CN209537674U - Single crystal growing furnace lifting head dynamic dynamic balancer - Google Patents
Single crystal growing furnace lifting head dynamic dynamic balancer Download PDFInfo
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- CN209537674U CN209537674U CN201822111386.XU CN201822111386U CN209537674U CN 209537674 U CN209537674 U CN 209537674U CN 201822111386 U CN201822111386 U CN 201822111386U CN 209537674 U CN209537674 U CN 209537674U
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- dynamic
- linear motion
- clump weight
- lifting head
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Abstract
The utility model relates to Czochralski silicon single crystal furnace equipment technical field, a kind of single crystal growing furnace lifting head dynamic dynamic balancer.Including lifting head mechanism；Dynamic dynamic balancer is mounted on lifting head mechanism shell body, and cable pipe is installed in lifting head mechanism；Dynamic dynamic balancer is controlled by automatically controlled automatic system, including motor and linear motion unit, motor are mounted on linear motion unit, and drives the sliding block on linear motion unit to carry out straight reciprocating motion by shaft coupling；Linear motion unit is equipped with balance weight mechanism and position sensor；Balance weight mechanism includes design clump weight, and design clump weight is fixed on sliding block.The utility model installs dynamic dynamic balancer on the seed crystal lifting device of traditional single crystal growing furnace, the centroid position offset of seed crystal lifting device caused by cable pipe linear motion is adjusted in real time, seed crystal lifting device mass center is forced to return to setting position, to improve seed crystal lifting device stability, monocrystalline quality is improved.
Description
Technical field
The utility model relates to Czochralski silicon single crystal furnace equipment technical field, a kind of single crystal growing furnace lifting head dynamic dynamic balancing machine
Structure.
Background technique
Straight pull type single crystal furnace is the capital equipment for producing monocrystalline silicon and integrated circuit and monocrystalline silicon used for solar batteries.With
Solar battery silicon materials size it is increasing.And integrated circuit is higher and higher to the quality requirements of monocrystal material.It is right
More stringent requirements are proposed for the degree of automation of corresponding single crystal growth apparatus and the stability of long-time service.Monocrystalline is raw
Long equipment is mainly single crystal growing furnace, and single crystal growing furnace includes that the main furnace chamber of monocrystalline silicon growing synthesis, the silicon seed positioned at main furnace chamber upper end mention
Rise device and automatically controlled automatic system.The seed crystal lifting device of traditional single crystal growing furnace is that the movement of cable pipe is moved at setting position
Balanced adjustment, when seed crystal lifting device promotes seed crystal, the centroid position of seed crystal lifting device shifts, and makes to lift stability
Difference causes the reduction of product product rate.
Utility model content
The technical problems to be solved in the utility model is to overcome deficiency in the prior art, provides a kind of single crystal growing furnace lifting
Head dynamic dynamic balancer.
In order to solve the above technical problems, the solution that the utility model uses is:
A kind of single crystal growing furnace lifting head dynamic dynamic balancer, including lifting head mechanism and dynamic dynamic balancer are provided；It is dynamic
State dynamic balancer is mounted on lifting head mechanism shell body, and cable pipe is installed in lifting head mechanism, for storing lifting molybdenum
Steel wire；
Dynamic dynamic balancer is controlled by automatically controlled automatic system, including motor and linear motion unit, motor are mounted on
On linear motion unit, and the sliding block on linear motion unit is driven to carry out straight reciprocating motion by shaft coupling；Linear motion
Unit is equipped with balance weight mechanism and position sensor；
Balance weight mechanism includes design clump weight, and design clump weight is fixed on sliding block, is designed on clump weight through sticky material
Material is bonded with assembly clump weight.
As an improvement cohesive material is structure glue.
As an improvement design clump weight, the gross mass of sliding block and assembly clump weight and cable pipe mechanism are proportional.
As an improvement the movement of the linear movement direction and cable pipe of design clump weight, sliding block and assembly clump weight
Contrary and movement velocity is proportional.
As an improvement being divided into the side and bottom of straight-line motion mechanism there are two position sensors.
Compared with the prior art, the technical effects of the present invention are:
The utility model installs dynamic dynamic balancer on the seed crystal lifting device of traditional single crystal growing furnace, to cable Guan Zhi
The centroid position offset of seed crystal lifting device caused by line moves is adjusted in real time, is forced seed crystal lifting device mass center to return to and is set
Positioning is set, to improve seed crystal lifting device stability, improves monocrystalline quality.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of single crystal growing furnace lifting head dynamic dynamic balancer assembly.
Fig. 2 is the structural schematic diagram of dynamic dynamic balancer.
Fig. 3 is the structural schematic diagram of dynamic dynamic balancer details.
Appended drawing reference: 1- lifting head mechanism, 2- dynamic dynamic balancer, 3- motor, 4- shaft coupling, 5- linear motion are single
Member, 6- balance weight mechanism, 7-1 position sensor, 8-2 position sensor, 9- sliding block, 10- design clump weight, 11- structure glue,
12- assembles clump weight, 13- outer housing, 14- cable pipe.
Specific embodiment
With reference to the accompanying drawing, specific embodiment of the present utility model is described in detail.
