CN1995484A - Sensor built-out type crystal lifting device - Google Patents
Sensor built-out type crystal lifting device Download PDFInfo
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- CN1995484A CN1995484A CN 200610166878 CN200610166878A CN1995484A CN 1995484 A CN1995484 A CN 1995484A CN 200610166878 CN200610166878 CN 200610166878 CN 200610166878 A CN200610166878 A CN 200610166878A CN 1995484 A CN1995484 A CN 1995484A
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Abstract
The invention discloses a crystal driving device of straight drawing typed crystal growing furnace, wherein the crystal elevating part of external crystal elevating device of sensor contains slow speed motor component, rapid motor, synchronous band component, flexible junction box, photoelectric coder, backing stage gear-worm retarder, after stage gear-worm retarder, rigid junction box, limit block, weight block, balanced arm, rack, weight cavity, elevating cavity, crystal-elevating floor and electric box; the crystal-switching part is composed of multi-band component, conductive slip-ring, crystal-switching magnetic flow, motor rack and crystal-switching motor. The invention improves the reliability of crystal elevating device greatly, which is fit for control automatically.
Description
Technical field
The present invention relates to a kind of crystal-driven device of Czochralski crystal grower, particularly a kind of sensor built-out type crystal lifting device.
Background technology
Czochralski crystal grower is topmost high quality silicon crystal production equipment.According to the crystallization rule of silicon single-crystal, with the starting material heat fused, controlled temperature is slightly higher than the Tc of silicon single-crystal, and the silicon materials after guaranteeing to melt can crystallization at molten surface.By crystal lifting device monocrystalline is slowly proposed liquid level reposefully, make it crystallization, growth, cooling, shaping, forming a main body at last is that right cylinder, afterbody are the crystal of cone.
Crystal lifting device is one of system of crystal growing furnace most critical.It need pass through a flexible axle (wireline), accurately, stably control diameter 6～8 " cylindric silicon single crystal; promote and low speed rotation with the speed of stable and controllable; allow silicon single-crystal grow regularly on request; ooze assorted agent, oxygen level axial and radial distribution is even, with integrity and the homogeneity of guaranteeing final crystal product.In this respect, domestic production producer has done a large amount of technological improvements and raising, but the full-automatic control system that all can't adapt to present crystal furnace, the integrity of crystal product and homogeneity far do not reach the requirement of high quality IC sheet silicon single crystal bar, and majority can only be used for the production of solar cell.
Summary of the invention
Main purpose of the present invention is to overcome deficiency of the prior art, and a kind of sensor built-out type crystal lifting device is provided.
In order to realize the object of the invention, technical scheme provided by the invention is:
The invention provides a kind of sensor built-out type crystal lifting device, comprise brilliant ascending part spare and brilliant rotation member, described brilliant ascending part spare comprises slow speed motor assembly, fast speed motor, is with assembly, flexible coupling, photoelectric encoder, prime worm type of reduction gearing, back level worm type of reduction gearing, rigid coupling device, limited block, balancing weight, balance arm, support, the chamber of weighing, lifting chamber, crystalline substance to rise base plate and electrical box synchronously; Wherein, slow speed motor assembly, prime worm type of reduction gearing, back level worm type of reduction gearing and lifting chamber are screwed at crystalline substance and rise on the base plate, and connect by two flexible couplings and a rigid coupling device respectively, constitute transmission loop at a slow speed; Fast speed motor is screwed in slow speed motor assembly side, connects the output shaft of slow speed motor assembly by synchronous band assembly, and with two worm type of reduction gearings with promote the chamber and constitute quick transmission loop; Photoelectric encoder connects by holding screw with an end of prime worm type of reduction gearing output shaft; Limited block is screwed at crystalline substance and rises on the base plate, connects by being with assembly synchronously with the input shaft that promotes the chamber; Balancing weight is fixed on the balance arm with thru-bolt, can move along the yi word pattern groove of balance arm; Balance arm is screwed on support, can rotate along the deep-slotted chip breaker of support; Support rises base plate with crystalline substance and is screwed; The chamber of weighing is screwed on promote the chamber seal with O ring; Electrical box is screwed at crystalline substance and rises the base plate side.
