CN220977142U

CN220977142U - Coating jacking device

Info

Publication number: CN220977142U
Application number: CN202322654898.1U
Authority: CN
Inventors: 请求不公布姓名
Original assignee: Guangdong Lyric Robot Automation Co Ltd
Current assignee: Guangdong Lyric Robot Automation Co Ltd
Priority date: 2023-09-28
Filing date: 2023-09-28
Publication date: 2024-05-17
Anticipated expiration: 2033-09-28

Abstract

The utility model relates to a coating jacking device, which comprises: the coating cavity is used for heating the carrier plate loaded with the product; the jacking mechanisms are arranged below the film coating cavity, and the jacking ends of the jacking mechanisms can be arranged in a lifting manner and can be connected with the film coating cavity; the driving piece is used for driving the plurality of jacking mechanisms to act; the synchronous transmission mechanism is used for connecting the driving piece with the input ends of the plurality of jacking mechanisms and comprises a support, a driving wheel, a plurality of driven wheels and a belt, wherein the driving piece is arranged on the support, the driving wheel is rotationally arranged on the support and is connected with the output end of the driving piece, the plurality of driven wheels are correspondingly connected with the input ends of the plurality of jacking mechanisms, and the belt is wound on the driving wheel and the plurality of driven wheels. According to the utility model, a single driving piece is adopted to drive a plurality of jacking mechanisms to synchronously jack, so that the program dependence is lower, the control difficulty is lower, and the cost is lower.

Description

Coating jacking device

Technical Field

The utility model relates to the field of coating equipment, in particular to a coating jacking device.

Background

The production of the photovoltaic cell needs to carry out coating processing on the silicon wafer, and currently, the PECVD technology is mainly adopted for coating the silicon wafer. In the PECVD process, the silicon wafer is heated to a preset temperature during film coating, infrared heating (non-contact heating) or contact heating is generally adopted, a heating plate positioned in a film coating cavity is lifted by a lifting mechanism in contact heating, the heating plate is contacted with a carrier plate for loading the silicon wafer, and the temperature of the silicon wafer is raised by heating the carrier plate. The existing jacking mechanism adopts a single-point jacking or multi-point jacking mode, wherein the single-point jacking heating plate has the problems of inclination, inconsistent edge jacking height variation and difficult meeting of screw design strength caused by overlarge screw stress. The multipoint jacking heating plate needs to adopt a plurality of servo motors, namely one jacking mechanism is driven by a corresponding servo motor, so that the cost is increased.

Disclosure of utility model

In view of the above, the present utility model provides a plating film jacking device capable of realizing single motor driven multipoint jacking.

The aim of the utility model is achieved by the following technical scheme:

A plating film jacking device comprises: the coating cavity is used for heating the carrier plate loaded with the product; the jacking mechanisms are arranged below the film coating cavity, and the jacking ends of the jacking mechanisms can be arranged in a lifting mode and can extend into the film coating cavity; the driving piece is used for driving a plurality of jacking mechanisms to act; the synchronous transmission mechanism is used for connecting the driving piece with a plurality of input ends of the jacking mechanism and comprises a support, a driving wheel, a plurality of driven wheels and a belt, wherein the driving piece is arranged on the support, the driving wheel is rotationally arranged on the support and is connected with the output end of the driving piece, the driven wheels are correspondingly connected with the plurality of input ends of the jacking mechanism, and the belt is wound on the driving wheel and the driven wheels.

According to the technical scheme, the heating plates in the film coating cavity are supported by the plurality of jacking mechanisms, so that the heating plates can be supported at multiple points, the inclination of the heating plates in the lifting process is effectively reduced, and the heating uniformity of the carrier plate is improved; the driving piece can synchronously drive the plurality of jacking mechanisms to act through the synchronous transmission mechanism, namely, a single driving piece can drive the plurality of jacking mechanisms to synchronously jack, and compared with the control of a plurality of servo motors in transmission, the control method does not need to control the synchronization of the plurality of servo motors, and has lower program dependence, lower control difficulty and lower cost.

