CN110541194A - Height adjusting device for quartz crucible in single crystal furnace of semiconductor equipment - Google Patents
Height adjusting device for quartz crucible in single crystal furnace of semiconductor equipment Download PDFInfo
- Publication number
- CN110541194A CN110541194A CN201910964938.8A CN201910964938A CN110541194A CN 110541194 A CN110541194 A CN 110541194A CN 201910964938 A CN201910964938 A CN 201910964938A CN 110541194 A CN110541194 A CN 110541194A
- Authority
- CN
- China
- Prior art keywords
- single crystal
- crystal furnace
- quartz crucible
- internal thread
- height adjusting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the technical field of semiconductor production equipment, in particular to a height adjusting device for a quartz crucible in a single crystal furnace of semiconductor equipment, which comprises a lifting mechanism, a driving mechanism, a liquid level detection module, a fixing device and a stroke control device which are arranged in the single crystal furnace, wherein the lifting mechanism comprises a lifting screw rod, an internal thread pipe matched with the lifting screw rod and a synchronous gear matched with the internal thread pipe, 4 through holes are uniformly arranged at the center of the bottom of the single crystal furnace, a square is formed among the 4 through holes, a high-temperature-resistant bearing is arranged in each through hole, the middle parts of the 4 internal thread pipes are respectively and fixedly arranged in the corresponding high-temperature-resistant bearings, the upper end of each internal thread pipe with a bearing as a boundary is positioned in the single crystal furnace, the lower end of each internal thread pipe is positioned outside the single crystal furnace, the lifting screw rods are respectively and, 4 synchronous gears are respectively arranged on the lower ends of the corresponding internal thread pipes, and the invention can facilitate the taking out of monocrystalline silicon.
Description
Technical Field
The invention relates to the technical field of semiconductor production equipment, in particular to a height adjusting device for a quartz crucible in a single crystal furnace of semiconductor equipment.
Background
the single crystal furnace is an important processing device in semiconductor production equipment, and comprises a quartz crucible as an important processing part of monocrystalline silicon, but in the existing single crystal furnace, the height of the quartz crucible in the single crystal furnace cannot be adjusted for being fixed in the single crystal furnace, so when the liquid in the quartz crucible is less, the precipitated monocrystalline silicon is positioned at a lower position in the single crystal furnace, the taking-out of the monocrystalline silicon is difficult, the production efficiency is reduced, and the operation steps are complicated.
Disclosure of Invention
The invention aims to provide a height adjusting device for a quartz crucible in a single crystal furnace of semiconductor equipment, which aims to solve the problems of low monocrystalline silicon precipitation efficiency and difficult taking out in the single crystal furnace in the prior art.
In order to achieve the purpose, the invention provides the following technical scheme: a height adjusting device for a quartz crucible in a single crystal furnace of semiconductor equipment comprises a lifting mechanism, a driving mechanism, a liquid level detection module, a fixing device and a stroke control device which are arranged in the single crystal furnace, wherein the lifting mechanism comprises 4 lifting screws, 4 internal thread pipes matched with the lifting screws and 4 synchronous gears matched with the internal thread pipes, 4 through holes are uniformly formed in the center of the bottom of the single crystal furnace, a square is formed among the 4 through holes, a high-temperature-resistant bearing is arranged in each through hole, the middle parts of the 4 internal thread pipes are respectively and fixedly arranged in the corresponding high-temperature-resistant bearings, the upper ends of the internal thread pipes are positioned in the single crystal furnace by taking the bearings as boundaries, the lower ends of the internal thread pipes are positioned outside the single crystal furnace, the lifting screws are respectively and in thread fit with the corresponding internal thread pipes, and the upper ends of the lifting screws are fixedly connected with the, 4 synchronous gears are respectively arranged on the lower ends of the corresponding internal thread pipes,
the driving mechanism comprises a motor, a driving gear and a synchronous belt, the motor is arranged outside the single crystal furnace, the driving gear is arranged on an output shaft of the motor, the driving gear is correspondingly matched with 4 synchronous gears, the synchronous belt is sleeved outside the driving gear and the 4 synchronous gears, the 4 synchronous gears are synchronously linked through the synchronous belt to run simultaneously,
The liquid level detection module is arranged at an opening at the upper end of the single crystal furnace, the detection end of the liquid level detection module faces the quartz crucible and is arranged in the quartz crucible, the stroke control device is arranged outside the single crystal furnace, the signal output end of the liquid level detection module is connected with the input end of the stroke control device, and the output end of the stroke control device is connected with the control end of the motor.
preferably, the lifting screw and the internal threaded pipe are both made of high-temperature-resistant metal.
preferably, the bottom end of the outer part of the single crystal furnace is provided with a mounting frame, the mounting frame is positioned under the synchronous gear, and the motor is fixedly arranged on the mounting frame.