As shown in Figure 1, a kind of single crystal growing furnace lifting head dynamic dynamic balancer, including lifting head mechanism 1 and dynamic dynamic balancing
Mechanism 2；Dynamic dynamic balancer 2 is mounted on 1 outer housing 13 of lifting head mechanism, and cable pipe 14 is installed in lifting head mechanism 1,
Molybdenum steel silk is lifted for storing；
As Figure 2-3, dynamic dynamic balancer 2 is controlled by automatically controlled automatic system, including motor 3 and linear motion list
Member 5, motor 3 is mounted on linear motion unit 5, and drives the sliding block 9 on linear motion unit 5 to carry out directly by shaft coupling 4
Line moves back and forth, and linear motion unit 5 is equipped with balance weight mechanism 6 and position sensor；There are two position sensors, and respectively 1
Number position sensor 7 and No. 2 position sensor 8 is divided into the side and bottom of linear motion unit 5.
Balance weight mechanism 6 includes being equipped with design clump weight 10, and design clump weight 10 is fixed on sliding block 9, designs on clump weight 10
Assembly clump weight 12 is bonded with by structure glue 11.
It is proportional to design clump weight 10, the gross mass of sliding block 9 and assembly clump weight 12 and 14 mechanism of cable pipe.
It designs clump weight 10, sliding block 9 and assembles the linear movement direction of clump weight 12 and the direction of motion phase of cable pipe 14
Anti- and movement velocity is proportional.
The working process of the utility model is as follows: when lifting head mechanism 1 works, cable pipe 14 in lifting head mechanism 1 into
Row linear motion, starts dynamic dynamic balancer 2 by automatically controlled automatic system, drives shaft coupling 4 to rotate by motor 3, drives
The opposite direction that sliding block 9 and balance weight mechanism 8 move along a straight line to cable pipe 14 carries out a certain proportion of linear motion, forces lifting head
The centroid position of mechanism 1 keeps setting position.
It is finally noted that listed above is only specific embodiment of the utility model.Obviously, the utility model
Above embodiments are not limited to, can also there is many variations.Those skilled in the art can be from content disclosed by the utility model
In all deformations for directly exporting or associate, be considered as the protection scope of the utility model.
Claims (5)
1. a kind of single crystal growing furnace lifting head dynamic dynamic balancer, including lifting head mechanism, which is characterized in that further include that dynamic is dynamic flat
Weigh mechanism；Dynamic dynamic balancer is mounted on lifting head mechanism shell body, cable pipe is installed in lifting head mechanism, for storing up
Deposit lifting molybdenum steel silk；
The dynamic dynamic balancer is controlled by automatically controlled automatic system, including motor and linear motion unit, motor are mounted on
On linear motion unit, and the sliding block on linear motion unit is driven to carry out straight reciprocating motion by shaft coupling；Linear motion
Unit is equipped with balance weight mechanism and position sensor；
The balance weight mechanism includes design clump weight, and design clump weight is fixed on the slide block, designs and passes through on clump weight
Cohesive material is bonded with assembly clump weight.
2. mechanism according to claim 1, which is characterized in that the cohesive material is structure glue.
3. mechanism according to claim 1, which is characterized in that described to design the total of clump weight, sliding block and assembly clump weight
The quality of quality and cable pipe mechanism is proportional.
4. mechanism according to claim 1, which is characterized in that described to design the straight of clump weight, sliding block and assembly clump weight
The line direction of motion and direction of motion of cable pipe is opposite and movement velocity is proportional.
5. mechanism according to claim 1, which is characterized in that there are two the position sensors, is divided into linear motion
The side and bottom of unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822111386.XU CN209537674U (en) | 2018-12-17 | 2018-12-17 | Single crystal growing furnace lifting head dynamic dynamic balancer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822111386.XU CN209537674U (en) | 2018-12-17 | 2018-12-17 | Single crystal growing furnace lifting head dynamic dynamic balancer |
Publications (1)
| Publication Number | Publication Date |
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| CN209537674U true CN209537674U (en) | 2019-10-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201822111386.XU Active CN209537674U (en) | 2018-12-17 | 2018-12-17 | Single crystal growing furnace lifting head dynamic dynamic balancer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109440186A (en) * | 2018-12-17 | 2019-03-08 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace lifting head dynamic dynamic balancer |
| CN112795981A (en) * | 2020-11-06 | 2021-05-14 | 北京工业大学 | Dynamic balancing mechanism for mass center of pulling head of single crystal furnace |
| CN113684531A (en) * | 2021-08-25 | 2021-11-23 | 连城凯克斯科技有限公司 | Seed crystal lifting self-balancing lifting device |
-
2018
- 2018-12-17 CN CN201822111386.XU patent/CN209537674U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109440186A (en) * | 2018-12-17 | 2019-03-08 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace lifting head dynamic dynamic balancer |
| CN112795981A (en) * | 2020-11-06 | 2021-05-14 | 北京工业大学 | Dynamic balancing mechanism for mass center of pulling head of single crystal furnace |
| CN113684531A (en) * | 2021-08-25 | 2021-11-23 | 连城凯克斯科技有限公司 | Seed crystal lifting self-balancing lifting device |
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