Optionally, in one possible implementation manner, the jacking mechanism includes a lifting seat, a screw rod and a jacking rod, the screw rod is rotationally connected with the support, the lifting seat is in threaded connection with the screw rod and is in sliding connection with the support, the jacking rod is arranged on the lifting seat, the top end of the jacking rod is configured as a jacking end of the jacking mechanism, and the driven wheel is connected with the screw rod.

In the above technical scheme, the action wheel passes through the rotation of belt drive follow driving wheel to drive the rotation of screw rod, because with support sliding connection simultaneously with screw rod threaded connection's elevating socket, therefore the screw rod can drive the lift of elevating socket in step when rotatory, thereby drive the lift of jacking rod, above-mentioned simple structure just is stable, only needs the rotation of driving wheel to drive the rotation of action wheel, thereby drives the rotation of a plurality of follow driving wheels, can realize the lift of a plurality of jacking rods.

Optionally, in one possible implementation manner, one end of the screw is rotatably connected with the bracket through a bearing seat, the other end of the screw is connected with an optical axis, the optical axis is connected with the screw through a coupling, and the driven wheel is arranged on the optical axis.

Among the above-mentioned technical scheme, the setting of bearing frame can conveniently install the screw rod on the support, improves the smoothness nature and the stability of screw rod when rotating simultaneously, and the setting of optical axis and shaft coupling is for convenient maintenance, promptly when leading to the transmission inaccuracy because of reasons such as wearing and tearing from the driving wheel, can carry out driven wheel's change through only dismantling the optical axis, and need not dismantle whole screw rod, and the maintenance of later stage is simple and the cost is lower.

Optionally, in one possible implementation, the lifting mechanism further includes a sealing member, and the sealing member is sleeved on the periphery of the lifting rod.

In the technical scheme, the sealing piece is used for sealing the gap between the lifting rod and the coating cavity, so that the coating effect is improved.

Optionally, in one possible implementation manner, the synchronous transmission mechanism further includes a tensioning wheel, and the tensioning wheel is rotatably installed on a moving seat, and the moving seat is slidably disposed on the support.

Among the above-mentioned technical scheme, the take-up pulley can effectively improve belt drive's stability and transmission precision, and the take-up pulley can be adjusted through removing the seat, conveniently realizes the secondary tensioning of belt, can adjust the position of take-up pulley in a flexible way according to the processing condition in the actual course of working.

Optionally, in a possible implementation manner, an adjusting component is disposed on the support and located on one side of the moving seat, the adjusting component includes an adjusting rod and a fixing seat, the adjusting rod is in threaded connection with the fixing seat, and one end of the adjusting rod is connected with the moving seat.

According to the technical scheme, the position of the movable seat can be adjusted through the adjusting assembly, and then the position of the tensioning wheel is adjusted, so that tensioning adjustment of the belt is realized. The adjusting rod is rotated to enable the adjusting rod to rotate relative to the fixed seat, and the movable seat can be driven to slide relative to the support under the action of threads, so that the position of the tensioning wheel is adjusted.

Optionally, in a possible implementation manner, a fixing plate is provided on the support, the driving piece is installed on the fixing plate, and the moving seat is slidably arranged on the fixing plate.

In the technical scheme, the fixing plate is arranged to facilitate the installation of the driving piece and the movable seat, so that the installation of the driving piece and the movable seat is simpler and more convenient

Optionally, in one possible implementation manner, two in-place detection sensors are arranged on the support at intervals on the moving path of the lifting seat, and the lifting seat is provided with an induction piece matched with the in-place detection sensors.

In the technical scheme, the position of the lifting mechanism is detected in real time through the in-place detection sensor, when the driving piece drives the lifting mechanism to lift in place, if the in-place detection sensor does not detect the induction piece, an alarm is sent, namely the lifting mechanism or the synchronous transmission mechanism is possibly abnormal, so that the lifting precision of the lifting mechanism is changed, and the lifting mechanism can be conveniently and timely processed by technicians.