Preferably, the mounting rack is provided with stepped shafts corresponding to the 4 synchronizing gears respectively, and the 4 synchronizing gears are rotatably mounted on the corresponding stepped shafts respectively.
preferably, an automatic tensioning device is arranged on the mounting frame corresponding to the synchronous belt, and a tensioning operation end of the automatic tensioning device abuts against the outer surface of the synchronous belt.
Preferably, automatic tensioning device includes tensioning gyro wheel, adjusting spring, slider and sliding tray, and the sliding tray setting is on the support body, and slider slidable mounting is in the sliding tray, and adjusting spring installs in the sliding tray, and adjusting spring's one end is contradicted in a lateral wall of sliding tray, and adjusting spring's the other end is contradicted on the slider, and about elasticity through adjusting spring, can promote the slider and slide towards the hold-in range direction, and the tensioning gyro wheel rotates and installs on the slider, and the tensioning gyro wheel is vertical setting, and the surface of tensioning gyro wheel is contradicted on the outside surface of hold-in range.
Preferably, the liquid level detection module is a laser liquid level detection sensor.
Preferably, the fixing device comprises a crucible tray and a limiting block, the bottom of the crucible tray is fixedly connected with the lifting screw, the upper portion of the crucible tray is an arc-shaped groove matched with the quartz crucible, and the limiting block is arranged at the center of the arc-shaped groove.
Preferably, the limiting block is arranged in a hemispherical protruding manner, and a limiting groove matched with the limiting block is formed in the position, corresponding to the limiting block, of the bottom of the quartz crucible.
Preferably, the program control device is a PLC motor controller.
Compared with the prior art, the invention has the beneficial effects that: through the matched arrangement of the internal thread pipe and the lifting screw rod, the internal thread pipe can rotate to drive the lifting screw rod to lift, so that the height of the quartz crucible in the single crystal furnace can be adjusted, through 4 mutually matched lifting screw rods and internal thread pipes, the high-stability fixation of the lifting screw rod on the crucible tray is realized, and the condition that the quartz crucible shakes in the lifting adjustment process after the quartz crucible is placed in the crucible tray is avoided;
Through the arrangement of the synchronous belt and the synchronous gear, the synchronous rotation adjustment of the internal thread pipe can be realized, the synchronous operation is realized when 4 lifting screws are lifted, and no height error exists;
Through the arrangement of the bearing, the rotating efficiency of the internal thread pipe can be improved, the energy waste is reduced, the mechanical operation stability is improved, the synchronous gear can be rotationally limited through the arrangement of the stepped shaft, and the conditions that the matching between the synchronous gear and the internal thread pipe is unstable, the synchronous gear rotates and shakes and deviates in the long-time operation process are avoided;
Through the arrangement of the automatic tensioning device, when the synchronous belt becomes loose from the synchronous gear after long-time running, the tensioning adjustment of the synchronous belt can be realized, so that the synchronous belt can be completely meshed with the synchronous gear all the time;
through the matching setting of stopper and spacing groove, can place in the crucible tray at quartz crucible, through the direction setting of stopper and spacing groove for quartz crucible can be totally just to placing in the arc wall of crucible tray, has improved operating efficiency, has avoided the condition of placing the skew of process quartz crucible.
Drawings
FIG. 1 is a schematic cross-sectional view of the present invention;
FIG. 2 is a schematic top view of a synchronizing gear according to the present invention;
FIG. 3 is a matching structure view of the lifting screw and the internal threaded pipe of the present invention;
Fig. 4 is a cross-sectional structural view of the automatic tensioner of the present invention.
