CN206872983U - A kind of device for being used to measure thermograde during crystalline silicon ingot casting - Google Patents
A kind of device for being used to measure thermograde during crystalline silicon ingot casting Download PDFInfo
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- CN206872983U CN206872983U CN201720604634.7U CN201720604634U CN206872983U CN 206872983 U CN206872983 U CN 206872983U CN 201720604634 U CN201720604634 U CN 201720604634U CN 206872983 U CN206872983 U CN 206872983U
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Abstract
The utility model provides a kind of device for being used to measure thermograde during crystalline silicon ingot casting, including prod, the pressure sensor that is connected with one end of the prod, and the drive device to be moved along a straight line up and down for driving the prod to carry out；The other end of the prod is used to stretch into the thickness that mushy zone is tested in the crucible of ingot furnace, and the pressure sensor is used to monitoring the prod caused pressure signal in linear motion up and down in mushy zone and silicon melt in real time.The device provided by the utility model for being used to measure thermograde during crystalline silicon ingot casting, it can conveniently and efficiently test to obtain thermograde during crystalline silicon ingot casting, casting ingot process can be adjusted according to the change of thermograde, make crystal defect and dislocation reduction, degree of purity lifting in crystalline silicon, bulk crystal silicon minority carrier life time is lifted, so as to reach the lifting of the conversion efficiency of battery.The apparatus structure is simple, easy to operate simultaneously.
Description
Technical field
It the utility model is related to field of semiconductor manufacture, and in particular to one kind is used to measure temperature during crystalline silicon ingot casting
The device of gradient.
Background technology
In recent years, solar energy has become the heat of people's R and D as a kind of emerging renewable green energy resource
Point.Along with the fast development of solar cell industry, cost it is low and suitable for large-scale production polysilicon or class monocrystalline silicon turn into
One of most important photovoltaic material in industry, and progressively substitute traditional pulling of silicon single crystal in solar cell material market
Leading position.
In the crystal growing process of polysilicon, its solid liquid interface forward position longitudinal direction liquidus temperature gradient (abbreviation thermograde) is
One critically important parameter and index, thermograde directly affects the quality of crystalline silicon, but current technology can not be obtained easily
Temperature gradient magnitude, therefore, it is necessary to provide a kind of device for being used to measure thermograde during crystalline silicon ingot casting.
Utility model content
In consideration of it, the utility model provides a kind of device for being used to measure thermograde during crystalline silicon ingot casting.Should
Device is simple to operation, can simply, easily obtain the thermograde in crystalline silicon growth course.
The utility model provides a kind of device for being used to measure thermograde during crystalline silicon ingot casting, including test
Rod, the pressure sensor being connected with one end of the prod, and for driving the prod to carry out straight line fortune up and down
Dynamic drive device；The other end of the prod tests the thickness of mushy zone, the pressure in the crucible for stretching into ingot furnace
Force snesor is used to monitoring the prod caused pressure in linear motion up and down in mushy zone and silicon melt in real time
Force signal.
Wherein, the pressure sensor is provided with the data acquisition unit being used for every the data of collection in 0.1 second.
Wherein, the drive device include motor, with the motor connection be used for drive the prod up and down straight line
The moving member of motion and the support member for supporting the moving member.
Wherein, the drive device includes motor and lead screw, and the lead screw includes guide rail and slided on guide rail
Dynamic sliding block, the top that the motor is arranged on the guide rail are used to drive the sliding block to slide on the guide rail, the cunning
Block is connected to drive the prod move along a straight line up and down with the pressure sensor.
Wherein, the drive device includes rolling lead screw, the driver being arranged on rolling lead screw and is arranged on described
Motor at the top of rolling lead screw, the motor drive rolling lead screw to do forward and reverse rotation, the driver by forward and reverse rotation
Linear motion, the driver up and down are done with the forward and reverse rotation of the rolling lead screw to be connected to the pressure sensor
The prod is driven move along a straight line up and down.
Wherein, the driving wheel group that the drive device includes driving rack, engaged with the driving rack, and for driving
Move the motor that the driving wheel group moves up and down in the driving rack；The driving wheel group is connected use with the force sensor
In driving the prod move along a straight line up and down.