Optionally, in a possible implementation manner, a scale is provided on the support, and a scale pointing to the scale is provided on the lifting seat.

In the technical scheme, the lifting height of the jacking mechanism can be conveniently calibrated through the arrangement of the scales and the scales, so that the positions of the jacking ends of the jacking mechanisms are kept consistent.

Optionally, in one possible implementation manner, the two brackets are two, two lifting mechanisms are connected to opposite sides of each bracket, and the driving piece is disposed on one of the brackets.

Among the above-mentioned technical scheme, the setting of two supports is convenient to match the coating film cavity and installs, and every support corresponds to be provided with two climbing mechanism, so can conveniently make four climbing mechanism set up with respect to the central symmetry of the hot plate in the hot plate coating film cavity, guarantee that the hot plate atress is even when the jacking.

Compared with the prior art, the utility model has the beneficial effects that:

According to the coating jacking device, the heating plates are supported by the jacking mechanisms, so that the heating plates can be supported at multiple points, the inclination of the heating plates in the lifting process is effectively reduced, and the heating uniformity of the carrier plate is improved; the driving piece can synchronously drive the plurality of jacking mechanisms to act through the synchronous transmission mechanism, namely, the single driving piece can drive the plurality of jacking mechanisms to synchronously jack, compared with the control of a plurality of servo motors in transmission, the control of the plurality of servo motors is not needed to be synchronous, the program dependence degree is lower, the control difficulty is lower, and the cost is lower.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic overall structure of an embodiment of the present utility model.

Fig. 2 is a schematic structural view of a support and a lifting mechanism according to an embodiment of the present utility model.

Fig. 3 is a cross-sectional view of the structure shown in fig. 2.

Fig. 4 is a schematic structural view of a movable seat and an adjusting assembly according to an embodiment of the present utility model.

Reference numerals: 1-a film coating cavity; 2-a jacking mechanism; 21-lifting seat; 211-scale; 212-a slider; 213-connecting blocks; 22-screw; 23-lifting the rod; 24-seals; 3-a driving member; 4-a synchronous transmission mechanism; 41-a bracket; 411-fixing plate; 412-scale; 413-a slide rail; 42-driving wheel; 43-driven wheel; 44-tensioning wheel; 5-bearing seats; 6-optical axis; 61-coupling; 7-a movable seat; 71-a fixed shaft; 8-an adjustment assembly; 81-adjusting the rod; 82-fixing seat.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments of the present application. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

Referring to fig. 1, the present embodiment provides a film plating jacking device, including: the coating cavity 1 is used for heating the carrier plate loaded with the product; the jacking mechanisms 2 are arranged below the film coating cavity 1, and the jacking ends of the jacking mechanisms 2 can be arranged in a lifting manner and can extend into the film coating cavity 1 to be connected with a heating plate positioned in the film coating cavity 1; a driving member 3 for driving the plurality of lifting mechanisms 2 to operate; the synchronous transmission mechanism 4 is configured to connect the driving element 3 with input ends of the plurality of jacking mechanisms 2, and includes a support 41, a driving wheel 42, a plurality of driven wheels 43, and a belt (not shown in the figure), where the driving element 3 is disposed on the support 41, the driving wheel 42 is rotatably disposed on the support 41 and connected with output ends of the driving element 3, the plurality of driven wheels 43 are correspondingly connected with the input ends of the plurality of jacking mechanisms 2, and the belt is wound around the driving wheel 42 and the plurality of driven wheels 43. Wherein the driving wheel 42 and the driven wheels 43 are arranged on the same horizontal plane, so that the inclination of the belt during installation can be effectively avoided; the driving member 3 is a motor, and an output shaft of the motor is connected to the driving wheel 42, so as to drive the driving wheel 42 to rotate.

