CN101880910B

CN101880910B - Single crystal furnace weighing device

Info

Publication number: CN101880910B
Application number: CN2010102138022A
Authority: CN
Inventors: 杨金海; 吴学军
Original assignee: NINGXIA RIJING NEW ENERGY EUIPMENT CO Ltd
Current assignee: NINGXIA RIJING NEW ENERGY EUIPMENT CO Ltd
Priority date: 2010-06-30
Filing date: 2010-06-30
Publication date: 2012-05-23
Anticipated expiration: 2030-06-30
Also published as: CN101880910A

Abstract

The invention relates to the field of single crystal furnaces, in particular to a single crystal furnace weighing device. The single crystal furnace weighing device comprises a pulley, a bracket, a connecting board, a rotation shaft, a fixed plate, a supporting column, an end cover, a weighing sensor, a bearing and a base; the rotation shaft is arranged inside the bearing which is fixed in the pulley, the pulley fits with the rotation shaft through the bearing, the front end of the rotation shaft is arranged on the bracket, and the rear end of the rotation shaft is fixed on the connecting boar which is connected with the bracket; the lower end of the weighing sensor is fixed with the bracket, and the upper end of the weighing sensor is connected with the fixed board; and the fixed board is fixed on the base through the supporting column, and the end cover is fixed on the base for covering the rotation shaft, the fixed board and the weighing sensor. In a crystal pulling process, the single crystal furnace can measure the weight of a crystal bar in a real time; and through measuring the weight and the charging quantity of the crystal bar, the weight of the silicon material remaining in a crucible can be obtained, an optimal time for ending is held, and the silicon material is saved.

Description

Single crystal furnace weighing device

Technical field

The present invention relates to the single crystal growing furnace field, relate in particular to a kind of single crystal furnace weighing device.

Background technology

Single crystal growing furnace is that polysilicon is converted into the indispensable equipment in the silicon single crystal technological process, and silicon single crystal is the basic material in photovoltaic generation and the semicon industry.Silicon single crystal is as the critical support material of advanced information society, is one of most important monocrystal material in the world at present, and it is not only the major function material of development computingmachine and unicircuit, also is the major function material that photovoltaic generation utilizes sun power.

In the silicon single-crystal pulling process, need to measure the weight of crystal bar, be convenient to calculate the quality of excess silicon material in the quartzy pot, so need a cover single crystal furnace weighing device.Existing weighing device all is to adopt complicated mechanical to move to realize, relatively require great effort, and the precision of measuring is not high, is prone to cause the phenomenons such as waste of silicon material.

Summary of the invention

Technical problem to be solved by this invention provides a kind of single crystal furnace weighing device; This weighing device is measured boule wt in real time through a LOAD CELLS; Measure accurately, farthest reduce crystal pulling and finish the excess silicon material amount of back in quartz crucible, practiced thrift the silicon material.

The present invention is achieved in that a kind of single crystal furnace weighing device, comprises pulley, support, web plate, rotating shaft, retaining plate, pillar stiffener, end cap, LOAD CELLS, bearing and base; Said rotating shaft is arranged in the bearing, and bearing fixing is in pulley, and said pulley cooperates with rotating shaft through bearing, and the front end of rotating shaft is rack-mount, and the rear end of rotating shaft is fixed on the web plate, and web plate links to each other with support; The lower end and the support of said LOAD CELLS are fixed, and the upper end and the retaining plate of LOAD CELLS are fixed; Said retaining plate is fixed on the base through pillar stiffener, and said end cap is fixed on and covers rotating shaft, retaining plate and LOAD CELLS on the base.

Sealing-ring is equipped with in the junction of described end cap and base.

Described bearing is a spot contact bearing.

Baffle plate is equipped with in the side of said support, and baffle plate is positioned at the upper end of pulley.

Single crystal furnace weighing device of the present invention can rationally be arranged in the single crystal growing furnace crystalline drawing process flow process, in single crystal growing furnace crystal pulling process, can measure boule wt in real time through LOAD CELLS; Through measuring boule wt and charging capacity, obtain excess silicon material weight in the crucible, grasp best ending time, farthest reduce crystal pulling and finish the excess silicon material amount of back in quartz crucible, practiced thrift the silicon material.