In the figure: 1. a single crystal furnace; 2. a quartz crucible; 3. a lifting screw; 4. an internally threaded tube; 5. a synchronizing gear; 6. a high temperature resistant bearing; 7. a motor; 8. a drive gear; 9. a synchronous belt; 10. a mounting frame; 11. a stepped shaft; 12. tensioning the roller; 13. adjusting the spring; 14. a slider; 15. a sliding groove; 16. a crucible tray; 17. a limiting block; 18. a limiting groove; 19. a liquid level detection module; 20. a stroke control device.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 4, the present invention provides a technical solution: a height adjusting device for a quartz crucible in a single crystal furnace of semiconductor equipment comprises a lifting mechanism, a driving mechanism, a liquid level detection module 19, a fixing device and a stroke control device 20 which are arranged in the single crystal furnace 1, wherein the lifting mechanism comprises 4 lifting screws 3, 4 internal thread pipes 4 matched with the lifting screws 3 and 4 synchronizing gears 5 matched with the internal thread pipes 4, 4 through holes are uniformly formed in the center of the bottom of the single crystal furnace 1, a square is formed between the 4 through holes, a high-temperature-resistant bearing 6 is arranged in each through hole, the middle parts of the 4 internal thread pipes 4 are respectively and fixedly arranged in the corresponding high-temperature-resistant bearings 6, the upper ends of the internal thread pipes 4 with the bearings 6 as boundaries are positioned in the single crystal furnace 1, the lower ends of the internal thread pipes are positioned outside the single crystal furnace 1, the lifting screws 3 are respectively and in the corresponding internal thread pipes 4 in a thread matching manner, the upper end of the lifting screw rod 3 is fixedly connected with the bottom of the fixing device, 4 synchronous gears 5 are respectively arranged on the lower ends of the corresponding internal threaded pipes 4,
The driving mechanism comprises a motor 7, a driving gear 8 and a synchronous belt 9, the motor 7 is arranged outside the single crystal furnace 1, the driving gear 8 is arranged on an output shaft of the motor 7, the driving gear 8 is correspondingly matched with 4 synchronous gears 5, the synchronous belt 9 is sleeved outside the driving gear 8 and the 4 synchronous gears 5, the 4 synchronous gears 5 synchronously move by synchronous linkage of the synchronous belt 9, the motor 7 is a servo motor 7, the servo motor 7 can realize accurate rotation adjustment of the synchronous gears 5,
The liquid level detection module 19 is arranged at an opening at the upper end of the single crystal furnace 1, the detection end of the liquid level detection module 19 faces the inside of the quartz crucible 2, the stroke control device 20 is arranged outside the single crystal furnace 1, the signal output end of the liquid level detection module 19 is connected with the input end of the stroke control device 20, and the output end of the stroke control device 20 is connected with the control end of the motor 7.
The lifting screw 3 and the internal threaded pipe 4 are both made of high-temperature-resistant metal.
The outer bottom end of the single crystal furnace 1 is provided with an installation frame 10, the installation frame 10 is located under the synchronous gear 5, and the motor 7 is fixedly arranged on the installation frame 10.
Step shafts 11 are respectively installed on the installation rack 10 corresponding to the positions of the 4 synchronous gears 5, and the 4 synchronous gears 5 are respectively rotatably installed on the corresponding step shafts 11.
An automatic tensioning device is arranged on the mounting frame 10 corresponding to the synchronous belt 9, and a tensioning operation end of the automatic tensioning device abuts against the outer surface of the synchronous belt 9.
Automatic tensioning device includes tensioning gyro wheel 12, adjusting spring 13, slider 14 and sliding tray 15, sliding tray 15 sets up on the support body, 14 slidable mounting of slider are in sliding tray 15, adjusting spring 13 installs in sliding tray 15, and adjusting spring 13's one end is contradicted in a lateral wall of sliding tray 15, adjusting spring 13's the other end is contradicted on slider 14, about elasticity through adjusting spring 13, can promote slider 14 and slide towards hold-in range 9 direction, tensioning gyro wheel 12 rotates and installs on slider 14, and tensioning gyro wheel 12 is vertical setting, tensioning gyro wheel 12's surface is contradicted on the outside surface of hold-in range 9.
the two long side surfaces in the sliding groove 15 are respectively provided with a barrier strip at the upper part of the sliding block 14, and the sliding block 14 is positioned below the barrier strips, so that the sliding block cannot fall off from the sliding groove 15 when sliding in the sliding groove 15.
The liquid level detection module 19 is a laser liquid level detection sensor.