Described brilliant rotation member comprises cuts band assembly, conducting slip ring, brilliant magnetic fluid, electric machine support and the brilliant rotating motor of changeing more; Wherein, the brilliant magnetic fluid that changes has a tubular shaft that makes progress at bottommost; Conducting slip ring is enclosed within on the tubular shaft of brilliant commentaries on classics magnetic fluid, and the inner ring rotor connects with holding screw with tubular shaft, and the outer ring stator is screwed at crystalline substance changes magnetic fluid one side; Electric machine support is screwed at crystalline substance to be changeed on the magnetic fluid flange; Brilliant rotating motor and electric machine support screw attachment; Duo ?band assembly one end be enclosed within on the brilliant tubular shaft that changes magnetic fluid, respectively with tubular shaft with brilliantly rise bottom plate connecting, the other end is enclosed within on the brilliant rotating motor output shaft with screw, holding screw is fixed; The brilliant tubular shaft that changes magnetic fluid passes conducting slip ring, cuts the band assembly more and rises base plate with brilliant, enters the bottom outlet of vacuum cavity, seal with O ring; Wireline passes the brilliant tubular shaft that changes magnetic fluid in the vacuum cavity, changes from crystalline substance that stomidium passes under the magnetic fluid.
As a kind of improvement of the present invention, described slow speed motor assembly comprises servomotor, harmonic speed reducer, transition connector, speed reduction unit seat, reducer shaft, clutch base, electromagnetic clutch, output shaft and synchronous pulley; Wherein, servomotor, transition connector and speed reduction unit seat screw attachment; The speed reduction unit seat the other end stretches into clutch base, its flange and clutch base screw attachment; Harmonic speed reducer is contained in the speed reduction unit seat, with the axle of servomotor by the axle head screw retention; Electromagnetic clutch connects by reducer shaft with harmonic speed reducer in clutch base; Between output shaft and clutch base bearing is housed, can relatively rotates, the moving plate of electromagnetic clutch and synchronous pulley are enclosed within the both sides of output shaft respectively; Synchronous pulley is synchronously with the part of assembly.
As a kind of improvement of the present invention, described lifting chamber comprises left end cap, vacuum cavity, screw thread guide pin bushing, cable pipe, wireline, press nips, rolling spline pair, right end cap, brilliant magnetic fluid and the synchronous pulley of rising; Wherein, left end cap and right end cap are screwed respectively at vacuum cavity two ends, seal with O ring; Left end cap one end stretches into vacuum cavity, with screw thread guide pin bushing screw attachment; The two ends of rolling spline pair respectively by bearing fixing in left end cap and right end cap centre hole, can freely rotate; The slide block of rolling spline pair can horizontally slip thereon; The slide block screw attachment of cable pipe and rolling spline pair, its left end screw thread is screwed into the screw thread guide pin bushing; Steel wire disk is on the semicircle spiral line of cable pipe right-hand member, and an end embeds in the cable tube seat, and the other end is perpendicular to the bottom outlet center of vacuum cavity; Press nips is screwed in the vacuum cavity side, and seal with O ring, its roller are pushed down the wireline on the cable pipe; Crystalline substance rises magnetic fluid and is screwed on right end cap, seal with O ring, and its hollow shaft sleeve is on rolling spline pair one end axle; Synchronous pulley is enclosed within the axle outer end of rolling spline pair, is synchronously with the part of assembly.
As a kind of improvement of the present invention, the described chamber of weighing comprises cavity, fishplate bar, LOAD CELLS, pulley bracket, pulley cover, pulley, hinge, side cover, sealing aviation plug, nut and top cover; Wherein, fishplate bar and LOAD CELLS screw attachment; LOAD CELLS and pulley bracket pass through thread connection; Pulley and pulley bracket connect by axle; Pulley covers on the pulley top, is fixed on the pulley bracket with pin; Fishplate bar passes the top center hole in cavity, with nut and tight; Top cover is screwed at cavity top, seal with O ring; Side cover is screwed a side outside cavity, seal with O ring; The sealing aviation plug is fixed on the side cover center by screw thread; Hinge one end is fixed on cavity lower end one side, and the other end is fixed on the vacuum cavity side; The chamber of weighing can be rotated relative to promoting the chamber by hinge.
As a kind of improvement of the present invention, described limited block comprises synchronous pulley, switch base, transmission screw, driving nut and limit switch; Wherein, the two ends of transmission screw respectively by bearing fixing in two stomidiums of switch base, can freely rotate; Driving nut connects with transmission screw by screw thread, and the extension bar of one side passes the lateral yi word pattern groove of switch base; Two limit switches are screwed respectively at two ends, switch base side; Synchronous pulley is enclosed within the axle outer end of transmission screw, is synchronously with the part of assembly.
