CN202830228U - Solid liquid interface measuring device used for silicon ingot furnace - Google Patents
Solid liquid interface measuring device used for silicon ingot furnace Download PDFInfo
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- CN202830228U CN202830228U CN 201220452245 CN201220452245U CN202830228U CN 202830228 U CN202830228 U CN 202830228U CN 201220452245 CN201220452245 CN 201220452245 CN 201220452245 U CN201220452245 U CN 201220452245U CN 202830228 U CN202830228 U CN 202830228U
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- quartz pushrod
- silicon ingot
- ingot furnace
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Abstract
The utility model discloses a solid liquid interface measuring device used for a silicon ingot furnace. The solid liquid interface measuring device comprises a quartz pushrod, an air cylinder, a drive device, a pressure sensor and a programmable logic controller (PLC). The quartz pushrod is used for contacting solid state polycrystalline silicon in the silicon ingot furnace. A first piston rod of the air cylinder is in an extending state and connected with the quartz pushrod. The drive device is used for driving the quartz pushrod to carry out rectilinear motion vertically. The pressure sensor is used for sensing acting force produced when the quartz pushrod contacts the solid state polycrystalline silicon. The PLC is respectively connected with the drive device and the pressure sensor in an electrical mode, used for receiving signals collected by the pressure sensor, and controls the drive device to drive the quartz pushrod to ascend or descend according to received signals. The solid liquid interface measuring device is simple in structure, low in manufacturing cost, convenient to use, accurate in measuring result, and capable of automatically obtaining the depth of fusing silicon in the silicon ingot furnace. In addition, a measuring worker does not need to insert the quartz pushrod into the silicon ingot furnace frequently in a manual mode nor count, and therefore labor intensity is reduced.
Description
Technical field
The utility model relates to a kind of solid-liquid interface determinator for the silicon ingot furnace, particularly a kind of for the silicon ingot furnace in order to measure the device of the molten silicon degree of depth, belong to silicon ingot casting technology field.
Background technology
It is electric energy (photovoltaic generation) that solar cell is used for transform light energy.According to the difference of material therefor, solar cell can be divided into: 1, the solar cell take non-crystalline silicon, polysilicon and silicon single crystal as material; 2, the solar cell take multi-element compounds such as group Ⅲ-Ⅴ compound semiconductor such as GaAs, Inp as material; 3, with copper indium diselenide (CuInSe
2) be the solar cell of material produce; 4, the solar cell of producing with other materials.Solar cell to the general requirement of material is: 1, semi-conductive crystal zone can not be too wide; 2, higher photoelectric transformation efficiency to be arranged; 3, material itself does not pollute environment; 4, material source is extensive, and the stable performance of material.Comprehensive above several respects factor consideration, silicon materials are optimal solar cell materials.Although it is a lot of to make the material of solar cell, silicon materials are easy to obtain because having, cost is reasonable, and it is when the making solar cell, and electricity, physics and chemical property aspect have suitable balance, and are widely used in the preparation of solar cell.
Use the most generally crystalline silicon material in the silicon materials at present, comprise silicon single crystal and polysilicon, the most outstanding characteristics of crystal silicon solar energy battery are its stability and high efficiencies.The preparation method of crystalline silicon material comprises: the directional solidification method (Directional Solidification) of molten (Floating Zone) method in the vertical pulling of silicon single crystal (Czochralski) Fa He district and polysilicon.Directional solidification method casting crystalline silicon can be produced large crystalline silicon ingot, with respect to present CZ method and FZ method, its growth technique process is simple, and production cost is low, and when the silicon ingot evolution, can obtain large square polysilicon chip, reduce the cost in the cell processing course of downstream.
In the directional solidification method casting casting crystalline silicon process, the possible existence form of the silicon materials in the crucible be whole molten states, partial melting part solid-state, all be solid-state.When the existence of silicon materials is partial melting parts when solid-state, has solid-liquid interface between puddle and solid-state part.In directional solidification method casting crystalline silicon technique, be heated to molten state and be condensed into solid-state process by molten state by solid-state for silicon materials, be one of important factor that determines the crystal degree of uniformity, so the monitoring of solid-liquid interface is extremely important.Usually the solid-state poly height in the polycrystalline furnace is measured, in order to calculate long brilliant speed.