Wherein, the drive device includes being connected with the prod weight, with the prod it is connected to drive
Prod up and down move along a straight line drive lead screw, for drive the drive lead screw up and down move along a straight line driving motor and be used for
The proximity transducer of the weight mobile message is monitored, the driving motor drives drive lead screw to do up and down by forward and reverse rotation
Move along a straight line and then drive the prod to do linear motion up and down, when the proximity transducer monitors the weight position hair
When raw mobile, the proximity transducer indicates that the driving motor starts to invert.
Wherein, the device for being used to measure thermograde during crystalline silicon ingot casting also includes PLC and man-machine interface, institute
State PLC to electrically connect with the pressure sensor, the drive device and the man-machine interface respectively, the PLC is according to receiving
The signal of the pressure sensor and the parameter value of man-machine interface input control the drive device to drive the test
Rod move along a straight line up and down.
Wherein, the prod or the moving member are provided with position sensor, for monitoring the stroke of the prod.
Wherein, the pressure sensor is carried out to caused pressure signal in linear motion above and below the prod
Collection and reading, and reading result is passed into PLC, the man-machine interface is passed to by the PLC and is shown in the people
On machine interface.
The device provided by the utility model for being used to measure thermograde during crystalline silicon ingot casting, can conveniently and efficiently be surveyed
Examination obtains thermograde during crystalline silicon ingot casting, can adjust casting ingot process according to the change of thermograde, make in crystalline silicon
Crystal defect and dislocation are reduced, degree of purity lifting, bulk crystal silicon minority carrier life time lifting, so as to reach the conversion efficiency of battery
Lifting.The apparatus structure is simple, easy to operate simultaneously.
Brief description of the drawings
Fig. 1 is the knot for being used to measure the device of thermograde during crystalline silicon ingot casting in the embodiment of the utility model one
Structure schematic diagram；
Fig. 2 is to be used to measure the device of thermograde during crystalline silicon ingot casting in the embodiment of the utility model one
PLC control principle block diagrams；
Fig. 3 is the survey for being used to measure the device of thermograde during crystalline silicon ingot casting in the embodiment of the utility model one
Measure procedure chart；
Fig. 4 is that the device for being used for measuring thermograde during crystalline silicon ingot casting is used in the embodiment of the utility model one
When prod tension variations and mushy zone thickness relationship curve when lifting upwards.
Embodiment
As described below is preferred embodiment of the present utility model, it is noted that for the ordinary skill of the art
For personnel, on the premise of the utility model principle is not departed from, some improvements and modifications can also be made, these are improved and profit
Decorations are also considered as the scope of protection of the utility model.
Fig. 1 is the knot for being used to measure the device of thermograde during crystalline silicon ingot casting in the embodiment of the utility model one
Structure schematic diagram；Fig. 2 is to be used to measure the device of thermograde during crystalline silicon ingot casting in the embodiment of the utility model one
PLC control principle block diagrams；Referring to Figures 1 and 2, the utility model embodiment provides a kind of for measuring crystalline silicon ingot casting process
The device of middle thermograde, including prod 10, the pressure sensor 20, Yi Jiyong that is connected with one end of the prod 10
In the drive device 30 for driving the prod to be moved along a straight line about 10；The other end of the prod 10 is used to stretch into casting
The thickness of mushy zone is tested in the crucible 41 of ingot stove 40, the pressure sensor 20 is being pasted for monitoring the prod 10 in real time
Caused pressure signal in linear motion above and below in shape area and silicon melt.Arrow in Fig. 1 represents the movement of prod
Direction.
In the utility model embodiment, the linear motion up and down of prod refers to prod in silicon melt with vertical
Motion is risen or fallen in the direction of crucible bottom.
In the utility model embodiment, crucible is silica crucible, and alternatively, ingot furnace includes crucible, the inwall of crucible
Bottom is provided with silicon nitride layer, silicon nitride layer is arranged to conventional selection, and particular determination is not done to its thickness and set-up mode.
In the utility model embodiment, inculating crystal layer is can be set in crucible bottom, and silicon melt is then set above inculating crystal layer,
Inculating crystal layer is arranged to conventional selection, and its thickness and set-up mode do not do particular determination.