According to the embodiment, the heating plates in the film coating cavity 1 are supported by the plurality of jacking mechanisms 2, so that the multi-point support of the heating plates can be realized, the inclination of the heating plates in the lifting process is effectively reduced, and the heating uniformity of the carrier plate is improved; the driving piece 3 can synchronously drive the plurality of jacking mechanisms 2 to act through the synchronous transmission mechanism 4, namely, the single driving piece 3 can drive the plurality of jacking mechanisms 2 to synchronously jack, and compared with the control of a plurality of servo motors in transmission, the embodiment does not need to control the synchronization of the plurality of servo motors, and has lower program dependence, lower control difficulty and lower cost.

It should be noted that, the film plating of the silicon wafer needs to be performed in the film plating cavity, the carrier plate for loading the silicon wafer can be transmitted in the film plating cavity, the heating plate is arranged in the film plating cavity 1, the lifting mechanism 2 is located below the film plating cavity 1 and is also located below the lifting direction of the heating plate, and the lifting end of the lifting mechanism 2 can extend into the film plating cavity to be connected with the heating plate.

Referring to fig. 2, in one possible implementation, the jacking mechanism 2 includes a lifting seat 21, a screw 22 and a jacking rod 23, the screw 22 is rotationally connected with the bracket 41, the lifting seat 21 is in threaded connection with the screw 22 and is slidably connected with the bracket 41, the jacking rod 23 is disposed on the lifting seat 21, the top end of the jacking rod is configured as the jacking end of the jacking mechanism 2, and the driven wheel 43 is connected with the screw 22. Specifically, the lifting seat 21 is fixedly provided with a sliding block 212, the support 41 is fixedly provided with a sliding rail 413, and the sliding block 212 is slidably arranged on the sliding rail 413, so that the lifting seat 21 can slide along the sliding rail 413, thereby ensuring the stability and accuracy of the movement of the lifting seat 21. In addition, a connecting block 213 is fixedly arranged on the lifting seat 21, and the lifting seat 21 is in threaded connection with the screw 22 through the connecting block 213.

The driving wheel 42 of this embodiment drives the rotation of the driven wheel 43 through the belt, thereby driving the rotation of the screw 22, and the lifting seat 21 in threaded connection with the screw 22 is in sliding connection with the support 41 at the same time, so that the screw 22 can synchronously drive the lifting of the lifting seat 21 while rotating, thereby driving the lifting of the lifting rod 23, and the structure is simple and stable, and only the driving member 3 is required to drive the rotation of the driving wheel 42, thereby driving the rotation of the driven wheels 43, and thus the lifting of the lifting rods 23 can be realized.

Referring to fig. 2 and 3, in one possible implementation, one end of the screw 22 is rotatably connected to the bracket 41 through the bearing block 5, the other end is connected to the optical axis 6, the optical axis 6 is connected to the screw 22 through the coupling 61, and the driven wheel 43 is disposed on the optical axis 6. The bearing seat 5 and the optical axis 6 are respectively disposed at two ends of the screw 22, and the optical axis 6 is an extending end of the screw 22.

The setting of bearing frame 5 can conveniently install screw rod 22 on support 41, improves the smoothness and the stability of screw rod 22 when rotating simultaneously, and the setting of optical axis 6 and shaft coupling 61 is for convenient maintenance, promptly when driven wheel 43 leads to the transmission inaccurate because of wearing and tearing etc. can carry out the change from driving wheel 43 through dismantling optical axis 6 alone, and need not dismantle whole screw rod 22, and later maintenance is simple and the cost is lower.

Referring to fig. 1, in one possible implementation, the jacking mechanism 2 further includes a sealing member 24, where the sealing member 24 is sleeved on the outer periphery of the jacking rod 23. The sealing piece 24 is used for sealing the gap between the lifting rod 23 and the coating cavity, and improving the coating effect. In order to adapt to the frequent lifting of the lifting rod 23, the sealing piece 24 of the embodiment adopts a corrugated pipe, and the connection part of the corrugated pipe and the bottom of the film plating cavity 1 or the lifting seat 21 is provided with corresponding sealing rings to enhance the sealing performance.