At present, measuring solid-liquid interface generally is to adopt survey crew plug quartz pushrod, judges the degree of depth of the silicon solution of molten state by the collision of quartz pushrod and solid-state polysilicon.Namely erect a graduated scale on the quartz pushrod next door, by survey crew reading is carried out at graduated scale in the position of quartz pushrod, by institute's reading value is analyzed, calculated, thereby draw the changing value of the position of the interior solid-state polysilicon contact of quartz pushrod and ingot furnace in the unit time.Adopt this method, need survey crew to the top of ingot furnace, reading to be carried out at graduated scale in the position of quartz pushrod continually, and thereby the trend of paying close attention to quartz pushrod constantly in time reads the numerical value on the graduated scale, not only the labour intensity of survey crew is large, and accuracy of measurement is difficult to be guaranteed.
The utility model content
In view of the above-mentioned problems in the prior art, technical problem to be solved in the utility model provides a kind of simple in structure, solid-liquid interface determinator that is used for the silicon ingot furnace of measuring accurately, can reducing intensity of workers.
In order to solve the problems of the technologies described above, the utility model has adopted following technical scheme: a kind of solid-liquid interface determinator for the silicon ingot furnace comprises:
Be used for the quartz pushrod with the solid-state polysilicon contact of silicon ingot furnace;
The first piston bar is in the cylinder of the state of stretching out, and described first piston bar is connected with described quartz pushrod;
Thereby be used for driving described cylinder and drive up and down straight-line drive unit of described quartz pushrod; Be installed between the first piston bar and described quartz pushrod of described cylinder, be used for responding to the pressure transmitter of the reactive force that described quartz pushrod and described solid-state polysilicon contact produce;
Be electrically connected with described drive unit and described pressure transmitter respectively, be used for receiving the signal that described pressure transmitter gathers, and drive the PLC that described quartz pushrod rises or descends according to the described drive unit of the signal control of the described pressure transmitter that receives.
As preferably, described drive unit is screw-nut body, described screw-nut body comprises stepper-motor, leading screw and nut, described stepper-motor is connected with described leading screw and is used for driving described leading screw rotation, and described nut sleeve is located on the leading screw and when described stepper-motor drives described leading screw rotation and moves up and down along described leading screw.
As preferably, be fixedly connected with the motion base plate on the described nut, the cylinder body of described cylinder is fixed on the described motion base plate, and with translational motion about the described motion base plate, one end of described first piston bar is connected with connecting arm, and the upper end of described quartz pushrod is installed on the described connecting arm.
As preferably, the upper end of described motion base plate is to the mounting plate that extends level away from a side of described drive unit, and the cylinder body of described cylinder is fixed on the described mounting plate, and the first piston bar of described cylinder passes described mounting plate;
Described motion base plate is provided with guide plate away from a side of described drive unit, offer vertical guide path on the described guide plate, be provided with the orienting lug suitable with described guide path on the first piston bar of described cylinder, described orienting lug is embedded in the described guide path and along described guide path translational motion up and down.
As preferably, offer the communicating pores that connects the upper and lower surface of described connecting arm on the described connecting arm, described quartz pushrod is connected with described connecting arm by web member, described web member comprises the cylindric body of rod that is arranged in the described communicating pores, be arranged on the first fastener of described body of rod upper end and be arranged on the second fastener on the described body of rod, described the first fastener block is at described connecting arm upper surface, described the second fastener block is at the lower surface of described connecting arm, and the aperture of described communicating pores is greater than the diameter of the described body of rod.
As preferably, described the first fastener and the described body of rod are one-body molded, and described the second fastener is welded on the described body of rod after the described body of rod is in the described communicating pores.
As preferably, described the first fastener and the described body of rod are one-body molded, offer outside screw on the described body of rod, and described the second fastener is the nut suitable with the described body of rod.
As preferably, described web member adopts elastomeric material to make.
As preferably, described web member adopts metallic substance to make.
As preferably, a side of the piston of described cylinder is connected with described first piston bar, and opposite side is connected with the second piston rod, is provided with position transducer on described the second piston rod or on the described cylinder body.
Compared with prior art, the beneficial effect of the solid-liquid interface determinator for the silicon ingot furnace of the present utility model is:
1, simple in structure, the low cost of manufacture of the solid-liquid interface determinator for the silicon ingot furnace of the present utility model, easy to use and to measure structure accurate.