In the utility model embodiment, the material of prod includes quartz or silicon nitride.To the length of prod and straight
Do not do particular determination in footpath.Alternatively, prod is repeatable using multiple.Alternatively, before test or test terminate after, test
Rod can be arranged on crucible top, not contacted with silicon melt, and high-temperature region can be departed from when such prod does not have to, and prevent from surveying
Coupon high temperature deformation, improve the number made full use of of prod.Alternatively, ingot furnace is provided with gas port, and prod is from leading
Stretched into stomata in ingot furnace and be used for the thickness for testing mushy zone.
In the utility model embodiment, the device for measuring thermograde during crystalline silicon ingot casting also includes PLC
And man-machine interface, PLC electrically connect with the pressure sensor, the drive device and the man-machine interface respectively, the PLC roots
The parameter value inputted according to the signal of the pressure sensor received and the man-machine interface controls the drive device driving
The prod move along a straight line up and down.
In the utility model embodiment, the pressure sensor includes conventional piezoelectric transducer, pressure sensor
The dynamics variable signal in linear motion and the signal can be passed to PLC up and down by monitoring and test rod in real time.Alternatively,
Pressure sensor can carry out reading to caused pressure signal in linear motion above and below prod, and reading result is passed
PLC is passed, and man-machine interface is passed to by PLC and is shown in man-machine interface.Alternatively, pressure sensor by fixture with
Prod connects.Alternatively, the pressure sensor is provided with the data acquisition unit being used for every the data of collection in 0.1 second, institute
PLC is transferred to after stating data acquisition unit gathered data.The data acquisition unit can monitor in real time the prod in mushy zone and
Caused pressure signal in linear motion above and below in silicon melt.Alternatively, the sample frequency of the pressure sensor is
10HZ。
In the utility model embodiment, the man-machine interface is touch-screen.
In the utility model embodiment, the drive device is including motor 31, with the motor connection for driving
The moving member 32 that the prod moves along a straight line up and down and the support member 33 for supporting the moving member.Alternatively, driving
Set location sensor is with the stroke of real-time monitoring driving device on dynamic device.
In the embodiment of the utility model one, drive device includes electric cylinders.Alternatively, the drive device include motor and
Lead screw, the lead screw include guide rail and the sliding block slided on guide rail, and the motor is arranged on the top of the guide rail
Portion is used to drive the sliding block to slide on guide rail, and the sliding block is connected to drive the prod with the pressure sensor
Move along a straight line up and down.Specifically, when motor driving sliding block slides up and down in guide rail, prod is driven to carry out up and down
It is mobile.According to the height change of sliding block, the height change of prod can be obtained, so as to obtain the thickness of mushy zone.Sliding block exists
Make uniform motion on guide rail, its speed is knowable, and the time slided further according to sliding block can calculate the height of sliding block slip.
In addition, the utility model can also on prod or sliding block set location sensor with the position of real-time monitoring and test rod or sliding block
Put.
In the embodiment of the utility model one, the drive device includes rolling lead screw, the drive being arranged on rolling lead screw
Dynamic device and the motor being arranged at the top of the rolling lead screw, the motor are done positive and negative by forward and reverse rotation drive rolling lead screw
To rotation, the driver with the forward and reverse rotation of the rolling lead screw do up and down linear motion, the driver with it is described
Pressure sensor is connected to drive the prod move along a straight line up and down.
In the embodiment of the utility model one, the drive device includes driving rack, engaged with the driving rack
Driving wheel group, and the motor for driving the driving wheel group to be moved up and down in the driving rack；The driving wheel group with
The force sensor is connected to drive the prod move along a straight line up and down.
In the embodiment of the utility model one, the drive device include be connected with the prod weight, with it is described
Prod is connected to drive the drive lead screw of linear motion above and below prod, for driving straight line above and below the drive lead screw to transport
Dynamic driving motor and the proximity transducer for monitoring the weight mobile message, the driving motor pass through forward and reverse rotation
Drive drive lead screw to do to move along a straight line up and down and then drive the prod to do linear motion up and down, when the proximity transducer is supervised
When measuring the weight position and being moved, the proximity transducer indicates that the driving motor starts to invert.Specifically, it is optional
Ground, when the prod is stretched into the crucible and is declined until when reaching the position of the crystalline silicon, weight can be sent out by jacking up
Raw movement, triggering proximity transducer send a signal to PLC, and PLC controlled motors start to invert.