The fixing device comprises a crucible tray 16 and a limiting block 17, the bottom of the crucible tray 16 is fixedly connected with the lifting screw rod 3, the upper portion of the crucible tray 16 is an arc-shaped groove matched with the quartz crucible 2, and the limiting block 17 is installed at the center of the arc-shaped groove.
stopper 17 is the protruding setting of hemisphere, 2 bottoms of quartz crucible be provided with the spacing groove 18 that matches with stopper 17 corresponding to stopper 17 department.
the stroke control device 20 is a PLC motor 7 controller.
Through the technical scheme, when the quartz crucible automatic feeding device is used, the quartz crucible 2 is placed on the crucible tray 16, through the matching guiding of the limiting groove 18 and the limiting block 17, the quartz crucible 2 can be placed on the center position of the crucible tray 16 completely at one time, when monocrystalline silicon is separated out in the quartz crucible 2, liquid level detection is carried out in the quartz crucible 2 through the laser liquid level detection sensor, and a detection signal is output, the PLC motor 7 controller controls the servo motor 7 to operate, so that the servo motor 7 drives the synchronous gear 5 to rotate accurately through the synchronous belt 9, the internal thread pipe 4 drives the lifting screw rod 3 to rise accurately for adjusting the specific height of the quartz crucible 2 in the single crystal furnace 1, when the quartz crucible 2 is taken out from the single crystal furnace 1 for material injection, the servo motor 7 stops operating, after the quartz crucible 2 after the material injection is placed on the tray 16, by the detection of the laser liquid level detection sensor, the controller then controls the servo motor 7 to rotate reversely, so that the height of the quartz crucible 2 is adjusted to be lowered.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A height adjusting device for a quartz crucible in a single crystal furnace of a semiconductor apparatus, characterized in that: the single crystal furnace comprises a lifting mechanism, a driving mechanism, a liquid level detection module, a fixing device and a stroke control device, wherein the lifting mechanism is arranged in the single crystal furnace, the lifting mechanism comprises 4 lifting screws, 4 internal thread pipes matched with the lifting screws and 4 synchronous gears matched with the internal thread pipes, 4 through holes are uniformly formed in the center of the bottom of the single crystal furnace, a square is formed among the 4 through holes, a high-temperature-resistant bearing is arranged in each through hole, the middle parts of the 4 internal thread pipes are respectively and fixedly arranged in the corresponding high-temperature-resistant bearings, the upper ends of the internal thread pipes are positioned in the single crystal furnace by taking the bearings as boundaries, the lower ends of the internal thread pipes are positioned outside the single crystal furnace, the lifting screws are respectively and threadedly arranged in the corresponding internal thread pipes, the upper ends of the lifting screws are fixedly connected with the bottom of the fixing device, and the 4 synchronous gears,
The driving mechanism comprises a motor, a driving gear and a synchronous belt, the motor is arranged outside the single crystal furnace, the driving gear is arranged on an output shaft of the motor, the driving gear is correspondingly matched with 4 synchronous gears, the synchronous belt is sleeved outside the driving gear and the 4 synchronous gears, the 4 synchronous gears are synchronously linked through the synchronous belt to run simultaneously,
The liquid level detection module is arranged at an opening at the upper end of the single crystal furnace, the detection end of the liquid level detection module faces the quartz crucible and is arranged in the quartz crucible, the stroke control device is arranged outside the single crystal furnace, the signal output end of the liquid level detection module is connected with the input end of the stroke control device, and the output end of the stroke control device is connected with the control end of the motor.
2. The height adjusting apparatus of a quartz crucible used in a single crystal furnace of a semiconductor device according to claim 1, wherein: the lifting screw and the internal threaded pipe are both made of high-temperature-resistant metal.
3. The height adjusting apparatus of a quartz crucible used in a single crystal furnace of a semiconductor device according to claim 1, wherein: the outer bottom end of the single crystal furnace is provided with an installation frame, the installation frame is located under the synchronous gear, and the motor is fixedly arranged on the installation frame.
4. the height adjusting apparatus of a quartz crucible used in a single crystal furnace of a semiconductor device according to claim 3, wherein: step shafts are respectively installed on the installation frame corresponding to the positions of the 4 synchronous gears, and the 4 synchronous gears are respectively rotatably installed on the corresponding step shafts.
5. The height adjusting apparatus of a quartz crucible used in a single crystal furnace of a semiconductor device according to claim 4, wherein: an automatic tensioning device is arranged on the mounting frame corresponding to the synchronous belt, and a tensioning operation end of the automatic tensioning device is abutted against the outer surface of the synchronous belt.