2, the degree of depth that can automatically obtain molten silicon in the silicon ingot furnace for the solid-liquid interface determinator of silicon ingot furnace by the degree of depth of quartz pushrod insertion of the present utility model, manually in the silicon ingot furnace, insert frequently quartz pushrod and carry out reading and need not survey crew, survey crew is liberated.
3, the solid-liquid interface determinator for the silicon ingot furnace of the present utility model is provided with man-machine interface, the signal that receives from position transducer and pressure transmitter by PLC carries out computational analysis, thereby obtain the depth value of molten silicon solution, and this numerical value is shown on the man-machine interface, so that solid-liquid interface determinator of the present utility model can be directly by man-machine interface output liquid depth value, thereby saved the step of artificial computational analysis, improved efficiency of measurement.
Description of drawings
Fig. 1 is the structural representation of the solid-liquid interface determinator that is used for the silicon ingot furnace of embodiment one of the present utility model;
Fig. 2 is the enlarged view of A part among Fig. 1;
Fig. 3 is the control principle block diagram of the solid-liquid interface determinator that is used for the silicon ingot furnace of embodiment one of the present utility model;
Fig. 4 is the structural representation of the solid-liquid interface determinator that is used for the silicon ingot furnace of embodiment two of the present utility model;
Fig. 5 is the control principle block diagram of the solid-liquid interface determinator that is used for the silicon ingot furnace of embodiment two of the present utility model.
Main description of reference numerals
1-quartz pushrod 2-cylinder
22-cylinder body 23-piston
24-first piston bar 25-the second piston rod
3-drive unit 31-stepper-motor
The control unit 4-pressure transmitter of 32-drive unit
5-man-machine interface 6-PLC
7-motion base plate 8-connecting arm
81-communicating pores 9-mounting plate
10-guide plate 11-orienting lug
The 12-web member 121-body of rod
122-the first fastener 123-the second fastener
13-position transducer 14-loam cake
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described in further detail, but not as to restriction of the present utility model.
Embodiment one
As shown in Figure 1 to Figure 3, solid-liquid interface determinator for the silicon ingot furnace of the present utility model, comprise: quartz pushrod 1, cylinder 2, drive unit 3, pressure transmitter 4 and PLC 6, quartz pushrod 1 vertically arranges, the solid-state polysilicon contact that is used for the silicon ingot furnace is the degree of depth of molten silicon material in the silicon ingot furnace with the height that detects solid-state polysilicon, not shown silicon ingot furnace among Fig. 1 only shows the loam cake 14 of silicon ingot furnace, and quartz pushrod 1 extend in the silicon ingot furnace from the perforate of loam cake 14.The first piston bar 24 of cylinder 2 is in the state of stretching out forever, and first piston bar 24 is connected with quartz pushrod 1.Drive unit 3 is used for driving cylinder translational motion 2 about because quartz pushrod 1 is fixedly connected with the first piston bar 24 of cylinder 2, so quartz pushrod 1 under the drive of drive unit 3, can do about translational motion.Pressure transmitter 4 is installed between the first piston bar 24 and quartz pushrod 1 of cylinder 2, is used for the reactive force that the solid-state polysilicon contact in induction quartz pushrod 1 and the described silicon ingot furnace produces.As shown in Figure 3, PLC 6 is electrically connected with control unit 32 and the pressure transmitter 4 of drive unit respectively, be used for to receive the signal that pressure transmitter 4 gathers, thereby and drive cylinders 2 according to the signal control drive unit 3 of the pressure transmitter 4 that receives and drive quartz pushrods 1 and rise or descend.
A kind of preferred version as the present embodiment, solid-liquid interface determinator for the silicon ingot furnace of the present utility model can also comprise man-machine interface 5, man-machine interface 5 is electrically connected with PLC6, and man-machine interface 5 is used for measuring process is carried out parameter setting and display measurement result.
A kind of preferred version as the present embodiment, drive unit 3 is screw-nut body, screw-nut body comprises stepper-motor 31, leading screw (not shown) and nut (not shown), stepper-motor 31 is connected with described leading screw and is used for driving described leading screw rotation, and described nut sleeve is located on the leading screw and when stepper-motor 31 drives described leading screw rotation and moves up and down along described leading screw.
Further preferred version as the present embodiment, make up and down translational motion in order to make drive unit 3 can drive cylinder 2, the present embodiment has adopted such structure: be fixedly connected with motion base plate 7(on the described nut or be called mechanical arm), the cylinder body 22 of cylinder 2 is fixed on the motion base plate 7, and with motion base plate translational motion about in the of 7, one end of first piston bar 24 is connected with connecting arm 8, and the upper end of quartz pushrod 1 is installed on the connecting arm 8.
As preferred version further, the upper end of motion base plate 7 is to the mounting plate 9 that extends level away from a side of drive unit 3, and the cylinder body 22 of cylinder 2 is fixed on the mounting plate 9, and the first piston bar 24 of cylinder 2 is connected with quartz pushrod 1 after passing mounting plate 9.Motion base plate 7 is provided with guide plate 10 away from a side of drive unit 3, offer vertical guide path (not shown) on the guide plate 10, be provided with the orienting lug 11 suitable with guide path on the first piston bar 24 of cylinder 2, orienting lug 11 is embedded in the described guide path and along described guide path translational motion up and down.The matching design of guide plate 10 and orienting lug 11, can guarantee the up and down translational motion of first piston bar 24, prevent the skew in the moving process, thereby also just guaranteed the up and down translational motion (vertical movement) of quartz pushrod 1, the accuracy of the measuring result of the molten silicon degree of depth is improved.
In order to prevent causing quartz pushrod 1 breakage owing to quartz pushrod 1 with bad contact of solid-state polysilicon, as further preferred, as shown in Figure 2, offer on the connecting arm 8 and connect on the connecting arm 8, the communicating pores 81 of lower surface, quartz pushrod 1 is connected with connecting arm 8 by web member 12, web member 12 comprises the cylindric body of rod 121 that is arranged in the communicating pores 81, be arranged on first fastener 122 and the second fastener 123 that is arranged on the body of rod 121 of the body of rod 121 upper ends, the first fastener 122 blocks are at the upper surface of connecting arm 8, the second fastener 123 blocks are at the lower surface of connecting arm 8, and the aperture of communicating pores 81 is greater than the diameter of the body of rod 121.Quartz pushrod 1 is connected to the end that web member 12 is provided with the second fastener 123.When solid-state polysilicon is excessive to the reactive force of quartz pushrod 1, or behind the solid-state polysilicon of quartz pushrod 1 contact, when drive unit 3 does not in time drive cylinder 2 and quartz pushrod 1 rising, owing to having certain gap between communicating pores 81 and the body of rod 121, allowing web member 12 at left and right directions certain motion to be arranged.Can discharge the power on the quartz pushrod 1, thereby prevent quartz pushrod 1 breakage.
As further preferred, as shown in Figure 2, the first fastener 122 is one-body molded with the body of rod 121, and the body of rod 121 is arranged in the communicating pores 81 from the top down, then the second fastener 123 is welded on the body of rod 121, and the web member 12 of this moment can adopt metallic substance.
Certainly, web member 12 also can adopt such structure: the first fastener 122 is one-body molded with the body of rod 121, offer outside screw at the body of rod 121, the second fastener 123 is the nut suitable with the body of rod 121, by described nut is rotated up or is rotated down along the described body of rod 121, realization web member 12 is connected or dismounting with communicating pores 81.The web member 12 of this moment can adopt metallic substance.
As the preferred version of the present embodiment, web member 12 can also adopt elastomeric material to make.At this moment, the first fastener 122 also can be one-body molded with the body of rod 121, just but the second fastener 123 can not adopt the mode of welding or being threaded to be connected with the body of rod 121, connects and can adopt such as bonding mode.Namely realized flexibly connecting of quartz pushrod 1 and connecting arm 8.
The below briefly introduces the working process of the solid-liquid interface determinator for the silicon ingot furnace of the present utility model:
At first need to prove:
1, the first piston bar 24 of the cylinder in the utility model 2 is in the state of stretching out forever, and can keep this state, first piston bar 24 can bear the less reactive force that makes progress and can not be retracted in the cylinder 2, namely when being no more than the predetermined force of first piston bar 24, it is constant that first piston bar 24 stretches out the length of cylinder body 22 of cylinder 2, but when the reactive force that makes progress of first piston bar 24 was surpassed certain predetermined value, first piston bar 24 can be pushed upwardly and enter cylinder body 22.And when cylinder 2 moved under the drive of drive unit 3 up or down, piston 23 and first piston bar 24 kept relative motionless with cylinder body 22.
Can be subject to resistance and the frictional force of molten silicon solution when 2, moving down in the silicon ingot furnace owing to quartz pushrod 1, therefore pressure transmitter 4 can be set certain predetermined value, and this preset value is greater than resistance and the frictional force (this preset value can obtain by the molten silicon laboratory) of molten silicon.
Working process:
1, drive unit 3 actuation movement base plates 7 move down from starting position band dynamic air cylinder 2 and quartz pushrod 1;
2, after quartz pushrod 1 detects solid-liquid interface (after namely the lower end of quartz pushrod 1 touches solid-state polysilicon), the pressure transmitter 4 that is arranged between first piston bar 24 and the quartz pushrod 1 can be sensed sudden change power (solid-state polysilicon is to the reactive force of quartz pushrod 1);
3, the signal that pressure transmitter 4 should sudden change power sends to PLC 6;
4, (multiple mode of the prior art can be adopted in the position that obtains motion base plate 7 to the current position of PLC 6 record motion base plates 7, calculate the position of motion base plate 7 such as the revolution by stepper-motor, perhaps pass through the mode of setting position sensor, do not repeat them here), and send instruction and make 7 repositions of drive unit 3 actuation movement base plates, PLC 6 carries out computing, analysis with motion base plate 7 present positions and other information simultaneously, and send to man-machine interface 5, demonstrate the degree of depth of solid-liquid interface on the man-machine interface 5;
5, repeat said process, just can measure the degree of depth of solid-liquid interface in the different time.
Embodiment two
As shown in Figure 4 and Figure 5; the present embodiment two only is that from the difference of embodiment one cylinder is different; the cylinder 2 of the present embodiment adopts the second protection cylinder; one side of the piston 23 of cylinder 2 connects the first piston bar 24 that is connected with quartz pushrod 1; the opposite side of piston 23 is connected with on the second piston rod 25, the second piston rods 25 or is provided with position transducer 13 on the cylinder body 22.
The setting of the present embodiment is in order to prevent at pressure transmitter 4 at access times when too much no longer 4 inductions of sensitivity or pressure transmitter are malfunctioning to pressure, when solid-liquid interface is detected in the lower end of quartz pushrod 1, pressure transmitter 4 is not sensed sudden change power, drive unit 3 does not drive quartz pushrod 1 and moves up, this moment, quartz pushrod 1 can move up under the reactive force of solid-state polysilicon, and to 24 1 impellents that make progress of first piston bar, when the impellent of 1 pair of first piston bar 24 of quartz pushrod surpasses the setting pressure of cylinder 2, second piston rod 25 that can promote the other end of cylinder 2 moves upward, be arranged on the second piston rod 25 or the position transducer 13 on the cylinder body 22 can be sensed position signal, and the signal of sensing sent to PLC 6, the current position of PLC 6 record motion base plates 7, and send instruction and allow 7 repositions of motion base plate, PLC 6 sends to man-machine interface 5 with motion base plate 7 present positions and other information simultaneously.
Above embodiment is exemplary embodiment of the present utility model only, is not used in restriction the utility model, and protection domain of the present utility model is defined by the claims.Those skilled in the art can make various modifications or be equal to replacement the utility model in essence of the present utility model and protection domain, this modification or be equal to replacement and also should be considered as dropping in the protection domain of the present utility model.
Claims (10)
1. a solid-liquid interface determinator that is used for the silicon ingot furnace is characterized in that, comprising:
Be used for the quartz pushrod with the solid-state polysilicon contact of silicon ingot furnace;
The first piston bar is in the cylinder of the state of stretching out, and described first piston bar is connected with described quartz pushrod;
Thereby be used for driving described cylinder and drive up and down straight-line drive unit of described quartz pushrod;
Be installed between the first piston bar and described quartz pushrod of described cylinder, be used for responding to the pressure transmitter of the reactive force that described quartz pushrod and described solid-state polysilicon contact produce;
Be electrically connected with described drive unit and described pressure transmitter respectively, be used for receiving the signal that described pressure transmitter gathers, and drive the PLC that described quartz pushrod rises or descends according to the described drive unit of the signal control of the described pressure transmitter that receives.
2. the solid-liquid interface determinator for the silicon ingot furnace according to claim 1, it is characterized in that, described drive unit is screw-nut body, described screw-nut body comprises stepper-motor, leading screw and nut, described stepper-motor is connected with described leading screw and is used for driving described leading screw rotation, and described nut sleeve is located on the leading screw and when described stepper-motor drives described leading screw rotation and moves up and down along described leading screw.