In the embodiment of the utility model one, drive device may include cylinder.Still optionally further, on the piston rod of cylinder
Lower reciprocating motion, so as to drive prod to pump, pressure sensor is provided between prod and piston rod.It is optional
Ground, drive device can also be hydraulic cylinder or other power set.
In the embodiment of the utility model one, the prod or the moving member are provided with position sensor, for supervising
Survey the stroke of the prod and by the data transfer monitored to PLC.Alternatively, the support member is provided with the upper limit of evagination
Position block and lower position block.The effect of upper limit position block is to avoid the moving member in drive device from departing from driving dress in uphill process
Put, the effect of lower position block is to avoid the moving member in drive device from driving prod to touch crucible bottom during decline
It is broken prod.Here moving member can be sliding block, driving wheel group etc..
In the present embodiment, when prod touches crystalline silicon during decline, test stick end is pressed by crystalline silicon
The pressure is simultaneously reached pressure sensor by power, and pressure sensor, which senses the pressure and the signal is passed into PLC, to be represented now to survey
The end of coupon contacts with crystalline silicon, and PLC makes moving member out of service according to the signal, and then PLC controls moving member to enter
Row inverted running, drive prod to travel upward and out crystalline silicon, when pressure sensor sense pressure F that prod is subject to
When lifting pressure F1 of the prod in silicon melt is identical, after PLC is according to the signal, make moving member out of service, according to now
The height of prod lifting can determine the thickness of mushy zone, and thermograde and mushy zone are calculated according to the thickness gauge of the mushy zone
The quantitative relation of thickness.
In the embodiment of the utility model one, there can be arithmetic element in PLC, for being passed to receiving from position
The signal of sensor and pressure sensor carries out calculating analysis, so as to obtain the numerical value of thermograde and be shown in the numerical value man-machine
On interface.The setting of arithmetic element enables thermograde self-operated measuring unit provided by the utility model directly by man-machine boundary
The numerical value of the thermograde of face output polycrystalline furnace, so as to eliminate artificial the step of calculating analysis, improves measurement efficiency.
In the utility model embodiment, drive device can be fixed on ingot furnace by fixing device, specifically, can be led to
Bolt, support etc. is crossed to be fixed on ingot furnace.
What the utility model embodiment provided be used to measure during the crystalline silicon ingot casting device of thermograde uses model
Enclose and be far above G5 silicon ingots, equally can be achieved in G6, G7 silicon ingot, class monocrystalline, fritting method, fine melt method production high-efficiency polycrystalline.
Reference picture 3, Fig. 3 are to be used to measure thermograde during crystalline silicon ingot casting in the embodiment of the utility model one
The measurement process figure of device；In Fig. 3,1 represents prod, and 2 represent crucible, and 3 represent silicon melt, and 4 represent mushy zone, and 5 represent crystalline substance
Body silicon.The test process of the device of thermograde during measurement crystalline silicon ingot casting, including：
(1) device for measuring thermograde during crystalline silicon ingot casting is provided, the device includes prod and crucible,
Silicon melt is housed in the crucible, the prod is placed in the silicon melt, lifted then up, tests the prod
Value of thrust F1 in the silicon melt；After test terminates, the prod is lifted to the top of the crucible；
(2) regulation temperature enters crystal growing stage, the silicon melt is started forming core and crystallizes to form crystalline silicon, now the earthenware
Crucible includes crystalline silicon 5, mushy zone 4 and uncrystallized silicon melt 3, and the prod 1 is stretched into the crucible 2 and declined straight
To the position for reaching the crystalline silicon 5, then the prod 1 is lifted upwards, the speed of the lifting and carrying for step (1)
Pulling rate degree is identical, monitors value of thrust F change of the prod 1 during lifting in real time；As the value of thrust F and the F1
When identical, stop lifting, test the hoisting depth of the now prod 1, the hoisting depth is the thickness L of mushy zone；
(3) according to formula G=(TL–Ts)/L calculates the quantitative relation of thermograde and mushy zone thickness, and wherein G is represented
Thermograde, TL–TsRepresent the temperature difference of crystalline silicon and silicon melt, the TL–TsFor constant, L is the thickness of mushy zone.