6. The height adjusting apparatus of a quartz crucible used in a single crystal furnace of a semiconductor device according to claim 5, wherein: automatic overspeed device tensioner includes tensioning gyro wheel, adjusting spring, slider and sliding tray, the sliding tray sets up on the support body, slider slidable mounting is in the sliding tray, adjusting spring installs in the sliding tray, and adjusting spring's one end is contradicted in a lateral wall of sliding tray, adjusting spring's the other end is contradicted on the slider, about elasticity through adjusting spring, can promote the slider and slide towards the hold-in range direction, the tensioning gyro wheel rotates and installs on the slider, and the tensioning gyro wheel is vertical setting, the surface of tensioning gyro wheel is contradicted on the outside surface of hold-in range.
7. The height adjusting apparatus of a quartz crucible used in a single crystal furnace of a semiconductor device according to claim 1, wherein: the liquid level detection module is a laser liquid level detection sensor.
8. The height adjusting apparatus of a quartz crucible used in a single crystal furnace of a semiconductor device according to claim 1, wherein: the fixing device comprises a crucible tray and a limiting block, the bottom of the crucible tray is fixedly connected with the lifting screw, the upper portion of the crucible tray is an arc-shaped groove matched with the quartz crucible, and the limiting block is arranged at the center of the arc-shaped groove.
9. the height adjusting apparatus of a quartz crucible used in a single crystal furnace of a semiconductor device according to claim 8, wherein: the stopper is the protruding setting of hemisphere, quartz crucible bottom be provided with the spacing groove that matches with the stopper corresponding to stopper department.
10. The height adjusting apparatus of a quartz crucible used in a single crystal furnace of a semiconductor device according to claim 1, wherein: the travel control device is a PLC motor controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910964938.8A CN110541194A (en) | 2019-10-11 | 2019-10-11 | Height adjusting device for quartz crucible in single crystal furnace of semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910964938.8A CN110541194A (en) | 2019-10-11 | 2019-10-11 | Height adjusting device for quartz crucible in single crystal furnace of semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110541194A true CN110541194A (en) | 2019-12-06 |
Family
ID=68715700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910964938.8A Pending CN110541194A (en) | 2019-10-11 | 2019-10-11 | Height adjusting device for quartz crucible in single crystal furnace of semiconductor equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110541194A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111719184A (en) * | 2020-06-28 | 2020-09-29 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and control method thereof |
| CN111999290A (en) * | 2020-08-25 | 2020-11-27 | 淄博纳瑞仪器有限公司 | Automatic dry full-automatic water-soluble acid-base apparatus of colour comparison tube residual moisture |
| CN113684538A (en) * | 2021-08-26 | 2021-11-23 | 哈尔滨科友半导体产业装备与技术研究院有限公司 | Device and method for reducing generation of 4H-SiC polytype defects |
| CN114540940A (en) * | 2022-02-15 | 2022-05-27 | 浙江晶阳机电股份有限公司 | Automatic liquid level measurement and compensation integrated system and method for single crystal furnace |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070256625A1 (en) * | 2000-02-01 | 2007-11-08 | Komatsu Denshi Kinzoku Kabushiki Kaisha | Apparatus for pulling single crystal by CZ method |
| CN201358321Y (en) * | 2009-03-09 | 2009-12-09 | 常州有则科技有限公司 | Rotary lifting shaft of crucible of single crystal furnace |
| CN101988845A (en) * | 2010-07-30 | 2011-03-23 | 西安理工大学 | Device and method for detecting fused silica liquid level by laser curved mirror reflection |
| CN201942788U (en) * | 2010-12-18 | 2011-08-24 | 江阴市华英光伏科技有限公司 | Direct-pulling single crystal furnace crucible rotating and lifting mechanism |
| CN102995111A (en) * | 2012-11-07 | 2013-03-27 | 北京七星华创电子股份有限公司 | Method and device for measuring silicon material liquid level position in single crystal furnace in non-contact manner |
| CN207347692U (en) * | 2017-10-27 | 2018-05-11 | 乐山新天源太阳能科技有限公司 | The lifting gear of single crystal growing furnace silica crucible |