3. the solid-liquid interface determinator for the silicon ingot furnace according to claim 2, it is characterized in that, be fixedly connected with the motion base plate on the described nut, the cylinder body of described cylinder is fixed on the described motion base plate, and with translational motion about the described motion base plate, one end of described first piston bar is connected with connecting arm, and the upper end of described quartz pushrod is installed on the described connecting arm.
4. the solid-liquid interface determinator for the silicon ingot furnace according to claim 3, it is characterized in that, the upper end of described motion base plate is to the mounting plate that extends level away from a side of described drive unit, the cylinder body of described cylinder is fixed on the described mounting plate, and the first piston bar of described cylinder passes described mounting plate;
Described motion base plate is provided with guide plate away from a side of described drive unit, offer vertical guide path on the described guide plate, be provided with the orienting lug suitable with described guide path on the first piston bar of described cylinder, described orienting lug is embedded in the described guide path and along described guide path translational motion up and down.
5. the solid-liquid interface determinator for the silicon ingot furnace according to claim 3, it is characterized in that, offer on the described connecting arm and connect on the described connecting arm, the communicating pores of lower surface, described quartz pushrod is connected with described connecting arm by web member, described web member comprises the cylindric body of rod that is arranged in the described communicating pores, be arranged on first fastener and the second fastener that is arranged on the described body of rod of described body of rod upper end, described the first fastener block is at described connecting arm upper surface, described the second fastener block is at the lower surface of described connecting arm, and the aperture of described communicating pores is greater than the diameter of the described body of rod.
6. the solid-liquid interface determinator for the silicon ingot furnace according to claim 5 is characterized in that, described the first fastener and the described body of rod are one-body molded, and described the second fastener is welded in the described body of rod after the described body of rod is in the described communicating pores.
7. the solid-liquid interface determinator for the silicon ingot furnace according to claim 5 is characterized in that, described the first fastener and the described body of rod are one-body molded, offer outside screw on the described body of rod, and described the second fastener is the nut suitable with the described body of rod.
8. the solid-liquid interface determinator for the silicon ingot furnace according to claim 5 is characterized in that, described web member adopts elastomeric material to make.
9. according to claim 6 or 7 described solid-liquid interface determinators for the silicon ingot furnace, it is characterized in that, described web member adopts metallic substance to make.
10. the solid-liquid interface determinator for the silicon ingot furnace according to claim 1, it is characterized in that, one side of the piston of described cylinder is connected with described first piston bar, and opposite side is connected with the second piston rod, is provided with position transducer on described the second piston rod or on the described cylinder body.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220452245 CN202830228U (en) | 2012-09-06 | 2012-09-06 | Solid liquid interface measuring device used for silicon ingot furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220452245 CN202830228U (en) | 2012-09-06 | 2012-09-06 | Solid liquid interface measuring device used for silicon ingot furnace |
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| CN202830228U true CN202830228U (en) | 2013-03-27 |
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| CN 201220452245 Withdrawn - After Issue CN202830228U (en) | 2012-09-06 | 2012-09-06 | Solid liquid interface measuring device used for silicon ingot furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103668449A (en) * | 2012-09-06 | 2014-03-26 | 镇江荣德新能源科技有限公司 | Solid-liquid interface determination device for silicon ingot furnace |
| CN103776361A (en) * | 2014-01-15 | 2014-05-07 | 中钞信用卡产业发展有限公司 | Depth detection device and detection method for antennae in double-interface card |
-
2012
- 2012-09-06 CN CN 201220452245 patent/CN202830228U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103668449A (en) * | 2012-09-06 | 2014-03-26 | 镇江荣德新能源科技有限公司 | Solid-liquid interface determination device for silicon ingot furnace |
| CN103668449B (en) * | 2012-09-06 | 2017-06-06 | 镇江荣德新能源科技有限公司 | A kind of Solid-liquid interface determination device for silicon ingot furnace |
| CN103776361A (en) * | 2014-01-15 | 2014-05-07 | 中钞信用卡产业发展有限公司 | Depth detection device and detection method for antennae in double-interface card |
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Granted publication date: 20130327 Effective date of abandoning: 20170606 |
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| AV01 | Patent right actively abandoned |