In the utility model embodiment, crystalline silicon is polycrystal silicon ingot or class monocrystal silicon, when crystalline silicon is class monocrystalline silicon
During ingot, crucible bottom is provided with inculating crystal layer.
In the utility model embodiment, step (1) is the melting stage during ingot casting, and now silicon melt is molten
State.
In the utility model embodiment, when the height of crystalline silicon is 1cm, prod is stretched into the crucible and tested
The change of the value of thrust F.When crystalline silicon height is too small, prod is easy to produce pressure to crystalline silicon during decline
Crystalline silicon is caved in, tested again when crystalline silicon height is too big, complete temperature gradient data may be cannot get.
In the utility model embodiment, institute is represented when running into the resistance increased suddenly during prod decline
The position that prod reaches the crystalline silicon is stated, now the prod stops declining, and starts lifting upwards.Specifically, institute is worked as
Prod is stated when running into the resistance more than 35-40N during decline, stops declining, starts lifting upwards.Alternatively, test
The decrease speed of rod is greater than long brilliant speed, is fixed with the crystalline silicon for preventing prod from constantly being grown.Still optionally further,
The speed that prod declines is 0.2mm/s-100mm/s.Still optionally further, the speed that prod declines is 0.2mm/s-
10mm/s.Still optionally further, the speed that prod declines is 10mm/s-100mm/s.Specifically, the speed that prod declines
For 0.2mm/s, 1mm/s, 5mm/s, 10mm/s, 15mm/s, 20mm/s, 25mm/s, 30mm/s, 35mm/s, 40mm/s, 45mm/
s、50mm/s、55mm/s、60mm/s、65mm/s、70mm/s、75mm/s、80mm/s、85mm/s、90mm/s、95mm/s、
100mm/s。
In the utility model embodiment, in crystal growing stage, the thickness of a mushy zone is determined every 5min-60min, directly
Constant or long crystalline substance is kept to terminate to thermograde.The number and frequency of test can be adjusted according to the needs of actual process.Can
Selection of land, the thickness of the mushy zone is determined once every 5min-30min.Alternatively, once institute is determined every 30min-60min
State the thickness of mushy zone.Still optionally further, every 5min, 10min, 15min, 20min, 25min, 30min, 35min,
40min, 45min, 50min, 55min, 60min determine the thickness of a mushy zone.
In the utility model embodiment, the speed that prod lifts upwards is 0.01mm/s-100mm/s.If lifting
Speed is less than 0.01mm/s, and the pull rate of prod is less than long brilliant speed, and the possible president of prod is in crystalline silicon.If carry
Pulling rate degree is more than 100mm/s, it is possible that the situation beyond pressure sensor test precision.Alternatively, prod is upward
The speed of lifting is 10mm/s-100mm/s.Alternatively, the speed that prod lifts upwards is 0.01mm/s-10mm/s.Enter one
Step alternatively, the speed that prod lifts upwards be 0.01mm/s, 0.1mm/s, 1mm/s, 5mm/s, 10mm/s, 15mm/s,
20mm/s、25mm/s、30mm/s、35mm/s、40mm/s、45mm/s、50mm/s、55mm/s、60mm/s、65mm/s、70mm/s、
75mm/s、80mm/s、85mm/s、90mm/s、95mm/s、100mm/s。
During ingot casting, mushy zone can be formed in crucible, in directional solidification process, the solid-liquid of a stable plane
Boundary is always using a larger thermograde as prerequisite.Therefore, once a directional solidification sample is in a stabilization
Temperature gradient conditions under, certainly exist one corresponding to the solid liquid phase temperature of this thermograde and crystal and be less than solidus temperature
The solid phase area of degree, the liquid phase region higher than liquidus temperature and the paste coexisted somewhere between the solid liquid phase asked of solidus and liquidus curve
Shape area (mushy-zone).Mushy zone is a unstable region, the region will influence microstructure form, coagulation defect and
The mechanical performance of crystalline material, while the stabilization of the solid-liquid phase interface of stable plane will be influenceed.Brilliant process is grown in polycrystal silicon ingot
In, because the viscous force of mushy zone is different from silicon melt, by testing upward value of thrust and pulling force of the mushy zone to prod
Change to weigh the mushy zone thickness of silicon ingot growth front, so as to obtain the stable gradient that polycrystal silicon ingot grows brilliant forward position.It is somebody's turn to do
After thermograde change, the process debugging of crystal growth can be instructed and weigh the stability at directional solidification oriented growth interface, from
And obtain the more uniform crystalline silicon of conversion efficiency of battery end to end.