| CN209066048U (en) * | 2018-10-31 | 2019-07-05 | 东海县太阳光新能源有限公司 | The lifting device of single crystal growing furnace silica crucible |
-
2019
- 2019-10-11 CN CN201910964938.8A patent/CN110541194A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070256625A1 (en) * | 2000-02-01 | 2007-11-08 | Komatsu Denshi Kinzoku Kabushiki Kaisha | Apparatus for pulling single crystal by CZ method |
| CN201358321Y (en) * | 2009-03-09 | 2009-12-09 | 常州有则科技有限公司 | Rotary lifting shaft of crucible of single crystal furnace |
| CN101988845A (en) * | 2010-07-30 | 2011-03-23 | 西安理工大学 | Device and method for detecting fused silica liquid level by laser curved mirror reflection |
| CN201942788U (en) * | 2010-12-18 | 2011-08-24 | 江阴市华英光伏科技有限公司 | Direct-pulling single crystal furnace crucible rotating and lifting mechanism |
| CN102995111A (en) * | 2012-11-07 | 2013-03-27 | 北京七星华创电子股份有限公司 | Method and device for measuring silicon material liquid level position in single crystal furnace in non-contact manner |
| CN207347692U (en) * | 2017-10-27 | 2018-05-11 | 乐山新天源太阳能科技有限公司 | The lifting gear of single crystal growing furnace silica crucible |
| CN209066048U (en) * | 2018-10-31 | 2019-07-05 | 东海县太阳光新能源有限公司 | The lifting device of single crystal growing furnace silica crucible |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111719184A (en) * | 2020-06-28 | 2020-09-29 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and control method thereof |
| CN111719184B (en) * | 2020-06-28 | 2021-08-13 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and control method thereof |
| CN111999290A (en) * | 2020-08-25 | 2020-11-27 | 淄博纳瑞仪器有限公司 | Automatic dry full-automatic water-soluble acid-base apparatus of colour comparison tube residual moisture |
| CN113684538A (en) * | 2021-08-26 | 2021-11-23 | 哈尔滨科友半导体产业装备与技术研究院有限公司 | Device and method for reducing generation of 4H-SiC polytype defects |
| CN114540940A (en) * | 2022-02-15 | 2022-05-27 | 浙江晶阳机电股份有限公司 | Automatic liquid level measurement and compensation integrated system and method for single crystal furnace |
| CN114540940B (en) * | 2022-02-15 | 2022-09-23 | 浙江晶阳机电股份有限公司 | Automatic liquid level measurement and compensation integrated device and method for single crystal furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110541194A (en) | Height adjusting device for quartz crucible in single crystal furnace of semiconductor equipment | |
| CN110040431A (en) | Two-row roller pipeline with steering mechanism | |
| CN205387365U (en) | Automatic patch machine of glass | |
| CN205221806U (en) | Lifting device for photovoltaic cell cluster mixer upper mounting plate | |
| CN205290268U (en) | Liftable formula is bracket for pipe prefabrication | |
| CN217228058U (en) | A on-line measuring removing devices for oral solid preparation dress box | |
| CN105417005A (en) | Lifting device for upper platform of automatic layout machine for photovoltaic cell strings | |
| CN102416510B (en) | Linear cutting molybdenum wire tensile force automatic control system and tensile force control method | |
| CN211875544U (en) | Quick adjusting device of beam-pumping unit belt | |
| CN215902932U (en) | Ultra-narrow-pitch wafer-level laser cutting equipment | |
| CN115745377A (en) | Float glass edge roller based on vision system | |
| CN213894110U (en) | Continuous conveying device for mold frames | |
| CN213041466U (en) | Building engineering quality detection device | |
| CN112875183A (en) | Lifting rotary feeding device | |
| CN210085620U (en) | Full-automatic furnace chamber lifting and rotating system | |
| CN221351191U (en) | Continuous transmission structure based on photovoltaic glass defect detection | |
| CN208529865U (en) | A kind of Corrugating Machine that platen is smooth | |
| CN206408098U (en) | A kind of double curved glass forming area roller-way is installed and adjustment structure | |
| CN215325078U (en) | Transmission device is used in medical instrument production | |
| CN215883875U (en) | Be convenient for poor adjustment frock of adjustment formula skylight face | |
| CN219851775U (en) | Cold bending machine with correction mechanism for anti-seismic bracket | |
| CN206418022U (en) | A kind of quartz glass sheet material annealing kiln transmission mechanism | |
| CN220977142U (en) | Coating jacking device | |
| CN218797416U (en) | Solar wafer surface defect detection device based on machine vision | |
| CN218803506U (en) | Rubber roll rubber coating device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |