CN204111917U - A kind of polycrystalline ingot furnace surveys long brilliant device automatically - Google Patents

A kind of polycrystalline ingot furnace surveys long brilliant device automatically Download PDF

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Publication number
CN204111917U
CN204111917U CN201420475233.2U CN201420475233U CN204111917U CN 204111917 U CN204111917 U CN 204111917U CN 201420475233 U CN201420475233 U CN 201420475233U CN 204111917 U CN204111917 U CN 204111917U
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China
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quartz glass
corrugated tube
glass bar
polycrystalline ingot
ingot furnace
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CN201420475233.2U
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傅林坚
王巍
陈明杰
王奕皓
汤成伟
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HANGZHOU HUIXIANG ELECTROHYDRAULIC TECHNOLOGY DEVELOPMENT Co Ltd
Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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HANGZHOU HUIXIANG ELECTROHYDRAULIC TECHNOLOGY DEVELOPMENT Co Ltd
Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Priority to CN201420475233.2U priority Critical patent/CN204111917U/en
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Abstract

The utility model relates to field of crystal growth furnace, aims to provide a kind of polycrystalline ingot furnace and automatically surveys long brilliant device.This kind of polycrystalline ingot furnace is automatically surveyed long brilliant device and is comprised quartz glass bar, stay wire sensor, cylinder and corrugated tube, the inside of polycrystalline ingot furnace is stretched in one end of quartz glass bar, the other end is arranged in corrugated tube, and be fixed on quartz glass bar folder, cylinder is moved up and down by corrugated tube carriage drive corrugated tube, and then drives the stay cord on quartz glass bar and stay wire sensor to move up and down; Stay wire sensor is used for the data recorded that moved up and down by stay cord, is converted to simulating signal and is sent to outside, realize showing and record the data recorded.The utility model adopts all automatic measurement mode, not only can alleviate the labour intensity of survey crew, avoid the error of artificial reading, and data directly read record by control module simultaneously, facilitate subsequent analysis, improve accuracy and the efficiency of measurement of measurement.