Using the above-mentioned side for being used to measuring the device of thermograde during crystalline silicon ingot casting and being measured to thermograde
Method, comprise the following steps：
1) dress for measuring thermograde during crystalline silicon ingot casting is inputted to PLC first by man-machine interface
The measurement period T and induction pressure the value F1 and F2 of pressure sensor put；F2 is to be contacted during prod declines with crystalline silicon
When the surface pressure that is subject to；F1 is the value of thrust that is subject to of the prod in silicon melt in uphill process；
2) PLC starts drive device, and drive device drives prod to be slowly drop down to prod from initial position
Lower end close to the surface of crystalline silicon；
3) when the lower end of prod touches the surface of crystalline silicon, and when the pressure that is subject to of surface of crystalline silicon reaches F2,
The signal sensed is transferred to PLC by pressure sensor, after PLC is according to the signal, makes drive device out of service, together
When the stroke H1 of drive device passed into PLC, PLC is recorded to the signal received and shown by man-machine interface；
4) PLC control drive device carries out inverted running, drives prod to travel upward and out crystalline silicon, works as pressure
When force snesor senses that the pulling force F that prod is subject to is identical with F1, PLC stops drive device according to the signal
Operation, while the stroke H2 of drive device or drive device run time s and speed v are passed into PLC, PLC is to receiving
To signal recorded and shown by man-machine interface；Prod driven device is with direction of the trend away from surface of crystalline silicon
Initial position is moved to be measured next time；
5) after measurement period T time, according to the height of the movement of drive device, first measurement is calculated
Thermograde G=(T in cycleL–Ts)/L, L=H2-H1 or L=vs；
6) repeat the above steps 2) to 5), you can calculate the thermograde of the polycrystalline furnace in each measurement period.
Fig. 4 is that tension variations and mushy zone thickness relationship are bent when prod lifts upwards in the embodiment of the utility model one
Line；Solid line represents pulling force value changes (fine melt) of the prod in silicon melt in Fig. 4, and dotted line represents to exist in crystal growing stage prod
Pulling force value changes in mushy zone and silicon melt.Figure 4, it is seen that run into unexpected increasing during the prod declines
Represent that the prod reaches the position of the crystalline silicon during big resistance, now the prod stops declining, and starts upward
Lifting.Value of thrust F also slowly declines, and when the value of thrust F is identical with the F1=20N, stops lifting, test is now described
The hoisting depth of prod, the hoisting depth are the thickness L of mushy zone；Figure 4, it is seen that the present embodiment is tested
Thickness L=3.1mm, the G=(T for the mushy zone arrivedL–Ts)/L=(TL–Ts)/3.1。
The device for being used to measure thermograde during crystalline silicon ingot casting that the utility model embodiment provides, can be conveniently fast
Test to obtain thermograde during crystalline silicon ingot casting promptly, can subsequently adjust thermograde, crystal defect in silico briquette can be made
And dislocation is reduced, degree of purity lifting, bulk crystal silicon minority carrier life time lifting, so as to reach the lifting of the conversion efficiency of battery.Together
When the apparatus structure it is simple, easy to operate.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to the utility model patent scope.It should be pointed out that for the common of this area
For technical staff, without departing from the concept of the premise utility, various modifications and improvements can be made, these all belong to
In the scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
- A kind of 1. device for being used to measure thermograde during crystalline silicon ingot casting, it is characterised in that including prod, with it is described The pressure sensor that one end of prod is connected, and for driving the prod to carry out the driving dress of linear motion up and down Put；The other end of the prod tests the thickness of mushy zone in the crucible for stretching into ingot furnace, the pressure sensor is used In monitoring the prod caused pressure signal in linear motion up and down in mushy zone and silicon melt in real time.
- 2. the as claimed in claim 1 device for being used to measuring thermograde during crystalline silicon ingot casting, it is characterised in that described Pressure sensor is provided with the data acquisition unit being used for every the data of collection in 0.1 second.