Compared with prior art, beneficial effect of the present invention is:
The present invention is by the rational structure layout, and crystal lift stroke detecting sensor and limit switch all be put into beyond the vacuum cavity, increased substantially the reliability of crystal lifting device, improved the load performance of crystal lifting device, and crystal promotes and the precision and the stationarity of velocity of rotation control, and has adapted to the full automatic control of crystal lifting process.Equip the crystal growing furnace of this crystal lifting device, can realize full automatic control, its crystal product integrity and homogeneity are all very good, can reach the requirement of IC circuit to monocrystal material fully.
Description of drawings
Fig. 1 is a system architecture vertical view in the embodiment of the invention;
Fig. 2 is a system architecture front view in the embodiment of the invention;
Fig. 3 is a slow speed motor assembly assumption diagram in the embodiment of the invention;
Fig. 4 promotes cavity configuration figure in the embodiment of the invention;
Fig. 5 is the cavity configuration figure that weighs in the embodiment of the invention;
Fig. 6 is a limited block structure iron in the embodiment of the invention.
1. slow speed motor assemblies among the figure, 2. fast speed motor 3. is with assembly synchronously, 4. flexible coupling, 5. photoelectric encoder, 6. prime worm type of reduction gearing, 7. level worm type of reduction gearing, 8. rigid coupling device, 9. limited block after, 10. balancing weight, 11. balance arms, 12. supports, the chamber 13. weigh, 14. promote the chamber, the 15. brilliant base plates that rise, 16. electrical box, Duo in the of 17. ?the band assembly, 18. conducting slip rings, 19. brilliant magnetic fluid, 20. electric machine supports, the 21. brilliant rotating motors of changeing, 22. servomotor, 23. harmonic speed reducers, 24. transition connectors, 25. the speed reduction unit seat, 26. reducer shafts, 27. clutch bases, 28. electromagnetic clutch, 29. output shafts, 30. synchronous pulleys, 31. left end cap, 32. vacuum cavities, 33. screw thread guide pin bushings, 34. the cable pipe, 35. wireline, 36. press nips, 37. rolling spline pair, 38. right end caps, the 39. brilliant magnetic fluids that rise, 40. cavity, 41. fishplate bars, 42. LOAD CELLS, 43. pulley bracket, 44. the pulley cover, 45. pulleys, 46. hinges, 47. side cover, 48. the sealing aviation plug, 49. nuts, 50. top covers, 51. switch base, 52. transmission screw, 53. driving nuts, 54. limit switches.
Embodiment
The present invention will be further described below in conjunction with specific embodiment:
The structure of specific embodiment 1 cathetus guide rail type crucible lifting device is shown in Fig. 1 to 6.It it comprise following two parts:
Brilliant ascending part spare: comprise slow speed motor assembly 1, fast speed motor 2 is with assembly 3 synchronously, flexible coupling 4, photoelectric encoder 5, prime worm type of reduction gearing 6, back level worm type of reduction gearing 7, rigid coupling device 8, limited block 9, balancing weight 10, balance arm 11, support 12, the chamber 13 of weighing, promote chamber 14, the brilliant base plate 15, electrical box 16 of rising; Slow speed motor assembly 1, prime worm type of reduction gearing 6, back level worm type of reduction gearing 7 and lifting chamber 14 are screwed at crystalline substance and rise on the base plate 15, and connect by two flexible couplings 4 and a rigid coupling device 8 respectively, constitute transmission loop at a slow speed; Fast speed motor 2 is screwed in slow speed motor assembly 1 side, and its rotation passes to the output shaft 29 of slow speed motor assembly 1 by synchronous band assembly 3, passes to by two worm type of reduction gearings 6,7 and promotes chamber 14, constitutes quick transmission loop; Photoelectric encoder 5 connects by holding screw with an end of prime worm type of reduction gearing 6 output shafts, measures the angle that turns over, thereby further calculates the stroke that wireline 35 promotes or descends; Limited block 9 is screwed at crystalline substance and rises on the base plate 15, and it connects by being with assembly 3 synchronously with the input shaft that promotes chamber 14, transmits synchronous speed; Balancing weight 10 usefulness thru-bolts are fixed on the balance arm 11, can move along the yi word pattern groove of balance arm 11; Balance arm 11 is screwed on support 12, can rotate along the deep-slotted chip breaker of support 12; Support 12 rises base plate 15 with crystalline substance and is screwed, and adjusts the position of balancing weight 10 and balance arm 11, and the center of gravity that crystalline substance can be risen assembly is adjusted to its rotation center, realizes transient equilibrium; The chamber 13 of weighing is screwed on promote chamber 14, seal with O ring, and their mutual group become the part of vacuum enclosed housing; Electrical box 16 is screwed at crystalline substance and rises base plate 15 sides, realizes the electrical control of brilliant ascending part spare.