Description

A kind of polycrystalline ingot furnace surveys long brilliant device automatically
Technical field
The utility model is about field of crystal growth furnace, and particularly a kind of polycrystalline ingot furnace surveys long brilliant device automatically.
Background technology
Sun power is most important basic power source in various renewable energy source, and biomass energy, wind energy, sea energy, water energy etc. are all from sun power.By photoelectric conversion device, solar radiant energy is converted to utilization of power and belong to solar energy generation technology, photoelectric conversion device normally utilizes the photovoltaic effect principle of semiconducter device (solar cell) to carry out opto-electronic conversion, therefore also known as solar-photovoltaic technology.
Because silicon materials account for the overwhelming majority in solar cell cost, reduce the key that silicon materials production cost is photovoltaic application.Polycrystalline silicon ingot casting technology is one of important channel reducing solar cell cost, and this technology eliminates expensive crystal-pulling process, and make throwing furnace charge with the silicon compared with low-purity, starting material and power consumption aspect are all comparatively economized.
Producing the equipment mainly polycrystalline silicon ingot or purifying furnace of polysilicon crystal, obtaining polysilicon crystal by carrying out directional freeze to silicon material.Polysilicon crystal is shaped more even, and crystal mass is higher, and crystalline growth velocity is one of important factor of polysilicon crystal shaping degree of uniformity, is also the important reference regulating polycrystalline ingot furnace processing parameter.Its speed of growth of traditional manual measurement, quartz glass bar manually inserts in silicon liquid by the main survey crew that relies at set intervals, measures silicon solid-liquid interface height location, carrys out survey calculation must to come out of the stove the brilliant situation of interior length with this.While survey crew plug quartz glass bar, directly reading is carried out on the scale to quartz glass bar depth of penetration, by analyzing institute's reading value, calculate, thus draws the variable quantity of silicon solid-liquid interface height in the unit time, as its speed of growth.Adopt in this way, survey crew needs to arrive polycrystalline ingot furnace two-layer platform continually and measures, record and calculating, the labour intensity of the long crystal type of traditional survey not only survey crew is large, and measuring result can due to the insertion gesture of the reading mode of survey crew and quartz glass bar, dynamics, size deviation such as angle and being disturbed, measuring error can be larger.And existing manual Ce Changjing mechanism survey crew when operating is difficult to control well the dynamics and angle that glass stick pulls and pushes up and down, glass stick is caused extremely easily to rupture, and the glass stick after fracture in stove can be fallen in silicon solution, affect the rate that manufactures a finished product, thus bring greater loss.
Utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, provides a kind of polycrystalline ingot furnace of all automatic measurement mode that adopts to survey long brilliant device.For solving the problems of the technologies described above, solution of the present utility model is:
A kind of polycrystalline ingot furnace is provided automatically to survey long brilliant device, comprise quartz glass bar, also comprise stay wire sensor, cylinder and corrugated tube, the inside of polycrystalline ingot furnace is stretched in one end of quartz glass bar, the other end is arranged in corrugated tube, and be fixed on quartz glass bar folder, quartz glass bar folder is arranged on the corrugated tube support that is connected with cylinder piston rod; One end of corrugated tube and furnace roof viewing window Flange joint, the other end is connected with corrugated tube support, and quartz glass bar, quartz glass bar clip pack is rolled in corrugated tube, and corrugated tube is located at the outside of polycrystalline ingot furnace; The quartz glass bar admission port place of polycrystalline ingot furnace is sealed by corrugated tube, and the stay cord on stay wire sensor and quartz glass bar folder are connected and fixed; Cylinder is moved up and down by corrugated tube carriage drive corrugated tube, and then drives the stay cord on quartz glass bar and stay wire sensor to move up and down; Stay wire sensor is used for the data recorded that moved up and down by stay cord, is converted to simulating signal and is sent to outside (control module), and (control module) realizes showing and record the data recorded.
As further improvement, described a kind of polycrystalline ingot furnace surveys the furnace roof that long brilliant device is arranged on polycrystalline ingot furnace automatically, and quartz glass bar is arranged on the furnace roof viewing window place of polycrystalline ingot furnace, and moves up and down with corrugated tube.
As further improvement, the cylinder diameter of described cylinder meets formula: wherein, D refers to cylinder diameter, and reactive force suffered when F refers to cylinder, P refers to operating pressure.
As further improvement, described operating pressure P is between 0.2Mpa ~ 0.6Mpa.
As further improvement, described cylinder adopts the cylinder of cylinder diameter between 7.283mm ~ 12.616mm.
Compared with prior art, the beneficial effects of the utility model are:
The utility model adopts all automatic measurement mode, not only can alleviate the labour intensity of survey crew, avoid the error of artificial reading, and data directly read record by control module simultaneously, facilitate subsequent analysis, improve accuracy and the efficiency of measurement of measurement.
Accompanying drawing explanation
Fig. 1 is one-piece construction schematic diagram of the present utility model.
Reference numeral in figure is: 1 corrugated tube support; 2 quartz glass bars; 3 quartz glass bar folders; 4 cylinders; 5 stay wire sensors; 6 corrugated tubes; 7 polycrystalline silicon ingot or purifying furnaces; 8 silicon liquid liquid levels; 9 quartz crucibles; 10 solid-liquid interfaces.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is described in further detail:
As shown in Figure 1, a kind of polycrystalline ingot furnace is automatically surveyed long brilliant device and is comprised corrugated tube support 1, quartz glass bar 2, quartz glass bar folder 3, cylinder 4, stay wire sensor 5 and corrugated tube 6, is arranged on the furnace roof of polycrystalline ingot furnace 7.Quartz glass bar 2 is arranged on the furnace roof viewing window place of polycrystalline ingot furnace 7, the inside of polycrystalline ingot furnace 7 is stretched in one end of quartz glass bar 2, the other end is arranged in corrugated tube 6, in the outside of polycrystalline ingot furnace 7, the quartz glass bar 2 admission port place of polycrystalline ingot furnace 7 is sealed by one end of corrugated tube 6.Upper surface and the quartz glass bar of corrugated tube 6 press from both sides 3 and are together fixed on the corrugated tube support 1 that is connected with cylinder 4 piston rod.Cylinder 4 moves up and down for driving corrugated tube 6, and then drives the stay cord on quartz glass bar 2 and stay wire sensor 5 to move up and down.Stay wire sensor 5 for by the data recorded that moved up and down by stay cord, is converted to simulating signal and is sent in outside control module, and control module is for showing the data that record and carrying out record to data.When quartz glass bar is inserted and touches solid-liquid interface 10 in stove for 2 times, the length that the stay cord of stay wire sensor 5 is drawn out namely be quartz glass bar 2 lower surface from starting position to solid-liquid interface 10 distance, by stay wire sensor 5, the data obtained being converted to simulating signal is again sent on the operation interface of service platform, by control module record, thus the personnel of being convenient for measuring check, because crystal grows, solid-liquid interface 10 raises, one group of range measurements changed is drawn through the repetitive measurement with constant duration, and measuring result draws the brilliant speed of the length of polycrystalline ingot furnace 7 in this time period by control module direct analysis.
Cylinder 4 should by determining that the size of reactive force determines the cylinder diameter of required cylinder 4.Cylinder diameter is too small, and reactive force is inadequate, then quartz glass bar 2 possibly cannot touch solid-liquid interface 10; And cylinder diameter is excessive, then quartz glass bar 2 may insert solid-liquid circle 10 and excessively deeply causes damaging, and simultaneously equipment is heavy, and cost improves, and increases air consumption again, wastes energy.
Cylinder 4 has two kinds of reactive forces when working: a kind of is tensile force f 1 when moving upward, namely bear the total force of corrugated tube support 1 and quartz glass bar 2 and corrugated tube 6, add the frictional force produced when elastic force when corrugated tube 6 stretches and quartz glass bar 2 move; Another kind is thrust F2 when moving downward, when cylinder 4 works, the F1=F2 when air pressure is identical, and due to corrugated tube 6 be not spring, the elastic force that its stretching produces within the scope of normal travel is very little negligible, when moving up and down equally, only there is running fit quartz glass bar 2 and corrugated tube 6 lower end, and its frictional force produced is very little also negligible.If the gross weight calculating corrugated tube support 1 and quartz glass bar 2 and corrugated tube 6 is 5kg, i.e. F1=50N, if set safety coefficient as 0.2 that is cylinder 4 can promote the minimum force Fmin=250N of quartz glass bar 2, and be 0.2Mpa ~ 0.6Mpa according to cylinder 4 working pressure range, the cylinder diameter scope of optional cylinder 4 namely can be calculated according to the working pressure range of cylinder 4.
The cylinder diameter of cylinder 4 meets formula: wherein, D refers to cylinder diameter, reactive force suffered when F refers to that cylinder 4 works, and P refers to operating pressure, and operating pressure P is 2kgf ~ 6kgf.Therefore show that the cylinder diameter of cylinder 4 is between 7.283mm ~ 12.616mm.
During work, a kind of polycrystalline ingot furnace is surveyed automatically the furnace roof viewing window place that long brilliant device is fixed on polycrystalline ingot furnace 7, load onto quartz glass bar 2, make quartz glass bar 2 be in highest point.Then, quartz glass bar 2 be placed in corrugated tube 6 inside and be fixed on quartz glass bar folder 3, upper surface and the quartz glass bar of corrugated tube 6 press from both sides 3 and are together fixed on the corrugated tube support 1 that is connected with cylinder 4 piston rod, the stay cord head of stay wire sensor 5 is fixed on quartz glass bar folder 3, like this when cylinder 4 drives corrugated tube 6 to move downward, quartz glass bar 2 also with under insert and drive the stay cord head of stay wire sensor 5 to move downward, until touch solid-liquid interface 10 in stove, the slotting distance of the Distance geometry quartz glass bar that the stay cord of stay wire sensor 5 is drawn out 2 times is identical, the variable quantity of the pulling rope length measured by stay wire sensor 5 just can calculate the height location of quartz glass bar 2.
Finally, converting the numerical value recorded to simulating signal by stay wire sensor 5 is sent on the operation interface of teller console, just can see the position of this quartz glass bar 2 of record, namely the difference of altitude of twice measurement is the height of crystal growth in twice interval time of measurement.
Finally, it should be noted that above what enumerate is only specific embodiment of the utility model.Obviously, the utility model is not limited to above embodiment, can also have a lot of distortion.All distortion that those of ordinary skill in the art can directly derive or associate from content disclosed in the utility model, all should think protection domain of the present utility model.

Claims (5)

1. a polycrystalline ingot furnace surveys long brilliant device automatically, comprise quartz glass bar, it is characterized in that, also comprise stay wire sensor, cylinder and corrugated tube, the inside of polycrystalline ingot furnace is stretched in one end of quartz glass bar, the other end is arranged in corrugated tube, and is fixed on quartz glass bar folder, and quartz glass bar folder is arranged on the corrugated tube support that is connected with cylinder piston rod; One end of corrugated tube and furnace roof viewing window Flange joint, the other end is connected with corrugated tube support, and quartz glass bar, quartz glass bar clip pack is rolled in corrugated tube, and corrugated tube is located at the outside of polycrystalline ingot furnace; The quartz glass bar admission port place of polycrystalline ingot furnace is sealed by corrugated tube, and the stay cord on stay wire sensor and quartz glass bar folder are connected and fixed; Cylinder is moved up and down by corrugated tube carriage drive corrugated tube, and then drives the stay cord on quartz glass bar and stay wire sensor to move up and down; Stay wire sensor is used for the data recorded that moved up and down by stay cord, is converted to simulating signal and is sent to outside, realize showing and record the data recorded.
2. a kind of polycrystalline ingot furnace according to claim 1 surveys long brilliant device automatically, it is characterized in that, described a kind of polycrystalline ingot furnace surveys the furnace roof that long brilliant device is arranged on polycrystalline ingot furnace automatically, and quartz glass bar is arranged on the furnace roof viewing window place of polycrystalline ingot furnace, and moves up and down with corrugated tube.
3. a kind of polycrystalline ingot furnace according to claim 1 surveys long brilliant device automatically, and it is characterized in that, the cylinder diameter of described cylinder meets formula: wherein, D refers to cylinder diameter, and reactive force suffered when F refers to cylinder, P refers to operating pressure.
4. a kind of polycrystalline ingot furnace according to claim 3 surveys long brilliant device automatically, and it is characterized in that, described operating pressure P is between 0.2Mpa ~ 0.6Mpa.
5. a kind of polycrystalline ingot furnace according to claim 4 surveys long brilliant device automatically, it is characterized in that, described cylinder adopts the cylinder of cylinder diameter between 7.283mm ~ 12.616mm.
CN201420475233.2U 2014-08-21 2014-08-21 A kind of polycrystalline ingot furnace surveys long brilliant device automatically Active CN204111917U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104213189A (en) * 2014-08-21 2014-12-17 杭州慧翔电液技术开发有限公司 Automatic crystal growth measuring device of polycrystalline ingot furnace
CN114457413A (en) * 2021-12-31 2022-05-10 上海翌波光电科技有限公司 Crystal growth equipment and crystal growth method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104213189A (en) * 2014-08-21 2014-12-17 杭州慧翔电液技术开发有限公司 Automatic crystal growth measuring device of polycrystalline ingot furnace
CN114457413A (en) * 2021-12-31 2022-05-10 上海翌波光电科技有限公司 Crystal growth equipment and crystal growth method

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