Referring to fig. 1 and 4, in one possible implementation, the synchronous transmission mechanism 4 further includes a tensioning wheel 44, where the tensioning wheel 44 is rotatably mounted on a moving seat 7, and the moving seat 7 is slidably disposed on the support 41. The movable base 7 is provided with a fixed shaft 71 for mounting the tension pulley 44.

The tensioning wheel 44 can effectively improve belt transmission stability and transmission precision, and the tensioning wheel 44 can be adjusted through the movable seat 7, so that secondary tensioning of the belt can be conveniently realized, and the position of the tensioning wheel 44 can be flexibly adjusted according to the processing condition in the actual processing process.

Specifically, the tensioning wheels 44 in this embodiment are provided with three tensioning wheels, each tensioning wheel 44 is provided with a corresponding movable seat 7, and the tensioning degree of the belt can be adjusted more flexibly through the arrangement of a plurality of tensioning wheels 44.

Referring to fig. 4, in a possible implementation manner, an adjusting component 8 is disposed on a side of the support 41 located on the moving seat 7, the adjusting component 8 includes an adjusting rod 81 and a fixing seat 82, the adjusting rod 81 is screwed with the fixing seat 82, and one end of the adjusting rod 81 is connected with the moving seat 7. The fixing base 82 is disposed on the bracket 41.

The position of the movable seat 7 can be adjusted through the adjusting component 8, so that the position of the tensioning wheel 44 can be adjusted, and tensioning adjustment of the belt can be realized. The adjusting rod 81 is rotated by rotating the adjusting rod 81, so that the adjusting rod 81 rotates relative to the fixed seat 82, and the movable seat 7 can be driven to slide relative to the bracket 41 under the action of the screw thread, so that the position of the tensioning wheel 44 is adjusted.

Referring to fig. 1, in one possible implementation, the bracket 41 is provided with a fixing plate 411, the driving member 3 is mounted on the fixing plate 411, and the moving seat 7 is slidably disposed on the fixing plate 411. The driving piece 3 and the movable seat 7 can be respectively arranged on two opposite surfaces of the fixed plate 411, and the fixed plate 411 can facilitate the installation of the driving piece 3 and the movable seat 7, so that the installation of the driving piece 3 and the movable seat 7 is simpler and more convenient

In one possible implementation, two in-place detection sensors are arranged on the support 41 at intervals on the moving path of the lifting seat 21, and the lifting seat 21 is provided with a sensing piece matched with the in-place detection sensors. The in-place detection sensor can determine the position of the elevating seat 21 by detecting the position of the sensing piece.

In this embodiment, the position of the lifting mechanism 2 is detected in real time by the in-place detection sensor, and after the driving piece 3 drives the lifting mechanism 2 to lift in place, if the in-place detection sensor does not detect the sensing piece, an alarm is sent, that is, the lifting mechanism 2 or the synchronous transmission mechanism 4 is possibly abnormal, such as loose belts, so that the lifting precision of the lifting mechanism 2 changes, and the lifting mechanism can be conveniently handled by technicians in time.

In one possible implementation, the support 41 is provided with a scale 412, and the lifting base 21 is provided with a scale 211 pointing to the scale 412. The scale 412 may extend in the vertical direction, one end of the scale 211 pointing to the scale 412 is in a pointed arrow structure, and the scale 412 and the scale 211 may be arranged to facilitate the calibration of the lifting height of the jacking mechanism 2, so that the positions of the jacking ends of the jacking mechanisms 2 are kept consistent.

In one possible implementation, the number of the brackets 41 is two, two jacking mechanisms 2 are connected to opposite sides of each bracket 41, and the driving member 3 is arranged on one bracket 41.