Brilliant rotation member: comprise Duo ?band assembly 17, conducting slip ring 18, brilliant magnetic fluid 19, electric machine support 20, the brilliant rotating motor 21 of changeing.The brilliant magnetic fluid 19 that changes is at bottommost, and it has a tubular shaft that makes progress, relatively rotating between tubular shaft and housing by ferrofluid seal, and frictional coefficient is little and vacuum-sealing is effective; Conducting slip ring 18 is enclosed within on the tubular shaft of brilliant commentaries on classics magnetic fluid 19, and the inner ring rotor connects with holding screw with tubular shaft, can rotate with tubular shaft, and the outer ring stator is screwed at crystalline substance changes magnetic fluid 19 1 sides; The effect of conducting slip ring 18 is that the electric signal of the brilliant ascending part spare of rotation passes to the lower end fixed part; Electric machine support 20 is screwed at crystalline substance to be changeed on magnetic fluid 19 flanges; Brilliant rotating motor 21 is used screw attachment with electric machine support 20; Cut band assembly 17 1 ends more and be enclosed within on the tubular shaft of brilliant commentaries on classics magnetic fluid 19, rise base plate 15 with tubular shaft and crystalline substance respectively with screw and connect, the other end is enclosed within on brilliant rotating motor 21 output shafts, and holding screw is fixed; The rotation Tong Guo Duo of brilliant rotating motor 21 ?band assembly 17, drive the brilliant tubular shaft that changes magnetic fluid 19 and brilliantly rise base plate 15 and rotate together; The brilliant tubular shaft that changes magnetic fluid 19 pass conducting slip ring 18 ， Duo ?band assembly 17 and brilliantly rise base plate 15, enter the bottom outlet of vacuum cavity 32, seal with O ring; Wireline 35 passes the brilliant tubular shaft that changes magnetic fluid 19 in vacuum cavity 32, change 19 times stomidiums of magnetic fluid from crystalline substance and pass.
Several gordian techniquies of crystal lifting device:
1, slow speed motor components mechanism (as shown in Figure 3): comprise servomotor 22, harmonic speed reducer 23, transition connector 24, speed reduction unit seat 25, reducer shaft 26, clutch base 27, electromagnetic clutch 28, output shaft 29, synchronous pulley 30; Servomotor 22, transition connector 24 and speed reduction unit seat 25 are used screw attachment; Speed reduction unit seat 25 the other ends stretch into clutch base 27, and its flange and clutch base 27 are used screw attachment; Harmonic speed reducer 23 is contained in 25 li of speed reduction unit seats, with the axle of servomotor 22 by the axle head screw retention; Electromagnetic clutch 28 connects by reducer shaft 26 with harmonic speed reducer 23 in clutch base 27; 27 of output shaft 29 and clutch bases are equipped with bearing, can relatively rotate, and the moving plate of electromagnetic clutch 28 and synchronous pulley 30 are enclosed within the both sides of output shaft 29 respectively; Adhesive moving plate during electromagnetic clutch 28 energisings, the rotation of servomotor 22 passes to output shaft 29, transmission loop works at a slow speed after slowing down by harmonic speed reducer 23 vast scales; Throw off moving plate during electromagnetic clutch 28 dead electricity, output shaft 29 is in free state, and the rotation of fast speed motor 2 passes to output shaft 29 by synchronous band assembly 3, fast the transmission loop works.This mechanism has realized the quick switching of Belt Driven by Double Motor, guarantees that two motors all are operated in the optimal performance interval, has improved the load performance and the traveling comfort of crystal lifting device.
2, promote chamber mechanism (as shown in Figure 4): comprise left end cap 31, vacuum cavity 32, screw thread guide pin bushing 33, cable pipe 34, wireline 35, press nips 36, rolling spline pair 37, right end cap 38, the brilliant magnetic fluid 39, synchronous pulley 30 of rising; Left end cap 31 and right end cap 38 are screwed respectively at vacuum cavity 32 two ends, seal with O ring; Left end cap 31 1 ends stretch into vacuum cavity 32, use screw attachment with screw thread guide pin bushing 33; The two ends of rolling spline pair 37 respectively by bearing fixing in left end cap 31 and right end cap 38 centre holes, can freely rotate; The slide block of rolling spline pair 37 can horizontally slip thereon; The slide block screw attachment of cable pipe 34 and rolling spline pair 37, its left end screw thread is screwed into screw thread guide pin bushing 33; Wireline 35 is coiled on the semicircle spiral line of cable pipe 34 right-hand members, and an end embeds in cable pipe 34 grooves, and the other end is walked around the bottom outlet center of pulley 45 backs in the chamber 13 of weighing perpendicular to vacuum cavity 32, enters the brilliant tubular shaft that changes magnetic fluid 19; The pitch of the semicircle spiral line of cable pipe 34 left end screw threads and right-hand member equates, rotation along with rolling spline pair 37, drive 34 rotations of cable pipe, the moving circle wireline 35 of revolution is in 34 coilings of cable pipe or discharge a circle, simultaneously cable pipe 34 phase double thread guide pin bushings 33 are to the right or to pitch of left, have guaranteed that like this wireline 35 promotes perpendicular to the bottom outlet center of vacuum cavity 32 all the time or descends; Press nips 36 is screwed in vacuum cavity 32 sides, and seal with O ring, its roller are pushed down the wireline 35 on the cable pipe 34, prevent its job-hopping; Crystalline substance rises magnetic fluid 39 and is screwed on right end cap 38, seal with O ring, its hollow shaft sleeve plays rotation with one on rolling spline pair 37 1 end axles, tubular shaft and crystalline substance rise relatively rotating by ferrofluid seal between magnetic fluid 39 housings, and frictional coefficient is little and vacuum-sealing is effective; Synchronous pulley 30 is enclosed within the axle outer end of rolling spline pair 37, is synchronously with the part of assembly 3, and it passes to the synchronous speed of rolling spline pair 37 transmission screw 52 of limited block 9.This mechanism has guaranteed wireline 35 stationarities of traction crystal in process of growth and has promoted precision.
3, the chamber mechanism (as shown in Figure 5) of weighing: comprise cavity 40, fishplate bar 41, LOAD CELLS 42, pulley bracket 43, pulley cover 44, pulley 45, hinge 46, side cover 47, sealing aviation plug 48, nut 49, top cover 50; Fishplate bar 41 and LOAD CELLS 42 are used screw attachment; LOAD CELLS 42 and pulley bracket 43 pass through thread connection; Pulley 45 and pulley bracket 43 connects by axle, and wireline 35 is walked around pulley 45, passes perpendicular to the bottom outlet center of vacuum cavity 32, and wireline 35 suffered pulling force are measured by LOAD CELLS 42; Pulley cover 44 is fixed on the pulley bracket 43 with pin above pulley 45, and the protection wireline can not jumped out pulley; Fishplate bar 41 passes the top center hole in cavity 40, with nut 49 and tight; Top cover 50 is screwed at cavity 40 tops, seal with O ring; Side cover 47 is screwed a side outside cavity 40, seal with O ring; Sealing aviation plug 48 is fixed on side cover 47 centers by screw thread, and the signal wire of LOAD CELLS 42 is passed the vacuum-sealing cavity; Hinge 46 1 ends are fixed on cavity 40 lower ends one side, and the other end is fixed on vacuum cavity 32 sides; The chamber 13 of weighing can relatively be rotated in lifting chamber 14 by hinge 46.The effect of this mechanism is the variation by real-time measuring steel wire rope 35 suffered pulling force, the analyzing crystal crystal growth rate, and this is that the full automatic control of crystal growing process is necessary.
