tube (81) are respectively provided with an electrode part (82), a communication hole (85) is arranged in the second connecting block (83), the communication hole (85) is communicated with the heating tubes (81), a second connecting rod (86) is arranged on the second connecting block (83), and a sleeving hole (87) is arranged on the second connecting rod (86);
heating member (8) are through suit hole (87) suit on second threaded rod (42), fix heating member (8) through second threaded rod (42) and nut cooperation, adjust the levelness of heating member (8) simultaneously.
9. The single crystal furnace thermal field heating device according to claim 8, wherein an observation opening (913) is arranged above the conical sleeve (911), the outer wall of the conical sleeve (911) is provided with support sleeves (914) distributed in an array, sliding holes (915) are arranged in the support sleeves (914), and third connecting rods (917) distributed in an array are arranged between the second support ring (912) and the support shell (916);
a second placing groove (9162) is formed in the third connecting block (9161), and a rotating connecting hole (9163) is formed in the third connecting block (9161);
fourth connecting rods (919) distributed in an array are arranged between the support shell (916) and the third support ring (918);
the connecting rope (921) is located in the sliding hole (915), one end of the lifting rope (922) is fixedly connected with the connecting rope (921), and the other end of the lifting rope is provided with a lifting ring (923) and a portable lifting ring (923).
10. A heating method using the heating apparatus according to claim 9 for heating, characterized by comprising the steps of:
s1 Quartz cover Placement
The second rotating handle (53) is rotated, so that the base (6) moves downwards, a gap is generated between the reference disc (7) and the heating element (8), the quartz cover is placed on the reference disc (7), the traditional mode that the quartz cover is dispersed into a plurality of parts and placed from the upper side of the heating element (8) is replaced, the operation is convenient, the efficiency is improved, and the second rotating handle (53) is rotated, so that the quartz cover is inserted into the heating element;
s2 horizontal adjustment
Adjusting a nut on the second threaded rod (42) to adjust the levelness of the heating element (8), wherein the heating element and the seed crystal rod are coaxial;
s3 horizontal adjustment of quartz cover
The levelness of the reference disc (7) is changed by rotating the adjusting screw (10), the traditional gasket adjustment is replaced, and the method is convenient and quick;
s4 axle center adjustment
Moving the quartz cover to ensure that the axis of the quartz cover is the same as the axis of the seed rod, so that the quartz cover can be heated synchronously;
s5 Sand filling
Filling sand into the quartz cover, filling sand into a placing area (94) of the filling part (9), lifting and pulling the lifting and pulling part (92), sleeving a matching groove (9181) on the first supporting ring (84), loosening the lifting and pulling part (92), allowing the sand to enter the quartz cover, observing the sand filling condition from an observation port (913), lifting and pulling the lifting and pulling part (92), intercepting the sand by the intercepting part (93), taking down the filling part (9), replacing the traditional method of filling by using a spoon, and being convenient and rapid and avoiding spilling;
s6 crucible Placement
Leveling sand in the quartz cover, placing a crucible on the sand, wherein the crucible is positioned in the middle of the quartz cover;
s7 filling sand again
Filling sand around the crucible by the method in S5;
s8 heating operation
Close door body (2), through rotating first rotation handle (322), extrude spacingly through extrusion piece (324) to door body (2), pack graphite to heating tube (81) through intercommunicating pore (85), replace traditional tip to pack, be favorable to the even packing of graphite when improving the efficiency of filling, heat through electrode portion (82) circular telegram.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB513638A (en) * | 1938-03-08 | 1939-10-18 | Alban Clement Herbert Barchard | Improvements in or relating to means for use in filling sacks or bags |
| CN207347705U (en) * | 2017-10-27 | 2018-05-11 | 乐山新天源太阳能科技有限公司 | The erecting device of single crystal growing furnace silica crucible |
| CN207347692U (en) * | 2017-10-27 | 2018-05-11 | 乐山新天源太阳能科技有限公司 | The lifting gear of single crystal growing furnace silica crucible |
| CN110158149A (en) * | 2019-06-27 | 2019-08-23 | 陈其坚 | Single crystal growing furnace is used in a kind of processing of solar battery raw material |
| CN110359082A (en) * | 2019-08-15 | 2019-10-22 | 胡正阳 | A kind of single crystal growing furnace that thermal field is stable |
-
2021
- 2021-03-29 CN CN202110334151.0A patent/CN113122911B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB513638A (en) * | 1938-03-08 | 1939-10-18 | Alban Clement Herbert Barchard | Improvements in or relating to means for use in filling sacks or bags |
| CN207347705U (en) * | 2017-10-27 | 2018-05-11 | 乐山新天源太阳能科技有限公司 | The erecting device of single crystal growing furnace silica crucible |
| CN207347692U (en) * | 2017-10-27 | 2018-05-11 | 乐山新天源太阳能科技有限公司 | The lifting gear of single crystal growing furnace silica crucible |
| CN110158149A (en) * | 2019-06-27 | 2019-08-23 | 陈其坚 | Single crystal growing furnace is used in a kind of processing of solar battery raw material |
| CN110359082A (en) * | 2019-08-15 | 2019-10-22 | 胡正阳 | A kind of single crystal growing furnace that thermal field is stable |
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