- 3. the as claimed in claim 1 device for being used to measuring thermograde during crystalline silicon ingot casting, it is characterised in that described Drive device includes motor, the moving member for being used to drive the prod to move along a straight line up and down and use with the motor connection In the support member for supporting the moving member.
- 4. the as claimed in claim 3 device for being used to measuring thermograde during crystalline silicon ingot casting, it is characterised in that described Drive device includes motor and lead screw, and the lead screw includes guide rail and the sliding block slided on guide rail, the motor The top for being arranged on the guide rail is used to drive the sliding block to slide on the guide rail, the sliding block and the pressure sensor It is connected to drive the prod move along a straight line up and down.
- 5. the as claimed in claim 3 device for being used to measuring thermograde during crystalline silicon ingot casting, it is characterised in that described Drive device includes rolling lead screw, the driver being arranged on rolling lead screw and the electricity being arranged at the top of the rolling lead screw Machine, the motor drive rolling lead screw to do forward and reverse rotation by forward and reverse rotation, and the driver is with the rolling lead screw Forward and reverse rotation do linear motion up and down, the driver is connected to drive the prod to enter with the pressure sensor Row moves along a straight line up and down.
- 6. the as claimed in claim 3 device for being used to measuring thermograde during crystalline silicon ingot casting, it is characterised in that described The driving wheel group that drive device includes driving rack, engaged with the driving rack, and for driving the driving wheel group to exist The motor that the driving rack moves up and down；The driving wheel group is connected to drive the prod with the pressure sensor Move along a straight line up and down.
- 7. the as claimed in claim 3 device for being used to measuring thermograde during crystalline silicon ingot casting, it is characterised in that described The weight and the prod that drive device includes being connected with the prod are connected to drive prod to move along a straight line up and down Drive lead screw, for driving driving motor that the drive lead screw moves along a straight line up and down and for monitoring weight movement letter The proximity transducer of breath, the driving motor drive drive lead screw to do and moved along a straight line up and down to drive institute by forward and reverse rotation State prod and do linear motion up and down, it is described close when the proximity transducer monitors that the weight position is moved Sensor indicates that the driving motor starts to invert.
- 8. the as claimed in claim 1 device for being used to measuring thermograde during crystalline silicon ingot casting, it is characterised in that described Device for measuring thermograde during crystalline silicon ingot casting also includes PLC and man-machine interface, the PLC respectively with the pressure Force snesor, the drive device and man-machine interface electrical connection, the PLC is according to the pressure sensor received Signal and the parameter value of man-machine interface input control the drive device to drive the prod move along a straight line up and down.
- 9. the as claimed in claim 3 device for being used to measuring thermograde during crystalline silicon ingot casting, it is characterised in that described Prod or the moving member are provided with position sensor, for monitoring the stroke of the prod.
- 10. the as claimed in claim 8 device for being used to measuring thermograde during crystalline silicon ingot casting, it is characterised in that institute Pressure sensor is stated to be acquired caused pressure signal in linear motion above and below the prod and reading, and will Reading result passes to PLC, passes to the man-machine interface by the PLC and is shown in the man-machine interface.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720604634.7U CN206872983U (en) | 2017-05-26 | 2017-05-26 | A kind of device for being used to measure thermograde during crystalline silicon ingot casting |
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| CN201720604634.7U CN206872983U (en) | 2017-05-26 | 2017-05-26 | A kind of device for being used to measure thermograde during crystalline silicon ingot casting |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107142519A (en) * | 2017-05-26 | 2017-09-08 | 江西赛维Ldk太阳能高科技有限公司 | The method and apparatus of thermograde during a kind of measurement crystalline silicon ingot casting |
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2017
- 2017-05-26 CN CN201720604634.7U patent/CN206872983U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107142519A (en) * | 2017-05-26 | 2017-09-08 | 江西赛维Ldk太阳能高科技有限公司 | The method and apparatus of thermograde during a kind of measurement crystalline silicon ingot casting |
| CN107142519B (en) * | 2017-05-26 | 2023-05-12 | 江西赛维Ldk太阳能高科技有限公司 | Method and device for measuring temperature gradient in crystalline silicon ingot casting process |
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