4, limited block mechanism (as shown in Figure 6): comprise synchronous pulley 30, switch base 51, transmission screw 52, driving nut 53, limit switch 54; The two ends of transmission screw 52 respectively by bearing fixing in two stomidiums of switch base 51, can freely rotate; Driving nut 53 connects with transmission screw 52 by screw thread, and pitch is identical with screw thread guide pin bushing 33, and the extension bar of one side passes switch base 51 lateral yi word pattern grooves; Two limit switches 54 are screwed respectively at two ends, switch base 51 side; Synchronous pulley 30 is enclosed within the axle outer end of transmission screw 52, is synchronously with the part of assembly 3, and it passes to transmission screw 52 with the synchronous speed of rolling spline pair 37; Transmission screw 52 rotates, and drives driving nut 53 translations, makes the extension bar of one side trigger limit switch 54 to the right or left, thus the limit position that restriction wireline 35 rises or descends.The limit switch 54 that this mechanism promotes crystal moves on to beyond the vacuum-sealing cavity, has made things convenient for spacing adjustment up and down, has also increased vacuum-packed reliability.
Obviously, the invention is not restricted to above embodiment, many distortion can also be arranged.All distortion that those of ordinary skill in the art can directly derive or associate from content disclosed by the invention all should be thought protection scope of the present invention.
Claims (5)
1, a kind of sensor built-out type crystal lifting device comprises brilliant ascending part spare and brilliant rotation member, it is characterized in that:
Described brilliant ascending part spare comprises slow speed motor assembly, fast speed motor, is with assembly, flexible coupling, photoelectric encoder, prime worm type of reduction gearing, back level worm type of reduction gearing, rigid coupling device, limited block, balancing weight, balance arm, support, the chamber of weighing, lifting chamber, crystalline substance to rise base plate and electrical box synchronously; Wherein, slow speed motor assembly, prime worm type of reduction gearing, back level worm type of reduction gearing and lifting chamber are screwed at crystalline substance and rise on the base plate, and connect by two flexible couplings and a rigid coupling device respectively, constitute transmission loop at a slow speed; Fast speed motor is screwed in slow speed motor assembly side, connects the output shaft of slow speed motor assembly by synchronous band assembly, and with two worm type of reduction gearings with promote the chamber and constitute quick transmission loop; Photoelectric encoder connects by holding screw with an end of prime worm type of reduction gearing output shaft; Limited block is screwed at crystalline substance and rises on the base plate, connects by being with assembly synchronously with the input shaft that promotes the chamber; Balancing weight is fixed on the balance arm with thru-bolt, can move along the yi word pattern groove of balance arm; Balance arm is screwed on support, can rotate along the deep-slotted chip breaker of support; Support rises base plate with crystalline substance and is screwed; The chamber of weighing is screwed on promote the chamber seal with O ring; Electrical box is screwed at crystalline substance and rises the base plate side;
Described brilliant rotation member comprise Duo ?band assembly, conducting slip ring, brilliant magnetic fluid, electric machine support and the brilliant rotating motor of changeing; Wherein, the brilliant magnetic fluid that changes has a tubular shaft that makes progress at bottommost; Conducting slip ring is enclosed within on the tubular shaft of brilliant commentaries on classics magnetic fluid, and the inner ring rotor connects with holding screw with tubular shaft, and the outer ring stator is screwed at crystalline substance changes magnetic fluid one side; Electric machine support is screwed at crystalline substance to be changeed on the magnetic fluid flange; Brilliant rotating motor and electric machine support screw attachment; Duo ?band assembly one end be enclosed within on the brilliant tubular shaft that changes magnetic fluid, respectively with tubular shaft with brilliantly rise bottom plate connecting, the other end is enclosed within on the brilliant rotating motor output shaft with screw, holding screw is fixed; The brilliant tubular shaft that changes magnetic fluid pass conducting slip ring ， Duo ?band assembly and brilliantly rise base plate, enter the bottom outlet of vacuum cavity, seal with O ring; Wireline passes the brilliant tubular shaft that changes magnetic fluid in the vacuum cavity, changes from crystalline substance that stomidium passes under the magnetic fluid.
2, sensor built-out type crystal lifting device according to claim 1, it is characterized in that described slow speed motor assembly comprises servomotor, harmonic speed reducer, transition connector, speed reduction unit seat, reducer shaft, clutch base, electromagnetic clutch, output shaft and synchronous pulley; Wherein, servomotor, transition connector and speed reduction unit seat screw attachment; The speed reduction unit seat the other end stretches into clutch base, its flange and clutch base screw attachment; Harmonic speed reducer is contained in the speed reduction unit seat, with the axle of servomotor by the axle head screw retention; Electromagnetic clutch connects by reducer shaft with harmonic speed reducer in clutch base; Between output shaft and clutch base bearing is housed, can relatively rotates, the moving plate of electromagnetic clutch and synchronous pulley are enclosed within the both sides of output shaft respectively; Synchronous pulley is synchronously with the part of assembly.