Description of drawings

Fig. 1 is a single crystal furnace weighing device structural representation of the present invention;

Fig. 2 is the A-A sectional view of Fig. 1;

Fig. 3 is the B-B sectional view of Fig. 1.

Among the figure: 1 pulley, 2 supports, 3 web plates, 4 baffle plates, 5 rotating shafts, 6 retaining plates, 7 pillar stiffeners, 8 end caps, 9 LOAD CELLSs, 10 bearings, 11 little acorn nuts, 12 screws, 13 sealing-rings, 14 seed crystals rope, 15 bases, 16 crystal bars.

Embodiment

Below in conjunction with specific embodiment, further set forth the present invention.Should be understood that these embodiment only to be used to the present invention is described and be not used in the restriction scope of the present invention.Should be understood that in addition those skilled in the art can do various changes or modification to the present invention after the content of having read the present invention's statement, these equivalent form of values fall within the application's appended claims institute restricted portion equally.

Like Fig. 1,2, shown in 3, a kind of single crystal furnace weighing device comprises pulley 1, support 2, web plate 3, rotating shaft 5, retaining plate 6, pillar stiffener 7, end cap 8, LOAD CELLS 9, bearing 10 and base 15; Said rotating shaft 5 is arranged in the bearing 10 with boss and back-up ring restriction rotating shaft 5 moving axially in bearing 10; Said bearing 10 is fixed in the pulley 1, and said pulley 1 cooperates with rotating shaft 5 through bearing 10, in the present embodiment; Described bearing 10 adopts spot contact bearing; The front end of rotating shaft 5 is installed on the support 2, and the rear end of rotating shaft 5 is fixed on the web plate 3 through roundlet nut 11, and web plate 3 links to each other with support 2; The upper end of said LOAD CELLS 9, lower end are separately fixed on retaining plate 6, the support 2 through screw 12; Said retaining plate 6 is fixed on the base 15 through pillar stiffener 7; Said end cap 8 is fixed on and covers rotating shaft 5, retaining plate 6 and LOAD CELLS 9 on the base 15; Sealing-ring 13 is equipped with in the junction of end cap 8 and base 15, when the sealing circle is used for inside and vacuumizes, stops extraneous air to get into.

Present embodiment can further describe to the side of said support 2 baffle plate 4 is housed, and baffle plate 4 is positioned at the upper end of pulley 1, prevents that seed crystal rope 14 from skidding off in the groove of pulley 1.

In the present embodiment; Described support 2 becomes one with web plate 3; Rotating shaft 5 is suspended on the LOAD CELLS 9 through support 2 and web plate 3, and seed crystal rope 14 is walked around pulley 1 posterior end suspension crystal bar 16 when the crystal pulling operation, and the action of gravity of crystal bar 16 is in rotating shaft 5; The gravity of crystal bar 16 makes LOAD CELLS 9 produce deformation through the transmission of support 2, thereby realizes the accurate measurement to crystal bar 16 weight.

Claims

1. a single crystal furnace weighing device is characterized in that: comprise pulley (1), support (2), web plate (3), rotating shaft (5), retaining plate (6), pillar stiffener (7), end cap (8), LOAD CELLS (9), bearing (10) and base (15); Said rotating shaft (5) is arranged in the bearing (10); Bearing (10) is fixed in the pulley (1), and said pulley (1) cooperates with rotating shaft (5) through bearing (10), and the front end of rotating shaft (5) is installed on the support (2); The rear end of rotating shaft (5) is fixed on the web plate (3), and web plate (3) links to each other with support (2); The lower end of said LOAD CELLS (9) and support (2) are fixing, and the upper end of LOAD CELLS (9) and retaining plate (6) are fixing; Said retaining plate (6) is fixed on the base (15) through pillar stiffener (7), and said end cap (8) is fixed on and covers rotating shaft (5), retaining plate (6) and LOAD CELLS (9) on the base (15).

2. single crystal furnace weighing device as claimed in claim 1 is characterized in that: sealing-ring (13) is equipped with in the junction of described end cap (8) and base (15).

3. according to claim 1 or claim 2 single crystal furnace weighing device, it is characterized in that: described bearing (10) is a spot contact bearing.

4. according to claim 1 or claim 2 single crystal furnace weighing device, it is characterized in that: baffle plate (4) is equipped with in the side of said support (2), and baffle plate (4) is positioned at the upper end of pulley (1).