The setting of two supports 41 conveniently matches coating film cavity 1 and installs, and every support 41 corresponds to be provided with two climbing mechanism 2, so can conveniently make four climbing mechanism 2 set up with respect to the central symmetry of coating film cavity 1 hot plate, guarantee that the hot plate atress is even when the jacking.

The two brackets 41 of this embodiment are arranged at intervals, the lifting mechanism 2 is arranged on two opposite sides of each bracket 41, the driving piece 3 and the driving wheel 42 are arranged on the fixed plate 411 on the same bracket 41, the fixed plates 411 on the two brackets 41 are provided with the corresponding movable seat 7 and the tensioning wheel 44, and the movable seat 7 and the tensioning wheel 44 can be arranged into one group or two groups.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. In the description of the embodiments of the present application, it should be understood that the terms "upper", "lower", "left", "right", "vertical", "horizontal", etc. indicate orientations or positional relationships based on those shown in the drawings, or orientations or positional relationships that are conventionally put in use of the product of the application, or orientations or positional relationships that are conventionally understood by those skilled in the art, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element to be referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application.

It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a coating film jacking device which characterized in that includes:

the coating cavity is used for heating the carrier plate loaded with the product;

the jacking mechanisms are arranged below the film coating cavity, and the jacking ends of the jacking mechanisms can be arranged in a lifting mode and can extend into the film coating cavity;

The driving piece is used for driving a plurality of jacking mechanisms to act;

The synchronous transmission mechanism is used for connecting the driving piece with a plurality of input ends of the jacking mechanism and comprises a support, a driving wheel, a plurality of driven wheels and a belt, wherein the driving piece is arranged on the support, the driving wheel is rotationally arranged on the support and is connected with the output end of the driving piece, the driven wheels are correspondingly connected with the plurality of input ends of the jacking mechanism, and the belt is wound on the driving wheel and the driven wheels.

2. The plating film jacking device according to claim 1, wherein the jacking mechanism comprises a lifting seat, a screw rod and a jacking rod, the screw rod is rotatably connected with the bracket, the lifting seat is in threaded connection with the screw rod and is in sliding connection with the bracket, the jacking rod is arranged on the lifting seat, the top end of the jacking rod is configured as a jacking end of the jacking mechanism, and the driven wheel is connected with the screw rod.

3. The coating jacking device according to claim 2, wherein one end of the screw is rotatably connected with the bracket through a bearing block, the other end of the screw is connected with an optical axis, the optical axis is connected with the screw through a coupling, and the driven wheel is arranged on the optical axis.

4. The plating film jacking device according to claim 2, wherein the jacking mechanism further comprises a sealing member, and the sealing member is sleeved on the periphery of the jacking rod.

5. The plating film jacking device according to claim 1, wherein the synchronous transmission mechanism further comprises a tensioning wheel rotatably mounted on a movable seat slidably disposed on the bracket.

6. The plating film jacking device according to claim 5, wherein an adjusting assembly is arranged on the support and located on one side of the movable seat, the adjusting assembly comprises an adjusting rod and a fixed seat, the adjusting rod is in threaded connection with the fixed seat, and one end of the adjusting rod is connected with the movable seat.

7. The plating lift-up device of claim 5, wherein the bracket is provided with a fixing plate, the driving member is mounted on the fixing plate, and the movable seat is slidably disposed on the fixing plate.

8. The coating jacking device according to claim 2, wherein two in-place detection sensors are arranged on the support at intervals on the moving path of the lifting seat, and the lifting seat is provided with an induction piece matched with the in-place detection sensors.

9. The coating jacking device according to claim 2, wherein the bracket is provided with scales, and the lifting seat is provided with a scale pointing to the scales.

10. The plating film jacking device according to any one of claims 1 to 9, wherein there are two brackets, two jacking mechanisms are connected to opposite sides of each bracket, and the driving member is provided on one of the brackets.