3, sensor built-out type crystal lifting device according to claim 1, it is characterized in that described lifting chamber comprises left end cap, vacuum cavity, screw thread guide pin bushing, cable pipe, wireline, press nips, rolling spline pair, right end cap, brilliant magnetic fluid and the synchronous pulley of rising; Wherein, left end cap and right end cap are screwed respectively at vacuum cavity two ends, seal with O ring; Left end cap one end stretches into vacuum cavity, with screw thread guide pin bushing screw attachment; The two ends of rolling spline pair respectively by bearing fixing in left end cap and right end cap centre hole, can freely rotate; The slide block of rolling spline pair can horizontally slip thereon; The slide block screw attachment of cable pipe and rolling spline pair, its left end screw thread is screwed into the screw thread guide pin bushing; Steel wire disk is on the semicircle spiral line of cable pipe right-hand member, and an end embeds in the cable tube seat, and the other end is perpendicular to the bottom outlet center of vacuum cavity; Press nips is screwed in the vacuum cavity side, and seal with O ring, its roller are pushed down the wireline on the cable pipe; Crystalline substance rises magnetic fluid and is screwed on right end cap, seal with O ring, and its hollow shaft sleeve is on rolling spline pair one end axle; Synchronous pulley is enclosed within the axle outer end of rolling spline pair, is synchronously with the part of assembly.
4, sensor built-out type crystal lifting device according to claim 1 is characterized in that, the described chamber of weighing comprises cavity, fishplate bar, LOAD CELLS, pulley bracket, pulley cover, pulley, hinge, side cover, sealing aviation plug, nut and top cover; Wherein, fishplate bar and LOAD CELLS screw attachment; LOAD CELLS and pulley bracket pass through thread connection; Pulley and pulley bracket connect by axle; Pulley covers on the pulley top, is fixed on the pulley bracket with pin; Fishplate bar passes the top center hole in cavity, with nut and tight; Top cover is screwed at cavity top, seal with O ring; Side cover is screwed a side outside cavity, seal with O ring; The sealing aviation plug is fixed on the side cover center by screw thread; Hinge one end is fixed on cavity lower end one side, and the other end is fixed on the vacuum cavity side; The chamber of weighing can be rotated relative to promoting the chamber by hinge.
5, sensor built-out type crystal lifting device according to claim 1 is characterized in that, described limited block comprises synchronous pulley, switch base, transmission screw, driving nut and limit switch; Wherein, the two ends of transmission screw respectively by bearing fixing in two stomidiums of switch base, can freely rotate; Driving nut connects with transmission screw by screw thread, and the extension bar of one side passes the lateral yi word pattern groove of switch base; Two limit switches are screwed respectively at two ends, switch base side; Synchronous pulley is enclosed within the axle outer end of transmission screw, is synchronously with the part of assembly.
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| CNB2006101668788A CN100460572C (en) | 2006-12-16 | 2006-12-16 | Sensor built-out type crystal lifting device |
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| CNB2006101668788A CN100460572C (en) | 2006-12-16 | 2006-12-16 | Sensor built-out type crystal lifting device |
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| CN1995484A true CN1995484A (en) | 2007-07-11 |
| CN100460572C CN100460572C (en) | 2009-02-11 |
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| CN101407940B (en) * | 2008-07-24 | 2012-01-25 | 中国科学院上海硅酸盐研究所 | Crystal growth apparatus and method under vibration field |
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Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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Address after: Hangzhou City, Zhejiang province Xihu District 310013 Ancient Jade Road 149, room 310 Co-patentee after: Zhejiang Jingsheng Electrical and Mechanical Co., Ltd. Patentee after: Hangzhou Huixiang Electrohydraulic Technology Development Co., Ltd. Address before: Hangzhou City, Zhejiang province Xihu District 310013 Ancient Jade Road 149, room 310 Co-patentee before: Shangyu Jingsheng M&E Co., Ltd. Patentee before: Hangzhou Huixiang Electrohydraulic Technology Development Co., Ltd. |